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Clean Room HVAC Design & Energy Efficiency

The document summarizes the typical HVAC clean room design. It has filtered air distributed through the ceiling into the clean room area and extracted through the floor or low walls. This unidirectional flow is designed to direct contaminants downward. The make-up air handler pressurizes the room with fresh outside air through in-line HEPA filters while the re-circulation air handler handles internal heat loads. Together they maintain clean room air quality and pressurization.

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118 views1 page

Clean Room HVAC Design & Energy Efficiency

The document summarizes the typical HVAC clean room design. It has filtered air distributed through the ceiling into the clean room area and extracted through the floor or low walls. This unidirectional flow is designed to direct contaminants downward. The make-up air handler pressurizes the room with fresh outside air through in-line HEPA filters while the re-circulation air handler handles internal heat loads. Together they maintain clean room air quality and pressurization.

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CIVIL
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
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[Link] PDH Course M143 [Link].

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PART – IV TYPICAL ARRANGEMENT & ENERGY CONSERVATION

1
Clean room Arrangement
The common HVAC clean room design has the filtered air distributed via the ceiling void area into

the controlled room area and is taken out via the floor void or low wall return. The main reason is

to keep the contaminants directed downwards as a result of unidirectional flow.

M ake-up R e-circulation Air H andler


Air H andler - +
-
O utside Air

In Line H E P A Filter

C LASS 10000 C LASS 100

H EPA filter in 100% H EPA


located in duct C eiling

R eturn Air R eturn Air

C LASS 10000 C LASS 100

Figure #1

In the scheme above, the class 100 room arrangements is shown with 100% HEPA filter

coverage. In practice, the make-up air handler (MAH) is a fresh air unit that provides the

room pressurization. The MAH is designed for latent and sensible load of outside air. This

unit feeds to single or multiple re-circulation air handlers that are designed for the internal

sensible heat load from process machinery and the personnel.

Page 36 of 61

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