Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology

Péter G. Szabó Balázs Németh Márta Rencz Bernard Courtois Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology http://arxiv.org/abs/0711.3301 2007 CoRR abs/0711.3301 db/journals/corr/corr0711.html#abs-0711-3301