USER MANUAL

COMPex
03/2003
LP Part Number: 262 349
Document Code: A0303COMP
U.S.A. JAPAN
Lambda Physik USA, Inc. Lambda Physik Co., Ltd.
3201 West Commerical Blvd. German Industry Center
Ft. Lauderdale, FL 33309, USA 1-18-2 Hakusan, Midori-ku
Yokohama 226-0006, Japan
Tel.: +1 (954) 486-1500
1 (800) EXCIMER Tel.: +81 (45) 939-7848
Fax: +1 (954) 486-1501 Fax: +81 (45) 939-7849
eMail: [email protected]

GERMANY Marabun Corp.

Lambda Physik AG Marabun Daiya Bldg.
Hans-Böckler-Strasse 12 8-1 Nihonbashi Odenmacho
D - 37079 Göttingen, Germany Chuo-ku, Tokyo 103-8577, Japan

Tel.: +49 (551) 6938-0 Tel.: +81 (3) 3639-9811

Fax: +49 (551) 68691 Fax: +81 (3) 3662-1349
eMail: [email protected]

Internet:http://www.lambdaphysik.com
CONTENTS

1 INTRODUCTION

2 LASER DEVICE FUNDAMENTALS

3 SAFETY

4 SPECIFICATIONS,
REQUIREMENTS AND
ACCESSORIES

5 INSTALLATION

6 OPERATION

7 MAINTENANCE

8 REMOTE SOFTWARE

9 TROUBLESHOOTING

10 WIRING DIAGRAMS/
DIAGRAM SCHEMATICS

11 GLOSSARY

LIST OF FIGURES

INDEX
 TABLE OF CONTENTS

1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . 1

1.1 About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . 1

1.1.1 Purpose, Availability and Use. . . . . . . . . . . . . . . . 1
1.1.2 Intended Audience . . . . . . . . . . . . . . . . . . . . . . . . 2
1.1.3 Numbering of Chapters, Pages and Instructions . 2
1.2 Laser Terminology According to ISO 11145 . . . . . 3
1.3 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3.1 Laser Safety Classification . . . . . . . . . . . . . . . . . . 4
1.3.2 Safety Information . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3.3 Signal Words and Symbols in this Manual . . . . . . 4
1.3.3.1 Signal Words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3.3.2 Symbols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.4 Overview of Chapters . . . . . . . . . . . . . . . . . . . . . . . 6

1.5 Conversion Tables . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.5.1 Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.5.2 Temperatures . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.6 Patents and Trademarks. . . . . . . . . . . . . . . . . . . . . 8
1.6.1 Patents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.6.2 Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.7 Feedback Regarding Documentation . . . . . . . . . 11

2 LASER DEVICE FUNDAMENTALS . . . . . . 13

2.1 Fundamental Design of the COMPex. . . . . . . . . . 13

2.1.1 Outer System Diagrams . . . . . . . . . . . . . . . . . . . 14
2.1.2 Inner System Diagram
(except COMPex F2-version) . . . . . . . . . . . . . . 16
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2.1.3 Functional Description . . . . . . . . . . . . . . . . . . . . 17

2.2 Excimer and Gas Lasers. . . . . . . . . . . . . . . . . . . . 19
2.3 Laser Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.4 Laser Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
2.5 Thyratron . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

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2.6 Energy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
2.6.1 Energy Measurement . . . . . . . . . . . . . . . . . . . . . 25
2.6.2 Energy Management . . . . . . . . . . . . . . . . . . . . . 25
2.6.2.1 Halogen Injection . . . . . . . . . . . . . . . . . . . . . . . . . . 27
2.6.2.2 Partial Gas Replacement (PGR). . . . . . . . . . . . . . . 27
2.6.2.3 No Gas Replacement (NGR) . . . . . . . . . . . . . . . . . 30

3 SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

3.1 General Safety Aspects . . . . . . . . . . . . . . . . . . . . 31

3.1.1 Basic Operation and Designated Use . . . . . . . . 31
3.1.2 Organizational Measures . . . . . . . . . . . . . . . . . . 32
3.1.3 Selection and Qualification of Personnel
- Basic Responsibilities . . . . . . . . . . . . . . . . . . . 33
3.1.4 Safety Instructions Governing Specific Operational
Phases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
3.2 Specific Safety Aspects . . . . . . . . . . . . . . . . . . . . 34
3.2.1 Physical Hazards . . . . . . . . . . . . . . . . . . . . . . . . 35
3.2.1.1 Laser Radiation Safety . . . . . . . . . . . . . . . . . . . . . . 35
3.2.1.2 High Voltage / Electric Energy . . . . . . . . . . . . . . . . 35
3.2.1.3 Halogen Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
3.2.1.4 Ozone . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

3.2.2 Personnel Safety . . . . . . . . . . . . . . . . . . . . . . . . 39

3.2.2.1 Laser Radiation Safety . . . . . . . . . . . . . . . . . . . . . . 39
3.2.2.2 Electrical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
3.2.2.3 Gas Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.2.2.4 Pressure Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.2.2.5 Seismic Protection . . . . . . . . . . . . . . . . . . . . . . . . . 45

3.2.3 Constructive Safety Features . . . . . . . . . . . . . . . 46

3.2.3.1 Radiation Safety Features . . . . . . . . . . . . . . . . . . . 46
3.2.3.2 Electrical Safety Features . . . . . . . . . . . . . . . . . . . . 47
3.2.3.3 Pressure and Gas Handling Safety Features . . . . . 48
3.2.3.4 Fire Safety Features . . . . . . . . . . . . . . . . . . . . . . . . 48
3.2.3.5 Mechanical Safety Features . . . . . . . . . . . . . . . . . . 49
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3.2.3.6 General Safety Features. . . . . . . . . . . . . . . . . . . . . 49

3.3 Safety Compliance List . . . . . . . . . . . . . . . . . . . . . 49

3.4 Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
3.4.1 Labels Outside the Laser
(all countries except Germany) . . . . . . . . . . . . . 50
3.4.2 Labels Inside the Laser
(all countries except Germany) . . . . . . . . . . . . . 54

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4 SPECIFICATIONS,
REQUIREMENTS AND
ACCESSORIES . . . . . . . . . . . . . . . . . . . . . . 57

4.1 Laser Specifications . . . . . . . . . . . . . . . . . . . . . . . 58

4.1.1 COMPex 100 Series. . . . . . . . . . . . . . . . . . . . . . 58
4.1.2 COMPex 200 Series. . . . . . . . . . . . . . . . . . . . . . 59
4.1.3 COMPex F2 Series . . . . . . . . . . . . . . . . . . . . . . 60
4.2 Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . 61
4.3 Electrical Requirements . . . . . . . . . . . . . . . . . . . . 62
4.3.1 Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
4.3.2 Serial Interface . . . . . . . . . . . . . . . . . . . . . . . . . . 63
4.3.3 Remote Socket. . . . . . . . . . . . . . . . . . . . . . . . . . 63
4.3.4 Trigger Signal Ports . . . . . . . . . . . . . . . . . . . . . . 64
4.3.4.1 External Trigger In . . . . . . . . . . . . . . . . . . . . . . . . . 64
4.3.4.2 Sync. Out Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

4.4 Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

4.5 Gas Requirements. . . . . . . . . . . . . . . . . . . . . . . . . 66
4.5.1 Gases Required . . . . . . . . . . . . . . . . . . . . . . . . . 67
4.5.2 Optimum Gas Mixtures. . . . . . . . . . . . . . . . . . . . 69
4.5.3 Pressure Regulators. . . . . . . . . . . . . . . . . . . . . . 70
4.5.4 Gas Cabinets . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
4.6 Air Intake and Exhaust . . . . . . . . . . . . . . . . . . . . . 71
4.7 Beam Exit Position . . . . . . . . . . . . . . . . . . . . . . . . 71
4.8 Environmental Conditions . . . . . . . . . . . . . . . . . . 72
4.8.1 Transport and Storage Conditions . . . . . . . . . . . 72
4.8.2 Operational Environmental Conditions. . . . . . . . 72
4.9 Vacuum Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
4.10 Halogen Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
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5 INSTALLATION . . . . . . . . . . . . . . . . . . . . . . 75

5.1 Transport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
5.1.1 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
5.1.2 Transport and Storage Conditions . . . . . . . . . . . 76
5.1.3 Floor Loads . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
5.1.3.1 Packaging Dimensions and Weight . . . . . . . . . . . . 77

5.1.4 Transport Packaging . . . . . . . . . . . . . . . . . . . . . 79

5.1.5 Transport / Lifting with Rigid Packaging . . . . . . . 80
5.1.6 Remove Rigid Packaging . . . . . . . . . . . . . . . . . . 81
5.1.7 Transport / Lifting without Rigid Packaging . . . . 82
5.1.8 Remove Anti-Static Inner Cover. . . . . . . . . . . . . 83
5.2 Transport Locks . . . . . . . . . . . . . . . . . . . . . . . . . . 84
5.3 Install Remote Socket . . . . . . . . . . . . . . . . . . . . . . 84
5.4 Connect Water Lines (COMPex 110, COMPex F2
and COMPex 205 only) . . . . . . . . . . . . . . . . . . . . . 84
5.5 Electrical Line Installation . . . . . . . . . . . . . . . . . . 87
5.5.1 Connect the Vacuum Pump . . . . . . . . . . . . . . . . 87
5.5.2 Connect the Handheld Keypad . . . . . . . . . . . . . 88
5.5.3 Connect a Remote PC . . . . . . . . . . . . . . . . . . . . 90
5.5.4 Connect the Main Power Supply Line . . . . . . . . 91
5.6 Exhaust Lines Installation . . . . . . . . . . . . . . . . . . 92
5.6.1 Install Exhaust Line of Laser Device Housing . . 92
5.6.2 Install Laser Tube Exhaust Line
(Including the Vacuum Pump) . . . . . . . . . . . . . . 93
5.7 Install Gas Lines . . . . . . . . . . . . . . . . . . . . . . . . . . 96

6 OPERATION . . . . . . . . . . . . . . . . . . . . . . . . 99

6.1 Overview of this Section. . . . . . . . . . . . . . . . . . . 100

6.2 Fundamental Laser Operations . . . . . . . . . . . . . 101
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6.2.1 Switch on the Laser Device . . . . . . . . . . . . . . . 101

6.2.2 Start Laser Operation . . . . . . . . . . . . . . . . . . . . 103
6.2.3 Stop Laser Operation . . . . . . . . . . . . . . . . . . . . 103
6.2.4 Switch off the Laser Device . . . . . . . . . . . . . . . 103
6.2.5 Check the Beam Path . . . . . . . . . . . . . . . . . . . 104

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 TABLE OF CONTENTS

6.2.6 Adjust the Cooling Water Flow Rate

(COMPex 110 and 205 only) . . . . . . . . . . . . . . 104
6.2.6.1 Laser Device with Optional Temperature Control . 104
6.2.6.2 Laser Device without Temperature Control . . . . . 104

6.2.7 Check Parameter Settings . . . . . . . . . . . . . . . . 105

6.3 Gas Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
6.3.1 Select the Gas Menu . . . . . . . . . . . . . . . . . . . . 106
6.3.2 Reset the Gas Menu to Factory Settings . . . . . 107
6.3.3 Select the Gas Mode . . . . . . . . . . . . . . . . . . . . 107
6.4 Change Triggering . . . . . . . . . . . . . . . . . . . . . . . 109
6.4.1 Change the Trigger Mode . . . . . . . . . . . . . . . . 109
6.4.2 Change the Repetition Rate . . . . . . . . . . . . . . . 109
6.5 Running Modes . . . . . . . . . . . . . . . . . . . . . . . . . . 111
6.5.1 Select the Running Mode . . . . . . . . . . . . . . . . . 112
6.5.2 Adjust the Energy Constant (EGY) Mode. . . . . 112
6.5.3 Adjust the High Voltage Constant (HV) Mode . 113
6.5.4 Choose Charge On Demand (COD) . . . . . . . . 114
6.6 Pulse Counter . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
6.6.1 Select the Pulse Counter . . . . . . . . . . . . . . . . . 115
6.6.2 Reset the User Counter . . . . . . . . . . . . . . . . . . 116
6.7 Emergency Fill . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
6.7.1 Manual Fill with Inert Gas. . . . . . . . . . . . . . . . . 116
6.8 Additionals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118
6.8.1 Temperature Control (optional) . . . . . . . . . . . . 118

7 MAINTENANCE . . . . . . . . . . . . . . . . . . . . . 119

7.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119

7.2 Laser Logbook. . . . . . . . . . . . . . . . . . . . . . . . . . . 121
7.3 Maintenance Schedule . . . . . . . . . . . . . . . . . . . . 122
7.4 Gas System Maintenance . . . . . . . . . . . . . . . . . . 123
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7.4.1 Flush Gas Lines . . . . . . . . . . . . . . . . . . . . . . . . 123

7.4.1.1 Evacuate a Gas Line. . . . . . . . . . . . . . . . . . . . . . . 123
7.4.1.2 Refill a Gas Line with Fresh Gas . . . . . . . . . . . . . 124

7.4.2 Purge Gas Lines. . . . . . . . . . . . . . . . . . . . . . . . 125

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7.4.3 New Gas Fill . . . . . . . . . . . . . . . . . . . . . . . . . . . 126

7.4.3.1 New Gas Fill without Halogen Source . . . . . . . . . 127
7.4.3.2 New Gas Fill with Halogen Source . . . . . . . . . . . . 128

7.4.4 Replacing Gas Cylinders . . . . . . . . . . . . . . . . . 129

7.4.4.1 Replace Halogen Cylinder . . . . . . . . . . . . . . . . . . 130
7.4.4.2 Replace Rare, Buffer or Inert Gas Cylinders . . . . 130

7.5 Laser Tube Maintenance . . . . . . . . . . . . . . . . . . 131

7.5.1 Purge Laser Tube. . . . . . . . . . . . . . . . . . . . . . . 131
7.5.2 Re-Passivate Laser Tube. . . . . . . . . . . . . . . . . 132
7.6 Tube Optics Maintenance . . . . . . . . . . . . . . . . . . 134
7.6.1 Tube Optics Maintenance: All COMPex Versions
(Except F2 - Version) . . . . . . . . . . . . . . . . . . . . 134
7.6.2 Tube Optics Maintenance: COMPex F2 - Version
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
7.7 Energy Monitor Calibration . . . . . . . . . . . . . . . . 154
7.7.1 Energy Monitor Calibration:
All COMPex Versions Except F2-Version . . . . 156
7.7.2 Energy Monitor Calibration: COMPex F2-Version
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
7.8 Electrical Maintenance . . . . . . . . . . . . . . . . . . . . 164
7.8.1 Check Thyratron. . . . . . . . . . . . . . . . . . . . . . . . 164
7.8.2 Adjust Thyratron . . . . . . . . . . . . . . . . . . . . . . . . 166
7.9 Halogen Filter Maintenance . . . . . . . . . . . . . . . . 168
7.9.1 Check the Halogen Filter Filling Ratio . . . . . . . 168
7.9.2 Halogen Filter Exchange . . . . . . . . . . . . . . . . . 168
7.9.3 Reset Halogen Filter Filling Ratio. . . . . . . . . . . 171
7.10 Prepare Gas System for Transportation and
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172
7.10.1 Transportation Fill. . . . . . . . . . . . . . . . . . . . . . . 172
7.10.2 Disconnecting Gas Lines . . . . . . . . . . . . . . . . . 173
7.10.2.1 Disconnect a Halogen Line . . . . . . . . . . . . . . . . . . 173
7.10.2.2 Disconnect a Premix Line . . . . . . . . . . . . . . . . . . . 174
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7.10.2.3 Disconnect Gas Supply Lines except Halogen Line

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175

7.11 Installation and Alignment of the

Unstable Resonator Optics (optional) . . . . . . . 176
7.11.1 Description of the Unstable Resonator. . . . . . . 176
7.11.2 Installation and Alignment Procedure. . . . . . . . 176

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8 REMOTE SOFTWARE. . . . . . . . . . . . . . . . 183

8.1 Nomenclature within this Chapter . . . . . . . . . . . 183

8.2 Remote Software Basics . . . . . . . . . . . . . . . . . . 184
8.2.1 Choosing Remote Software . . . . . . . . . . . . . . . 184
8.2.2 Software Syntax . . . . . . . . . . . . . . . . . . . . . . . . 184
8.3 Operation Commands (OPMODE) . . . . . . . . . . . 184
8.3.1 OPMODE=CAPACITY RESET . . . . . . . . . . . . 185
8.3.2 OPMODE=CONT . . . . . . . . . . . . . . . . . . . . . . . 185
8.3.3 OPMODE=ENERGY CAL . . . . . . . . . . . . . . . . 186
8.3.4 OPMODE=FLUSH <xy> LINE . . . . . . . . . . . . . 188
8.3.5 OPMODE=FLUSHING . . . . . . . . . . . . . . . . . . . 188
8.3.6 OPMODE=HI . . . . . . . . . . . . . . . . . . . . . . . . . . 190
8.3.7 OPMODE=LL OFF . . . . . . . . . . . . . . . . . . . . . . 190
8.3.8 OPMODE=MANUAL FILL INERT . . . . . . . . . . 190
8.3.9 OPMODE=NEW FILL. . . . . . . . . . . . . . . . . . . . 191
8.3.10 OPMODE=OFF . . . . . . . . . . . . . . . . . . . . . . . . 191
8.3.11 OPMODE=ON . . . . . . . . . . . . . . . . . . . . . . . . . 193
8.3.12 OPMODE=PASSIVATION FILL . . . . . . . . . . . . 195
8.3.13 OPMODE=PGR . . . . . . . . . . . . . . . . . . . . . . . . 195
8.3.14 OPMODE=PURGE <xy> LINE. . . . . . . . . . . . . 195
8.3.15 OPMODE=PURGE RESERVOIR . . . . . . . . . . 196
8.3.16 OPMODE=SAFETY FILL . . . . . . . . . . . . . . . . . 196
8.3.17 OPMODE=SKIP . . . . . . . . . . . . . . . . . . . . . . . . 196
8.3.18 OPMODE=TRANSPORT FILL . . . . . . . . . . . . . 197
8.4 Parameter Commands . . . . . . . . . . . . . . . . . . . . 197
8.4.1 BUFFER= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197
8.4.2 CAP.SET= . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198
8.4.3 COD= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198
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8.4.4 COUNTER= . . . . . . . . . . . . . . . . . . . . . . . . . . . 198

8.4.5 COUNTS= . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
8.4.6 EGY= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
8.4.7 EGY RANGE= . . . . . . . . . . . . . . . . . . . . . . . . . 199
8.4.8 EGY SET= . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200

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8.4.9 FILTER= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200

8.4.10 FILTER CONTAMINATION= . . . . . . . . . . . . . . 200
8.4.11 GASMODE= . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
8.4.12 HALOGEN= . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
8.4.13 HV= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
8.4.14 INERT= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
8.4.15 MENU=. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
8.4.16 MODE= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
8.4.17 OPMODE= . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
8.4.18 RARE= . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
8.4.19 REPRATE= . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
8.4.20 ROOMTEMP= . . . . . . . . . . . . . . . . . . . . . . . . . 203
8.4.21 TEMP CONTROL=. . . . . . . . . . . . . . . . . . . . . . 204
8.4.22 TIMEOUT= . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
8.4.23 TRIGGER= . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
8.5 Polling Commands . . . . . . . . . . . . . . . . . . . . . . . . 205
8.5.1 ACCU? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
8.5.2 BUFFER? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
8.5.3 CAP.LEFT? . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
8.5.4 COD? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
8.5.5 COUNTER? . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
8.5.6 COUNTS? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
8.5.7 EGY? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
8.5.8 EGY SET? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
8.5.9 EGY RANGE? . . . . . . . . . . . . . . . . . . . . . . . . . 206
8.5.10 FILTER? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
8.5.11 FILTER CONTAMINATION? . . . . . . . . . . . . . . 206
8.5.12 GASMODE? . . . . . . . . . . . . . . . . . . . . . . . . . . . 207
8.5.13 HALOGEN? . . . . . . . . . . . . . . . . . . . . . . . . . . . 207
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8.5.14 HV? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207

8.5.15 INERT?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207
8.5.16 INTERLOCK?. . . . . . . . . . . . . . . . . . . . . . . . . . 207
8.5.17 LEAKRATE?. . . . . . . . . . . . . . . . . . . . . . . . . . . 207
8.5.18 MENU?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207

CONTENTS - XII User Manual COMPex

 TABLE OF CONTENTS

8.5.19 MODE?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207

8.5.20 OPMODE? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
8.5.21 POWER STABILIZATION ACHIEVED?. . . . . . 208
8.5.22 PRESSURE? . . . . . . . . . . . . . . . . . . . . . . . . . . 208
8.5.23 PULSE DIFF?. . . . . . . . . . . . . . . . . . . . . . . . . . 208
8.5.24 RARE? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
8.5.25 RESERVOIR TEMP? . . . . . . . . . . . . . . . . . . . . 208
8.5.26 REPRATE? . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
8.5.27 ROOMTEMP? . . . . . . . . . . . . . . . . . . . . . . . . . 209
8.5.28 TEMP? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
8.5.29 TEMP CONTROL?. . . . . . . . . . . . . . . . . . . . . . 209
8.5.30 TIMEOUT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
8.5.31 TOTALCOUNTER? . . . . . . . . . . . . . . . . . . . . . 209
8.5.32 TRIGGER? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
8.5.33 TYPE OF LASER? . . . . . . . . . . . . . . . . . . . . . . 209
8.5.34 VERSION? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 210
8.6 Priority of ON Code Messages . . . . . . . . . . . . . . 210

9 TROUBLESHOOTING . . . . . . . . . . . . . . . . 211

9.1 Overview of this Section. . . . . . . . . . . . . . . . . . . 211

9.2 Warnings and Error Messages. . . . . . . . . . . . . . 211
9.2.1 Duty Cycle Exceeded (ON:03) . . . . . . . . . . . . . 213
9.2.2 Energy Cal. Error (OFF:7) . . . . . . . . . . . . . . . . 213
9.2.3 Error Temperature Measurement (OFF:12) . . . 213
9.2.4 Fatal Error, COM-Datalink (-) . . . . . . . . . . . . . . 213
9.2.5 Fatal Error, LWL-Datalink (OFF:5) . . . . . . . . . . 214
9.2.6 Fatal Error, Watchdog (OFF:4). . . . . . . . . . . . . 216
9.2.7 Fluorine Valve Not Opened (OFF:13; ON:13) . 217
9.2.8 Halogen Pressure Too High (OFF:33) . . . . . . . 217
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9.2.9 HI in Prep (ON:34) . . . . . . . . . . . . . . . . . . . . . . 217

9.2.10 Inert Valve Closed (OFF:39) . . . . . . . . . . . . . . 217
9.2.11 Interlock XXX (OFF:1) . . . . . . . . . . . . . . . . . . . 218
9.2.12 Leak!-Check Windows
(FLUSHING LEAKTEST CONT:30) . . . . . . . . 218

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TABLE OF CONTENTS

9.2.13 Low Light (OFF:26) . . . . . . . . . . . . . . . . . . . . . 218

9.2.14 Low Pressure (OFF:10; ON:10) . . . . . . . . . . . . 218
9.2.15 New Gas Fill Needed (OFF:8; ON:8) . . . . . . . . 219
9.2.16 No Capacity Left (OFF:11) . . . . . . . . . . . . . . . . 219
9.2.17 No Gas Flow (XX:3) . . . . . . . . . . . . . . . . . . . . . 219
9.2.18 No Vacuum (OFF:9) . . . . . . . . . . . . . . . . . . . . . 220
9.2.19 No Vacuum (ON:9). . . . . . . . . . . . . . . . . . . . . . 221
9.2.20 Not Available (OFF:35). . . . . . . . . . . . . . . . . . . 221
9.2.21 OFF:41 (OFF:41) . . . . . . . . . . . . . . . . . . . . . . . 221
9.2.22 ON:40 (ON:40) . . . . . . . . . . . . . . . . . . . . . . . . . 222
9.2.23 ON:41 (ON:41) . . . . . . . . . . . . . . . . . . . . . . . . . 222
9.2.24 Polling (OFF:6) . . . . . . . . . . . . . . . . . . . . . . . . . 222
9.2.25 Preset Energy too High (OFF:2; ON:2) . . . . . . 223
9.2.26 RAM Check Error (OFF:29) . . . . . . . . . . . . . . . 223
9.2.27 Timeout (OFF:31). . . . . . . . . . . . . . . . . . . . . . . 224
9.2.28 Warm-up 8min (OFF:21) . . . . . . . . . . . . . . . . . 224
9.2.29 Warning! Repetition Rate for COD 50 Hz (ON:37)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 224
9.2.30 Wrong Pressure (OFF:27) . . . . . . . . . . . . . . . . 225
9.3 Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226
9.3.1 Overload. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226
9.3.2 Remote. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227
9.3.3 Temp.Res. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227
9.3.4 Ventilation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 228
9.4 Laser Pulses without Triggering
(Self-Firing) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
9.5 No Trigger Signal . . . . . . . . . . . . . . . . . . . . . . . . 229
9.6 Corrosion in Gas System . . . . . . . . . . . . . . . . . . 229
9.7 Gas Leak . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 231
9.7.1 Leak Test Gas Lines . . . . . . . . . . . . . . . . . . . . 231
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9.7.2 Leak Test Laser Tube . . . . . . . . . . . . . . . . . . . 232

9.8 Laser Device Does Not Start . . . . . . . . . . . . . . . 233
9.9 Beam Energy Too Low . . . . . . . . . . . . . . . . . . . . 234
9.10 Low Light . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239

CONTENTS - XIV User Manual COMPex

 TABLE OF CONTENTS

9.11 Fuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243

9.11.1 Fuses Inside COMPex . . . . . . . . . . . . . . . . . . . 243
9.11.2 Fuses Outside COMPex. . . . . . . . . . . . . . . . . . 245

10 WIRING DIAGRAMS/
DIAGRAM SCHEMATICS . . . . . . . . . . . . . 247

10.1 Gas Flow Diagrams . . . . . . . . . . . . . . . . . . . . . . . 248

10.2 Layout of the COMPex . . . . . . . . . . . . . . . . . . . . 251
10.3 Maintenance Areas . . . . . . . . . . . . . . . . . . . . . . . 253
10.4 Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . 255

11 GLOSSARY . . . . . . . . . . . . . . . . . . . . . . . . 257

LIST OF FIGURES . . . . . . . . . . . . . . . . . . . 267

INDEX. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271
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LAMBDA PHYSIK - 03/2003 CONTENTS - XV

TABLE OF CONTENTS

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CONTENTS - XVI User Manual COMPex

 About this Manual

1 INTRODUCTION
This chapter outlines:
– the purpose as well as the necessary availability and use of the
instruction manual,
– the persons, for whom the instruction manual is intended,
– how the instruction manual is organized,
– the use of signal words and safety signs in the instruction manual,
– the contents of each chapter.

1.1 About this Manual

1.1.1 Purpose, Availability and Use

This instruction manual is intended to familiarize the user with the

COMPex and its designated use.
The instruction manual contains important information to installing and
operate the COMPex safely, properly and most efficiently. Observing
these instructions helps to avoid danger, reduce repair costs and
downtimes and increase the reliability and lifetime of the COMPex.
The instruction manual must always be available wherever the
COMPex is in use.
The instruction manual must be read and applied by any person in
charge of carrying out work with and on the COMPex, e.g.:
– operation including setting up, troubleshooting in the course of work,
removal of production waste, care and disposal of consumables,
– maintenance (servicing, inspection, repair) and/or
– transport.
The instruction manual is to be supplemented by the respective
national rules and regulations for accident prevention and
environmental protection.
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INTRODUCTION

1.1.2 Intended Audience

This manual is intended for:

– Operators, who have completed the COMPex Basic Operations
course.
– Operators, who have completed the COMPex Advanced Operations
course.
– Any reader who wishes to acquire general knowledge of the
COMPex excimer laser.

1.1.3 Numbering of Chapters, Pages and Instructions

The pages of this manual are numbered continuously. The page

number appears in the lower outside corner of every page.
The chapters are numbered continuously. The name of the chapter
appears in the upper outside corner of every even page, the name of
the main section appears in the upper outside corner of the
corresponding odd page.
Each chapter ends with an even page number. Consequently, certain
even pages at the ends of chapters will be intentionally left blank.
Each step within a procedure is sequentially numbered.

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2 User Manual COMPex

 Laser Terminology According to ISO 11145

1.2 Laser Terminology According to

ISO 11145
ISO 11145 (“Optics and Optical Instruments - Lasers and Laser
Related Equipment - Vocabulary and Symbols”) contains a list of laser
terminology.
To prevent misunderstandings, this manual strictly differentiates
between “laser” and “laser device” (see Figure 1). Thus “Start laser
device” means that the power is off and shall be turned on. To “start
the laser” means to switch on the laser beam and start lasing.

F G H
A

E
B
C

I J

D
Figure 1: Laser components according to ISO 11145

Key and Definitions to Figure 1:

A Laser
Consists of an amplifying medium capable of emitting coherent
radiation with wavelengths up to 1 mm by means of stimulated
emission.
B Laser Device
A laser (A), where the radiation is generated, together with
essential additional facilities (E) that are necessary to operate the
laser (e.g. cooling, power and gas supply) .
C Laser Assembly
Laser device (B) together with specific, normally optical,
mechanical and/or electrical system components for beam
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handling and forming (F: e.g. mirrors, lenses; G: e.g. telescope,

focussing).
D Laser Unit
One ore more laser assemblies (C) together with measurement
and control systems (I) and handling systems (J: robotics,
workpiece positioning).
H Workpiece

LAMBDA PHYSIK - 03/2003 3

INTRODUCTION

1.3 Safety

1.3.1 Laser Safety Classification

Lasers and laser systems are classified according to their relative

hazards. These classifications are found in the American National
Standards for the Safe Use of Lasers (ANSI Z 136.1-2000),
FDA 21 CFR 1040.10 and 1040.11 and IEC-60825-1.
Within this classification, the COMPex excimer laser is a class IV
(high power) laser. It must be regarded as a potential hazard to
the human operator. When connected to a correspondingly
configured beam guidance system, the COMPex becomes a class I
laser device.
The laser beam must also be regarded as a potential fire hazard.

1.3.2 Safety Information

Chapter 3 (Safety) describes the physical hazards related to the laser

device, the means of protection against these hazards and the safety
features incorporated in the design of the laser device.
The Safety Chapter must be read by all persons entrusted with any
sort of work on the COMPex excimer laser device.
Never start to follow the procedures detailed in this manual
unless you have read and fully understood the information given
in the Safety Chapter.

1.3.3 Signal Words and Symbols in this Manual

Contained within this manual are sections in which particular hazards

are defined or special attention is drawn to particular conditions. These
are indicated with signal words in accordance with ANSI Z-535.2-1991
and safety symbols (pictorial hazard alerts) in accordance with ANSI
Z535.3-1991. The signal words are defined in section 1.2.3.1 of this
manual and the safety symbols in section 1.2.3.2.

1.3.3.1 Signal Words

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Four signal words are used in this manual: DANGER, WARNING,

CAUTION and NOTE. The signal words DANGER, WARNING and
CAUTION designate the degree or level of hazard:

DANGER
Indicates an imminently hazardous situation which, if not
avoided, will result in death or serious injury.

4 User Manual COMPex

 Safety

WARNING
Indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.

CAUTION
Indicates a potentially hazardous situation which, if not avoided,
may result in minor or moderate injury. It is also used to alert
against unsafe practices that may result in property damage.

Use of the signal word ”NOTE”:

NOTE
Used to define sections, where particular attention should be paid
to ensure efficient operation or servicing of the laser device.

1.3.3.2 Symbols

The signal words DANGER, WARNING, and CAUTION are always

emphasized with a safety symbol. These safety symbols are used to
indicate special hazards. They are used regardless of the hazard level:

This symbol is combined with one of the signal words DANGER,

WARNING or CAUTION to indicate a hazardous situation caused by
laser radiation.

This symbol is combined with one of the signal words DANGER,

WARNING or CAUTION to indicate a hazardous situation caused by
electricity.

This symbol is combined with one of the signal words DANGER,

WARNING or CAUTION to indicate a hazardous situation caused by
toxic substances.

This symbol is combined with one of the signal words DANGER,

WARNING or CAUTION to indicate a hazardous situation caused by
flammable substances.
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This symbol is combined with one of the signal words DANGER,

WARNING or CAUTION to indicate a hazardous situation caused by
circumstances other than those described above.

LAMBDA PHYSIK - 03/2003 5

INTRODUCTION

1.4 Overview of Chapters

• Chapter 1 (this chapter).

• Chapter 2 provides the reader with a short overview of system

elements and a description of different subsystems. It introduces
fundamental operational concepts, such as running modes, as well
as familiarizing the reader with organization and function of the
system.

• Chapter 3 explains safety and provides an overview of safety signs

and identification labels. Described are the main physical hazards as
well as personal and constructional precautions. It is essential that
you read this chapter before performing any task on the
COMPex.

• Chapter 4 describes the specifications, installation requirements,

conditions of transport and operation and the accessories delivered
with the COMPex.

• Chapter 5 describes the installation of the COMPex.

• Chapter 6 contains instructions on how to start and operate the

COMPex.

• Chapter 7 describes fundamental maintenance routines, which can

be performed by instructed operators.

• Chapter 8 provides an overview of the remote part of the software.

• Chapter 9 explains what action the operator can take when errors
occur and how to trace errors.

• Chapter 10 gives an overview of wiring diagrams and schematics.

• Chapter 11 is a glossary.

• The last pages of this manual include a list of figures and an index.

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6 User Manual COMPex

 Conversion Tables

1.5 Conversion Tables

1.5.1 Measurements

Listed below are the units of measure used in this manual and their
equivalents according to the SI standard:

1 meter (m) = 39.37 inches (in)

1 meter (m) = 3.28 feet (ft)
1 centimeter (cm) = 0.3937 inch (in)
1 square meter (m²) = 1,550 square inches (in²)
1 square meter (m²) = 10.76 square feet (ft²)
1 cubic meter (m³) = 35.31 cubic feet (ft³)
1 liter (l) = 0.264 US gallons (gal)
1 kilogram (kg) = 2.20 US pounds (lbs)
1 bar = 100,000 Pascal (Pa)
100,000 Pascal (Pa) = 14.50 pounds force
per square inch (lbf/in²)

1.5.2 Temperatures

The temperatures in this manual are primarily indicated in degrees

celsius (° C).
To convert °C to °F; multiply by 9, divide by 5 and add 32.
To convert °F to °C; subtract 32, multiply by 5, divide by 9.
As a guide, we have converted below some temperature values from
°C to °F:

-10 °C = 14 °F
0 °C = 32 °F
5 °C = 41 °F
20 °C = 68 °F
38 °C = 100 °F
100 °C = 212 °F
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LAMBDA PHYSIK - 03/2003 7

INTRODUCTION

1.6 Patents and Trademarks

1.6.1 Patents

Lambda Physik GmbH is owner of the following patents:

Germany: P 32 12 928.9 “Entladungsgepumpter Laser”

US Patent # 4,534,034 “Discharge-pumped laser”
Germany: P 33 35 690.4 “Vorrichtung zum Erzeugen von
Hochleistungs-Hochspannungsimpulsen
hoher Wiederholfrequenz”
Germany: P 38 17145.7 “Elektrode für gepulste Gaslaser und ihre
Verwendung”
Germany: G 88 17 197.3 “Elektrode für gepulste Gaslaser”
US Patent # 4,860,300 “Electrode for pulsed gas lasers”
Germany: P 37 14 503.7 “Steuerschaltung für einen gepulsten
Gaslaser und Verfahren zum
Initialisieren der Steuerschaltung”
US Patent #4,916,707 “Control circuit for a pulsed gas laser”
US Patent # 4,993,042 “Device for mounting a window on a gas
discharge laser”
US Patent # 4,980,894 “Ignitor for the preionization of a gas
discharge laser”
US Patent # 4,951,295 “Preionization means for a gas discharge
laser”
Germany: G 8906 627.8 “Vorrichtung zum Reinigen von
Lasergas”
Germany: P 40 03 841.6-09 “Laserresonator”
US Patent #5,220,574 “Excimer laser with hydrogen chloride
and method for producing hydrogen
chloride for an excimer laser”
Japan 1 991 984 “Excimer laser with hydrogen chloride
and method for producing hydrogen
chloride for an excimer laser”
Germany: P 42 06 803.7-09 “Verfahren zum Nachfüllen von
Halogengas in das Gasreservoir eines
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Excimerlasers”
US Patent # 5,396,514 “Excimer laser comprising a gas
reservoir and a collecting receptacle and
a method of refilling the gas reservoir of
the laser”
Germany: G 92 08 936.4 “Laserresonator”

8 User Manual COMPex

 Patents and Trademarks

Germany: P 42 33 634.1 “Elektroden für die Entladungseinheit

eines Excimerlasers”
US Patent # 5,347,532 “Laser having at least one anode and one
cathode for preionization and/or
discharge”
Japan: Hei 5-262 989/93 “Laser having at least one anode and one
cathode for preionization and/or
discharge”
US Patent # 4,977,573 “Excimer laser output control device”
US Patent # 4,611,270 “Method and means of controlling the
output of a pulsed laser”
Germany: P 43 35 079.8-33 “Elektroden in einer Fluor enthaltenden
Entladungseinheit eines gepulsten
Gasentladungslasers”
Germany: G 93 20 768.9 “Elektroden in einer Fluor enthaltenden
Entladungseinheit eines gepulsten
Gasentladungslasers”
Germany: G 94 01 808.1 “Vorrichtung zum Regeln der Temperatur
von Lasergas, insbesondere eines
Excimerlasers”
Germany: 295 20 820.1 “Laserröhre für halogenhaltige
Gasentladungslaser”
US Patent # 4,611,327 “Gas transport laser system”
US Patent # 4,549,091 “Electrical excitation circuit for gas laser”
US Patent # 4,393,505 “Gas discharge laser having a buffer gas
of neon”
US Patent # 4,340,968 “Rare gas hydrogen-halide excimer laser
with hydrogen additive”
Germany P 44 00 345.5 “Vorrichtung für die Reinigung von
Lasergas”
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LAMBDA PHYSIK - 03/2003 9

INTRODUCTION

1.6.2 Trademarks

LAMBDA PHYSIK is a registered trademark of Lambda

Physik AG
the Lambda Physik logo is a registered
trademark of Lambda Physik AG

NovaTube is a registered trademark of Lambda

Physik AG
Halo Safe is a registered trademark of Lambda
Physik GmbH
Gyrolok is a registered trademark of Hoke Inc.,
NJ, USA
Microsoft, MS, are registered trademarks of Microsoft
Windows, Windows 95 and Corporation in USA and other countries
Windows NT
IBM is a registered trademark of
International Business Machines, Inc.

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10 User Manual COMPex

 Feedback Regarding Documentation

1.7 Feedback Regarding Documentation

If you have any comments regarding the documentation provided to
you, please contact us.
When you contact us, please provide us with
– The document code
– The date of issue
– The page number, section number and, where applicable, the
procedure step number
– A description of any errors
– A proposal for improvements

Feedback Address

E-mail [email protected]

Post Lambda Physik AG

Documentation Comments
Hans-Böckler-Straße 12
D-37079 Göttingen
Germany

Telefax +49 551 68691

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LAMBDA PHYSIK - 03/2003 11

INTRODUCTION

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12 User Manual COMPex

 Fundamental Design of the COMPex

2 LASER DEVICE FUNDAMENTALS

This chapter briefly describes the most important features, functions,
and subassemblies of a Lambda Physik excimer laser. This
background information will ease your understanding of the
information contained in the subsequent chapters.
The information in this chapter does not enable you to operate or
service the COMPex excimer laser.
Never switch on or attempt to operate or service the COMPex
before reading, understanding and fully familiarizing yourself
with Chapter 3 of this manual (Safety)!

2.1 Fundamental Design of the COMPex

This section gives an overview of
– the system in general
– the nomenclature
– the location of the parts.
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LAMBDA PHYSIK - 03/2003 13

LASER DEVICE FUNDAMENTALS

2.1.1 Outer System Diagrams

1
8
2

6
5
4

Figure 2: Front view of the COMPex (from beam exit)

Key to Figure 2:
1 Right Side Panel (Service Panel)
2 Thyratron Access Panel
3 Lower Air Intake
4 Beam Shutter
5 Beam Exit Frame
6 Front Mirror Access Panel
7 Upper Air Intake
8 Front Panel
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14 User Manual COMPex

 Fundamental Design of the COMPex

Figure 3: Rear view of the COMPex

Key to Figure 3:
1 Rear Panel
2 Key Switch
3 Control Supply Lamp
4 Fuses
5 Mains Switch
6 Power On Lamp
7 Mains Supply Line
8 Exhaust Fan Outlet
9 Remote Interlock Connector
10 RS232 Connector
11 Rear Mirror Access
12 Communication Interface Access Panel
A0303COMP

13 LAN Feedthrough
14 Trigger BNC Connector
15 Vacuum Pump Power Supply
16 Buffer Gas Connector
17 Rare Gas Connector
18 Halogen Gas Connector
19 Inert Gas Connector
20 Vacuum Pump Connector
21 Water Connection Fittings

LAMBDA PHYSIK - 03/2003 15

LASER DEVICE FUNDAMENTALS

2.1.2 Inner System Diagram (except COMPex F2-version)

A B C D E

P
O

M
L

J I H G F
Figure 4: COMPex inside

Key to Figure 4:
A Thyratron (front) and HV Power Supply (behind)
B Thyratron Adjustment Panel
C Service Panel HV Discharge Unit
D Power-On Circuit (with Key Switch, Transformer)
E Communication Interface (CI)
F Fuses
G Gas Valve Block
H Basic Module
I Control Box (with transmitter, reveiver, main board)
J Laser Tube
K Power Supply for Electrostatic Gas Purifier
L Fan Motor
M Pressure Sensor
N Beam Shielding
O Beam Splitter Box
P Energy Monitor
A0303COMP

16 User Manual COMPex

 Fundamental Design of the COMPex

2.1.3 Functional Description

LASER is an acronym for “Light Amplification by Stimulated Emission

of Radiation”. A laser amplifies light and produces coherent light
beams. As the waves of coherent light beam propagate in step with
one another, laser light can be made extremely intense, highly
directional, and very pure in frequency (color).
To produce laser light technically, three basic components are
needed:
– a active laser medium capable for emission of laser light
– an optical resonator for the amplification of the laser light
– and an energy source to stimulate the emission of laser light.
An active laser medium (see Figure 5, A) can be a solid, a liquid or a
gaseous material. The COMPex laser device uses a gaseous material
as active lasing medium, which is contained in its laser tube. The
electrons in this laser-active medium are pumped, or energized, to an
excited state by an energy source (B). In a process known as
stimulated emission, they are “stimulated” by external photons to emit
the stored energy in the form of photons. The photons thus emitted
travel in step with the stimulating photons and, in turn, impinge on
other excited atoms to release more photons.
The optical resonator normally consists of two mirrors (C and D) which
are placed on two sides of the active laser medium. Light amplification
is achieved as the photons move back and forth between the two
mirrors, triggering further stimulated emissions. A part of the intense,
directional, and monochromatic laser light finally leaves the resonator
through one of the mirrors (D), which is only partially reflective.
COMPex laser devices have these two mirrors attached to the rear
and front side of the laser tube.

Figure 5: Laser principle

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Key to Figure 5:
A Active laser medium C Rear mirror
B Energy source D Front mirror

LAMBDA PHYSIK - 03/2003 17

LASER DEVICE FUNDAMENTALS

To stimulate the active lasing medium for emission of laser light an

electric discharge is used which is also integrated in the laser tube.
The amount of energy needed for the electrical discharge requires
high voltages. Therefore COMPex laser devices are equipped with a
high voltage power supply.
COMPex laser devices are designed to emit laser light in pulses. The
electrical energy for each laser pulse is stored in an array of
capacitors, which are supplied by the high voltage power supply.
When a laser pulse is needed, an electronic switch, technically
realized by a thyratron, enables the capacitors to be discharged. The
electrical energy stored in the capacitors is then transferred to the
laser-active medium via an electrical discharge between a set of
electrodes in the laser tube, and thus stimulates the laser pulse. For
the control of the laser beam energy COMPex laser devices are
equipped with an energy monitor.
The internal control of the components in COMPex laser devices is
achieved by a built-in laser control device, the Communication
Interface. The laser control is described in Section 2.3 on page 20.
The functional design of the COMPex laser device is shown in Figure 6.

G B
C
F

D E
H A

Figure 6: Functional design of the COMPex

Key to Figure 6:
A Laser tube F Capacitor array
B High voltage power supply G Communication interface
C Thyratron H Energy monitor
D Front mirror (partly reflective) I Vacuum pump
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E Rear mirror (high reflective)

18 User Manual COMPex

 Excimer and Gas Lasers

2.2 Excimer and Gas Lasers

The emission of laser light under certain specified conditions
characterizes different kinds of materials. Several solid, liquid and
gaseous materials are able to emit laser radiation. COMPex laser
devices use two types of gaseous phases as lasing medium:
– excimer gas and
– gas.
In COMPex laser devices the lasing medium is stored in a gas
reservoir - the laser tube.

Excimer Lasers
Excimer lasers take their name from the exci ted state dimers from
which lasing occurs. The eximer gas is a gaseous medium built up by
two gas phases - a dimeric gas. Most important are excimer gases
composed of a rare gas and halides, such as Argon Fluoride (ArF),
Krypton Fluoride (KrF), Xenon Chloride (XeCl) and Xenon Fluoride
(XeF). The COMPex uses these excimer gases as lasing medium.
Depending on their composition these excimer gases produce intense
UV light (U ltra V iolet) on distinct spectral lines between 193 nm and
351nm.

Gas Lasers
Some lasing mediums consisting of a single gas phase (monomeric
gas) are also able to emit laser radiation. The most important gas for
the emission of VUV (V acuum U ltra V iolet) laser radiation is Fluorine
(F2) gas. The VUV light emission of Fluorine gas occurs at the
wavelength of 157 nm. Fluorine gas can also be used in specially
equipped COMPex laser devices.

Optional Accessories
Normally the compressed gas cylinders of the halogen gases used
must be stored in specially designed safety gas cabinets. For safety
reasons and to ease the use of COMPex laser devices Lambda Physik
offers the halogen source Halo Safe® as an option. This halogen
source allows on-site production of the required halogen, thereby
eliminating the need for compressed gas cylinders with hazardous
hydrogen fluorine/chloride as well as safety gas cabinets. This
drastically simplifies gas handling.
A0303COMP

In addition, the halogen source provides purer halogen than tank

halogen, thereby reducing contamination of the optics.

LAMBDA PHYSIK - 03/2003 19

LASER DEVICE FUNDAMENTALS

2.3 Laser Control

The COMPex uses a built-in laser control device, the Communication
Interface (CI). The information is optically coded by the CI and given to
or received by the data ring as a sequence of light pulses. Each of the
submodules has an adress assigned to it which can be actuated by the
CI.
Partial tasks are carried out independently by submodules specially
designed for different purposes, e.g. energy monitoring.
This system prevents any interference due to electromagnetic
radiation, as there are no electrical connections between handheld
keypad (or PC) and modules. This is a crucial advantage in excimer
lasers with their high internal electromagnetic interference (EMI) level,
generated by the fast high voltage discharge.
COMPex software version 4.8 or higher is required.It consists of two
integrated parts, the local and the remote software:
– The local software provides a compact and easy possibility to use
the COMPex via the handheld keypad (see Figure 7).

3 4 5

2
6
A

1
B

Figure 7: COMPex control with handheld keypad

Key to Figure 7:
A COMPex laser device 1 RS 232 C connection
A0303COMP

B Handheld keypad 2 FOL data ring

3 Communication interface
4 Energy monitor
5 Basic module
6 Power supply

20 User Manual COMPex

 Laser Control

– The remote software is used to operate and control the laser from
any given external computer system (see Figure 8). For the
information transfer between the external computer system and the
local PC the RS232 interface is used. The remote software
description is intended for programmers only.

3 4 5

2
6
A

B
1

Figure 8: COMPex control with remote computer

Key to Figure 8

A COMPex laser device 1 RS 232 C remote connection

B Remote computer 2 FOL data ring
3 Communication interface
4 Energy monitor
5 Basic module
6 Power supply

Communication Interface and Handheld Keypad

The handheld keypad (Figure 9, right) provides a comfortable use of
the COMPex and uses the local software part of the communication
interface (Figure 9, left). The keys are explained in chapter 7 and 8.
A0303COMP

Figure 9: Communication Interface and Handheld Keypadr

LAMBDA PHYSIK - 03/2003 21

LASER DEVICE FUNDAMENTALS

2.4 Laser Tube

All Lambda Physik excimer lasers use the NovaTube® technology.
The NovaTube® has been conceived to virtually eliminate the effects
of corrosion and contamination. To ensure strict adherence to these
design objectives, all laser tube components are assembled in a
clean-room. Optimized electrode materials combined with an improved
preionization scheme minimizes electrode erosion. These major
improvements in laser tube technology lead to an increased laser tube
lifetime.
The NovaTube® can be considered as the motor of the laser. Figure
10 shows a cutaway drawing of the laser tube.

Figure 10: Cutaway drawing of the laser tube

The laser tube (C) is the reservoir for the laser gas. The materials
chosen allow the problem-free use of excimer gas mixtures. The
material surfaces become coated with a layer of halogen metal
complex. This process, resulting from a reaction between halogen
(laser gas) and metal (material within tube), is called passivation.
Passivation renders the material surfaces within the tube chemically
inert to halogen.
A repetition of this process, known as re-passivation, is always
required
A0303COMP

– if the surface passivation has been damaged as a result of air

entering the laser tube
– (with multigas version only) if a change from a fluorine to a chlorine
gas mixture is necessary
– when the laser device or laser tube has been transported or stored
for longer periods.

22 User Manual COMPex

 Laser Tube

A high voltage discharge between the electrodes (B) transfers the

energy to the excimer gas mixture (e. g. fluorine or krypton premix). In
order to obtain a controlled, spark-free discharge, the laser gas has to
be preionized, i. e. a sufficiently high density of free charged molecules
has to be created between the electrodes. This is achieved with
preionization pins (A) arranged along the main electrodes. The result
is a homogeneous preionization of the laser gas. The switching of
preionization and main discharge in series ensures a perfect
synchronization between preionization and main discharge.
After the high-voltage discharge, thermal inhomogenities in the laser
gas arise in the discharge area. Therefore, the gas volume in the
discharge area has to be completely exchanged between two laser
pulses. A transverse circulation fan (D) positioned within the laser tube
causes the gas volume between the main electrodes to be completely
replaced between two successive laser pulses. The circulation fan is
driven externally via a magnetic coupling by a single-phase motor.
The energy efficiency of the excimer laser is to the order of 2%, i. e.
the main part of the energy supplied has to be carried away in the form
of heat. The gas, heated up by the discharge, reaches the heat
exchangers (F) as a result of the flow in the laser tube and is cooled
down to the correct operating temperature (approx. 30 °C or 86 °F).
Each discharge pulse of the laser results in a load on the preionization
pins and main electrodes and causes a slightly erosion of material.
Percipitation of the created particles on the laser windows would result
in diminishing beam intensity by scattering and absorption. Therefore
these particles must permanantly be removed from the laser gas
which is done by an electrostatic filter (E) integrated in the gas
circulation. Due to the pressure conditions generated by the circulation
fan, the laser gas continuously flows through this electrostatic filter
The maintenance operations required during the lifetime of the
NovaTube® are new gas fills and the exchange of the windows. To
minimize downtimes, the windows should be stored as premounted
units.
A0303COMP

LAMBDA PHYSIK - 03/2003 23

LASER DEVICE FUNDAMENTALS

2.5 Thyratron
The laser uses a simple 3-inch hydrogen thyratron, a thermionic tube.
It is used as an active switch to discharge the storage capacitors. The
anode of the thyratron is connected to the charging voltage. The
cathode is connected to ground. Between these two main electrodes is
the control grid, which initiates the discharge (switching) of the
thyratron.
As is also the case with conventional thermionic tubes, the cathode
structure has to be heated in order to ensure sufficient emission of
starting electrons. If the electron emission after a longer operating
period is no longer sufficient to initiate switching of the thyratron, this
can be corrected during the thyratron lifetime by increasing the heating
power of the cathode. Hydrogen is necessary to provide a fast current
increase and a high current intensity. However, as hydrogen is
continually lost due to diffusion and metal erosion, the concentration of
hydrogen has to be continually renewed. For this purpose, there is a
reservoir structure (palladium) in the tube, in which a large quantity of
hydrogen is stored. By heating the reservoir, hydrogen is released
from the reservoir into the main thyratron. It should be noted, however,
that too much hydrogen reduces the hold-off voltage between the
electrodes of the thyratron to such a level that unwanted switching of
the thyratron will take place even without the trigger pulse. On the
other hand, if the partial hydrogen pressure in the thyratron is too low,
the laser is unable to pulse. This is because there is no discharge in
the thyratron due to a lack of charged particles.
The values for the two heating voltages, UH for the cathode heating
and UR for the hydrogen reservoir voltage, are critical to the correct
operation of the tube. The voltages are stabilized in a broad input
voltage range in order to be unaffected by voltage fluctuations in the
supply line (spikes). These values have to be altered during the total
life of the thyratron to ensure proper switching of the tube. This can be
done simply by using the jumpers provided for this purpose. You will
find a description of the thyratron adjustment in Section 7.8.2 of this
manual. A0303COMP

24 User Manual COMPex

 Energy

2.6 Energy

2.6.1 Energy Measurement

A built-in energy monitor measures the energy of individual laser

pulses, converts them into a digital value and transmits the value via
the Data Ring to the CI.
As the energy monitor does not supply absolute measured values, it
has to be calibrated by means of a calibrated energy meter or power
meter. Apart from the additional energy and power detector no further
measures are neceaary; the calibration is faciltated with the help of the
CI (thus by handheld keypad or PC) with a specific calibration menu.

2.6.2 Energy Management

The pulse energy (output energy) of an excimer laser is dependent

upon the charging voltage (high voltage) and condition (age) of the
excimer laser gas. The following sections describe the mutual
dependence of energy, high voltage and gas actions (halogen
injections, partial gas replacements).
When the pulse energy (E) is considered as a function of the charging
voltage (U), the result is approximately the function shown in Figure
11.
E [mJ]

x
x

U [kV]

Figure 11: Pulse energy as a function of charging voltage

A0303COMP

As excimer laser gases age, the pulse energy obtained from a given
charging voltage will decrease. The laser can, therefore, run either in
the Energy Constant mode (EGY CONST) or in the High Voltage
Constant mode (HV CONST).

LAMBDA PHYSIK - 03/2003 25

LASER DEVICE FUNDAMENTALS

– When the Energy Constant mode is selected, the laser control

continuously adjusts the high voltage to achieve laser operation at a
preset energy level (see Figure 12).

Energy

Energy
HV High Voltage

Time
Figure 12: Voltage increase in the Energy Constant mode

– When the High Voltage Constant mode is selected, the pulse energy
decreases with time as excimer laser gases have a limited lifetime
(see Figure 13).

High Voltage
Energy
HV

Energy

Time
Figure 13: Energy decrease in the HV Constant mode

Most applications require the energy constant mode, whereas the high
voltage constant mode is primarily used for diagnostic purposes (e.g.
to measure the gas lifetime).
If excimer lasers are operated continuously the pulse energy as a
function of time and particularly as a function of the number of laser
pulses shows a clear drop. This drop is basically due to the following
three reasons:
1. The halogen concentration in the laser gas slowly decreases,
because the highly reactive halogen enters into a variety of stable
compounds, particularly when the laser is operated at higher
repetition rates.
2. Impurities and reaction products accumulate in the laser gas.
3. The intense laser radiation in the resonator causes small particles
generated by the electrode burn-off to condense on the optics with
chemical reactants from the laser gas.
A0303COMP

In order to keep the desired pulse energy of the laser constant, the
controller replenishes laser gas by halogen injections (HI) and partial
gas replacements (PGR) if the PGR mode is selected. These gas
actions take place if the high voltage adjustment reaches a preset
replacement value (HVrepl).

26 User Manual COMPex

 Energy

2.6.2.1 Halogen Injection

Halogen concentration decreases slowly, even in well passivated

systems. This leads to lower pulse energy. A portion of halogen is
added to the gas fill to compensate for the loss of halogen partial
pressure. This gas refreshment is carried out if high voltage reaches
the value for replacement (HVrepl, Figure 14):

max Energy
repl

Energy
HV

HV
min
Time
Gasrefreshment
Figure 14: Charging current with halogen injections

2.6.2.2 Partial Gas Replacement (PGR)

Laser gas is released through the halogen filter and halogen, rare and
buffer gases are refilled accordingly, dependent on the preset partial
pressures.
During the first 80 seconds after laser start, no gas replacements take
place even if HVrepl is reached. This warm-up period prevents
unnecessary gas replenishment actions.

max Energy
repl
Energy
HV

HV
min
Time
HV decrease too low
Figure 15: Charging current with Partial Gas Replacement
A0303COMP

LAMBDA PHYSIK - 03/2003 27

LASER DEVICE FUNDAMENTALS

HI/PGR Algorithms (see flow diagram Figure 16)

• If HV regulation reaches HVrepl after the warm-up period, a HI is

performed.

• If the HI is successful, i. e. the HV level decreases after the HI to less

than HVrepl -0.6 kV, the next gas replenishment will be a HI. If the
controller already has performed three successful HIs in series, the
next gas action will be a PGR to adjust all partial gas pressure.

• If an HI is not successful, i.e. The HV-level does not decrease to less

than HVrepl -0.6 kV, a PGR will be performed when the HV level
again reaches HVrepl (see Figure 15).

• If a PGR is successful, i.e. the HV-level decreases after the PGR to

less than HVrepl -0.6 kV, the next gas replenishment action will be a
HI again.

• If a PGR is not successful, i.e. the HV-level does not decrease after
the PGR to less than HVrepl -0.6 kV, then the next gas replenishment
action will be a PGR.

• If 3 PGRs in series are not successful then the message “Preset

energy too high” will come up when HVrepl is reached again when
more than 64 pulses have been fired since the last PGR. When
HVmax is reached laser operation will be stopped.

A0303COMP

28 User Manual COMPex

 Energy

HVrepl
reached

yes
x-th* HI * "x" represents a number
in series ? given with the gas menu

no

HI performed

no
HV less than PGR
HVrepl-0.6kV? performed

yes

yes Laser runs

Laser operation HV less than
until HVrepl
continues HVrepl-0.6kV?
reached again

no

Laser runs yes no

until HVrepl 3rd PGR?
reached again

Message "Preset
Energy too high"
displayed

Laser runs until Laser stops;

Message "Preset Energy
A0303COMP

HVmax reached
too high" displayed

Figure 16: Partial Gas Replacement in Energy Constant Mode

LAMBDA PHYSIK - 03/2003 29

LASER DEVICE FUNDAMENTALS

2.6.2.3 No Gas Replacement (NGR)

The operating mode is a constant energy mode without any gas

replenishment.
When high voltage reaches the level HVrepl the message “New Gas
Fill Needed” will come up. Laser operation will be continued until
HVmax is reached. The laser then shuts off automatically (see Figure
17).

max Energy
repl

Energy
HV

HV
min
Time
"New gas fill needed"
Figure 17: Charging current with No Gas Replacement (NGR)

Figure 18 shows the flow diagram of the Energy Constant Mode with
No Gas Replacement.

HVrepl
reached

Message "New
Gas Fill Needed"
displayed

Laser runs until

HVmax reached
A0303COMP

Laser stops;
Message "New Gas Fill
Needed" displayed

Figure 18: No Gas replacement in Energy Constant Mode

30 User Manual COMPex

 General Safety Aspects

3 SAFETY
Never switch on or attempt to operate or service the COMPex
before reading, understanding and fully familiarizing yourself
with the contents of this chapter.
This chapter is divided into three sections:
– General Safety Aspects, which explains aspects relating to the safe
operation of the laser device.
– Special Safety Aspects, which outlines the risks specific to working
procedures with and on this laser device.
– Overview of safety-relevant labels, which shows the design of and
describes the safety labels.

3.1 General Safety Aspects

3.1.1 Basic Operation and Designated Use

The COMPex laser device has been built in accordance with state-of-
the-art standards and the recognized safety rules. Nevertheless, its
use may constitute a risk to life and limb of the user or of third parties
or cause damage to other material property.
The COMPex must only be used in technically perfect condition and in
accordance with its designated use and the instructions set out in this
manual, and only by safety conscious persons who are fully aware of
the risks involved in operating the COMPex laser device. Any
functional disorders, especially those affecting the safety of the
COMPex laser device, should therefore be rectified immediately.
The COMPex is primarily designed for use in low duty-cycle operation,
mainly scientific and medical, but also industrial applications. Using
the COMPex laser device for purposes other than those mentioned
above is considered contrary to its designated use. The manufacturer/
supplier cannot be held liable for any damage resulting from such use.
The risk of such misuse lies entirely with the user.
Operating the COMPex within the limits of its designated use also
A0303COMP

involves observing the instructions set out in this manual and

complying with the inspection and maintenance directives.

LAMBDA PHYSIK - 03/2003 31

SAFETY

3.1.2 Organizational Measures

In accordance with the valid national regulations for prevention of

accidents (in Germany: VBG 93, in the USA: ANSI Z 136.1) a
responsible person should be designated as the Laser Safety Officer
(LSO) with the responsibility to effect the knowledgeable evaluation of
laser hazards and to monitor and enforce their control.
The instruction manual must always be at hand at the place of use of
the COMPex laser device.
In addition to the operating instructions, observe and instruct the user
in all other generally applicable legal and other mandatory regulations
relevant to accident prevention and environmental protection.
These compulsory regulations may also deal with the handling of
hazardous substances and the issuing and/or wearing of personal
protective equipment.
The necessity of reading the instruction manual applies especially to
persons working only occasionally on the COMPex, e.g. during setting
up, service or maintenance.
Use protective equipment, e. g. protective eyewear, wherever required
by the circumstances or by law.
Ensure that all safety-relevant labels are attached to the laser device
in accordance with the label location diagrams in Section 3.4.1 and
Section 3.4.2 and local regulations. Make sure that these labels are
always complete and perfectly legible. If any labels are missing,
immediately inform Lambda Physik.
In the event of safety relevant modifications or changes in the
behaviour of the COMPex during operation, stop the laser device
immediately and report the malfunction to the competent authority/
person (e.g. Lambda Physik Service).
Never make any modifications, additions or conversions which might
affect safety without the suppliers approval. This also applies to the
installation and adjustment of safety devices and valves.
Spare parts must comply with the technical requirements specified by
the manufacturer. Spare parts from original equipment manufacturers
can be relied upon to do so.
Never modify the software of programmable control systems.
Adhere to prescribed intervals or those specified in the instruction
manual for routine checks and inspections.
A0303COMP

For the execution of maintenance work, tools and workshop

equipment adapted to the task on hand are absolutely indispensable.

32 User Manual COMPex

 General Safety Aspects

3.1.3 Selection and Qualification of Personnel

- Basic Responsibilities

Make sure that only authorized personnel works on or with the

COMPex laser device. Statutory minimum age limits must be
observed.
Employ only trained or instructed staff and set out clearly the individual
responsibilities of the personnel for operation, set up, maintenance
and repair.
Do not allow persons to be trained or instructed or persons taking part
in a general training course to work on or with the COMPex laser
device without being permanently supervised by an experienced
person.

3.1.4 Safety Instructions Governing Specific Operational

Phases

Take the necessary precautions to ensure that the COMPex is used

only when in a safe and reliable state.
Operate the COMPex laser device only if all protective and safety
oriented devices, such as removable safety devices, emergency shut
off equipment and exhausters, are in place and fully functional.
In the event of malfunctions, stop the laser device immediately and
lock it. Have any defects rectified immediately.
Before starting the COMPex laser device ensure that nobody is at risk.
Never switch off or remove suction and ventilation devices when the
laser device is in operation.
Observe the adjusting, maintenance and inspection activities and
intervals set out in the instruction manual, including information on the
replacement of parts and equipment. These activities may be
executed by skilled personnel only.
Brief operating personnel before beginning special operations and
maintenance work, and appoint a person to supervise the activities.
In any work concerning the operation, conversion or adjustment of the
COMPex and its safety oriented devices or any work related to
maintenance, inspection and repair, always observe the start up and
shut down procedures set out in the instruction manual and the
A0303COMP

information on maintenance work.

Ensure that the maintenance area is adequately secured.
Always tighten any screwed connections that have been loosened
during maintenance and repair.
Any safety devices removed for set up, maintenance or repair
purposes must be refitted and checked immediately upon completion
of the maintenance and repair work.

LAMBDA PHYSIK - 03/2003 33

SAFETY

Ensure that all consumables and replacement parts are disposed of

safely, with minimum environmental impact and in accordance with the
valid national and local regulations for waste disposal.

3.2 Specific Safety Aspects

Specific safety aspects are:
– the physical hazards related to the system Section 3.2.1,
– the protection of the operators or users of the system against these
hazards Section 3.2.2,
– the constructive protective measures against these hazards Section
3.2.3.
Lasers and laser systems are classified according to their relative
hazards. These classifications can be found in the American National
Standard for the Safe Use of Lasers (ANSI Z 136.1-2000), FDA 21
CFR 1040.10 and 1040.11, IEC-60825.
Within this classification, the COMPex is a Class IV (high power)
laser device when operated with open covers during servicing
conditions, and must therefore be regarded as a potential hazard to
the human operator. The laser beam must also be regarded as a
potential fire hazard.
A Class IV laser system is not enclosed and therefore requires several
safety precautions. Class IV is the most powerful (and potentially
hazardous) category of lasers. Direct and scattered radiation from
Class IV products are considered acute hazards to the eyes and skin.
Precautions include eye and skin protection, remote interlocks and
warning labels.

NOTE
The COMPex is a class IV laser device. However, when connected to
an OEM device or with housing closed, it becomes a Class I laser
device.
A Class I laser device is defined as a laser system which is supplied
with a special enclosure which does not allow access to hazardous
levels of laser light during normal operation. This class of laser does
not require special precautions for eye safety during normal operations
as long as the protective enclosure is in place.
A0303COMP

WARNING
Risk of serious injury!
A Class I laser system becomes a Class IV laser system with
freely accessible laser radiation when the enclosure is open.
Never work with the laser system with open housing.

34 User Manual COMPex

 Specific Safety Aspects

3.2.1 Physical Hazards

3.2.1.1 Laser Radiation Safety

Ultra-Violet Light
Laser radiation is emitted as a narrow beam of almost parallel rays,
the intensity of which will remain high even at some distance of the
laser. Although the radiation is nonionizing, damage can still occur to
living tissue, if exposed for to long, as a result of heat produced during
radiation absorption.
The radiation of an excimer laser lies outside the visible range.
Possible wavelengths of the high intensity ultraviolet radiation are
157 nm, 193 nm, 248 nm, 308 nm or 351 nm.

WARNING
Risk of very severe injuries to eyes and skin through laser
radiation!
The following are hazardous:
• Direct laser radiationt as it leaves the laser,
• laser radiation which was reflected from a surface,
• laser radiation which was scattered from a surface.
Always ensure to wear protective eyewear appropriate for the
wavelength used when there is a chance to expose the eyes to
laser radiation.

In general, the maximum permissible radiation exposure for the skin is

several times greater than for the eye. Safety measures with regard to
the radiation hazard are therefore mainly based on dangers for the
eye.
A potential chemical hazard originates from interaction between the
laser beam and an obstruction. The high irradiance could result in the
liberation of hazardous fumes and gases. In addition, the heat
generated is sufficient to ignite many materials.
Not only is the direct laser beam hazardous, but unchecked reflections
of laser light also constitute a potential hazard. This risk is excluded if
the laser beam is contained within a protective enclosure. Protective
measures must be taken, therefore, when personnel are working in an
open beam situation (use of beam shielding and beam dump).
A0303COMP

3.2.1.2 High Voltage / Electric Energy

High voltages of up to 32 kV are generated in the COMPex laser

device. As the equipment is provided with a protective housing,
accidental contact with current-carrying conductors during normal
operation is impossible. However, if an appropriate protective cover is
removed, potentially lethal hazards exist in spite of the existence of the

LAMBDA PHYSIK - 03/2003 35

SAFETY

housing interlocks. With a protective cover removed, there is the risk of

an electric shock whenever the mains supply is connected and the
high voltage capacitors are charged. The capacitors in the laser device
hold some of joules at peaking voltages of up to 32 kV.

WARNING
Risk of electrocution!
Personnel should never open the laser device before the main
power supply cable has been disconnected and the high voltage
capacitors are completely discharged.
Work on the electrical system and equipment of the COMPex
laser device must be carried out only by a skilled electrician.

An electrical safety overview is given in Section 3.2.2.2 of this chapter

(page 42), but reference should also be made to Section 3.2.3 (page
46) for an overall description of the system safeguards.
In addition to the above mentioned hazards, the HV switch used
(thyratron) generates ionizing radiation.
Radiation limit: 0.2 µSievert/h at 10 cm distance

This radiation limit will not be exceeded when operating a COMPex

laser device under normal conditions.

A0303COMP

36 User Manual COMPex

 Specific Safety Aspects

3.2.1.3 Halogen Gases

WARNING!
Toxic hazards!
Improper handling with parts of the gas system may provoke
halogen leakages.
Inhalation of, or skin contact with, halogen gases should be
avoided.

Halogen gases can cause severe chemical and thermal burns and in
sufficient concentrations can cause death due to respiratory damage
and pulmonary edema.
It is essential, therefore, that local safety regulations concerning the
emission of chemical vapors must be strictly observed along with the
recommendations made in this chapter and throughout this manual.
Depending upon the wavelength in which the laser is to be operated,
the halogen is either Fluorine or Hydrogen Chloride.
– Fluorine is in the form of a premix gas, ratio ≤ 5 % Fluorine in premix,
and diluted further with other gases in the laser. Fluorine is
characterized by an extremely stinging smell in very low
concentrations (0.1ppm).
– Hydrogen Chloride (HCl) is in the form of a premix gas,
ratio < 0.5 % HCl in premix.
Both gases are still present in sufficient quantities in the gas supply to
cause serious injury if not correctly handled and used.
The attention of the user is drawn, therefore, to the maximum
permitted exposure limits for Fluorine and Hydrogen Chloride and the
permitted periods of time in respect of these limits which depend on
local and international safety regulations.

NOTE
Refer to the corresponing Material Safety Data Sheets available from
your gas supplier and the International Chemical Safety Cards for
Fluorine (ICSC: 0046) or Hydrogen Chloride (ICSC: 0163), for more
precise health hazard information.

The possibility of over-pressure of the gas mixture containing fluorine

or hydrogen chlorine creates potential hazards with the risk of leakage
from the laser tube and gas pipes. Under normal operating conditions
the overpressure is less than 2.5 bar (3.5 bar abs.). In the event of a
leak occurring, the release of halogen gas constitutes the greatest
A0303COMP

hazard.
To remain even in a worst case under the PEL-value of 0.1 ppm for
Fluorine, non-ventilated rooms must have an air volume of at least
100 m3. For the installation in smaller rooms a sufficient air suction is
necessary.

LAMBDA PHYSIK - 03/2003 37

SAFETY

Further potential chemical hazards exist due to the formation of

hydrofluoric acid or hydrochloric acid when the halogen gas comes
into contact with water.
Hydrofluoric acid and hydrochloric acid can also be formed in the
halogen filters used in the system due to fluorine or chlorine coming
into contact with the hygroscopic components of the filter.

3.2.1.4 Ozone

The formation of ozone due to the interaction of ultra-violet light

(193 nm and 157 nm) with oxygen constitutes a potential hazard.
The attention of the user is drawn, therefore, to the maximum
permitted exposure limit for Ozone and the permitted periods of time in
respect of this limits which depends on local and international safety
regulations.

NOTE
Refer to the International Chemical Safety Cards for Ozone
(ICSC: 0068) for more precise health hazard information.

A0303COMP

38 User Manual COMPex

 Specific Safety Aspects

3.2.2 Personnel Safety

3.2.2.1 Laser Radiation Safety

Ultra-violet Radiation Safety

An excimer laser emits high intensity pulsed ultraviolet radiation which
constitutes a hazard to personnel during periods of operation and
servicing.

WARNING
Risk of very severe injuries to eyes and skin through laser
radiation!
The following are hazardous:
• Direct laser radiationt as it leaves the laser,
• laser radiation which was reflected from a surface,
• laser radiation which was scattered from a surface.
Always ensure to wear protective eyewear appropriate for the
wavelength used when there is a chance to expose the eyes to
laser radiation.

If alignment or maintenance work on Class IV laser equipment is

necessary, everyone in the laser area must wear appropriate
protective goggles or other appropriate protective eyewear. The
mandatory protective goggles provide protection against direct
radiation, reflected radiation and standard radiation (normal operating
conditions) within the respective wavelength range.
Contact a manufacturer of protective eyewear for information about
appropriate protective eyewear. Specifications needed to select
appropriate eyewear are: wavelength, power, beam diameter,
repetition rate and max. pulse duration.
The ANSI (American National Standards Institute) standard for safe
use of lasers requires that protective goggles which block the
appropriate laser wavelength should be worn while operating or
servicing class IV lasers. The goggles should be clearly labeled with
an optical density and the specified wavelength. To avoid confusion,
these goggles should be kept separate from other safety glasses and
personal protective equipment. Using the wrong type of goggles is
dangerous. It can be worse to have improper eyewear and a false
sense of security than to have no eyewear and take precautions based
on the absence of protection. Even if you're wearing protective
goggles, never looked directly into the beam; intense laser radiation is
A0303COMP

capable of destroying the protective filter.

Visible Red Radiation

Operating the Laser at 157 nm (ultra-violet) causes additional
spontaneous and stimulated emission of radiation in the range of
635 nm to 755 nm (visible red).

LAMBDA PHYSIK - 03/2003 39

SAFETY

Laser radiation is emitted as a narrow beam of almost parallel rays,

the intensity of which will remain high even at some distance of the
laser. Although the radiation is non-ionizing, damage can still occur to
living tissue, if exposed for too long, as a result of heat produced
during radiation absorption.
In general, the maximum permissible radiation exposure for the skin is
several times greater than for eye. Safety measures with regard to the
radiation hazard are therefore mainly based on dangers for the eye.
A potential chemical hazard originates from interaction between the
laser beam and an obstruction. The high irradiance could result in the
liberation of hazardous fumes and gases. In addition, the heat
generated is sufficient to ignite many materials.
Not only is the direct laser beam hazardous, but unchecked reflections
of laser light also constitute a potential hazard. This risk is excluded if
the laser is contained within a protective enclosure. Protective
measures must be taken, therefore, when personnel are working in an
open beam situation (use of beam shielding and beam dump).

Optical Safety Guidelines

The following guidelines describe some of the actions necessary to
avoid injury caused by the laser beam. Always follow these guidelines
and take additional precautions if necessary.

• When eyewear is necessary, make sure it has the proper optical

density for the laser wavelength.

• All other personnel in the vicinity of the laser should also be ordered
to wear protective eyewear. Only qualified personnel should be
permitted to operate the laser.

• Never intentionally look directly into any laser beam.

• Avoid indirect viewing of direct or reflected laser radiation. Specular

reflections (from reflective surfaces) can be as dangerous as the
direct laser beam. Do not view the beam through optical instruments
unless the optics are designed to filter the laser wavelength.

• Precautions must be taken to ensure that there are no reflecting

objects in the path of the laser beam.

• Do not deviate from standard operating procedures when working

with class IV laser equipment.

• Use lasers only in approved applications and locations. Take

adequate precautions to prevent unauthorized personnel from
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entering the area where a class IV laser is operating. Do not use

lasers around untrained personnel who may injure themselves
inadvertently. Ensure that all personnel in the area observed proper
safety precautions.

• Do not assume the laser system is aligned. Misaligned optics can

cause unintended exposure.

• Report all incidents of exposure to your supervisor.

40 User Manual COMPex

 Specific Safety Aspects

• Warning signs indicating the laser enclosed area should be clearly

displayed with an additional warning light outside the door.

• Local and national regulations governing the safe use of lasers

should be adhered to all times.

Skin Safety
Although the skin can withstand a considerably higher radiation
intensity than the eyes, tissue may be burned to a greater or lesser
degree, depending on the radiation time and the irradiation intensity:

• Avoid contact between the skin and the beam, or specular

reflections of the beam. Reflections of the beam may be as
dangerous as the beam itself. Appropriate protective clothing should
be worn to protect the skin whenever necessary.

Fire Safety
Because of the high output power from the class IV laser, a wide range
of materials can be set on fire. Therefore, when the beam path is
open, appropriate fire prevention measures should be taken:

• Combustible materials may be ignited by the laser beam or by

electrical components inside the laser system. Flammable items
must be isolated from the laser beam and from the laser system.

• Paper (circuit diagrams, leaflets, or even posters on the wall),

curtains that are not coated with fire retardant, wooden panels or
similar materials can be easily set on fire by direct or reflected laser
radiation.

• Only beam stops made of non flammable materials (not asbestos!)

should be used.

• Many fluids and solvents (e.g. cleaning agents used for

maintenance) are combustible. The intense beam of the laser or a
spark from an internal switch can ignite vapors from these materials.
Prevent the laser beam from contacting flammable materials used in
the laser area.

• Move containers of flammable materials as far from the laser system

as possible and shield them from the beam with opaque materials.
Under no circumstances should these solutions and vapors be
placed in the beam path or near the system.
A0303COMP

LAMBDA PHYSIK - 03/2003 41

SAFETY

3.2.2.2 Electrical Safety

WARNING
Electrical hazards!
If the laser device is completely shut down for maintenance and
repair work, it must be secured against inadvertent starting.
Ensure that the electrical system is locked-out and tagged-out
prior to servicing by locking the key switch of the laser device
and tagging appropriate warning signs.

High voltages of up to 32 kV are generated within the laser equipment.

The following precautions should be observed:

• Local safety regulations must always be strictly complied with.

• Switch off the COMPex immediately with an interlock switch or

Emergency Off (EMO) switch in case of an emergency, i.e. to
prevent injury or serious material damage, or if trouble occurs in the
electrical system (see Section 3.2.3.2 on page 47). Contact
appropriate maintenance personnel (e. g. safety officer) after use of
the interlock or EMO switch .

• Work on the electrical system or equipment may only be carried out

by a skilled electrician himself or by specially instructed personnel
under the control and supervision of such electrician and in
accordance with the applicable electrical engineering rules.

• Fault finding and troubleshooting in high voltage circuits must only

be performed by trained personnel.

• Necessary work on live parts and elements must be carried out only
in the presence of a second person who can cut off the power supply
in case of danger by actuating the emergency shut off or key switch.
Secure the working area with a red and white safety chain and a
warning sign.
Use insulated tools only.

• If provided for in the regulations, the power supply to parts of the

COMPex laser device on which inspection, maintenance and repair
work is to be carried out must be cut off.

• Before starting any work, check the de-energized parts for the
presence of power and ground or short circuit them in addition to
insulating adjacent live parts and elements.

• Use only original fuses with the specified current rating.

• The electrical equipment of the COMPex laser device is to be

A0303COMP

inspected and checked at regular intervals. Defects such as loose

connections or scorched cables must be rectified immediately.

42 User Manual COMPex

 Specific Safety Aspects

3.2.2.3 Gas Safety

The properties of compressed gases, such as pressure, diffusibility,

make the handling of compressed gases hazardous. Laser gas
mixtures invariably contain components which are corrosive, toxic and
oxidizing. Therefore, extreme care must be taken when handling these
mixtures.
As a general guide to safe working practices, the following precautions
should be observed when working with gas equipment. Always follow
these guidelines and take additional precautions if necessary.

• Gas protective equipment, such as masks, must be available at the

entrance to the area where the laser is located.
Ensure that a protective mask with a protective gas filter, or a
complete breathing apparatus set, is placed in a clearly displayed
and accessible part of the operating area.

• It is recommended that personnel work in pairs and within sight and

sound of each other, although not necessarily in the same working
area. Only trained and competent personnel should be permitted to
handle premix gas cylinders and regulators.

• Any equipment to be used for halogen gas servicing should be

thoroughly cleaned, degreased and dried before use, then treated
with increasing concentrations of halogen gas so that any impurities
can be burned off without the risk of the equipment catching fire.

• Any equipment that has contained fluorine must be thoroughly

purged with helium or argon and evacuated prior to opening or
refilling.

• Due to the possibility of over-pressure of the gas mixture containing

halogens, potential hazards exist due to the risk of leakage of the
laser cavity and gas pipes. The most vulnerable part is the window.
Under normal operating conditions the pressure is 3.8 bar. The
equipment must be used such that the beam exit is not directed at
personnel. In the event of a leak occurring, the release of halogen
gas constitutes the greatest hazard.

• The COMPex laser devices use an extrenally connected vacuum

pump and halogen filter. Due to the possibility of gas leaks, potential
hazards exist outside the laser device when evacuating the excimer
laser gas mixture. A halogen sensor and an evacuating system are
to be installed in the area of the vacuum pump to avoid hazardous
halogen gas concentrations.

• Avoid repeated bending and excessive vibration of gas piping and

A0303COMP

equipment as this can result in flaking of the protective halogen film

and rupturing of the metal. This could lead to the occurrence of a
fluorine metal fire. Flaking of the protective film can also cause dust
to foul the valves.

• All areas containing pressurized halogen gas mixtures should be

inspected for leaks periodically (weekly). In the event of a leak
occuring, the release of halogen constitutes the greatest hazard.

LAMBDA PHYSIK - 03/2003 43

SAFETY

• All leaks should be repaired immediately, but not while the system
contains halogen gases.

For Fluorine: Ammonia vapor expelled from a squeeze bottle

containing ammonium hydroxide may be used to detect leaks at
suspected points.
Filter paper moistened with potassium iodide solution is a very
sensitive means of detecting fluorine in concentrations as low as
approximately 25 ppm. The potassium iodide paper should be held
with the aid of a longpair of tongs or forceps, and will darken and turn
black when fluorine is present. Fluorine odor is sufficiently strong to
be detectable in very low concentrations (at 0.14 ppm). Fluorine will
also fume readily in air.

• Adequate ventilation is essential. See the corresponding

“Installation Conditions” manual for the specifications of the required
air flow.

WARNING
Toxic hazard!
Ensure that the laser is ventilated into an appropriate exhaust.
Make sure that the exhaust of the laser is not connected to the
duct system of systems used for the processing of breathing air
(e. g. air conditioning or ventilating systems).

• Ozone can be generated by high power ultra-violet radiation (in

particular with ArF at 193 nm and with F2 at 157 nm). This gas should
be removed with a proper air exhaust or by flushing the beam path
with Nitrogen or Argon.

• Adequate ventilation is essential. There should be at least 10 air

changes per hour when the laser device is installed in a confined
space, e.g. housing of additional devices.

• Always wear protective gloves when changing halogen filters as they

are hygroscopic and contain oxidizing agents.

• As the premix gas contains halogen, a needle valve or cut-off valve

should be installed in the premix gas line. The additional valve is to
be located near the gas cylinder to protect the gas line and pressure
regulator against corrosion and provide additional gas protection. Do
not solely rely on the main gas cylinder valve to provide adequate
protection.

• Gas cylinder valves should be closed except while filling the laser, or
when running the laser in the constant energy mode (EGY Const.).
A0303COMP

• The pressure regulator, situated between the external gas cylinder

and the laser, should be checked regularly. The maximum permitted
value while cylinders are opened is 5.0 bar (abs.) respectively
7.0 bar (abs.) to operate the halogen source’s pilot valve.

44 User Manual COMPex

 Specific Safety Aspects

3.2.2.4 Pressure Safety

Gas pressures of up to 3.8 bar (abs.) are permitted in the laser tube. If
pressure rises above that, a built-in safety valve releases the
overpressure via the halogen filter into the exhaust. The following
precautions should be observed:

• The laser should only be operated with the housing closed.

• In accordance with the local pressure vessel regulations (in

Germany: “Druckbehälterverordnung”), Lambda Physik
recommends to have the laser tube checked by a specialist every
five years.

3.2.2.5 Seismic Protection

For installations in areas that are susceptible to seismic activity, the

end user is responsible for appropriately securing the laser device
within their facility or the OEM is responsible if the laser device should
be installed within an OEM device, alternatively. For the exact
configuration of the protective devices, local regulatory requirements
are to be followed and the site vulnerability of the facility or OEM
device (e.g. soil conditions and design) is to be taken into account.
Provision is to be made for the following:

• Anchors to prevent movement or overturning of the laser device

during a seismic event.

• Suitable strain relief devices for all supply lines to control the risks
through leakage or escape of gases, liquids and electricity etc.
during a seismic event.
Specific information regarding the position of the mounting holes and
laser device feet is contained in Section 4.2 on page 61.
A0303COMP

LAMBDA PHYSIK - 03/2003 45

SAFETY

3.2.3 Constructive Safety Features

The laser device is equipped with the following constructional safety

features:

3.2.3.1 Radiation Safety Features

• Appropriate Class IV label affixed to laser device enclosure (see

Section 3.4.1 of this manual).

• All parts of the laser where laser radiation may possibly escape are
marked with the appropriate adhesive danger signs (according to
IEC 60825-1).

• The beam exit at the laser housing can be closed by a manually

operated beam shutter.

• COMPex series lasers are provided with a connector (”Remote”) on

the rear panel of the laser housing, where electrical circuits for a
warning light and an external interlock switch can be installed (the
appropriate plug is included in the service box).
The warning light signals that the laser is operating and therefore
warns of the risk of laser radiation. Additionally, the generation of
laser radiation can be recognized by the clicking noises: the higher
the repetition rate, the faster the clicking.
The interlock switch shuts down the laser externally, for instance if a
door connected with the switch is opened.
Please note, that the Remote Interlock (external interlock switch)
only switches off the high voltage. After closing the door, the laser
can be started again. To avoid starting of the laser device after
activating the door contact, the contact must be integrated into an
EMO (Emergency Off) circuit.

• The Basic Module is monitored by a watchdog. Watchdogs are

switches which alter the logical level as soon as the reset pulses
stop.
The watchdog is reset by the laser control at least three times a
second. Should the pulses stop, as in the case of a breakdown, this
is recognized by the watchdog belonging to the module. The module
is then switched to a safe, inactive state.
The COMPex immediately signals if this module has failed testing.

• The service panel at the laser is equipped with an interlock which will
shut off high voltage if the laser is opened during operation.
A0303COMP

46 User Manual COMPex

 Specific Safety Aspects

3.2.3.2 Electrical Safety Features

The following safety features protect the user from the potentially
lethal hazards associated with high voltage power sources:

• All potentially lethal voltages are contained in fully protected and

grounded enclosures. Additionally a housing cover interlock
disables the high voltage power supply when the cover is removed.

• Opening a housing cover panel for service triggers a housing cover

interlock switch that shuts off the high voltage and, consequently, the
laser radiation. This is not true for the mirror access panels, which
can be removed to service the optics of the COMPex.

• The Power Module shielding encloses the HV parts of the laser to

protect the surroundings against ionizing radiation and electro-
magnetic interference (limits, see Section 3.2.1.2 on page 35).
A proper closed laser housing completely shields the surroundings
from the ionizing radiation. The emission of ionizing radiation has
been checked by the German Physikalisch-Technische
Bundesanstalt (PTB). No radiation beyond background radiation
was detected with covers closed.
Opening the Power Module shielding discharges the capacitors by a
safety switch release.

• High voltage warning labels are prominently displayed on all three

high voltage modules: The High Voltage Power Supply, The Gas
Processor Power Supply and the High Voltage Circuitry.

• For service the capacitors can be discharged through a shortcut

plate to ground.

• All AC power wiring is UL- or VDE-recognized and rated at 600 V.

Black or brown is used for line phases, blue or white is used for
neutral and green or yellow-green is used for ground (depending on
the power supply version).

• A yellow-green grounding conductor is included in every AC power.

All power connectors have grounding pins that make first and break
last.

• All ground conductors are equipped with a ring lug and external tooth
lockwasher.

• Fuses are used to provide branch circuit protection against low level
faults.

• AC power and signal lines are never combined in the same

connector.
A0303COMP

• Fast acting magnetic circuit breakers with at least 10 kA interrupting

capacity, a lockable disconnect means and an emergency-off
function are supplied with the main switch.

• All external low voltage (24 V) lines conform to the VDE 0551 safety
standard.

LAMBDA PHYSIK - 03/2003 47

SAFETY

3.2.3.3 Pressure and Gas Handling Safety Features

The Lambda Physik Excimer Laser incorporates the following pressure

and gas handling features:

• The pressure chamber is designed in accordance with the official

German pressure vessel regulations, the Druckbehälterverordnung
(”Allgemeine Vorschrift, DruckbehV”; edited by the
”Bundesministerium für Arbeit und Soziales”; Germany).
Every chamber is tested up to 4.5 bar (abs).

• Gas valves are electrically operated.

• The tube housing is fully interlocked.

• All gas fittings are 6 mm Gyrolok.

• A powerful ventilation system causes continuous underpressure in

the tube chamber during laser operation. This prevents toxic gas
from escaping into the ambient air in case of a leak.

• The exhaust enclosure is designed to ensure ventilation of all

components.

3.2.3.4 Fire Safety Features

The fire safety features designed into Lambda lasers eliminate the use
of materials which are combustible or produce toxic vapors as well as
preventing flames from spreading or burning materials from dripping.
The design incorporates the following specific fire safety features:

• Except for electrical wire insulation polyvinyl chloride (PVC) is not

used.

• No ventilation holes in fire break enclosures are in excess of 5 mm

(0.20") in diameter. Hole arrays are used as required.

• Material meeting or exceeding UL 94-V1 is used. A0303COMP

48 User Manual COMPex

 Safety Compliance List

3.2.3.5 Mechanical Safety Features

Mechanical safety design provides protection against any hazards

which could cause physical injury or burns. Specific mechanical safety
features are listed below:

• Exposed corners are radiused.

• Air fans have grill guards with less than 6.4 mm (0.25 in).

• No high temperature components are accessible to touch.

• The laser center of gravity is centrally located within the enclosure to

minimize tipping hazard.

• Threaded holes are provided in the base of the housing to allow

suitable seismic anchorage of the laser device.

3.2.3.6 General Safety Features

The COMPex incorporates the following general safety features:

• Key-switch controlled laser operation.

The laser device can only be switched on with the key-switch. This
prevents inadvertent or unauthorized starting of the laser. It cannot
be operated with the key in the OFF position and the key cannot be
removed in the ON position.

• No polychlorinated biphenyl (PCB) is used.

• No asbestos is used.

3.3 Safety Compliance List

The equipment has been tested and found to comply with the
standards and recomendations about safety of laser products and
safety requirements for electrical equipment fr measurement, control
and laboratory use:
– IEC 60825-1 (1994) + A11 (1996)
(IEC 825-1: 1993)
– IEC 61010-1 (1990) + A1 (1992) + A2 (1995)
A0303COMP

– EN 61010-1 (1993) + A2 (1995)

– CAN-CSA 22.2 No. 1010.010-30
– UL 3101-1
All laser products from Lambda Physik are also compatible with the
European laser safety standard EN 60825.

LAMBDA PHYSIK - 03/2003 49

SAFETY

3.4 Labels
This chapter contains the description od the labels and where they are
found on the COMPex.
Be sure that all warning labels are affixed to the system according to
the plans given in Section 3.4.1 and Section 3.4.2 of this chapter.

WARNING
Risk of injury!
Misuse or improper handling of the laser device can cause
serious or, in certain situations, even lethal injuries.
Never put the COMPex into operation if the labeling is
incomplete.
Immediately replace missing labels or inform Lambda Physik of
their absence.

3.4.1 Labels Outside the Laser

(all countries except Germany)

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Figure 19: Labels on the front side of the COMPex

50 User Manual COMPex

 Labels

The labels on the front of the COMPex are:

1. Warning label according to CDRH. Contains laser radiation
warning and individual laser data (# 901 032):

COMPex Power Energy Duration Wavelength

Model [W] [J] [ns] [nm]
COMPex 102 20 0.6 10 - 50 157 - 800
COMPex 110 50 0.6 10 - 50 157 - 800
COMPex 120 50 0.4 10 - 50 157 - 800
COMPex 201 20 1 10 - 50 157 - 800
COMPex 205 50 1 10 - 50 157 - 800
COMPex F2 20 0.4 5 - 50 157 - 800

VISIBLE AND INVISIBLE

LASER RADIATION
AVOID EYE OR SKIN EXPOSURE TO
DIRECT OR SCATTERED RADIATION

W
Output: mJ/pulse
Duration to ns
Wavelength to nm
CLASS IV LASER PRODUCT

2. Sign warning of laser radiation while mirror access panel is

removed (# 904 025):

DANGER

AVOID EYE OR SKIN EXPOSURE TO DIRECT

OR SCATTERED RADIATION

3. Beam exit safety sign (# 901 031):

A0303COMP

AVOID EXPOSURE
VISIBLE AND INVISIBLE LASER
RADIATION IS EMITTED FROM
THIS APERTRE

LAMBDA PHYSIK - 03/2003 51

SAFETY

The labels on the rear of the COMPex are:

5
6
12
7
11

10 9 8

Figure 20: Labels on the rear side of the COMPex

4. Sign warning of laser radiation while mirror access panel is

removed (# 904025):

DANGER

AVOID EYE OR SKIN EXPOSURE TO DIRECT

OR SCATTERED RADIATION

5. Instruction for operating the COMPex with handheld or remote

computer at distances at more than 2 m.
This complies to IEC 60825 (# 905 121 01):
A0303COMP

ATTENTION
IF CONTROLLER AND LASER ARE
SEPARATED MORE THAN 2 METERS,
ALSO THE CONTROLLER HAS TO BE
EQUIPPED WITH APPROPRIATE
WARNING LABELS AND EMISSION
INDICATOR (SEE MANUAL)

52 User Manual COMPex

 Labels

6. FDA compliance label (#90103401):

This product complies with FDA

radiation performance standards
21 CFR Chapter 1, Subchapter J
7. Halogen gas warning (# 904 833 01):

TOXIC AND CORROSIVE

GASES

8. Warning that gas connections must be sealed when opened

(# 905 384):
GASANSCHLÜSSE UND GAS- GASINLETS AND SUPPLY
ZULEITUNGEN SIND NACH OUTLETS MUST BE BLAN-
DEM TRENNEN ODER BEI KED OFF AFTER DISCON-
NICHTBENUTZUNG ZU VER- NECTING OR IF NOT USED
SCHLIESSEN

9. (Fluorine version only) Label directing that no gas mixture other

than fluorine gas mixtures be used (# 906 446):

Nur Fluor-Gasgemische verwenden!

Only for Fluorine-Gas Mixtures!

10. Label indicating the protection by one or more patents (#905910):

11. Label showing electrical frequency for the main supply, where XX
is replaced by the frequency.
Laser is switched for XX Hz

12. Laser identification plate.

For more information about the configuration of the electrical
connection, please refer to Section 4.3. The indicated values are
shown on the label (# 905 743 01):
A0303COMP

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SAFETY

3.4.2 Labels Inside the Laser

(all countries except Germany)

1 2 3

6 5
Figure 21: Labels inside the COMPex

Labels inside the COMPex are:

1. Labels at the thyratron adjustment panel:
max

max

50 Hz
60 Hz

FUSE

AUX

BIAS

HEAT

RES
A0303COMP

GND
min

min

54 User Manual COMPex

 Labels

2. Label warning to access the high voltage circuit (# 900 837):

LEBENSGEFAHR!
Nur Personal, vollständig vertraut mit den Vorsichtsmaßnahmen für Arbeiten an
Hochspannungsgeräten darf Arbeiten am Gerät ausführen.
Vor jedem Service ist stets das Handbuch zu lesen.
Alle Anweisungen zur dauerhaften Erdung, sowie Prüfung auf Abwesenheit der Hoch-
spannung sind genau und jederzeit zu befolgen.

Only Personnel fully conversant with safety measures for working with High Voltage
equipment shall perform work at this equipment.
Every time before service it is mandatory to read the Manual.
All instructions for positive Grounding and Check for Absence of High Voltage have
to be followed meticuously and at any time.

DANGER TO LIFE!

3. Label showing electrical frequency and voltage needed for the

main supply (# 903 070):

Line Voltage 230V

Line Voltage 110V

Line Frequency 50Hz

Line Frequency 60Hz

E=_________

4. Labeling of the power supply unit’s fuses (# 905 221):

M03/ M03/ M03/ M03/ M03/ M03/
F6 F5 F4 F3 F2 F1

5. Fabrication number of the laser device (# 900 663):

Lambda Physik Göttingen

FN .
A0303COMP

LAMBDA PHYSIK - 03/2003 55

SAFETY

6. Identification label of the laser tube (# 904 489):

SERIEN-NR.: SIEHE SCHLAGZAHL

SERIAL-NO.: SEE ENGRAVED NUMBER
BAUJAHR:
MANUFACTION YEAR:
MAX. BETRIEBSDRUCK: BAR
MAX. OPERATION PRESSURE:
MAX. BETRIEBSTEMPERATUR: °C
MAX.OPERATION TEMPERATURE:
MIN. BETRIEBSTEMPERATUR:
°C
MIN.OPERATION TEMPERATURE:
INHALT: LITER
VOLUME: LITRE
GAS PROZESSOR: KV
GAS PROCESSOR:
ANODE: P: NO:
ANODE:
KATHODE: P:
NO:
CATHODE:
ELEKTRODEN-ABSTAND: MM
ELECTRODE GAP:

7. Sign warning of electrical shock (# 900 641):

8. Label naming the (upper) remote plug and describing the (lower)
power supply plug (# 380 289):

REMOTE
A0303COMP

0 .05 A
230 V
10 A
POW ER

56 User Manual COMPex

 4 SPECIFICATIONS,
REQUIREMENTS AND
ACCESSORIES
To continuously optimize the laser devices, all data in this chapter are
subject to changes.
Should information on seperate sheets (e. g. laser data sheets)
attached to or provided together with this manual contradict the
information in this chapter, the information on the separate data sheets
has priority.
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SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

4.1 Laser Specifications

4.1.1 COMPex 100 Series

CDRH-class
(laser classification) IV
Power ≤ 30 W
Pulseshape temp. ≥ 10 ns
Pulse to Pulse stability ≤ ± 12 % for pulse moving average
All data given are measured with an energy monitor and optimized gas
mixtures.

Specifications for COMPex 100 series

COMPex ArF KrF XeCl XeF Units
Model
Wavelength 193 248 308 351 nm
Pulse COMPex 102 200 300 200 150 mJ
Energy1) (Multigas)
COMPex 102 200 350 -- 150 mJ
(F-Version)
COMPex 110 200 300 200 150 mJ
(Multigas)
COMPex 110 200 350 -- 150 mJ
(F-Version)
Max. Rep. COMPex 102 20 20 20 20 Hz
Rate COMPex 110 100 100 100 100 Hz
Avg. Power2) COMPex 102 4 6 4 3 W
(Multigas)
COMPex 102 4 7 -- 3 W
(F-Version)
COMPex 110 12 25 20 12 W
(Multigas)
COMPex 110 12 30 -- 12 W
(F-Version)
Pulse Duration COMPex 100 25 30 20 25 ns,
(nominal) series FWHM
Beam COMPex 100 24 x 5-10 24 x 5-10 24 x 5-10 24 x 5-10 mm2
Dimensions3)
A0303COMP

series (V x H)
Beam COMPex 100 3x1 3x1 3x1 3x1 mrad
Divergence3) series (V x H)

1) measured at low repetition rate (5 Hz)

2)
measured at max. repetition rate
3)
typical value, FWHM

58 User Manual COMPex

 Laser Specifications

4.1.2 COMPex 200 Series

CDRH-class
(laser classification) IV
Power ≤ 30 W
Pulseshape temp. ≥ 10 ns
Pulse to Pulse stability ≤ ± 12 % for pulse moving average
All data given are measured with an energy monitor and optimized gas
mixtures.

Specifications for COMPex 200 series

COMPex ArF KrF XeCl XeF Units
Model
Wavelength 193 248 308 351 nm
Pulse COMPex 201 400 600 400 300 mJ
Energy1) (Multigas)
COMPex 201 400 650 -- 300 mJ
(F-Version)
COMPex 205 400 600 400 300 mJ
(Multigas)
COMPex 205 400 650 -- 3004) mJ
(F-Version)
Max. Rep. COMPex 201 10 10 10 10 Hz
Rate COMPex 205 50 50 50 50 Hz
Avg. Power2) COMPex 201 4 5 3.5 3 W
(Multigas)
COMPex 201 4 6 -- 3 W
(F-Version)
COMPex 205 15 25 20 15 W
(Multigas)
COMPex 205 15 30 -- 15 W
(F-Version)
Pulse Duration COMPex 100 20 25 25 20 ns, FWHM
(nominal) series
Beam COMPex 200 24 x 6-12 24 x 6-12 24 x 6-12 24 x 6-12 mm2
Dimensions3) series
Beam COMPex 3x1 3x1 3x1 3x1 mrad
A0303COMP

Divergence3) 200 series (V x H)

1)
measured at low repetition rate (5 Hz)
2)
measured at max. repetition rate
3) typical value, FWHM

LAMBDA PHYSIK - 03/2003 59

SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

4.1.3 COMPex F2 Series

CDRH-class
(laser classification) IV
Power ≤ 30 W
Pulseshape temp. ≥ 10 ns
All data given are measured with an energy monitor and optimized gas
mixtures.

Specifications for COMPex F2 series

COMPex F2 Units
Model
Wavelength COMPex F2 157 nm
Pulse COMPex F2 10 mJ
Energy1)
Max. Rep. COMPex F2 50 Hz
Rate
Avg. Power2) COMPex F2 0.5 W
Beam COMPex F2 (19 ± 4) mm2
Dimensions3) x (7 ± 2) (V x H)
Beam COMPex F2 6x2 mrad
Divergence3) (V x H)

1)
measured at low repetition rate (5 Hz)
2)
measured at max. repetition rate (50 Hz)
3) typical value, FWHM

A0303COMP

60 User Manual COMPex

 Physical Dimensions

4.2 Physical Dimensions

COMPex 100:
Laser (l × h × w) ≈ 1300 × 795 × 385 mm
Weight 250 kg

COMPex F2:
Laser (l × h × w) ≈ 1300 × 795 × 385 mm
Weight 270 kg

COMPex 200:
Laser (l × h × w) ≈ 1700 × 795 × 385 mm
Weight 325 kg

Vacuum Pump:
Laser (l × h × w) ≈ 230 × 450 × 240 mm
Pump with mounted filter 530 mm
Weight 23 kg
All dimensions are shown in the layout diagrams given in Section 10 of
this manual.
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SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

4.3 Electrical Requirements

This section provides the information about power supply and interface
specifications.

4.3.1 Power Supply

NOTE
All rated voltages can vary by ± 12 %.

230 V / 400 V version

COMPex Voltage Frequency Phases Wires Power Current
Model [V] [Hz [-] [-] Cons. [kVA] [A]
COMPex 102 230 50 / 60 1 3 1.5 6
COMPex 110 230 50 / 60 1 3 3 13
COMPex F2 230 50 / 60 1 3 3 13
COMPex 120 230 50 / 60 1 3 3 13
COMPex 201 230 50 / 60 1 3 1.5 6
COMPex 205 230 50 / 60 1 3 3 13

115 V / 208V Version

COMPex Voltage Frequency Phases Wires Power Current
Model [V] [Hz [-] [-] Cons. [kVA] [A]
COMPex 102 120 50 / 60 1 3 1.5 12
COMPex 110 120 50 / 60 1 3 3 25
COMPex F2 120 50 / 60 1 3 3 25
COMPex 120 120 50 / 60 1 3 3 25
COMPex 201 120 50 / 60 1 3 1.5 12
COMPex 205 120 50 / 60 1 3 3 25

See chapter 10 of this manual for wiring diagrams.

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62 User Manual COMPex

 Electrical Requirements

4.3.2 Serial Interface

The laser can be controlled by an external PC system using the

interface specified in this section.
The connector is a 25 pole Sub D-type male connector.

PIN Signal Specific Description

2 TXD O, RS232 Transmit Data
3 RXD I, RS232 Receive Data
7 GND Signal Ground

Data format:
data bits 8
parity no
stop bit 1
baud 9600 bps

4.3.3 Remote Socket

The Remote Socket enables to connct external safety features to the

laser device. Pin 2 and 3 must be connected to run the laser,
otherwise the interlock message “REMOTE” appears.
Pin 2 to 3 24 VAC
Pin 1 to 4 24 VAC / 100 mA
A0303COMP

Remote
interlock 2 1 External
(e. g. door laser radiation
switch) 3 4 warning lamp
Figure 22: Remote socket

LAMBDA PHYSIK - 03/2003 63

SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

4.3.4 Trigger Signal Ports

There are two BNC trogger signal ports at the COMPex laser device:
– External Trigger in (Ext. Trig.)
– Sync. Out

4.3.4.1 External Trigger In

This part allows external triggering of the laser.

The specifications of the necessary input are:
Voltage: +3.3 V to +5 V
Impedance: ≥ 5 kΩ
Duration: ≥ 15 µs
triggered on positive slope
Connector: BNC
Galvanic isolation by optocoupler provided.

4.3.4.2 Sync. Out Signal

The Sync. Out Signal is sent by the Communications Interface. it

informs devices other than the laser that a trigger signal (wether
internal or external) has just been given.

NOTE
If COD is active, there is a time delay between Sync. Out Signal and
firing of the laser. For more information about this delay, see Section
6.5.4 on page 114.

The specifications of the Sync. Out Signal are:

Voltage: +3.3 V to +5 V
Impedance: ≥ 1 kΩ
Duration: ≥ 15 µs
triggered on positive slope
Connector: BNC
A0303COMP

Galvanic isolation by optocoupler provided.

64 User Manual COMPex

 Cooling Water

4.4 Cooling Water

The models COMPex 102 and COMPex 201 are fully aircooled.
Installation of the water cooling is only required for COMPex 110,
COMPex F2 and COMPex 205. The lasers are optionally equipped
with built-in temperature stabilization to optimize the gas temperature
of the laser tube by regulation of the water flow.

CAUTION
Risk of corrosion of the laser heat exchange!
Do not use deionized or distilled water.

NOTE
A) Particles in the cooling water can clog the cooling cycle. Thus the
use of a filter is strongly recommended.
B) At high duty cycle, more than 1000 liters of cooling water are
needed a day. Due to cost and environmental factors, we recommend
a cooling circuit and an additional water chiller.

Specifications:
Temperature Range 5 to 20 °C (41 to 68 °F),
(at water inlet) for 100 % duty cycle
Flow 1 to 5 l/min, depending on the temperature
of the water
pH-value 6 to 9
Suspended particle < 200 µm
size
Water hardness < 100 ppm Ca
Pressure < 4 bar abs. (< 57 psi)
Heat transfer to water ≤ 1.5 kW
Connectors In/Out 10 mm Serto®
The laser is connected to the water line by
two ½ inch hoses (length: 3m).
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LAMBDA PHYSIK - 03/2003 65

SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

4.5 Gas Requirements

The active medium in an excimer laser is a mixture of a rare gas, a
halogen and a buffer gas. The gases are mixed in the laser itself.
The gas mixtures needed depend on the wavelengths desired for
operation:

Gas Mixture Wavelength

F2 in He, Inert (He) 157 nm
Ar, F2 in He, Buffer (Ne) 193 nm
Kr, F2 in He, Buffer (Ne) 248 nm
Xe, HCl and H2 in He, Buffer (Ne) 308 nm
Xe, F2 in He, Buffer (Ne) 351 nm

Normally the COMPex is prepared to operate at one wavelength only.

All gas valves on the laser device allow supply from separate gas
cylinders. In addition premix gases or the optional halogen source can
be used. The halogen source is the controlled by the laser.

NOTE
in addition to the laser gas mixture we strongly recommend a helium
and a neon gas cylinder even if they are not needed for the gas
mixture. The gas cylinders are necessary to purge the tube and the
gas lines (helium) and to make the laser device transportable and
storable (neon).

A halogen filter is built into the laser and will fully absorb all of the
halogen exhaust during the filling processes. No toxic gases will leave
the laser device. The halogen filter filling ratio is monitored by the laser
software. The filter should be exchanged after up to 30 gas fills or on a
yearly basis, whichever comes first.
At wavelengths less than 233 nm, nitrogen is required to purge the
beam path and optics modules.
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66 User Manual COMPex

 Gas Requirements

4.5.1 Gases Required

It is possible to operate the COMPex at different wavelengths if the

COMPex is prepared for multigas -operation.
Make sure that the appropriate gas cylinders are available.
For low duty cycle applications that consistently use the same laser
wavelength, a premix gas cylinder operation can be recommended. In
this case one cylinder of premix gas and another one with inert gas
(helium) for flushing is required.

Fluorine
(only required without the optional fluorine source)
Type of gas 5% F2 / 95 % He mixture
Purity of Helium 99.995 % or higher
Purity of Fluorine for excimer lasers
Pressure 3.5 to 5 bar abs.
Flow 0.3 to 3 l/s
RCS*) 10 l, 150 bar (2100 psi)

Fluorine (COMPex F2)

Type of gas 5% F2 / 95 % He mixture
Purity of Helium 99.995 % or higher
Purity of Fluorine for excimer lasers
Pressure 4.4 to 5.2 bar abs.
Flow 0.3 to 3 l/s
RCS*) 10 l, 150 bar (2100 psi)

Hydrogen chloride
(only required without the optional chlorine source)
Type of gas 5% HCl / 1 % H2 in He
Purity of the mixture 99.995 % or higher
Pressure regulator 3.5 to 5 bar abs.
Flow 0.3 to 3 l/s
RCS*) 10 l, 100 bar (1400 psi)

Argon
Purity 99.995 % or higher
Pressure regulator 3.5 to 5 bar abs.
Flow 0.8 to 3 l/s
A0303COMP

RCS*) 50 l, 200 bar (2800 psi)

Krypton
Purity 99.99 % or higher
Pressure regulator 3.5 to 5 bar abs.
Flow 0.8 to 3 l/s
RCS*) 10 l, 100 bar (1400 psi)

LAMBDA PHYSIK - 03/2003 67

SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

Xenon
Purity 99.99 % or higher
Pressure regulator 3.5 to 5 bar abs.
Flow 0.8 to 3 l/s
RCS*) 2.5 l, 50 bar (700 psi)

Neon
Purity 99.995 % or higher
Pressure regulator 3.5 to 5 bar abs.
Pressure regulator (for 6.5 to 7 bar abs.
optional halogen source
Flow 0.8 to 3 l/s
RCS*) 200 l, 200 bar (2800 psi)

Helium (flushing gas for the laser tube)

Purity 99.995 %
Pressure regulator 3.5 to 5 bar abs.
Pressure regulator (for 6.5 to 7 bar abs.
optional halogen source
Flow 0.8 to 3 l/s
RCS*) 200 l, 200 bar (2800 psi)

Nitrogen (purge gas for the beam path)

Purity 99.999 % or boil off
Pressure regulator 2 to 2.5 bar abs.
Pressure regulator (for 6.5 to 7 bar abs.
optional halogen source
Flow 1 to 12 l/s
RCS*) 50 l, 200 bar (2800 psi)

*) RCS = Recommended Cylinder Size

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68 User Manual COMPex

 Gas Requirements

4.5.2 Optimum Gas Mixtures

The gas mixtures described in this section are state of the art at the
given release date and may change due to new knowledge.
The gases are listed in the order in which they are charged.

CAUTION
Risk of soiling the tube!
Impurities from the gas cylinder walls can be washed out. Use the gas
cylinders with at least 5 bar (70 psi) remaining pressure.

Optimum Gas MIxtures (Release 01/2000)

COMPex Gas Mixture Partial Gas Pressure [%] Gas Port Total
Model (Wavelength) Pressure Pressure
[mbar] [mbar]
COMPex 102 ArF (193 nm) 100 F2/He 0.17/3.16 Halogen 3000
COMPex 110 160 Ar 5.33 Rare
2340 Ne 78.00 Buffer
400 He 13.33 Inert
KrF (248 nm) 80 F2/He 0.12/2.30 Halogen 3300
100 Kr 3.03 Rare
3120 Ne 94.55 Buffer
XeCl (308 nm) 80 HCl/H2/He 0.13/0.02/2.35 Halogen 3200
60 Xe 1.87 Rare
3060 Ne 95.63 Buffer
XeF (351 nm) 120 F2/He 0.18/3.46 Halogen 3300
15 Xe 0.45 Rare
3165 Ne 95.91 Buffer
COMPex F2 F2 (157 nm) 60 F2/He 0.1/1.9 Halogen 3000
2940 He 98 Inert
A0303COMP

LAMBDA PHYSIK - 03/2003 69

SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

Optimum Gas MIxtures (Release 01/2000)

COMPex Gas Mixture Partial Gas Pressure [%] Gas Port Total
Model (Wavelength) Pressure Pressure
[mbar] [mbar]
COMPex 201 ArF (193 nm) 100 F2/He 0.16/2.96 Halogen 3200
COMPex 205 200 Ar 6.25 Rare
2900 Ne 90.63 Buffer
KrF (248 nm) 60 F2/He 0.10/1.71 Halogen 3400
130 Kr 3.93 Rare
3210 Ne 94.26 Buffer
XeCl (308 nm) 60 HCl/H2/He 0.08/0.02/1.57 Halogen 3600
100 Xe 2.78 Rare
3440 Ne 95.55 Buffer
XeF (351 nm) 130 F2/He 0.20/3.74 Halogen 3300
15 Xe 0.45 Rare
2855 Ne 86.52 Buffer
300 He 9.09 Inert

4.5.3 Pressure Regulators

Pressure regulators are delivered by gas manufacturers. As a

minimum standard Lambda Physik recommends pressure regulators
which operate up to 5 bar (abs.). The joints for the gas lines must be
provided with Gyrolok fittings 6 mm diameter pipes. Stainless steel
regulators are required for halogen gases.

4.5.4 Gas Cabinets

Gas cylinders, especially those containing fluorine and hydrogen

chloride gas mixtures pose a safety hazard because of the risk of
leakage. In order to diminish this risk, safety gas cabinets are
available. Please contact gas manufacturers for further information.

CAUTION
Risk of soiling the laser tube by contaminated pipes!
Keep dust, humidity, oil or other pollutants off tubing. Operate the laser
device under clean conditions.
A0303COMP

Connections and tubing:

Gas Connections: 6 mm Gyrolok
Gas Lines: 316 L stainless steel, electropolished inside,
6 mm outer diameter, degreased
The halogen supply line from an external gas cylinder is
recommended to be a double wall tubing.
See Section 10.1 of this manual for gas flow diagrams.

70 User Manual COMPex

 Air Intake and Exhaust

4.6 Air Intake and Exhaust

The laser device has on central air exhaust. Under normal operating
conditions the exhaust does air does not include any toxic gases or
byproducts. Nevertheless, for certain failure scenarios the exhaust air
may include halogen gas or ozone in small concentrations.
Effective protection is only guaranteed if the hose leads to appropriate
ventilation.

WARNING
Risk of poisoning!
Lead laser and vacuum pump exhaust to an appropriate
ventilation system. Do not connect the exhaust to breathing air
systems (i.e. air conditioning or ventilating systems).

Specifications:
Air Flow approx. 200 m³/h (100 cfm)
Diameter 150 mm
Hose length 3 m max. If the distance
to the ventilation is more than 5 m, an
additional blower has to be installed.
Heat transfer < 1 kW
to exhaust

4.7 Beam Exit Position

The beam exit is on the left side of the laser when looking at the
service panel. The COMPex is equipped with height-adjustable feet,
so the beam exit can be adjusted from 378 mm to 418 mm in vertical
position.
The beam exit is shown in the layout diagrams given in Section 10 of
this manual.
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LAMBDA PHYSIK - 03/2003 71

SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

4.8 Environmental Conditions

This section describes recommended environmental conditions for
transport, storage and operation of the COMPex.

4.8.1 Transport and Storage Conditions

Temperature range -20 to +50 °C (-4 to 122 °F)

Max. temperature gradient 5 °C/h
Ambient air pressure 650 to 1070 mbar
Max. pressure gradient 75 mbar/h
Humidity < 70 % relative humidity (RH)
Max. allowed acceleration 1G
during transport

4.8.2 Operational Environmental Conditions

Ambient temperature 5 to 30 °C
Max. temperature gradient 5 °C/h
Altitude 0 to 2000 m above sea level
Max. atmospheric 75 mbar/h
pressure gradient
Humidity 30 to 70 % relative humidity (RH)
Cleanliness class 10,000

CAUTION
Risk of contaminating optical components!
The ambient air is to be free of dust, oil, organic particles, corroding
substances and photochemically decompositable or depositable
compounds. Protect the beam path and the laser optics with a
purgeable shield at critical environmental conditions.
Please contact Lambda Physik for more information.
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72 User Manual COMPex

 Vacuum Pump

4.9 Vacuum Pump

Type: Becker VTC 6/2
The vacuum pump is connected to the laser device with a 3 m supply
cable and does nor require an additional power supply.
For more information see the attached vacuum pump manual.

4.10 Halogen Filter

Type Standard
Supplier Lambda Physik AG
Hans-Böckler-Strasse 12
D-37079 Göttingen, Germany
Phone: +49 551 69 38-0
Fax: +49 551 68 69-1
Order No.: 261 068
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LAMBDA PHYSIK - 03/2003 73

SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES

A0303COMP

74 User Manual COMPex

 Transport

5 INSTALLATION
This chapter describes the installation of the laser device.
It must be read:

• prior to initial installation,

• after transportation,

• prior to re-installation after storing the laser device.

5.1 Transport
This section describes the eqipment delivered and how it shall be
unpacked and safely moved.

WARNING
Risk of injury or damage!
Failure to observe the transportation requirements and
restrictions in this section may result in injury to persons or
damage to equipment. Persons responsible for transporting the
system must ensure that all transport requirements are complied
with.

5.1.1 Safety

When moving the laser device and its components, always follow the
standard safety precautions and practices for the transportation and
handling of the heavy equipment.

WARNING
Risk of crushing!
The COMPex 100 series laser device together with its
components, accessories and packaging weighs 345 kg
(760.6 lb), the COMPex 200 series laser device together with its
packaging weighs 395 kg (870.8 lb).
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LAMBDA PHYSIK - 03/2003 75

INSTALLATION

CAUTION
Risk of damaging the laser device!
During transportation and installation, keep the laser device as
horizontal as possible. The laser device can be tilted max. 5° around
the beam axis and 20° longitudinally for a short period (see Figure 23).

max ± 5°

max ± 20°

Figure 23: Permitted tilting gradients

CAUTION
Risk of damaging laser device feet!
The COMPex laser device is to be transported carefully. Especially if
attached to the base plate of the rigid transport packaging avoid
sudden shocks and, if tilted, avoid vibrations.

5.1.2 Transport and Storage Conditions

Ensure that the following conditions are maintained while transporting

and storing the laser device:
Temperature range -20 to +50 °C (-4 to 122 °F)
(remove cooling water before
transport and for storing)
Max. temperature gradient 5 °C/h
A0303COMP

Ambient air pressure 650 to 1070 mbar

Max. pressure gradient 75 mbar/h
Humidity < 70 % relative humidity (RH)

76 User Manual COMPex

 Transport

5.1.3 Floor Loads

CAUTION
Risk of structural damage!
All floors an the proposed transport route or at the proposed storage/
installation location must be checked to ensure that they can
withstand the weight of the laser devcie and fork lift truck or similar
device (whatever used).

It is the responsibility of the customer to provide Lambda Physik and/or

the system manufacturer with:

• Accurate information regarding floor loading capabilities.

This information is necessary to determine the type of transportation
to be used.

• Elevator loading capacities

When elevator transport is intended, the loading capability of the
elevator must be verified.

5.1.3.1 Packaging Dimensions and Weight

Laser Device with Rigid Transport Packaging

Length 1820 mm (71.7 in)
Height 1030 mm (40.6 in)
Width 540 mm (21.3)
Weight
COMPex 100 series 345 kg (760.6 lb)
COMPex F2 series 365 kg (803.9)
COMPex 200 series 395 kg (870.8 lb)

Accessories (separately packed for COMPex 200 series)

Dimensions 660 mm × 520 mm × 430 mm
(26.0 in × 20.5 in × 16.9 in)
or 520 mm × 520 mm × 470 mm
(20.5 in × 20.5 in × 18.5 in)
Weight depending on configuration
A0303COMP

LAMBDA PHYSIK - 03/2003 77

INSTALLATION

Laser Device without Rigid Transport Packaging (approx.)

COMPex 100 series

Length 1300 mm (51.2 in)
Height 795 mm (31.3 in)
Width 385 mm (15.2 in)
Weight 250 kg (551.2 lb)

COMPex F2 series
Length 1300 mm (51.2 in)
Height 795 mm (31.3 in)
Width 385 mm (15.2 in)
Weight 270 kg (594.7 lb)

COMPex 200 series

Length 1700 mm (66.9 in)
Height 795 mm (31.3 in)
Width 385 mm (15.2 in)
Weight 325 kg (716.5 lb)

Vacuum Pump
Length 230 mm (9.1 in)
Height without halogen filter 450 mm (17.7 in)
Height with halogen filter 530 mm (20.9 in)
Width 240 mm (9.4 in)
Weight 23 kg (50.7 lb)
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78 User Manual COMPex

 Transport

5.1.4 Transport Packaging

This section describes the means of packaging of the COMPex laser

devices to ensure safe shipment and delivery in the required condition.

NOTE
Always retain the transport packaging to ensure optimum protection of
the laser device during sub sequent shipment.

The transport packaging of the COMPex 100 series laser devices

consists of a single transport container. This contains the laser device
together with all accessories and components removed from the laser
device for transport.
The accessories and components of the COMPex 200 series laser
devices are packed in a seperate box.
The transport packaging of the laser device is in two-stages:

• the rigid transport packaging

• the anti-static (polyethylene) inner cover.

The rigid transport packaging (see Figure 24) fully encapsulates the
laser devices and inner cover. It consists of a plywood base pallet (B)
and plywood upper panels (A) at the sides, front rear and top.

Figure 24: Rigid transport packaging

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LAMBDA PHYSIK - 03/2003 79

INSTALLATION

Placed on the base pallet are two shock absorbing buffers (see Figure
25). When the laser device feet are placed in the locating holes of the
buffers (A), the laser device is secured in position with rigid packaging
closed.

Figure 25: Shock absorbing buffers

The laser device is to be stored in the rigid transport packaging.

5.1.5 Transport / Lifting with Rigid Packaging

WARNING
Risk of crushing!
The COMPex 100 series laser device together with its
accessories and packaging weighs 345 kg (760.6 lb), the
COMPex 200 series laser device together with its packaging
weighs 395 kg (870.8 lb).
Prevent tipping or dropping during lifting and transportation.

A suitable for lift truck or similar device is required to lift the laser
device. Ensure that the fork length and loading capacity is sufficient to
safely lift the laser device in its packaging.

NOTE
For information regarding the size and weigth of the laser device in its
packaging see Section 5.1.3.1 on page 77.

The laser device can be lifted longitudinally or from the side. Set the
forks as far apart as possible to safely lift the laser device.
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 Transport

5.1.6 Remove Rigid Packaging

Purpose
Remove the top and side panels from the rigid transport packaging.

NOTE
At the end of this procedure the laser device remains attached to the
base pallet and is protected by the inner cover.

Tools and Materials

• suitable fork-lift truck

• clip removal tool (provided)

• screwdriver for removal of clip removal tool

Preparation
1. Using the fork lift truck or appropriate device, move the laser device
to the location whereit is to be unpacked.
2. Set down the laser device in the unpacking location.

NOTE
The original packaging is needed to re-ship the laser device. Store the
removed packaging in such a way that no parts are lost or damaged.

3. Unscrew and remove the clip removal tool (see Figure 26, A) from
the rigid transport packaging.

Figure 26: Location of clip removal tool

A0303COMP

CAUTION
Risk on injury caused by incorrect use of the clip removal tool!
The transport packaging clips are under tension. Do not use excess
force to remove. While levering off, use the other hand to restrain
movement.

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INSTALLATION

4. Working from the top downwards, remove the clips from the rigid
transport packaging. Push the clip removal tool into the recess on
the clip, press against the clip to control movement and lever off
(see Figure 27).

Figure 27: Removing the clips

5. When the corresponding clips have been removed, remove the top,
front, rear and side panels of the packaging.

Storing the Transport Packaging

6. Stack the disassembled panels of the rigid transport packaging and
accessory packaging onto the base pallet.

NOTE
When stacking, ensure that the outer cover does not become
contaminated or damaged and that the inside surfaces of the panels
cannot become contaminated.

5.1.7 Transport / Lifting without Rigid Packaging

NOTE
For information regarding the size of the laser device, see Section
5.1.3.1 on page 77.

WARNING
Risk of crushing!
The COMPex 100 series laser device together with its
accessories and packaging weighs 345 kg (760.6 lb),
the COMPex F2 series laser device together with its accessories
and packaging weighs 365 kg (803.9 lb) and the COMPex 200
A0303COMP

series laser device together with its packaging weighs 395 kg

(870.8 lb).
Prevent tipping or dropping during lifting and transportation.

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 Transport

CAUTION
Risk of soiling or damaging the laser optics!
To avoid the formation of condensed water, ensure that the max.
permissible temperature gradient (5 °C/h) is maintained while moving
the laser device from the storage area.

Ensure that all passageways, corridors and access points have

sufficient clearances. Pay particular attention to the clearences
required to turn the laser device.
A suitable fork lift truck or similar device is required to lift the laser
device. Ensure that the fork length and/or the loading capacity are
sufficient to safely lift the laser device.
When using a fork lift truck, always transport or lift the laser device
together with the base pallet.
When using a crane, position the lifting harness or belt as near to the
laser device’s feet as possible.

CAUTION
Risk of damaging the laser device!
incorrect lifting can cause serious damage. Use lifting points as far
apart as possible to safely lift the laser device.

5.1.8 Remove Anti-Static Inner Cover

Purpose
Remove the anti-static inner cover from the laser device and unpack
the accessories.

Tools and Materials

• knife for cutting sealing tape

Preparation
1. Move the laser device and accessories to the installation area.

Removing the Inner Covers

A0303COMP

NOTE
The original packaging is needed to re-ship the laser device. Store the
removed packaging in such a way that no parts are lost or damaged.

2. Remove the tape that seals the anti-static inner cover onto the laser
device and lift the anti-static inner cover off the laser device.
3. Take the accessories out of the packaging and clean the
accessories if required.

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INSTALLATION

5.2 Transport Locks

The COMPex is delivered without any transport locks.

5.3 Install Remote Socket

The remote socket is on the rearside of the laser device, marked with
“REMOTE CONTROL”. It provides the connections for the door
interlock switch and the laser warning light (according to the
international standard IEC 60825).

Installing the Door Interlock Switch

1. Connect pins 2 and 3 (e.g. via a switch that opens when a door is
opened, thus shutting down the laser and preventing accidental
beam contact).

Installing the Laser Warning Lamp (100 mA)

2. Connect pins 1 and 4 (e.g. with a laser radiation lamp that warns
upon entering a room that the laser in on).

NOTE
The laser can only operate when pins 2 and 3 are connected (with a
closed switch, a short-circuit plug, etc.).

Installation may vary due to local requirements.

5.4 Connect Water Lines (COMPex 110,

COMPex F2 and COMPex 205 only)
Due to the increased power of the COMPex 110 and the
COMPex 205, they cannot be air-cooled only and therefore require a
water cooling supply, when they are continuously operated at
repetition rates higher than 20 Hz.
A0303COMP

Water Supply Requirements

Input temperature 5 °C to 20 °C, for 100 % duty cycle
Maximum pressure < 4 bar abs.
Flow rate 1 l/min to 5 l/min
depending on the water temperature

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 Connect Water Lines (COMPex 110, COMPex F2 and COMPex 205 only)

Tools and Materials

• 2 water hoses (delivered with the COMPex)

• 4 hose clamps (delivered with the COMPex)

• hose cutter

CAUTION
Risk of laser tube corrosion!
Do not use deionized or distilled water.

NOTE
Particles in the cooling water can clog the cooling cycle. We strongly
recommend the use of a particle filter.

NOTE
During intensive use of the laser device, more than 1000 liters of
cooling water are consumed per day. For reasons of cost and
environment protection we recommend the use of an external cooling
circuit and an additional water chiller.

There are three types of water line connectors (see Figure 28). The
installation is therefore described in general.
A0303COMP

Figure 28: Fittings for water lines

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INSTALLATION

Installing the Water Lines

1. Mount the first water hose to the connector on the laser device
marked with “WATER IN”.
2. Connect the other end of the hose to the water source.
3. Mount the second water hose to the connector the laser device
marked with “WATER OUT”.
4. Connect the other end of the hose to the building drain.
5. Turn on the water supply and adjust within a range of 1 l/min to
5 l/min.
6. Check that there are no water leaks or blockages.
For a full adjustment of the cooling water see Section 6.2.6 on page
104.

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 Electrical Line Installation

5.5 Electrical Line Installation

Electrical installation of the COMPex consists of the following steps:
1. Connection of the vacuum pump to the laser device.
2. Connection of the handheld keypad to the laser device.
3. Connection of a remote computer to the laser device (when used).
4. Connection of the laser device to the mains power supply.

WARNING
Risk of electrocution!
Working on the electrical system and equipment of the COMPex
must be carried out only by skilled electricians or by instructed
persons under the supervision and guidance of a skilled
electrician and in accordance with electrical engineering rules
and regulations.

A mains power supply outet is required for the laser device (and for the
vacuum pump). Note the power consumption of these devices:
COMPex 102, 201: 1.5 kVA max.
COMPex 110, 120, 205, F2: 3.0 kVA max.

NOTE
The power supply line of the laser device is to be protected through an
approved and correctly rated circuit interruption device, in accordance
with valid national and local electrical standards.

5.5.1 Connect the Vacuum Pump

Please consult the operating instructions for the vacuum pump

attached to this manual. The vacuum pump must be connected to the
socket on the rear side of the laser device marked with “POWER
VACUUM PUMP”.
A0303COMP

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INSTALLATION

5.5.2 Connect the Handheld Keypad

The handheld keypad is an easy and comfortable way to use the

COMPex without an additional PC (remote PC).

CAUTION
Risk of data loss when disconnecting the handheld keypad!
The laser device must be switched off before disconnecting the
handheld keypad from the laser device. Otherwise the menu
parameters can be lost.

Tools and Materials

• Handheld keypad

• RS232 cable

• Appropriate screwdriver for the RS232 plugs

Connecting the Handheld Keypad

1. Switch off the laser device.
2. Plug the RS232 cable into the RS232 port on the laser device (see
Figure 29).

Figure 29: Connecting the RS232 plug to the laser device

3. Fasten the screws of the plug.

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 Electrical Line Installation

4. Plug in the other side of the cable into the handheld keypad (see
Figure 30 on page 89).

Figure 30: Connecting the RS232 plug to the keypad

5. Fasten the screws of the plug.

A0303COMP

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INSTALLATION

5.5.3 Connect a Remote PC

A remote PC can only be connected when the handheld keypad is

disconnected from the laser device.
The remote PC is used to run the COMPex with a program of your
need that uses the COMPex remote software.

Tools and Materials

• RS232C wire with 25 pole D-type connector of the following

specifications (at laser side):

PIN SIGNAL Specification Description

2 TXD O, RS232 Transmit Data
3 RXD I, RS232 Receive Data
7 GND - Signal Ground

• Appropriate screwdriver for the RS232 plugs

Connecting the Remote PC to the Laser Device

1. Connect the RS232 cable to the laser devices RS232 port (see
Figure 29 on page 88).
2. Fasten the plugs screws at the port.
3. Connect the RS232 cable to a serial port of the Remote PC.
4. Fasten the plugs screws at the port.
The remote software is detected automatically by the communication
interface within the laser device.

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 Electrical Line Installation

5.5.4 Connect the Main Power Supply Line

The COMPex must be connected with a General Power Outlet.

WARNING
Risk of electrocution!
Working on the electrical system and equipment of the COMPex
must be carried out only by skilled electricians or by instructed
persons under the supervision and guidance of a skilled
electrician and in accordance with electrical engineering rules
and regulations.

Tools and Materials

• Wire cutter and stripper

• If used, plug for your local mains socket

(The mains plug (30 A) is to be approved in accordance with valid
national and local electrical standards!

• Appropriate screwdrivers for the plugs used

Connecting the Laser Device to the Mains Power Supply

CAUTION
Risk of damaging the laser device!
Ensure that the laser device is designed for your local voltage and
frequency. You may know this by the laser identification plate on the
rear side of the laser device (lower left corner).

1. Switch the key switch to OFF.

2. Switch the main switch to OFF.
3. Blank the ends of the power supply wire (attached to the laser
device).
4. Connect the blanked ends to the plug or the General Power Outlet
(the colors of the cables depend on the power supply version):
black or brown: phase
white or blue: neutral
green or yellow/green: ground

5. If used, insert the prepared laser devices’ plug into the mains
socket.
A0303COMP

The COMPex is now prepared to be supplied with current.

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INSTALLATION

5.6 Exhaust Lines Installation

The COMPex has two exhaust lines:
– the exhaust of the laser device housing,
– the laser tube exhaust line (including the vacuum pump and the
halogen filter, which is also described in this chapter).

WARNING
Risk of toxic hazard!
Ensure that a halogen sensor and an evacuating system are
installed in the area of the vacuum pump to avoid hazardous
halogen gas concentrations in case of gas leaks during laser
tube evacuation.

5.6.1 Install Exhaust Line of Laser Device Housing

To prevent poisoning hazards, all gas from the laser must be

completely removed, even when the gas escapes as a result of an
accident.

Tools and Materials

• 4 mm Allen key (from service case)

• Exhaust line assembly (delivered with the COMPex)

• Connections to your own ventilation output (minimum internal

diameter 150 mm, flow min. 200 m³/h)

• Additional blower (when exhaust is longer than 5 m)

• Additional exhaust pipe (when exhaust line exceeds 5 m)

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92 User Manual COMPex

 Exhaust Lines Installation

Installing the Exhaust Line of the Laser Device Housing

1. Remove the two 4 mm allen screws at the exhaust fan outlet on the
rear side of the laser device (see Figure 31 on page 93).
2. Connect the exhaust pipe to the exhaust fan outlet using the (just
removed) two 4 mm allen screws.

Figure 31: Loosen the exhaust fan outlet

WARNING
Risk of toxic hazard!
Lead laser and vacuum pump exhaust hose to an appropriate
ventilation system.
Do not connect the exhaust to breathing air systems (i.e. air
conditioning or ventilating systems).

3. Connect the other end to the exhaust tube to a suitable ventilation

output.
4. Check that the air input filters on the front of the laser are fitted
properly and are not obstructed.
5. Switch on the laser main switch.
6. Check that the exhaust fan, mounted on the top rear of the laser
device, is working and sucking air out of the machine.
7. Switch off the laser main switch.
8. Check that there are no leaks around the exhaust pipe clamp.
Possible contamination within the laser device housing will now be
directed into your exhaust duct system.
A0303COMP

5.6.2 Install Laser Tube Exhaust Line

(Including the Vacuum Pump)

To remove gas from the laser tube, the tube has to be evacuated. This
gas contains toxic halogens, which are filtered out of the exhaust gas
by a halogen filter. Both, the vacuum pump and the halogen filter have
to be assemled.

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INSTALLATION

Tools and Materials

• Vacuum pump (delivered with the COMPex)

• Vacuum hose (delivered with the COMPex)

• Gas exhaust hose (¾” flexible hose)

• 36 mm wrench (from service case)

• 19 mm wrench (from service case)

• 6 mm allen key

Installing the Laser Tube Exhaust Line

Consult the vacuum pump manual (attached to this manual) for a basic
description of the installation of the vacuum pump and basic function
tests.

NOTE
While mounting the vacuum pump and halogen filter, five plugs are to
be removed. Keep these plugs in the service case for future use.

1. Remove the plug from the vacuum pump (see Figure 32)

Figure 32: Remove the plug from the vacuum pump

2. Remove the plastic plug from the halogen filter.

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 Exhaust Lines Installation

3. Set two of the halogen filter threaded rods into the anti-torsion fork
with the arrow on the filter pointing downwards (see Figure 33).

Figure 33: Inserting the halogen filter

4. (When anti-torsion fork is not properly adjusted) Adjust anti-torsion

fork with 6 mm allen key at the adjustment screw (see Figure 34).

Figure 34: Adjusting the anti-torsion fork

5. Tighten the halogen filter at the vacuum pump using the 36 mm

wrench.
6. Remove the center plug on top of the halogen filter.
7. Mount the vacuum hose at the halogen filter using the 19 mm
wrench.
8. Remove the plastic plug from the laser device connection marked
“VACUUM PUMP”.
A0303COMP

9. Mount the (white) vacuum hose to the laser device connection

using the 19 mm wrench.
10. Remove the plug from the vacuum pump outlet socket.
11. Mount the ¾” gas exhaust hose to the vacuum pump outlet socket.

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INSTALLATION

WARNING
Risk of toxic hazard!
Lead laser and vacuum pump exhaust hose to an appropriate
ventilation system.
Do not connect the exhaust to breathing air systems (i.e. air
conditioning or ventilating systems).

12. Connect the gas exhaust hose to a suitable ventilation output.

The exhaust line installation is now complete.

5.7 Install Gas Lines

The laser devices’ gas solenoid valves are installed to allow gas
supply from seperate gas cylinders. Additionally premix gas cylinders
and/or the optional halogen source can be used. Thus, the gas line
installation varies:

Configuration Gas Types Connection

Single gas Halogen Halogen
Helium Inert
Neon Buffer
as specified Rare
Premix and helium Premix Buffer (standard)
Helium Inert
Premix, helium and Premix Buffer
halogen source
Halogen source Halogen
Helium Inert
A0303COMP

96 User Manual COMPex

 Install Gas Lines

To obtain optimum laser performance, observe the following

instructions for the gas line installation:

• Only use gases specified in Section 4.5 on page 66.

• Only use materials specified in Section 4.5.4 on page 70. This

prevents impurities from entering the gas system.

• Store gas cylinders in a dry cabinet to avoid moisture.

• Never expose the halogen line to moisture while it contains halogen

or traces of halogen because it will corrode immediately.

• Avoid long and complicated line routings. This a source of impurities

entering the system.

• Only use clean and oil-free leak-proof fittings throughout the gas
line. Avoid complicated fittings.

• Carefully check for leaks.

• Never use gas lines that have been used for other gases.

NOTE
All unused connections must be blanked off with stainless steel plugs
delivered with the laser device.

Gas Line Requirements

Gas Connections: 6 mm Gyrolok
Gas Lines: Stainless steel 316L, electro polished
The fluorine supply line is recommended
to be a double-wall tubing.

Tools and Materials

• Gas supply lines (stainless steel 6 x 4) with Gyrolok connectors

• 9/16” wrench (from service case)

• 13 mm wrench (from service case)

• Tools for shaping and cutting stainless steel tubing

NOTE
Use only gas cylinders with sufficient pressure (see Section 4.5.2 on
page 69).

Installing the Gas Lines

A0303COMP

NOTE
See chapter 10 of this manual for a gas flow diagram.

1. Check that pressure regulators are connected to the gas cylinders.

2. Check that the gas supply lines are laid and connected to the
pressure regulators (or a halogen source).

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INSTALLATION

CAUTION
Risk of damaging gas connectors!
Cut stainless steel only with an appropriate tool. Do not ose a saw: Do
not use lubricants.

3. Fit each line with a 6 mm Gyrolok fitting.

4. Check that all gas supply valves are closed.
5. Remove the blanking plug from the appropriate gas connector on
the laser device.

NOTE
Keep the blanking plug in the service case for further use.

6. Fit the gas line to the appropriate connector using the Gyrolok
fittings.
7. Tighten the Gyrolok fittings using the 9/16” wrench and the 13 mm
wrench.
8. Repeat steps 5 to 7 until all supply lines are connected.

Final Checks
9. Check that all connections are properly matched and sealed tightly.
10. Perform a leak test on all newly fitted lines according to Section
9.7.1 on page 231 of this manual.

A0303COMP

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 6 OPERATION
This chapter contains information on how to use the COMPex with the
handheld keypad coupled with the local software part of the
communication interface. All maintenance instructions are described
separately in Section 7.

NOTE
The remote software is described in Section 8.
A0303COMP

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OPERATION

6.1 Overview of this Section

The individual buttons are explained on the pages given in this
overview.

1 2 3 4 5 6 7 8 9 10

COUNTS GAS MENU

RUN TRIGGER REPRATE SEL NEW SEL F1 F6

MODE FILL
STOP EXT/INT

FLUSH F7
F2
7 8 9 HV RESET LINE RESET

EGY PURGE
4 5 6 EGY CAL LINE
F3 F8

PURGE F4 F9
1 2 3 RESERVOIR

0 , CLEAR ENTER EXE BREAK

16 15 14 13 12 11
Figure 35: Overview of the handheld keypad

1 Start / stop laser operation page 103

2 Trigger mode page 109
3 Running mode page 112
4 Repetition rate page 109
5 Select counter page 115
6 Reset user counter page 116
7 Select gas menu page 106
8 Help not described
9 Emergeny Fill (manual fill with page 116
inert gas
10 Gas Mode page 107
11 Charge on demand page 114
12 Temperature control page 118
13 Reset gas menu page 107
14 Set beam energy page 112
15 Set HV constant page 113
A0303COMP

NOTE
A) The function keys <F2> and <F9> are for service only and
therefore protected with a password.
B) To abort software related procedures without saving changes,
press <BREAK>.

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 Fundamental Laser Operations

6.2 Fundamental Laser Operations

Please note the difference between “laser device” and “laser” (see
Section 1.2 on page 3).

6.2.1 Switch on the Laser Device

After the system is booted, a self-test is automatically carried out in

order to test the data ring and the modules for error-free interaction.
The serial structure of the data ring requires all modules working
properly and the controller receiving a correct resonse for a
transmitted signal. If this does not occur, the controller sends a
message: “FATAL ERROR; DATA CONFLICT; adress”. In this
situation it is not possible for the controller to localize the error.
To avoid provoking any unwanted results, the light on the data ring is
switched off by the controller. In order to localize a potentially defective
module, it is recommended to cold start the control processor again,
as in this case light is transmitted continuously from the interface to the
controller. This light can now simply be traced from module to module.
During the selftest, the error-free function of the watchdogs is
monitored and displayed on the screen.
Starting the laser device means:
– starting the 24 V circuit,
– checking the data ring and laser modules with a self-test,
– warming up the thyratron.
The last two steps are performed automatically.

Tools and Materials

• None

Preparation

WARNING
Risk of serious injury!
Ensure that only authorized and instructed personnel are
operating the laser.
A0303COMP

1. Ensure the installation has been completed.

2. Ensure a leak test has been performed.
3. Check the beam path (see Section 6.2.5 on page 104).
4. Close all gas cylinder valves.
5. Close all pressure regulators in the gas lines.
6. Open gas cylinder valves.

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OPERATION

7. Set pressure regulators to max. 4 bar (abs.).

8. Observe the maintenance schedule.

Switching on the Laser Device

9. (COMPex 110 and 205 only)
Switch on the cooling water (for adjustment, see Section 6.2.6 on
page 104).

A B C D

MainS POWER ON
F1 F3 F5

KEY SWITCH CONTROL LINE

SUPPLY F2 F4 F6
24V AC

Figure 36: Power switches and lamps on the laser device

10. Turn the key-switch from “0” to “I” (Figure 36, A).
11. Turn the main switch (C) from OFF to ON.
12. The control supply lamp and the power on lamp (B and D) are now
illuminated.
The laser device performs a self-test.
(In case “FATAL ERROR” is displayed in the second line during the
self-test, see Section 9.2 on page 211.)
After a successful self-test, the laser device warms up the thyratron for
eight minutes, displaying the message “WARMUP xx min” (“xx” is the
remaining time in minutes).

NOTE
During the warm-up period, the laser is off but can perform commands
that do not require laser beam generation.

The warm-up period can be used to perform maintenance actions:

– check parameter settings (see Section 6.2.7 on page 105) or
– flush the lines (see Section 7.4.1 on page 123) or
A0303COMP

– perform a new gas fill (see Section 7.4.3 on page 126).

After warm-up, the laser is ready for laser operation (see Section
6.2.2).

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 Fundamental Laser Operations

6.2.2 Start Laser Operation

Tools and Materials

• Protective eyeware

Starting Laser Operation

NOTE
Don’t start laser operation at max. high voltage level. The max. HV
value should be set only after a few minutes of laser operation (see
Section 6.5.3 on page 113).

1. Open the beam shutter.

2. Press <RUN/STOP>.
The laser now needs a few seconds to initialize the power supply
before emitting laser light with the given repetition rate. The repetition
rate can be recognized by the clicking noises: the higher the repetition
rate, the quicker the clicking.

6.2.3 Stop Laser Operation

Tools and Materials

• Protective eyewear

Stopping Laser Operation

1. Press <BREAK> twice.
2. Close the beam shutter.

NOTE
The button <RUN/STOP> can also be used, but it fails to stop the
laser when operating within a command that requires input.

6.2.4 Switch off the Laser Device

Tools and Materials

• None
A0303COMP

Switching Off the Laser Device

1. Turn the main switch to OFF.
2. Turn the key switch to “0”.

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OPERATION

6.2.5 Check the Beam Path

WARNING
Risk of serious injury!
Keep the beam path free of reflective objects.
Shield the laser beam.
Do not wear any reflectives (like rings, watches, etc.).
Read safety instructions carefully before running the laser.

Ensure that nobody accidentally looks into or touches the laser beam
or reflections of the laser light.

6.2.6 Adjust the Cooling Water Flow Rate

(COMPex 110 and 205 only)

The cooling water adjustment depends on the current laser device

configuration:

6.2.6.1 Laser Device with Optional Temperature Control

Tools and Materials

• None

Adjust the Cooling Water Flow Rate

1. Open the cooling water valve.
The temperature control adjusts the flow rate on its own.

6.2.6.2 Laser Device without Temperature Control

Tools and Materials

• Thermometer, scaled from 0 °C to 50 °C (32 °F to 122 °F)

Adjusting the Cooling Water Flow Rate

1. Open the cooling water valve.
A0303COMP

2. Switch on the laser device.

3. Start laser operation for about 1000 shots to warm up the laser
tube.
4. Measure the water outlet temperature. It must be within 25 °C to
30 °C (77 °F to 86 °F). This results in a laser tube temperature of
30 °C to 38 °C (86 °F to 100 °F).
5. When the water temperature is found to be below or above the
temperature range indicated in step 4, adjust the water flow.

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 Fundamental Laser Operations

6. Stop laser operation.

7. Switch off the laser device.

6.2.7 Check Parameter Settings

The actual settings of the COMPex main parameters are displayed as

follows:

1 2 3 4 5
6

MODE: HV 10 Hz 28.0 kV 0 mJ 3030 mbar

> KrF
Figure 37: Parameter settings display

1 Running mode see Section 6.5

2 Repetition rate see Section 6.4.2
3 Charging Voltage see Section 2.6.2
4 - (if HV const. is selected) actual value see Section 2.6.2
measured by the Energy Monitor
- (otherwise) preset EGY const. value see Section 6.5.2
5 Laser tube pressure --
6 Excimer gas (gas menu) --
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OPERATION

6.3 Gas Menu

Besides other data, the gas menu contains all partial gas pressures.
Some lasers only have one gas menu. If your laser is designed to run
with different gas mixtures the required gas menu must be selected.
The laser saves this selection even after being switched off.

6.3.1 Select the Gas Menu

Select the gas menu to change the excimer gas. The gas menu
displays the following parameters:
– menu number,
– gas mixture,
– partial pressures (step by step).

Tools and Materials

• None

Preconditions

• Laser in Stand-by mode

Selecting a Gas Menu

1. Press <BREAK> twice to stop laser operation.
2. Press the MENU button <SEL>.
In the second line of the handheld keypad a short-cut of the present
menu is displayed.
3. Press the left or right cursor to select the number of the gas menu.
4. Press <ENTER> to confirm.
5. Press <ENTER> for next partial pressure.

NOTE
The factory settings of the partial pressures are optimized according to
state-of-the-art. We strongly recommend that settings are only
changed when Lambda gas specifications are changed. Reset the gas
menu to re-obtain the factory setting (see Section 6.3.2).

6. If needed, type new partial pressure value using the numerical

A0303COMP

keys.
The limit values of the partial pressures are ± 20% of the partial
pressures of the factory settings.
7. Repeat steps 5 and 6 for the next gas component.
8. Press <ENTER> to confirm the gas menu.
The laser performs the next new gas fill with the new gas menu data.

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 Gas Menu

6.3.2 Reset the Gas Menu to Factory Settings

The COMPex allows resetting of all gas menus to the factory settings.
When resetting the following values are affected:
– partial pressures,
– gas mode,
– repetition rate,
– energy filter.

Tools and Materials

• None

Preconditions

• Laser device switched on

NOTE
If the laser is in OFF mode, this command is only available twice.

Resetting the Gas Menus

1. Press <BREAK> twice to stop laser operation.
2. Press the MENU button <RESET>.
3. Press <EXE> for resetting to default.
The gas menu is now set to the factory settings.

6.3.3 Select the Gas Mode

This function allows selection of the gas mode:

– Single gas mode
All gas components are connected as single gas cylinders; the
partial pressures are mixed by laser control.
– Premix gas mode
All gas components are premixed in one gas cylinder.
When the factory setting is PREMIX, it may be impossible to choose
SINGLE GASES and vice versa. This depends only on the gas menu.
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NOTE
A) Unless other arrangements have been mage with Lambda Physik,
apremix cylinder must be connected to the BUFFER gas inlet and a
helium cylinder to the INERT gas inlet. All other connections must be
blanked off with stain less steel plugs delivered with the laser device.
B) When resetting the gas menu, the gas mode is reset to factory
settings too.

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OPERATION

Tools and Materials

• None

Preconditions

• Laser in Off mode

Selecting the Gas Mode

1. Press >BREAK> twice to stop laser operation.
2. Press function button <F8>.
3. Press cursor left or right to select the gas mode.
4. Press <ENTER> to confirm.

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 Change Triggering

6.4 Change Triggering

To “trigger” the laser means to cause it to emit a single laser pulse.
Two trigger modes are possible:
– Internal trigger
The laser pulses are triggered by the laser’s own trigger generator.
– External trigger
The laser pulses are triggered by an external trigger signal via the
Ext. Trig. socket at the rear of the COMPex (for specifications of the
signal see Section 4.3.4 on page 64).

6.4.1 Change the Trigger Mode

To switch between internal and external triggering the trigger mode

must be changed.

Tools and Materials

• None

Preconditions

• Laser device switched on

Changing the Trigger Mode

1. Press <TRIGGER INT/EXT>.
2. Press cursor left or right to select the trigger mode.
3. Press <ENTER> to confirm.
The current trigger mode is displayed.
4. Press <ENTER> to quit.

6.4.2 Change the Repetition Rate

The repetition rate determines the number of laser pulses per second.
The repetition rate is given in Hertz (Hz), which is 1/s.
The minimum repetition rate is 1 Hz. The maximum repetition rate
depends on the laser type noted on your laser test sheet. Only integer
numbers are accepted.
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NOTE
Due to the power range limits of the power supply, some laser types
do not support maximum repetition rate with HVmax.

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OPERATION

Tools and Materials

• None

Preconditions

• Laser device switched on

Entering the Repetition Rate

1. Press <REPRATE>.
2. Type in the new repetition rate using the numerical buttons.
3. Press <ENTER> to confirm.
The new value is displayed in the display’s first line.

NOTE
An acoustic signal warns the user of out-of-range input. The last
acceptable value is retained.

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 Running Modes

6.5 Running Modes

Even in a well designed and passivated excimer laser the laser gas
degrades due to slow generation of impurities during laser operation.
Most of these impurities are removed by the built-in electrostatic filter.
Nevertheless, the gas quality continuously degrades which affects the
output parameters of the laser device. To compensate for this effect,
the COMPex can be operated in three different running modes (see
also Section 2.6.2 on page 25):
– Energy Constant Mode with Partial Gas Replacement (EGY PGR)
– Energy Constant Mode, no Partial Gas Replacement (EGY NGR)
– High Voltage Constant Mode (HV)

CAUTION
Risk of endangering the working application!
While a Partial Gas Replacement (EGY PGR) is performed, pulse
energy may fluctuate more strongly than normal. Ensure that this
effect does not affect your working application.

Energy Constant Mode with Partial Gas Replacement (EGY PGR)

The laser keeps the output energy of the laser pulses constant by
increasing the charging voltage HV during operation.
If the charging voltage exceeds the replacement value HVrepl and
halogen injections (HI’s) were not successful, a partial gas
replacement takes place (see also flow diagram, page 29). This value
is predetermined by the gas menu (see Section 6.3 on page 106). Due
to the better gas quality with partial gas replacement fluctuations of the
output energy (peak-to-peak-fluctuations) may occur.
The EGY PGR shall be used
– for precise beam energy with peak-to-peak fluctuations of beam
energy allowed.

Energy Constant Mode, no Partial Gas Replacement (EGY NGR)

The laser keeps the output energy of the laser pulses constant by
increasing the charging voltage HV.
There will be a warning but no gas replacement if charging voltage
exceeds the treshold limit value voltage HVrepl.
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The EGY NGR mode shall be used

– for precise beam energy with no peak-to-peak fluctuations allowed,
– if some gases are currently not connected to the laser device,
– when using the premix gas supply.

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OPERATION

High Voltage Constant Mode (HV)

The laser keeps the charging voltage constant and therefore the beam
energy slowly decreases. The beam energy in HV Constant Mode with
a new fill is up to 40 % higher than in any EGY mode.
The HV mode shall be used
– to apply maximum beam energy for a short time,
– if precise beam energy is not necessary, especially for service
purposes.

NOTE
The replacement value HVrepl can be obtained by pressing the <HV>
button while the laser is in Energy Constant Mode (see Section 2.6.2
on page 25).

6.5.1 Select the Running Mode

The current running mode is displayed in the upper left corner of the
handheld keypad display.

Tools and Materials

• None

Preconditions

• Laser device switched on

Selecting the Running Mode

1. Press <MODE>.
2. Press left or right cursor to select the required running mode.
3. Press <ENTER> to confirm.
The new mode is displayed in the upper left corner of the display.

NOTE
The message “PRESET ENERGY TOO HIGH” indicates,that a new
gas fill is needed (see Section 7.4.3 on page 126).

6.5.2 Adjust the Energy Constant (EGY) Mode

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In the Energy Constant (EGY) Modes the laser keeps the beam
energy constant. The value for the beam energy to be stabilized for
has to be entered manually. The range of energy values possible is
predetermined by the gas menu (see Section 6.3 on page 106).

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 Running Modes

Tools and Materials

• None

Preconditions

• Laser is running in Energy Constant mode

Entering a Beam Energy Value

1. Press <EGY>.
2. Enter a new beam energy value (in mJ) by using the numerical
buttons.
3. Press <ENTER> to confirm the value.
The new value is displayed in the first line of the handheld keypad
display.

NOTE
An acoustic signal warns the user of out-of-range input. The last
acceptable value is retained.

6.5.3 Adjust the High Voltage Constant (HV) Mode

In High Voltage Constant (HV) Mode the laser keeps the charging
voltage HV constant (see Section 2.6.2 on page 25). The minimum
and maximum high voltage values are specified in the gas menu (see
Section 6.3 on page 106). The constant charging voltage (HV
Constant Value) must be within this range.

NOTE
If the current running mode is one of the Energy Constant Modes
(EGY), the button <HV> can be pressed to display the replacement
value for partial gas replacement HVrepl (see Section 2.6.2 on page
25).

Tools and Materials

• None

Preconditions

• Laser running in HV mode

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Adjusting the HV Constant Mode

NOTE
Due to the power range limits of the power supply, some laser types
do not support maximum repetition rate with HVmax.

1. Press <HV>.
2. Type the new HV Constant value using the numerical buttons.

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OPERATION

3. Press <ENTER> to confirm the choice.

The new HV Constant Value is indicated on the handheld keypad
display.

NOTE
An acoustic signal warns the user of out-of-range input. The last
acceptable value is retained.

6.5.4 Choose Charge On Demand (COD)

NOTE
This function is only available, if the “Charge On Demand” is built-in.

This function toggles between normal charging and Charge On

Demand (COD).
Normally the COMPex laser device is used to emit laser pulses
continuously. When the emission of laser pulses is needed in irregular
intervals or the repetition rate is very low (e.g. 10 Hz or lower) the
storage capacitors remain charged up during the stand-by interval
between the laser pulses. In these stand-by intervals the laser may
produce unintended laser pulses (self-firing). Depending on the
working application self-firing may cause severe damage to the target.
COD was developed to prevent self-firing by enabling the thyratron to
switch only when the pulse is needed. For this purpose HV is switched
off; the capacitors remain uncharged. When a laser pulse is needed a
trigger signal enables the power supply to charge the storage
capacitors (see Section 11 on page 257). After the storage capacitors
are charged a trigger signal is sent to the thyratron. The laser emits
one pulse and HV is switched off again.
The trade-off for this advantange is an additional jitter of about 2.5 µs
(the typical jitter for the COMPex is only 2 ns). Since the COD can be
activated or deactivated, the COMPex is adaptable to both, jitter
sensitive applications and those which do not allow additional pulses.

NOTE
Due to the capacitor charging time of 20 ms, COD supports repetition
rates only up to 50 Hz. Higher values are automatically replaced with
50 Hz and the error message “WARNING! REPRATE FOR COD >
50 HZ” is displayed.

The COD should be used

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– to avoid temporary laser stand by while capacitors are charged. This

may cause the laser to self-fire.
– if the repetition rate is less than 50 Hz and jitter as well as delay are
not critical.
The COD command can also be used to know the COD time delay, as
it is displayed during selection of the COD.

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 Pulse Counter

Tools and Materials

• None

Preconditions

• Laser in Off mode

Toggeling between COD On or Off

1. Press <BREAK> twice to stop laser operation.
2. Press the function button <F10>.
If current status is “ON”, the time delay is displayed in µsec. This is the
time between trigger signal and laser pulse which is the time the
capacitors need to be charged before each laser pulse.
3. Press cursor left or right to select ON or OFF.
4. Press <ENTER> to confirm.
The COD status is saved. If COD has been switched on, “COD” is
displayed.

6.6 Pulse Counter

The COMPex has two different pulse counters:
– Total Counter
Counts the total number of laser pulses emitted by the laser since its
first use.
– User Counter
Counts the number of laser pulses emitted since the last counter
reset (see Section 6.6.2).

6.6.1 Select the Pulse Counter

This command can be used

– to check if scheduled actions are required
– to determine the actual number of pulses.
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Tools and Materials

• None

Preconditions

• Laser device switched on

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OPERATION

Selecting the Counter

1. Press the COUNT button <SEL>.
2. Press the left or right cursor to select the counter.
3. Press <ENTER> to confirm.
The selected counter and the current counter value are displayed in
the second line of the handheld keypad display.

6.6.2 Reset the User Counter

The user counter is one of the COMPex pulse counters. The total
counter, however, cannot be reset.

Tools and Materials

• None

Preconditions

• Laser in Off mode

Resetting the User Counter

1. Press <BREAK> twice to stop laser operation.
2. Press the COUNT button <RESET>.
3. Press <EXE> to confirm.
The user counter is now set to zero.

6.7 Emergency Fill

An emergency fill is required to fill up the tube to a pressure higher
than atmospheric pressure. This will protect the laser tube from
intruding gases or humidity for some time, even in the case of a
malfunction. The COMPex emergency fill is called “Manual Fill with
Inert Gas”.

6.7.1 Manual Fill with Inert Gas

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NOTE
Applicable only when a gas cylinder is attached to the inert gas line. If
not, make a transportation fill instead (see Section 7.10.1 on page
172).

The COMPex offers to manually inject inert gas into the tube. The
injection lasts 10 seconds and is used to increase the tube pressure.

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 Emergency Fill

The laser tube is to be filled with inert gas

– when a procedure has been interrupted, while tube pressure is less
than 1050 mbar,
– when the laser tube leaks (or is suspected to leak) so that the tube
pressure remains higher than atmospheric pressure.
This command can be used
– to check if scheduled actions are required,
– to determine the actual number of pulses.

Tools and Materials

• Gas cylinders with a minimum of 5 bar remaining pressure

Preconditions

• Laser in Off mode

Preparation
1. Press <BREAK> two times to stop laser operation.
The laser is off now. Next prepare the gas line.
2. Close inert gas pressure regulator.
3. Open valve on the inert gas cylinder.
4. Set inert gas pressure regulator to 4 bar.
Now a manual fill of inert gas can be performed.

Performing a Manual Fill with Inert Gas

5. Press <F6>.
6. Press cursor left or right to select MANUAL INERT.
7. Press <ENTER> to confirm.
8. Press <EXE> to execute the manual fill of inert gas.
The laser head valve and the inert gas valve open for 10 seconds and
afterwards close automatically. The new pressure is displayed. If a
higher pressure is required, repeat step 8.
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OPERATION

6.8 Additionals

6.8.1 Temperature Control (optional)

The temperature control can be activated to maintain a given tube

temperature.

Tools and Materials

• None

Preconditions

• Laser in Off mode

Activating the Temperature Control

1. Press <BREAK> twice to stop laser operation.
2. Ensure the cooling water valve to be opened.
3. Press the <F5> button.
4. Press cursor left or right to select ON or OFF.
5. Press <ENTER> to confirm.
If the temperature control is on, it keeps the tube temperature constant
by actuating the water valve.

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118 User Manual COMPex

 Overview

7 MAINTENANCE
This chapter describes regular maintenance actions using the
handheld keypad and the local software of the communications
interface. Additionally, it contains a maintenance schedule.
See Section 8 on page 183 ff. for the remote software codes.

7.1 Overview

1 2 3 4 5

COUNTS GAS MENU

RUN TRIGGER SEL NEW SEL F1 F6

MODE REPRATE
STOP EXT/INT FILL

FLUSH F7
F2
7 8 9 HV RESET LINE
RESET

EGY PURGE
4 5 6 EGY CAL LINE
F3 F8

PURGE F4 F9
1 2 3

F5 F10
0 , CLEAR ENTER EXE BREAK

8 7 6
Figure 38: Handheld keypad buttons for maintenance procedures

1. New Gas Fill page 126

2. Flush Gas Line page 123
3. Purge Gas Line page 125
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4. Passivating Laser Tube page 132

5. Transportation Fill page 172
Emergency Fill page 116
6. Halogen Filter Filling Ratio page 168
Halogen Filter Reset page 171
7. Purging Laser Tube page 131
Clean and Replace Optics
8. Calibrating Energy Monitor page 154

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MAINTENANCE

Maintenance Actions without Handheld Keypad

• Exchanging Gas Cylinders page 129

• Checking Thyratron page 164

• Exchanging Halogen Filter page 168

• Disconnecting Gas Lines page 173

NOTE
A) To cancel software related maintenance actions, press
<BREAK>.The routines “New Fill” and “Purge Laser Tube” cannot be
canceled when the gas action is in progress.
B) After finishing several gas actions, the vacuum pump will run for
some minutes. To enable these procedures to be completed, do not
switch off the laser device during this period.

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 Laser Logbook

7.2 Laser Logbook

It is important to continuously keep track of the characteristic data for
laser operation. For this purpose a laser logbook should be prepared.
This is an important aid in scheduling necessary maintenance and
searching for problems.
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MAINTENANCE

7.3 Maintenance Schedule

For proper and safe operation of the COMPex follow the maintenance
schedule supplied here.

Procedure Pulses Time Other Conditions Time

[Million] Req. [h]
Flushing Gas Lines - - before a new gas fill or -
(Section 7.4.1) after a week of non-
operation -
New Gas Fill 5-101) 1-3 weeks2) if beam energy too low 0.5
(Section 7.4.3) for desired application

COMPex F2 2 2 days
Exchanging Gas - - if pressure < 5 bar 0.5
Cylinders (Section 7.4.4)
Cleaning Tube Optics 15 - 30 - all 3-5 new gas fills 1.0
(Section 7.6)

COMPex F2 not intended

Exchanging Tube Optics - - after cleaning the optics 1.0
(Section 7.6) the fifth time3) or if optics
are damaged 1.0

COMPex F2 10
Calibrating Energy - - whenever the tube optics 0.2
Monitor (Section 7.7) have been maintained
Cleaning Beam Splitter - - with every energy monitor -
(Section 7.6) calibration
Exchanging Halogen - 1 year after 30 new gas fills 0.2
Filter (Section 7.9.2)
Transportation Fill - - before a transport or 0.2
(Section 7.10.1) before a storage 0.2

1)
Typical values for Dynamic Gas Lifetime. XeCl tends to be greater
than the other gases.
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2)Typical values for Static Gas Lifetime. XeCl tends to be greater than
the other gases.
3)
with ArF every third time

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 Gas System Maintenance

7.4 Gas System Maintenance

The gas quality is a crucial factor in excimer laser operations. Pay
special attention to the maintenance of the gas system and gases.

NOTE
When flushing or purging the external gas supply lines, the buffer
solenoid valve open automatically after switching off the vacuum
pump to refill the internal gas system with the gas connected to
“Buffer”.

7.4.1 Flush Gas Lines

Flushing a gas line consists of evacuating the line for two seconds. It is
intended to fill the line with fresh gas afterwards.
This command is used
– to evacuate a line (see the following Section 7.4.1.1)
– to fill a gas line with pure gas (e. g. after a leak test or changing a
gas cylinder (or before starting the laser after a week of standstill);
the corresponding gas cylinder must be open (see Section 7.4.1.2
on page 124).

NOTE
To completely flush a line from the gas cylinder valve to the laser, set
the pressure regulator to 5 bar. If pressure regulator setting is lower,
gas residues could remain in the line between pressure regulator and
gas cylinder valve.

7.4.1.1 Evacuate a Gas Line

Tools and Materials

• None

Head

• Laser in Off mode

Evacuating the Line

A0303COMP

1. Press <BREAK> twice to stop laser operation.

2. Close the pressure regulator of the gas line to be evacuated.
3. Close the corresponding gas cylinder valve.
4. Set the pressure regulator to 5 bar. The line is now open, but no gas
will enter from the gas cylinder.

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MAINTENANCE

5. Press <FLUSH LINE> to execute the flushing procedure. A

message including the currently selected gas line as well as other
choices is displayed.
6. Press cursor left or right to select gas line to be evacuated.
7. Press <ENTER> to confirm.
8. Press <EXE> to execute the flushing. The message “FLUSH x.L.”
appears (where “x” represents the first letter of the type of gas).
The gas inlet is closed and the vacuum pump will run for two
seconds.

NOTE
Depending on the length of the gas line, this procedure is to be
repeated two or three times to evacuate the line completely.

7.4.1.2 Refill a Gas Line with Fresh Gas

Tools and Materials

• Gas cylinders with a minimum of 10 bar remaining pressure.

Preconditions

• Laser in Off mode Evacuating the Line

1. Press <BREAK> twice to stop laser operation. The laser is now off.
Next prepare the gas line:
2. Close pressure regulator of the gas line to be filled.
3. Close gas cylinder valve of the corresponding gas line.
4. Set pressure regulator to 5 bar. The line is now open, but no gas
will enter from the gas cylinder.
5. Press <FLUSH LINE> to flush the gas line. A message including
the currently selected gas line as well as other choices is displayed.
6. Press cursor left or right to choose desired gas line to evacuate.
7. Press <ENTER> to confirm the choice.
8. Press <EXE> to execute the flushing.
The message “FLUSH x.L.” appears (where “x” represents the first
letter of the type of gas). The gas inlet is closed and the vacuum
pump will run for two seconds.

NOTE
Depending on the length of the gas line, this procedure is to be
repeated two or three times to evacuate the line completely.

Filling the Line with Fresh Gas

A0303COMP

9. Close pressure regulator corresponding to the desired gas line.

10. Open the gas cylinder valve corresponding to the desired gas line.

124 User Manual COMPex

 Gas System Maintenance

11. Set pressure regulator to 5 bar (abs.).

Gas from the gas cylinder fills the line.

NOTE
It is recommended to repeat this procedure at least once to refill the
gas line completely.

7.4.2 Purge Gas Lines

Purging a gas line means: The line is evacuated for five seconds and
afterwards filled with the gas connected to the inert gas line. This is
done using the PURGE LINE procedure.

NOTE
This function is only possible with an inert gas cylinder atta-ched to
the inert gas line.

This command is used

– to protect lines against impurities when the laser device is not to be
used for several days,
– to prevent emission of toxic gases before replacing a gas cylinder,
– to prevent a poisoning hazard when performing a leak test on the
halogen line.

NOTE
To completely purge a line from gas cylinder valve to laser, set the
pressure regulator to 5 bar. If pressure regulator set-ting is lower toxic
gas residue can remain in the line between pressure regulator and
gas cylinder valve.

Tools and Materials

• Gas cylinders with a minimum of 10 bar remaining pressure.

Preconditions

• Laser in Off mode

Purging a Gas Line

1. Press <BREAK> twice to stop laser operation.
A0303COMP

NOTE
Ensure, that the gas cylinders connected to the gas lines are open.
Otherwise the error message “NO GAS FLOW” appears while purging
the line.

2. Close gas cylinder valve of line to be purged.

3. Set pressure regulator in this line to 5 bar.
4. Close pressure regulator in the inert gas line.

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MAINTENANCE

5. Open gas cylinder valve in the inert gas line.

6. Set pressure regulator of inert line to 5 bar.
7. Press <PURGE LINE>.
8. Press <EXE> to start purging the gas line.
A message including the currently selected gas line as well as other
choices is displayed.
9. Press cursor left or right to select gas line to be evacuated.
10. Press <ENTER> to confirm the choice.
11. Press <EXE> to execute the purging.
The vacuum pump runs for 5 seconds to evacuate the line and the
message “PURGE LINE, x.L.” is displayed (where “x” represents
the first letter of the type of gas). Then the inert gas valve opens for
two seconds to allow inert gas flow into the line.

NOTE
Depending on the length of the gas line, this procedure is to be
repeated two or three times to fill the line completely with inert gas.

7.4.3 New Gas Fill

A new gas fill replaces gases of insufficient quality in the tube with
fresh gases. This is done using the NEW FILL Procedure.
The NEW FILL procedure differs, whether the laser device is equipped
with a halogen source or not. Both cases are described below.
The composition and pressure of the fresh gas mixture is specified by
the gas menu.
A new gas fill is recommended:
– when static gas lifetime is exceeded,
– when dynamic gas lifetime is exceeded,
– if the warning or error message “PRESET ENERGY TOO HIGH”
appears (remote: ON:2 and OFF:2) if the gas is not new,
– if the warning or error message “NEW GAS FILL NEEDED” appears
(remote: ON:8 and OFF:8),
– if the error message “LOW LIGHT” appears (remote: OFF:26),
– when the energy monitor is to be calibrated,
– when laser optics have been cleaned or replaced,
– when the tube has been re-passivated,
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Gas lifetime and energy yield of the gases depend greatly on

operational conditions. Thus you should protocol the frequency you
need a new gas fill, so as to develop a maintenance schedule on your

126 User Manual COMPex

 Gas System Maintenance

own. Record the total counter number and the date of each new gas fill
into your laser logbook. Note that the following situations shorten the
gas lifetime or reduce the energy yield of the gases:
– laser tube has just been passivated,
– first fill has been made after several weeks without operation,
– another wavelength has been selected,
– laser tube optics are soiled,
– high energy values in Energy Constant Mode.

CAUTION
Risk of damaging the laser tube!
If evacuation time exceeds 11.5 minutes, a gas leak is likely. The laser
control software performs an automatic Safety Fill up to 1050 mbar
with the gas connected to “Buffer”. Proceed according to the safety
instructions.

NOTE
Only in case of danger press <BREAK> while the NEW FILL
procedure is in progress, because the procedure will be terminated
immediately. The fill is not completed, so tube pressure may be
insufficient. In this case manually fill the tube to 1050 mbar with inert
gas (see Section 6.7.1 on page 116) or start a New Fill again.

7.4.3.1 New Gas Fill without Halogen Source

Tools and Materials

• Gas cylinders with a minimum of 10 bar remaining pressure

• New halogen filter (in stock)

Preconditions

• Laser in Off mode

Performing a New Gas Fill

1. Press <BREAK> twice to stop laser operation. The laser is now off.
2. If the laser has not been run for more than a month, purge the tube
and the gas lines to remove impurities (to purge the laser tube, see
Section 7.5.1 on page 131; to purge the gas lines, see Section
A0303COMP

7.4.2 on page 125).

3. Close all pressure regulators.
4. Open all gas cylinder valves.
5. Set pressure regulators to 5 bar.
6. Press <NEW FILL>.
7. Press <EXE> to start the NEW FILL procedure.

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MAINTENANCE

The halogen filter ratio is checked. If it exceeds 99%, the message

“RENEW HALOGEN FILTER” is displayed and the NEW FILL
procedure is terminated. Replace the halogen filter (see Section 7.9.2
on page 168).
If the ratio is in range, the vacuum pump starts to evacuate the tube.
The current pressure and the message “NEW FILL, EVAC” are
displayed. After reaching 30 mbar the vacuum pump stops.
If everything is all right, the message changes to “NEW FILL, FILL”.
The halogen gas valve opens and the laser tube is filled to the preset
value (from Gas Menu) with halogen. Then the halogen gas valve
closes and procedure continues with the next gas, until the new gas fill
is completed.

7.4.3.2 New Gas Fill with Halogen Source

Tools and Materials

• Gas cylinders with a minimum of 10 bar remaining pressure

• New halogen filter (in stock)

Preconditions

• Laser in Off mode

Performing a New Gas Fill

1. Press <BREAK> twice to stop laser operation. The laser is now off.
2. If the laser has not been run for more than a month, purge the tube
and the gas lines to ensure that gas lines are free from impurities
(to purge the laser tube, see Section 7.5.1 on page 131 to purge
the lines, see Section 7.4.2 on page 125).
3. Close all pressure regulators.
4. Open all gas cylinder valves and source valve.
5. Set pressure regulators to 5 bar.
6. Set pressure regulator on gas cylinder that controls the halogen
source’s pilot valve to 6.5 bar.
7. Press <NEW FILL>.
8. Press <EXE> to start the NEW FILL procedure.
The source’s remaining filling ratio is displayed in percent (e.g. CAP.
LEFT = 85 %). If it is near 0%, replace halogen source until the next
new gas fill.
A0303COMP

The halogen filter ratio is also checked. If it exceeds 99%, the

message “RENEW HALOGEN FILTER” is displayed and the NEW
FILL procedure terminates. Replace the halogen filter (see Section
7.9.2 on page 168).
If the ratio is within range:

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 Gas System Maintenance

9. Press <ENTER> to continue. If a chlorine source is present,

additional steps are required whether the current room temperature
is above (HIGH) or below (LOW) 22 °C (72 °F).
10. (only with chlorine source) Press cursor left or right to choose
“HIGH” or “LOW”.
11. (only with chlorine source) Press <ENTER> to confirm.
12. Press <EXE> to continue the NEW FILL procedure.
The vacuum pump starts to evacuate the tube, the current pressure
and the message “NEW FILL, EVAC” are displayed. After reaching
30 mbar the vacuum pump stops.
The laser then enters a two-minute stand-by phase for a laser tube
gas leak check. The message “NEW FILL, WAIT” is displayed.
If everything is all right, the message changes to “NEW FILL, FILL”.
This may last a few minutes, depending on the ratio of the source.

7.4.4 Replacing Gas Cylinders

The gas cylinders are to be replaced when

– remaining pressure is below 10 bar,
– the gas cylinders have expired (as specified by gas supplier).
The replacement procedure for a halogen gas cylinder is slightly
different from that for other gases.

Tools and Materials

• 9/16” wrench

• 13 mm wrench

• Stainless steel cap to seal the halogen line

• SNOOP® or other suitable leak detector

• Ethanol

• Cleaning paper

CAUTION
Risk of laser tube contamination!
Only use gas cylinders with a pressure of at least 10 bar (abs.).
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• Gas cylinders as specified

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7.4.4.1 Replace Halogen Cylinder

NOTE
The following assumes that an inert gas cylinder is attached to the
inert gas line used for purging. If this is not the case, seal the halogen
line while the gas cylinder is disconnected.

CAUTION
Risk of corrosion!
The halogen line must not be open for more than 2 minutes.

Replacing the Halogen Cylinder

1. Press <BREAK> twice to stop laser operation
2. Close the valve of the halogen gas cylinder.
3. Close the pressure regulator of the halogen gas cylinder.
4. Close the pressure regulator of the inert gas cylinder.
5. Set the pressure regulator of halogen gas cylinder to 5 bar.
6. Open valve of inert gas cylinder.
7. Set pressure regulator of inert gas cylinder to 5 bar.
8. Purge halogen line for at least four times (see Section 7.4.2).
9. Close valve of inert gas cylinder.
10. Close pressure regulators. The halogen line is now free of halogen,
so no halogen may pollute your environment.
11. Unscrew connection fittings in gas line.
12. Seal halogen line with the cap to prevent corrosion.
13. Replace gas cylinders.
14. Remove the cap from halogen line.
15. Screw line fittings to pressure regulator.
16. Perform a leak test (see Section 9.7 on page 231).
17. Flush the line and fill with pure gas at least 3 times (see Section
7.4.1 on page 123).

7.4.4.2 Replace Rare, Buffer or Inert Gas Cylinders

As all other excimer gases are non-toxic, these gas lines shall not be
purged.

Replacing the Gas Cylinders

1. Press <BREAK> twice to stop laser operation.
2. Close valve on gas cylinder to be replaced.
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3. Close the pressure regulator for the cylinder to be replaced.

4. Unscrew connection fittings in gas line.
5. Replace gas cylinder.
6. Screw line fittings to pressure regulator.
7. Perform a leak test (see Section 9.7 on page 231).
8. Flush the line and fill with pure gas at least three times (see Section
7.4.1 on page 123).
The cylinder replacement is now complete.

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7.5 Laser Tube Maintenance

7.5.1 Purge Laser Tube

Purging the tube means that the laser tube gas is replaced with inert
gas. The tube is evacuated and filled to 1050 mbar with the gas
connected to the inert gas line. The required procedure is the purge
reservoir procedure.

NOTE
A) This function only is possible with an inert gas cylinder attached to
the inert gas line.
B) The button <PURGE RESERVOIR> gives access to two different
procedures; the purge reservoir procedure and the window exchange
procedure (Section 7.6 on page 134). This section explains the first
procedure.

Purging the tube is recommended:

– when the laser has not been operated for more than a month,
– after repairing a leak at the laser tube,
– before and after replacing the laser tube.

NOTE
Do not press <BREAK> during the Purge Reservoir procedure as the
procedure is terminated immediately. The fill is not complete and thus
the tube pressure may be insufficient. If this has occurred, manually fill
the tube with inert gas to 1050 mbar (see Section 6.7 on page 116) or
restart the Purge Reservoir procedure.

Tools and Materials

• Inert gas cylinders with a remaining pressure of at least 10 bar

(abs.).

Preconditions

• Laser in Off mode

Purging the Tube with Inert Gas

1. Press <BREAK> twice to stop laser operation.
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2. Close all gas cylinder valves.

3. Close all pressure regulators.
4. Open valve of inert gas cylinder.
5. Set inert pressure regulator to 5 bar.
6. Press <PURGE RESERVOIR>.
7. Press cursor left or right to select “PURGE RESERVOIR”.
8. Press <ENTER> to confirm the choice.

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9. Press <EXE> to execute the reservoir purge. The message

“FLUSHING...” is displayed. The vacuum pump starts to evacuate
the tube, the current pressure is displayed. After reaching 30 mbar,
the vacuum pump stops and the tube is filled up with inert to
1050 mbar.

Finalization
10. To run the laser, perform a new gas fill (see Section 7.4.3).

7.5.2 Re-Passivate Laser Tube

NOTE
This function is only available if separate halogen and helium gas
cylinders are used. It cannot be carried out using a halogen source.

Halogen gases are aggressive substances. To protect the tube and

components, the tube consists of a material that develops a
passivation layer in the presence of halogen.
The laser tube is to be passivated:
– when tube passivation layer has been damaged by air in the tube.
The passivation fill lasts one day.
CAUTION
Risk of damaging the laser tube!
Do not use this procedure for re-passivation when changing the type
of halogen gas (fluorine to chlorine or vice versa).
Call authorized service.

Tools and Materials

• Halogen and helium gas cylinders with a minimum of 10 bar

remaining pressure,

• Protective eyeware.

Preconditions

• Laser in Off mode

Passivating the Laser Tube

1. Press <BREAK> twice to stop laser operation.
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2. Close valves of halogen and helium gas cylindes.

3. Close all pressure regulators.
4. Open valve on halogen gas cylinder.
5. Open valve on helium gas cylinder.
6. Set halogen pressure regulator to 4 bar.
7. Set helium pressure regulator to 4 bar.
8. Press <F3>.

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9. Press <EXE> to confirm. The tube is evacuated to 30 mbar and

filled with 200 mbar halogen gas and 900 mbar helium.
10. Let laser stand for at least 8 hours with the passivation fill (e.g.
overnight).

Finalization
11. Perform a new gas fill (see Section 7.4.3 on page 126). The
halogen displaces oxygenic compounds on tube walls and built-in
elements. The displaced compounds are removed in the
evacuation before the new gas fill.
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7.6 Tube Optics Maintenance

This section is subdivided into two seperate tube optics maintenance
procedures:
– Section 7.6.1 starting on this page describes the tube optics
maintenance procedue which is to be used for all COMPex versions
except the F2 - version,
– Section 7.6.2 on page 143 describes a different tube optics
maintenance procedure to be used only for COMPex F2 - version
laser devices.

NOTE
Before beginning with the tube optics maintenance procedure ensure
that the selected procedure suits the laser devices configuration.

7.6.1 Tube Optics Maintenance: All COMPex Versions

(Except F2 - Version)

The laser tube optics at COMPex are:

– rear mirror,
– output coupler.
Soiled laser tube optics must be cleaned. Damaged laser tube optics
must be replaced.
Cleaning the tube optics is recommended:
– when the maintenance interval is reached (see Section 7.3 on page
122),
– when the pulse energy is too low (see Section 9.9 on page 234),
– when the beam profile is bad.
Replacing the tube optics is recommended:
– when the optics are damaged,
– when the optics cannot be cleaned (e.g. due to burned-in dust),
– when the maintenance interval is reached (see Section 7.3 on page
122).
Cleaning or replacing the tube optics lasts approx. one hour.
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Tools and Materials

• 4 mm allen key (from service case)

• 3 mm allen key (from service case)

• 2.5 mm allen key (from service case)

• Optics wrench (from service case)

• Lens cleaning tissues (from service case)

• Vienna chalk (from service case)

• Rubber gloves

• Tap water

• Pure alcohol (96%)

• Sealing plate or premounted optics mounts

• External energy meter (for handling, see energy meter manual)

NOTE
Always change the output coupler and the rear mirror in two seperate
procedures to ensure that one of the optics is remaining adjusted. The
replaced optics can then be aligned with the optics that are still
adjusted.

When the tube optics is replaced in one single procedure, resonator

adjustment can only be performed by specially trained personnel or
authorized service.
Cleaning and replacing the tube optics consists of the following steps:
- Start flushing procedure steps 1 to 8 on page 136
- Unmount first tube optics steps 9 to 14 on page 136
- Clean and replace optics steps 15 to 30 on page 138
- Reassemble and remount the steps 31 to 36 on page 140
tube optics mount
- Perform a leak test steps 37 to 38 on page 141
- Perform a new gas fill step 39 Section 7.4.3
on page 126
- Adjust the tube optics steps 40 to 48 on page 142
- Unmount second tube optics steps 9 to 14 on page 136
- Clean and replace optics steps 15 to 30 on page 138
- Reassemble and remount the steps 31 to 36 on page 140
tube optics mount
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- Perform a leak test steps 37 to 38 on page 141

- Perform a new gas fill step 39 Section 7.4.3
on page 126
- Adjust the tube optics steps 40 to 48 on page 142
- Calibrate the energy monitor step 49 Section 7.7 on
page 154

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Flushing the Laser Tube

The flushing procedure is a software procedure that allows to replace
the tube optics.
1. Close all gas cylinder valves except inert gas.
2. Close all pressure regulators.
3. Open inert gas cylinder, if closed yet.
4. Set pressure regulator of inert gas cylinder to 5 bar.
5. Press <PURGE RESERVOIR>.
6. Press cursor left or right to select “WIN.EXCHANGE”.
7. Press <ENTER> to confirm the choice.
8. Press <EXE> to proceed.
The vacuum pump starts to evacuate the laser tube. After reaching
30 mbar, the vacuum pump stops, inert gas valve opens and the
tube is filled to 1200 mbar with inert. The inert gas valve then
closes.
After that, you are requested to change the tube optics. The
message “REPLACE WINDOWS (enter)” appears.

Unmounting One Tube Optics

This step explains how to remove the optics mount. When dismounting
the rear mirror, skip steps 9-12!
CAUTION
Risk of damageing the laser tube!
Do not press <ENTER> when tube optics are removed. .

NOTE
Always wear rubber gloves when handling the optics.

9. Dismount mirror access panels of the laser.

10. Dismount (magnetic) beam shielding (see Figure 39, A).
11. Loosen the single screw at energy monitor (B).

B
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Figure 39: Energy monitor without mirror access panel

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 Tube Optics Maintenance

12. Turn energy monitor to the side (see Figure 40).

Figure 40: View of optics mount, energy monitor removed

13. Loosen the six 3 mm Allen screws on the optics mount and remove
the optics mount.
You will hear a short hissing sound due to overpressure in the tube.
The laser tube is now open.
The inert gas valve opens to compensate for pressure drop with
inert gas so that no air will enter. If the laser tube has not been
closed, this will happen about every two seconds.

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed.

14. Immediately mount the sealing plate (see Figure 41).

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Figure 41: Optic mount dismounted, sealing plate

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MAINTENANCE

To shorten the maintenance time, prepared optics mounts (see Figure

42) can be mounted instead of the sealing plate.

Figure 42: View of optics mount, energy monitor rmoved

If you need more than a minute, a message will be displayed “CLOSE

RESERVOIR (enter)”.

Cleaning and Exchanging the Optics

The third step is disassembling the optics. Work on a smooth support
pad at a clean place (for nomenclature, see Figure 43):

Figure 43: Disassembled optical mount

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Key to Figure 43:

A - counter window mount B - lens
C - optics spacer D - optics collar
E - window mount F - threaded insert
G - optics wrench

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15. Use the optics wrench to loosen the threaded inset (approx. 5
turns).
16. Loosen the three 2.5 mm allen screws (do not lose the washers!).
17. Remove window mount from counter window mount.
18. Disassemble optics collar, lens, and optics spacer. The optics are
now ready to be cleaned or to be removed.

Cleaning the Optics

CAUTION
Risk of damaging coated optics!
Use only ethanol to polish coated side of optics. Polish carefully with
gentle pressure.
Wear rubber gloves.

The coating can be recognized:

– either by a pencil marking at the side of the coating (as the marking
becomes blurred over the course of time we recommend to renew
the marking carefully with a pencil before or after cleaning the
optics),
– or by a greenish patina on the lens surface, surrounded by a non-
coated ring (if you recognized the coating this way, make a pencil
marking at the side of your optics).
Cleaning the coated side of coated optics is only necessary if it is
contaminated (e.g. by fingerprints or dust).

Cleaning the coated side

To clean the coated side of coated optics:
19. Put a few drops of ethanol onto the surface close to one edge.
20. Wipe a lens cleaning tissue over the surface to clean the lens with
ethanol.

Cleaning the non-coated side

To clean non-coated optics or the uncoated side of coated optics:
21. Position 3 layers of lens cleaning tissues on top of each other.
22. Mix 2 teaspoons of water with 1 teaspoon of vienna chalk on the
tissues.
23. Rinse the dirty components of the optics under a stream of
(lukewarm) water.
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24. Place optics dirty-side-down on the vienna chalk slurry and polish
with figure-eight movement and gentle pressure for about 3
minutes.

Figure 44: Polish the optics

25. Polish the other side if necessary (and not coated!).

26. Rinse under water.
27. Dry optics with a fresh cleaning tissue.
28. Put a few drops of ethanol onto the surface.
29. Wipe a lens cleaning tissue over the surface to clean the lens with
the ethanol.
30. Visually inspect the optics (in a well-lit place). The surface must be
dry and clean.

Reassemble and Remount the Optics Mount

31. Place optics spacer in optics collar (see Figure 45).

A B C D E F G H

I
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Figure 45: Reassembling the optics mount

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 Tube Optics Maintenance

Key to Figure 45:

A - counter window mount B - lens
C - coating mark D - optics spacer
E - optics collar F - unlosable screws
G - window mount H - threaded insert
I - washer K - 2.5 mm screw

CAUTION
Risk of damaging lens coating!
When using a coated lens, ensure that the coated side only contacts
the optics spacer, not the counter optics mount. The coated side is
marked with a pencil marking.

32. Place the lens assembly (lens up) onto the support pad and place
the counter window mount over lens assembly.
33. Remove the sealing plate.
34. Place lens in optics collar (watch coated side).Tighten the window
mount evenly with three included 2.5 mm screws.
35. Hand-tighten threaded inset with optics wrench.
36. Tighten optics mount uniformly with six included 3mm Allen screws
at laser tube.

Performing a Leak Test

37. Press <ENTER>.
The laser executes a laser tube leak test with 3000 mbar of inert
gas for 15 minutes. During this time the message “LEAK TEST” is
displayed. If a leak is detected, the message “Leak!-Check
Windows” appears. Repeat this procedure, beginning with step 13
on page 137.
If tight:
38. Press <ENTER> to proceed.
In this step, the laser tube is evacuated to 30 mbar and refilled to
1050 mbar,
The laser is now leak-tested.
39. Perform a New Fill procedure as described in Section 7.4.3 on
page 126.

NOTE
We recommend to run the laser afterwards for several minutes to
warm the excimer laser gas mixture.
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Adjusting the Tube Optics

NOTE
Always adjust the replaced output coupler or rear mirror before
exchanging the other optics using the external energy meter. This
ensures that the replaced optics can be aligned with those which is
still adjusted.

WARNING
Risk of injury hazards to eyes and skin!
Laser radiation can cause serious damage to your health.
Carefully read safety instructions before running the laser.
Never look into the laser beam and its reflections.
Necer contact the laser beam.
Wear safety glasses specifically intended for the laser’s
wavelength.

40. Place the external energy meter within the beam path (for handling,
see energy meter manual).
41. Set running mode to HV constant mode (see Section 6.5 on page
111 ff.).
42. Enter repetition rate given in data sheet for the specified beam
energy (see Section 6.4.2 and data sheet).
43. Enter maximum high voltage according to laser data sheet (see
Section 6.5.3 and data sheet).
44. Start the laser (see Section 6.2).
45. Maximize beam energy by turning the horizontal optics adjustment
screw clockwise or counterclockwise (see Figure 46, 1).
46. Repeat previous step with vertical optics adjustment screw (see
Figure 46, 2).

Figure 46: Horizontal and vertical optics adjustment

47. When the laser beam energy is still insufficient (see the laser data
sheet for requested energy output data), repeat steps 45 and 46.
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When the laser beam does not meet the data sheet values, see
Section 9 (Troubleshooting) or call service.
48. Mount the energy monitor.

Finalization
49. Calibrate the energy monitor as described in Section 7.7.

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7.6.2 Tube Optics Maintenance: COMPex F2 - Version

The laser tube optics at the COMPex F2-version are:

– rear mirror,
– output coupler.
Soiled laser tube optics must be cleaned. Damaged laser tube optics
must be replaced.
Cleaning the tube optics is recommended:
– when the maintenance interval is reached (see Section 7.3 on page
122),
– when the pulse energy is too low (see Section 9.9 on page 234),
– when the beam profile is bad.
Replacing the tube optics is recommended:
– when the optics are damaged,
– when the optics cannot be cleaned (e.g. due to burned-in dust),
– when the maintenance interval is reached (see Section 7.3 on page
122).
Cleaning or replacing the tube optics lasts approx. one hour.

Tools and Materials

• 4 mm allen key (from service case)

• Optics wrench (from service case)

• Bayonet wrench (from service case)

• Lens cleaning tissues (from service case)

• Vienna chalk (from service case)

• Rubber gloves

• Tap water

• Pure alcohol (96%)

• Sealing plate or premounted optics mounts

• External energy meter (for handling, see energy meter manual)

A0303COMP

NOTE
Always change the output coupler and the rear mirror in two seperate
procedures to ensure that one of the optics is remaining adjusted. The
replaced optics can then be aligned with the optics that are still
adjusted.

When the tube optics is replaced in one single procedure, resonator

adjustment can only be performed by specially trained personnel or
authorized service.

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Cleaning and replacing the tube optics consists of following steps:

- Start flushing procedure steps 1 to 8 on page 144
- Unmount front tube optics steps 9 to 17 on page 145
- Clean and replace optics steps 22 to 34 on page 148
- Reassemble the front optics steps 35 to 38 on page 150
mount
- Mount the reassembled front steps 39 to 45 on page 151
optics
- Perform a leak test steps 50 to 51 on page 151
- Perform a new gas fill step 52 Section 7.4.3
on page 126
- Adjust the front tube optics steps 53 to 61 on page 152
- Unmount rear tube optics steps 18 to 21 on page 147
- Clean and replace optics steps 22 to 34 on page 148
- Reassemble the rear optics steps 35 to 38 on page 150
mount
- Mount the reassembled rear steps 46 to 49 on page 151
optics
- Perform a leak test steps 50 to 51 on page 151
- Perform a new gas fill step 52 Section 7.4.3
on page 126
- Adjust the tube optics steps 53 to 61 on page 152
- Calibrate the energy monitor step 62 Section 7.7 on
page 154

Flushing the Laser Tube

The flushing procedure is a software procedure that allows to replace
the tube optics.
1. Close all gas cylinder valves except inert gas.
2. Close all pressure regulators.
3. Open inert gas cylinder, if closed yet.
4. Set pressure regulator of inert gas cylinder to 5 bar.
5. Press <PURGE RESERVOIR>.
6. Press cursor left or right to select “WIN.EXCHANGE”.
7. Press <ENTER> to confirm the choice.
8. Press <EXE> to proceed.
The vacuum pump starts to evacuate the laser tube. After reaching
30 mbar, the vacuum pump stops, inert gas valve opens and the
tube is filled to 1200 mbar with inert. The inert gas valve then
closes.
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After that, you are requested to change the tube optics. The
message “REPLACE WINDOWS (enter)” appears.

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Unmounting Front Tube Optics

This step explains how to remove the front optics mount.

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed. .

NOTE
Always wear rubber gloves when handling the optics.

9. Loosen the fixing screws and remove the laser devices’ service
panel.
10. Disconnect the purge gas line plug and remove the purge gas line
from the optics mount (see Figure 47, B).

Figure 47: Front optics with energy monitor

11. Pull the lever of the clamping ring (see Figure 47, C) that clamps
the bellows onto the bending unit of the energy monitor (see Figure
47, A).
12. Remove the clamping ring.
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13. Press the bellows (see Figure 47, D) towards the laser tube and
remove the O-ring between bellows and bending unit.

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14. Insert the hook of the bayonet wrench into the lower recess of the
optics mount (see Figure 48, left picture) and turn the bayonet
wrench counterclockwise to loosen the optics mount.

Figure 48: COMPex F2-version: Loosen and fasten front optics mount

15. You will hear a short hissing sound due to overpressure in the tube.
The laser tube is now open.
The inert gas valve opens to compensate for pressure drop with
inert gas so that no air will enter. If the laser tube has not been
closed, this will happen about every two seconds.
16. Press the bellows against the laser tube to remove the optics
mount.
17. Immediately insert the sealing mount and turn the bayonet wrench
clockwise to close the laser tube.

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed.

To shorten the maintenance time, prepared optics mounts (see Figure

49 on page 147) can be mounted instead of the sealing mount.
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If you need more than a minute, a message will be displayed “CLOSE

RESERVOIR (enter)”.

Figure 49: Optics mount COMPex F2-version

Unmounting Rear Tube Optics

This step explains how to remove the rear optics mount.

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed. .

NOTE
Always wear rubber gloves when handling the optics.

18. Loosen the fixing screws and remove the laser devices’ service
panel if not already removed.
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Figure 50: COMPex F2-version: Fasten and loosen rear optics mount

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MAINTENANCE

19. Insert the hook of the bayonet wrench into one of the recesses of
the optics mount (see Figure 50 on page 147, right picture) and turn
the bayonet wrench counterclockwise to loosen the optics mount.
20. You will hear a short hissing sound due to overpressure in the tube.
The laser tube is now open.
The inert gas valve opens to compensate for pressure drop with
inert gas so that no air will enter. If the laser tube has not been
closed, this will happen about every two seconds.
21. Immediately insert the sealing mount and turn the bayonet wrench
clockwise to close the laser tube.

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed.

To shorten the maintenance time, prepared optics mounts (see Figure

49 on page 147) can be mounted instead of the sealing mount.
If you need more than a minute, a message will be displayed “CLOSE
RESERVOIR (enter)”.

Cleaning and Exchanging the Optics

Work on a smooth support pad at a clean place.
22. Use the optics wrench to loosen the threaded inset (see Figure 51,
A).
23. Remove the optics collar (C) from the window mount (D). Ensure
that the O-ring between optics collar and window mount remains in
its place in the window mount.
24. Remove the window (B) from the optics collar. Ensure that the red
optics spacer remains in its place in the optics collar.
The optics are now ready to be cleaned or to be exchanged.

C
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Figure 51: COMPex F2-version: Disassembled optics mount

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Cleaning the Optics

CAUTION
Risk of damaging coated optics!
Use only ethanol to polish coated side of optics. Polish carefully with
gentle pressure.
Wear rubber gloves.

The coating can be recognized:

– either by a pencil marking at the side of the coating (as the marking
becomes blurred over the course of time we recommended to renew
the marking carefully with a pencil before or after cleaning the
optics),
– or by a greenish patina on the lens surface, surrounded by a non-
coated ring (if you recognized the coating this way, make a pencil
marking at the side of your optics).

Cleaning the coated side of coated optics is only necessary if it is

contaminated (e.g. by fingerprints or dust).
Cleaning the coated side
To clean the coated side of coated optics:
25. Put a few drops of ethanol onto the surface close to one edge.

Wipe a lens cleaning tissue over the surface to clean the lens with
ethanol.

Cleaning the non-coated side

To clean non-coated optics or the uncoated side of coated optics:
26. Position 3 layers of lens cleaning tissues on top of each other.
27. Mix 2 teaspoons of water with 1 teaspoon of vienna chalk on the
tissues.
28. Rinse the dirty components of the optics under a stream of
(lukewarm) water.
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29. Place optics dirty-side-down on the vienna chalk slurry and polish
with figure-eight movement and gentle pressure for about 3
minutes.

Figure 52: Polish the optics

30. Polish the other side if necessary (and not coated!).

31. Rinse under water.
32. Dry optics with a fresh cleaning tissue.
33. Put a few drops of ethanol onto the surface.
34. Wipe a lens cleaning tissue over the surface to clean the lens with
the ethanol.
Visually inspect the optics (in a well-lit place). The surface must be dry
and clean.

Reassemble the Optics Mounts

Work on a smooth support pad at a clean place.

CAUTION
Risk of damaging lens coating!
When using a coated lens, ensure that the coated side only contacts
the optics spacer. The coated side is marked with a pencil marking.
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35. Ensure that the red optics spacer is in its place in the optics collar
and insert the window into the optics collar with the coating facing
the spacer.
36. Insert the optics collar into the optics mount.
37. Insert the threaded inset.
38. Use the optics wrench and hand-tighten the inset to fix the optics
collar in the optics mount.

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The reassembled optics mount is now ready for mounting.

Mount the Reassembled Front Optics Mount

39. Remove the sealing mount from the laser tube.

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed. .

40. Press the bellows against the laser tube to insert the reassembled
optics mount.
41. Insert the hook of the bayonet wrench into one of the recesses of
the optics mount (see Figure 48 on page 146, right picture) and turn
the bayonet wrench clockwise to fasten the optics mount.
42. Press the bellows (see Figure 47 on page 145, D) towards the laser
tube and insert the O-ring between bellows and bending unit.
43. Attach the clamping ring (see Figure 47, C) that clamps the bellows
onto the bending unit of the energy monitor (see Figure 47, A) and
close the lever to fix the connection.
44. Connect the purge gas line plug to the optics mount (see Figure 47,
B).
45. Attach the service panel to the laser device and tighten the fixing
screws.

Mount the Reassembled Rear Optics Mount

46. Remove the sealing mount from the laser tube.

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed. .

47. Immediately insert the reassembled optics mount.

48. Insert the hook of the bayonet wrench into one of the recesses of
the optics mount (see Figure 50 on page 147, left picture) and turn
the bayonet wrench clockwise to fasten the optics mount.
49. Attach the service panel to the laser device and tighten the fixing
screws.
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Performing a Leak Test

50. Press <ENTER>.
The laser executes a laser tube leak test with 3000 mbar of inert
gas for 15 minutes. During this time the message “LEAK TEST” is
displayed. If a leak is detected, the message “Leak!-Check

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Windows” appears. Repeat this procedure, beginning with step 13.

(page 145).
If tight:
51. Press <ENTER> to proceed.
In this step, the laser tube is evacuated to 30 mbar and refilled to
1050 mbar,
The laser is now leak-tested.
52. Perform a New Fill procedure as described in Section 7.4.3 on
page 126.

We recommend to run the laser afterwards for several minutes to

warm the excimer laser gas mixture.

Adjusting the Tube Optics

NOTE
Always adjust the replaced output coupler or rear mirror before
exchanging the other optics using the external energy meter with
vacuum flange. This ensures that the replaced optics can be aligned
with those which is still adjusted.

WARNING
Risk of injury hazards to eyes and skin!
Laser radiation can cause serious damage to your health.
Carefully read safety instructions before running the laser.
Never look into the laser beam and its reflections.
Never contact the laser beam.
Wear safety glasses specifically intended for the laser’s
wavelength.

53. Place the external energy meter within the beam path (for handling,
see energy meter manual).
54. Set running mode to HV constant mode (see Section 6.5 on page
111 ff.).
55. Enter repetition rate given in data sheet for the specified beam
energy (see Section 6.4.2 and data sheet).
56. Enter maximum high voltage according to laser data sheet (see
Section 6.5.3 and data sheet).
57. Start the laser (see Section 6.2).
58. Maximize beam energy by turning the horizontal optics adjustment
screw clockwise or counterclockwise (see Figure 46, 1).
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 Tube Optics Maintenance

59. Repeat previous step with vertical optics adjustment screw (see
Figure 46, 2).

Figure 53: Horizontal and vertical optics adjustment

60. When the laser beam energy is still insufficient (see the laser data
sheet for requested energy output data), repeat steps 58 and 59.
When the laser beam does not meet the data sheet values, see
Section 9 (Troubleshooting) or call service.
61. Mount the energy monitor.

Finalization
62. Calibrate the energy monitor as described in Section 7.7.
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7.7 Energy Monitor Calibration

This section is subdivided into two seperate energy monitor calibration
procedures:
– Section 7.7.1 starting on page 156 describes the energy monitor
calibration procedue which is to be used for all COMPex versions
except the F2 - version,
– Section 7.7.2 on page 159 describes a different energy monitor
calibration procedure to be used only for COMPex F2 - version laser
devices.

NOTE
Before beginning with the energy monitor calibration procedure ensure
that the selected procedure suits the laser devices configuration.

The COMPex energy monitor is built into the beam path inside the
laser. It controls:
– if the laser emits any laser pulses,
– the energy of the laser pulses.
The energy monitor must be calibrated:
– if it has been dismounted,
– whenever the tube optics have been maintained.
The energy monitor calibration procedure deletes the value of your
energy monitor reading and calculates a new calibration factor based
on the reading from the external energy meter.
Calibrating the energy monitor takes approximately 10 minutes (see
also flow diagram in Figure 54 on page 155).

Tools and Materials

• Pencil and paper

• Rubber gloves

• 4 mm Allen key (from service case)

• 3 mm Allen key (from service case)

• Vienna Chalk (from service case)

• Lens cleaning tissues (from service case)

•
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Ethanol

• Water

• Attenuators (from service case)

• External energy meter or power meter with vacuum flange if

necessary (for handling, see energy meter manual)
NOTE
In the following “energy meter” also means “power meter”.

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 Energy Monitor Calibration

Start

Make a New Fill

Clean beam splitter

Select
HV Constant Mode

Select
max. reprate

Run laser for

2 minutes

Install power meter

Select max. HV

Select reprate 10 Hz

Insert or remove Start energy

attenuators calibration

Laser adjusts energy

monitor reading

Stop energy no Reading

calibration within range*?
* Range except F2-Version: 99 - 200
Range F2-Version only: 9,9 - 20
yes

Input reading of
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external energy meter

Check
energy calibration

End

Figure 54: Energy monitor calibration procedure

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7.7.1 Energy Monitor Calibration:

All COMPex Versions Except F2-Version

Preparation
1. Perform a New Fill to ensure optimum calibration conditions (see
Section 7.4.3 on page 126). This takes about 20 minutes.

NOTE
Do not press <BREAK> during the new fill procedure, because the
procedure is terminated immediately. The fill is not completed and the
tube pressure may thus be insufficient. If this is the case start new fill
again.

Cleaning the Beam Splitter

2. Make sure that laser cannot be started while the beam splitter is
being cleaned.
3. Dismount mirror access panel.
4. Dismount (magnetic) beam shielding (A, Figure 39, page 136).
5. Put on rubber gloves.
6. Hold beam splitter by the beam splitter handle (D, Figure 55).

A B

D C

Figure 55: View onto the beam splitter

Key to Figure 55:

A - Attenuator B - Beam Splitter
C - Fixing Screw D - Beam Splitter Handle

7. Remove single fixing screw (see Figure 55, C).

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8. Remove beam splitter (B).

9. Clean beam splitter in the same manner as uncoated optics
(described in Section 7.6, steps 21 to 29, page 134 ff.).
10. Re-mount the beam splitter, tighten the fixing screw, remount the
magnetic beam shielding and the mirror access panel.

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 Energy Monitor Calibration

Obtain External Energy Reading

11. Place and prepare the external energy meter according to your
energy meter manual.

NOTE
For best results, calibrate the energy monitor at a repetition rate you
normally work at, with maximum HV. We recommend a repetition rate
of 10 Hz in the following only because most energy and power meters
can be operated at this value. In case of doubt consult your energy or
power meter manual.

12. Press <REPRATE>.

13. Enter 10.
14. Press <ENTER> to confirm input.
15. Press <HV>.
16. Enter maximum HV given on the laser data sheet.
17. Press <ENTER> to confirm input.

DANGER
Risk of injury hazards to eyes and skin!
Laser radiation can cause serious damage to your health.
Carefully read safety instructions before running the laser.

18. Start laser operation.

19. Read external energy meter.
20. Make a note of the energy meter data.
21. Stop laser operation.

Energy Monitor Calibration

22. Press <EGY CAL>.
23. Press <EXE> to confirm to start procedure. In the second display
line “Wait...” appears for a short time. The laser starts operation
with the chosen reprate and HV.
24. Observe the displayed values. For all COMPex laser devices
except the F2-version they must be within a range of 99 to 200.
The laser device now tries to adjust the energy monitor gain so that
the (AD converter) reading is within the range of 99 to 200.
If the reading is out of range, take note if it is too high or too low.
If the adjustment failed [display reads “ENERGY CAL ERROR”;
remote: OFF=7], go to step 25. If successful [display reads
“READING=”; remote: ENERGY CAL CONT], continue with step
32.
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Correct the Energy Monitor Beam Input

NOTE
If adjustment failed the following steps 25 to 31 are to be applied to all
COMPex laser devices except the F2-version. For the F2-version
please refer to Section 7.7.2 on page 159.

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25. Press <BREAK> to stop the energy monitor calibration.

26. Remove mirror access panel.
27. Remove (magnetic) beam shielding. The attenuators are now
accessible.

CAUTION
Risk of damaging attenuators and beam splitter!
The attenuators are fixed with two clamps and might be difficult to
remove.
Use rubber gloves.
Do not use any other tools.
Be careful of the beam splitter.

28. Change the attenuators to correct the energy monitor beam input
(see Figure 44 on page 161, A); if it is too difficult to remove the
attenuators, remove the beam splitter as described in step 6. to 8.
of this section (page 161).
29. Correct the energy meter beam input:
If the displayed internal calculation value was less than 99:
Remove an attenuator or replace with a coarser meshed
attenuator.
If the displayed internal calculation value was 200 or higher:
Add an attenuator or replace with an closer meshed attenuator.
30. Mount (magnetic) beam shielding and mirror access panel.
31. Return to step 9.

Input External Energy Measuring Data

(if adjustment succeeds)

NOTE
A) When the adjustment succeeds, the display changes to
“READING=” (if not, return to step 8).
B) Input values must be in mJ (1/1000 Joule). If you use an external
power meter, obtain the Input value with the following equation:

Eext = (Pext/f) × 1000

where Eext is the input value [in mJ], Pext is the reading from the
external power meter [in W] and f is the repetition rate [in Hz].
32. Enter the external energy measuring data in mJ.
33. Press <ENTER> to confirm input.
The laser device sets the external energy measuring data equal to
the internal calculation value. To check the calibration, measure a
few laser pulses with the external energy meter and compare these
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values with those displayed by the energy monitor values. They

should differ no more than 2% to 3%.

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 Energy Monitor Calibration

7.7.2 Energy Monitor Calibration: COMPex F2-Version

Preparation
1. Perform a New Fill to ensure optimum calibration conditions (see
Section 7.4.3 on page 126). This takes about 20 minutes.

NOTE
Do not press <BREAK> during the new fill procedure, because the
procedure is terminated immediately. The fill is not completed and the
tube pressure may thus be insufficient. If this is the case start new fill
again.

Cleaning the Beam Splitter

CAUTION
Risk of damaging optical components!
Always wear skintight plastic gloves when working on optical
components.

2. Make sure that laser cannot be started while the beam splitter is
being cleaned.
3. Loosen the screws of the laser devices’ service panel and remove
it from the laser.
4. Use a 3 mm allen key to loosen the five fixing screws of the bending
units cover (see Figure 56 on page 159, A).
5. Carefully pull out the beam splitter (see Figure 57) and clean it in
the same manner as uncoated optics (described in Section 7.6,
steps 21 to 29, page 134 ff.) when necessary.

A
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Figure 56: Bending unit of the energy monitor

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Figure 57: Beam splitter removed

6. Re-insert the beam splitter into the clamping bracket with slight
pressure.
7. Attach the bending unit cover to the bending unit and use a 3 mm
allen key to tighten the five fixing screws.
8. Refit the service panel and tighten the screws.

Obtain External Energy Reading

9. Place and prepare the external energy meter according to your
energy meter manual.

NOTE
For best results, calibrate the energy monitor at a repetition rate you
normally work at, with maximum HV. We recommend a repetition rate
of 10 Hz in the following only because most energy and power meters
can be operated at this value. In case of doubt consult your energy or
power meter manual.

10. Press <REPRATE>.

11. Enter 10.
12. Press <ENTER> to confirm input.
13. Press <HV>.
14. Enter maximum HV given on the laser data sheet.
15. Press <ENTER> to confirm input.

DANGER
Risk of injury hazards to eyes and skin!
A0303COMP

Laser radiation can cause serious damage to your health.

Carefully read safety instructions before running the laser.

16. Start laser operation.

17. Read external energy meter.
18. Make a note of the energy meter data.
19. Stop laser operation.

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 Energy Monitor Calibration

Energy Monitor Calibration

20. Press <EGY CAL>.
21. Press <EXE> to confirm to start procedure. In the second display
line “Wait...” appears for a short time. The laser starts operation
with the chosen reprate and HV.
22. Observe the displayed values. The values of the F2-version must
be in the range of 9.9 to 20.
The laser device now tries to adjust the energy monitor gain so that
the (AD converter) reading is within the range of 9.9 to 20.
If the reading is out of range, take note if it is too high or too low.
If the adjustment failed [display reads “ENERGY CAL ERROR”;
remote: OFF=7], go to step 23. If successful [display reads
“READING=”; remote: ENERGY CAL CONT], continue with
step 40.

Correct the Energy Monitor Beam Input

NOTE
If adjustment failed the following steps 23 to 39 apply only to COMPex
F2-version laser devices. For other COMPex - versions please refer to
Section 7.7.1 on page 156.

23. Press <BREAK> to stop the energy monitor calibration.

24. Make sure that laser cannot be started while the beam splitter is
being cleaned.
25. Loosen the screws of the laser devices’ service panel and remove
it from the laser.

CAUTION
Risk of damaging attenuators!
The attenuator is lying in the joining piece between energy monitor
and bending unit and might be difficult to remove.
Always wear skintight rubber gloves.
Do not use any tools to remove the attenuator.

26. Disconnect the two FOL’s (DATA in and DATA OUT) on top of the
energy monitor (see Figure 58 on page 162, A).
27. Disconnect the purge gas line from the energy monitor (see Figure
58 on page 162, C).
28. Pull the lever of the clamping ring (see Figure 58, D) that clamps
the bellows onto the bending unit of the energy monitor.
29. Remove the clamping ring.
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Figure 58: Energy monitor connection

30. Carefully remove the energy monitor from the laser housing.
31. Remove the O-ring between energy monitor and bending unit.
32. Change the attenuator lying in the joining piece between energy
monitor and bending unit (see Figure 58 on page 162, E) to correct
the energy monitor beam input.
33. Proceed as follows:
If the displayed internal calculation value was less than 9.9:
Replace with a coarser meshed attenuator (or remove an
attenuator if two attenuators were inserted).
If the displayed internal calculation value was 20 or higher:
Replace with a closer meshed attenuator (or add an appropriate
attenuator if necessary).
34. Place the O-ring back onto the joining piece and reattach the
energy monitor onto the bending unit.
35. Attach the clamping ring that clamps the energy monitor onto the
bending unit and close the lever to fix the connection.
36. Connect the purge gas line plug to the energy monitor.
37. Connect the two FOL’s (DATA IN and DATA OUT) into the sockets
on top of the energy monitor.
38. Attach the service panel to the laser device and tighten the fixing
screws.
39. Return to step 9.

Input External Energy Measuring Data

(if adjustment succeeds)

NOTE
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A) When the adjustment succeeds, the display changes to

“READING=” (if not, return to step 8).
B) Input values must be in mJ (1/1000 Joule). If you use an external
power meter, obtain the Input value with the following equation:

Eext = (Pext/f) × 1000

where Eext is the input value [in mJ], Pext is the reading from the
external power meter [in W] and f is the repetition rate [in Hz].

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 Energy Monitor Calibration

40. Enter the external energy measuring data in mJ.

41. Press <ENTER> to confirm input.
The laser device sets the external energy measuring data equal to
the internal calculation value. The energy monitor is now
calibrated. To check this, measure a few laser pulses with the
external energy meter and compare these values with those
displayed by the energy monitor values. They should differ no more
than 2% to 3%.
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7.8 Electrical Maintenance

The only electrical maintenance required on the COMPex is to check
the thyratron.

7.8.1 Check Thyratron

The thyratron is the main power switch of the COMPex. It is a 3” gas

filled triode tube in grounded cathode operation mode. It needs 8
minutes warm up time after the laser device has been started,
otherwise severe damage can result.
Both voltages can be adjusted in 0.2 V intervals at the thyratron
adjustment panel (Figure 59). It is situated in the middle upper part of
the right side panel (as viewed from the beam exit).
UH and UR must be monitored to compensate for cathode fatigue and
thyratron gas loss. Additionally, the tube grid voltage UBIAS should be
recorded.
Checking the thyratron is recommended:
– every 3×108 pulses,
– after an error (see chapter “Troubleshooting”)

Tools and Materials

• 3 mm Allen key

• TRMS Voltmeter (TRMS=True Root Mean Square)

• Laser logbook

Preconditions

• Laser device switched on, laser in Off mode A0303COMP

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 Electrical Maintenance

Preparation

NOTE
If your COMPex is not equipped with a thyratron access panel (see 2
in Figure 2 on page 14), remove the right side panel (as seen from
beam exit) instead.

1. Remove thyratron access panel (see Figure 2, page 14). You see
the thyratron adjustment (Figure 59).

50Hz

max
max
60Hz

FUSE

AUX
UR
UH

BIAS

HEAT

RES
min
min

GND

Figure 59: Thyratron adjustment

Measure UH:
Check the heating voltage of the thyratron. On the test sheet the value
UH is called “UHEATER”.
2. Measure UH between the jacks GND and HEAT with TRMS
Voltmeter.
3. Record the value measured in your laser logbook.

Measure UR:
Check the heating voltage of the hydrogen reservoir. On the test sheet
the value UR is called URESERV.
4. Measure UR between the jacks GND and RES.
5. Record the new value in your laser logbook.
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Measure UBIAS:
Note, that UBIAS is a direct current value.
6. Measure UBIAS between the jacks GND and BIAS.
7. Record the value measured in your laser logbook.
8. Measure UBIAS between GND and AUX.

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9. Record the value measured in your laser logbook.

NOTE
The value for UBIAS must be within the range of -150 to -160 V. If not,
a varistor is exhausted. Call authorized service.

7.8.2 Adjust Thyratron

The thyratron adjustment differs if it is scheduled maintenance or if it is

due to an error.
If any stepping switch on the thyratron adjustment panel is already on
the highest setting, the thyratron or its reservoir are exhausted. Call
service.

Adjusting for Scheduled Maintenance or due to Errors:

Missing Pulses, No Trigger or Low Beam Energy
1. Move the stepping switch UH one or two steps higher (in the
direction of the arrow, see Figure 59 on page 165).
2. Move the stepping switch UR one or two steps higher (in the
direction of the arrow, see Figure 59 on page 165).
3. After adjustment wait 3-4 minutes to allow the thyratron to stabilize.
If additional pulses should occur, decrease UR one step, otherwise
proceed.
4. Measure UH between GND and HEAT again.
5. Measure UR between GND and RES again.
6. Record the new values in your laser logbook.

Adjusting due to Errors:

Additional Pulses, Error Message OVERLOAD
1. Move the stepping switch UR one or two steps lower (opposite the
direction of the arrow, see Figure 59 on page 165).
2. After adjustment, wait 3 to 4 minutes to allow the thyratron to
stabilize.
3. Measure UR between GROUND and RES again.
4. Record the new value in your laser logbook.
5. Start laser operation at lowest possible HV value for stable energy
output.
6. Operate the laser for 5 minutes at max. repetition rate.
7. Increase the HV value in steps of 1 kV each 5 minutes until the
max. HV value is reached and operate the laser at max. HV for 15
minutes.
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If no additional pulses occur, the thyratron is adjusted. Otherwise,

proceed with step 1.

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 Electrical Maintenance

Adjusting due to Error: Jitter too High

This only affects at jitter-sensitive applications.
1. Move the stepping switch UR one or two steps higher (in the
direction of the arrow, see Figure 59 on page 165).
2. After adjustment, wait 3-4 minutes to allow the thyratron to
stabilize. If additional pulses should occur, decrease UR one step.
3. Measure UR between GND and RES again.
4. Record the new value in your laser logbook.

Clean-up after Adjustment

1. Reinstall the cover of the thyratron adjustment.
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7.9 Halogen Filter Maintenance

Lambda Physik excimer lasers utilize a halogen filter to remove
molecular species of fluorine from laser gas mixtures expelled from the
laser tube.

Storage
Filters must be stored in unopened packaging in accordance with all
relevant regulations. According to the Accident Prevention Rule
“Protection from Hazardous Chemical Substances (VBG 1a,
FR Germany)”, unopened filters can be stored for a period of up to 4
years. The filter’s lifetime is printed on the packaging. Filters should
always be stored in a dry place in the original, unopened packaging, to
protect from damage. A Filter with visible damage (e.g. dents) must be
removed regardless of its shelf life.

7.9.1 Check the Halogen Filter Filling Ratio

The COMPex allows to monitor the halogen filter filling ratio. The scale
ranges from 0 (new filter) to 100 (filter exhausted, replace it).

NOTE
Remember to reset the filter filling ratio after filter replacement.

Tools and Materials

• None

Preconditions

• Laser in Off mode

Checking the filter filling ratio

1. Press <BREAK> twice to stop laser operation.
2. Press <F4>.
3. Read filling ratio.
4. Press <BREAK> to leave the function.
Please remember to order a new halogen filter in time.
A0303COMP

7.9.2 Halogen Filter Exchange

This section describes the replacement of the halogen filter. Deviation

from this procedure is unsafe as the filter contains hazardous
chemicals.

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 Halogen Filter Maintenance

The halogen filter is enclosed in the aluminum housing above the

vacuum pump (see Figure 60).

Figure 60: View of the halogen filter

Tools and Materials

• Set of Allen keys

• Plastic gloves

• Sealable plastic bag

• Safety glasses

• Pliers

WARNING
Risk of toxic hazard!
Filter contains fluorine and/or chloride components.
Keep filter in a well ventilated place.
Wear safety glasses and gloves.

Preconditions

• Laser device switched off

Removing the Halogen Filter

CAUTION
Risk of toxic hazard!
The vacuum line may contain halogen. To ensure that there is no
halogen in the line, purge the inert line.
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1. Perform the PURGE INERT LINE procedure (see Section 7.4.2 on

page 125).
2. Remove the four wing nuts and washers on top of the halogen filter
housing.

B
C

G
Figure 61: Disassembling the halogen filter housing

Key to Figure 61:

A From laser tube
B Top cover
C O-ring Ø 85 × 4
D Spring
E Filter cartridge
F Filter housing
G To vacuum pump
A0303COMP

3. Lift off the top cover of the filter housing.

4. Remove the spring.
5. Lift out the filter cartridge using pliers.
Take care not to remove the bottom o-ring.
6. Check the condition of the upper and lower o-rings in the filter
housing. Replace the o-rings if damaged.

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 Halogen Filter Maintenance

Filter Cartridge Disposal

Reduce the toxic contamination of the filter so it can be disposed by
following this procedure.
WARNING
Risk of toxic hazard!
Filter may still contain F2 that has not reacted. A storage period
is necessary for safety reasons. Observe the storage periods
described below.

7. Store the filter cartridge for 6 hours in a well-ventilated place.

8. Immerse the filter cartridge in 10 liters of water for 24 hours.
9. Place the filter cartridge inside the plastic bag removed from the
new filter and seal the bag by means of the supplied twist-tie.
10. Dispose the filter cartridge in accordance with local regulations.
11. Dispose the water according to all relevant regulations.

NOTE
The water contains no hazardous substances. Local waste water
regulations may require that the water be neutralized the water. For
neutralization, use calcium hydroxide if pH<7 or acetic acid if pH>7.

Replacing the New Filter

12. Place the new filter cartridge in the filter housing. Ensure that the
arrow on the filter cartridge points to the vacuum pump.
13. Place the spring on top of the filter cartridge.
14. Re-install the top of the filter housing.
15. Fit the four wing nuts and hand tighten. The filter filling ratio must
now be reset to zero (see below).

7.9.3 Reset Halogen Filter Filling Ratio

After replacing the halogen filter the halogen filter filling ratio must be
reset.

Tools and Materials

• None

Preconditions

• New halogen filter inserted

• Laser in Off mode

A0303COMP

Resetting the Filter Filling Ratio

1. Press <BREAK> twice to stop laser operation.
2. Press <F4>.
3. Press the numerical button “0” to reset the filter and press
<ENTER> to confirm.
The filling ratio of the halogen filter is now set to zero.

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7.10 Prepare Gas System for Transportation

and Storage
During longer periods of non-operation, gases can enter
– the laser tube and damage the passivation layer,
– the gas lines and cause corrosion.
To prevent this, the laser device must be carefully prepared for
transportation and storage periods. The laser tube must be filled with a
transportation fill and the gas lines must be sealed.

7.10.1 Transportation Fill

NOTE This function is only possible with a buffer gas cylinder atta-
ched to the buffer gas line. The operation evacuates and fills the tube
to 1500 mbar with buffer gas, preparing it for storage or transportation.
A transportation fill is recommended:
– if laser device is to be non-operational for a long period,
– if laser device is to be transported.

NOTE
Do not press <BREAK> during the TRANSPORTATION FILL
procedure as this terminates the procedure immediately. The fill is not
completed and tube pressure may be insufficient. To ensure a
complete fill, start Transportation Fill again.

Tools and Materials

• Buffer gas cylinders with at least 10 bar remaining pressure

connected to the buffer gas line

Preconditions

• Laser in Off mode

Performing a Transportation Fill

1. Close all pressure regulators
2. Close all gas cylinder valves.
A0303COMP

3. Open buffer gas cylinder valve.

4. Set buffer pressure regulator to 5 bar.
5. Press <F6>.
6. Press cursor left or right to select “TRANSPORT”.
7. Press <ENTER> to confirm.

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 Prepare Gas System for Transportation and Storage

8. Press <EXE> to start the transportation fill.

The tube is evacuated to 30 mbar and filled to 1500 mbar with
buffer gas.

NOTE
The message “SAFETY FILL” appears (remote command OPMODE?
returns SAFETY FILL), if the evacuation failed. A leak is likely and a
safety fill takes place (see also Section 7.4.3).

7.10.2 Disconnecting Gas Lines

For de-installing, transporting and storing the laser device, the gas
supply lines are to be disconnected.

CAUTION
Risk of gas lines corrosion!
Prevent humidity and air from entering into the gas lines.

To prevent corrosion of the halogen lines, no halogen may remain in

the lines. Replace the halogen gas in the lines with inert gas before
disconnecting the gas lines.
This section describes measures to prevent corrosion.
There are three different procedures:
– Disconnect a halogen line (see Section 7.10.2.1).
– Disconnect a premix line (see Section 7.10.2.2)
If your laser runs with gas premix containing halogen and if this
premix is lead through another line than the halogen supply line,
treat it as it were a halogen line.
– Disconnect gas supply lines except halogen line (see Section
7.10.2.3)

7.10.2.1 Disconnect a Halogen Line

Tools and Materials

• 9/16 inch wrench

A0303COMP

• 13 mm wrench

• Gyrolok stainless steel cap to seal the halogen line

• Stainless steel plug included with the laser device to seal the
halogen connection at the laser device.

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MAINTENANCE

Disconnecting the Halogen Line

1. Close the main valve of the halogen gas cylinder.
2. Make sure that the pressure regulator of the halogen gas line is
open.
3. Make sure that the pressure regulator of the inert gas line is closed.
4. Open the main valve of the inert gas cylinder.
5. Set the pressure regulator of the inert gas line to 5 bar.
6. Purge the halogen line at least four times (see Section 7.4.2 on
page 125).
7. Close main valve of the inert gas cylinder.
8. Close the pressure regulator of the inert gas line.
9. Disconnect the halogen line.
10. Immediately seal the halogen connector at the laser device with the
plug.
11. Immediately seal the halogen line with the cap. The sealed halogen
line may remain in this state for a longer period of time now.

7.10.2.2 Disconnect a Premix Line

To prevent corrosion of the halogen lines, no halogen may remain in

the lines. The premix gas in the lines is to be removed with inert gas
before disconnecting the gas lines.

NOTE
The premix gas is usually connected to BUFFER. For reasons of
safety, identify the connection of the premix gas. If the premix gas is
connected to another connector than BUFFER, the following
instructions must be carried out for the other connector and the premix
gas line.

Tools and Materials

• 9/16 inch wrench

• 13 mm wrench

• Gyrolok stainless steel cap to seal the premix line

• Stainless steel plug included with the laser device to seal the premix
connection at the laser device.

Disconnecting the Premix Line

1. Close the main valve of the premix gas cylinder if it is open.
A0303COMP

2. Make sure that the pressure regulator of the premix gas line is
open.
3. Make sure that the pressure regulator of the inert gas line is closed.
4. Open the main valve of the inert gas cylinder.
5. Set the pressure regulator of the inert gas line to 5 bar.
6. Purge premix line at least four times (see Section 7.4.2 on page
125).
7. Disconnect premix line.

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 Prepare Gas System for Transportation and Storage

8. Immediately seal the premix connector at the laser device with the
plug.
9. Immediately seal the premix gas line with the cap. The sealed
premix line may remain in this state for a longer period of time now.

7.10.2.3 Disconnect Gas Supply Lines except Halogen Line

All gas lines, except the halogen lines, are not as endangered by
corrosion as the halogen line. Nevertheless, they must be protected
against humidity and air too.

Tools and Materials

• 9/16 inch wrench

• 13 mm wrench

• Gyrolok stainless steel cap to seal the line

• Stainless steel plugs included with the laser device to seal the
connection at the laser device.

Disconnecting the Gas Lines

1. Close the main valve of the respective gas cylinder.
2. Disconnect the gas supply line with an appropriate wrench.
3. Seal the gas connection at the laser device with the plug.
4. Seal the gas supply line with the cap. The sealed lines may remain
in this state for a longer period of time now.
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7.11 Installation and Alignment of the

Unstable Resonator Optics (optional)

7.11.1 Description of the Unstable Resonator

The unstable resonator is of the positive branch type. The optics set
consists of

• a plano-convex calcium fluoride (CaF2) or magnesium fluoride

(MgF2) mirror as rear optical reflector, which is HR-coated for a
specific wavelength,

• an uncoated meniscus lens for the output coupler.

The meniscus lens can be used for different wavelengths. Additional
coated plane-convex lenses are required in order to switch to different
wavelengths.

A B
Figure 62: Setup of the unstable resonator

Key to Figure 62:

A Rear optics, B Front optics (Output
plane-convex lens with coupler), meniscus lens
dielectric coating

The optics, shown in Figure 62, simultaneously seal the cavity of the
excimer laser. There are no additional windows installed. The convex
surfaces of the optics are always directed to the cavity of the laser
tube. The dielectric coating of the rear optics does not come into
contact with the laser gas.
The installation of the optics has to follow the same routine as used for
a standard optics installation.
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7.11.2 Installation and Alignment Procedure

Purpose
These instructions describe how to install and to adjust the optics for
the unstable resonator of the COMPex laser devices.

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 Installation and Alignment of the Unstable Resonator Optics (optional)

WARNING
Risk of injury and damage to the laser device!
Safety interlocks are only to be defeated by authorized
personnel.
Ensure that only trained or specifically instructed personnel
perform the procedure.

Tools and Materials

• Unstable Resonator Optics

• Unstable Resonator Adapter (for COMPex 100 models only)

• HeNe visible alignment laser

• Piece of card, on which the light reflexes of the HeNe-laser can

easily be seen; with 2 mm pin hole

• Energy meter (e. g. GenTec ED 500 or Coherent LM 100 E)

• Set of Allen keys

• Tool kit spanner wrench

• Adjustment apertures (from service case)

• Protective eyeware

Preconditions

• Laser in Off mode

Mounting the Unstable Resonator

When the stable resonator has to be modified to unstable resonator
operation, a HeNe-laser has to be adjusted to the aligned laser
resonator before dismantling the standard optics. The optics of the
unstable resonator fit into the adjustable mounting normally used for
the standard direct sealing resonator components.

NOTE
A) The resonator optics is to be aligned with an externally mounted
HeNe-laser. The alignment laser beam is directed along the laser tube
axis. The resonator optics are set perpendicular to the alignment laser
beam by monitoring back the retro-reflections of the alignment beam.
B) The alignment of the resonator optics requires recalibration of the
energy monitor.
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Installing the HeNe-Laser

1. Remove the front and rear optics access covers.
2. Remove the (magnetic) beam shielding (see Section 7.6, page 134
ff.).
3. Remove the energy monitor by loosening the 3 mm allen screw and
set the energy monitor aside.

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4. Install the HeNe - alignment laser about 500 mm in front of the laser
device.

WARNING
Risk of injury to eyes and skin!
Laser radiation can caus e serious damage to your health.
Never look into the alignment laser beam or its reflections.
Never contact the laser beam.
Wear safety glasses specifically intended for the laser’s
wavelength.

5. Direct the output of the alignment laser through the center of the
laser tube.
6. Verify that the laser beam passes through the tube without clipping
or reflecting off of the electrodes.

NOTE
You may determine that the beam is reflecting off an electrode when
adjusting the alignment laser tilt upward. If the laser beam moves
downward on the beam block, the aligmment laser beam is hitting an
electrode.

7. Insert the alignment apertures into the openings directly in front of

both of the tube optics.

NOTE
The alignment apertures are needed for positioning the alignment
laser beam to the optical axis of the excimer laser beam.

8. Move the alignment laser in its position until the beam is centered
to the front aperture.
9. Tilt the alignment laser to center the beam through the laser tube
to the rear alignment aperture.
10. Repeat the the beam centering iteratively until the beam is
centered to the alignment apertures.
11. Fasten the punctured card directly in front of the alignment laser,
such that the beam passes through the hole of the card.
12. Remove the alignment apertures from the tube optics.

Flushing the Laser Tube

13. Close all gas cylinder valves except inert gas.
14. Close all pressure regulators.
15. Open inert gas cylinder, if closed yet.
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16. Set pressure regulator of inert gas cylinder to 5 bar.

17. Press <PURGE RESERVOIR>.
18. Press cursor left or right to select “WIN.EXCHANGE”.
19. Press <ENTER> to confirm the choice.
Press <EXE> to proceed.
The vacuum pump starts to evacuate the laser tube. After reaching 30
mbar, the vacuum pump stops, inert gas valve opens and the tube is

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 Installation and Alignment of the Unstable Resonator Optics (optional)

filled to 1200 mbar with inert. The inert gas valve then closes.
After that, you are requested to change the tube optics. The message
“REPLACE WINDOWS (enter)” appears.

Exchange the Tube Optics

CAUTION
Risk of damaging the laser tube!
Do not press <ENTER> when tube optics are removed or exchanged!

20. Loosen the six 3 mm Allen screws of the output coupler’s mount
and remove the optics mount.
A short hissing sound can be heard due to tube overpressure.
21. Immediately mount the sealing plate (see Figure 41 on page 137).

CAUTION
Risk of damaging lenses!
The optics are expensive parts. They are made of calcium fluoride
(CaF2) or magnesium fluoride (MgF2) and can easily be damaged
while being taken out.
Do not drop the optics or let them have contact with any metal parts!

22. Remove the old output coupler from he premount with the spanner
wrench tool.
23. Insert the new output coupler into the premount with the concave
side facing the thruster ring (for the markings on the output coupler
see Figure 63).

NOTE
The orientation of the concave side can be verified by checking if the
alignment laser reflection focuses when incident on the concave side.

C
A0303COMP

Figure 63: Marking of the optics

Key to Figure 63:

A Coated surface
B Wavelength
C Arrow points to laser channel

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24. Remove the sealing plate from the cavity aperture.

25. Attach the mount with the new output coupler to the laser tube and
tighten the six 3 mm allen-type fixing screws.
26. Lossen the six 3 mm Allen screws of the rear optics mount and
remove the optics mount.
A short hissing sound can be heard due to tube overpressure.
27. Immediately mount the sealing plate (see Figure 41 on page 137).
28. Remove the old rear optics from the optics mount with the spanner
wrench.
29. Insert the new rear optics into the optics holder and attach it to the
external bracket mount.

NOTE
When the unstable resonator optics is to be used with a COMPex 100
laser device, the unstable resonator adapter must be fitted. In this
case the rear optics must be replaced by an uncoated window which
is mounted at an angle of 5°. The plano-convex rear optics is mounted
externally to the adapter outside the laser tube.

NOTE
Ensure that the flat, coated side of the optics faces away from the
laser tube. This will orientate the convex side toward the laser tube.
The convex side may be determined by viewing the curvature of the
optic from the side.

30. Remove the sealing plate from the rear cavity aperture.
31. And attach the window mount with the new rear optics to the laser
tube.

Adjusting the Tube Optics

32. Adjust the window mount for a few turns on the vertical and
horizontal axis to ensure that reflections from the window are not
on the laser tube axis.
33. Observe the reflection of the alignment laser off the output coupler
at the punctured card in front of the alignment laser.

NOTE
A) Reflections from each surface from the output coupler may be
overlapped and may produce an interference pattern.
B) The beam reflected from the output coupler may be enlarged when
the HeNe-laser is beyond 500 mm away.
C) The reflection of the output coupler is dimmer than the reflection of
the rear optics.
A0303COMP

34. Center the reflected alignment laser beam through the hole of the
punctured card with the horizontal and vertical adjustment screws
on the output coupler mount.
35. Observe the reflection of the alignment laser beam off the rear
optics at the punctured card in front of the alignment laser.
36. Center the reflected alignment laser beam through the hole of the
punctured card with the horizontal and vertical adjustment screws
on the rear optics mount.

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 Installation and Alignment of the Unstable Resonator Optics (optional)

Finalization
37. Reinstall the energy monitor and the magnetic beam shielding.
38. Replace the front and rear panels.
39. Press <ENTER> to signify that the tube optics have been
exchanged. A new flushing cycle will be started and perform a leak
test (see Section 7.6).
40. Refill the laser tube with a lasing fill.
41. Recalibrate the energy monitor (see Section 7.7 on page 154).
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182 User Manual COMPex

 Nomenclature within this Chapter

8 REMOTE SOFTWARE
This chapter is intended for programmers, who want to design a user
shell to run the COMPex with an external computer. The necessary
software is provided in the remote software of the communication
interface.
The Remote Software is divided into three types of commands:
– Operation Commands (OPMODEs): Commands to operate the
COMPex,
– Parameter Commands: Commands to set parameter values,
– Polling Commands: Commands to request values and the state of
the COMPex.
Before reading this chapter, become familiar with the operations of the
COMPex as described in chapters 6 and 7.
The software described is COMPex software version 4.82. You may
know your software version with the polling command “VERSION?”
(see Section 8.5.34 on page 210).

NOTE
The COMPex F2 Series comes with software version 4.83. If an
upgrade from version 4.82 to version 4.83 is planned, it is necessary
to replace the EPROM in the Basis Module of the Communication
Interface with the new version “CPX BM01 V2.2”.

8.1 Nomenclature within this Chapter

Software states are emphasized with an eye-catcher ( ).•
ITALIC CAPITAL LETTERS give names of error states. Descriptions
and solutions are the same as the error messages in the Local
Software, as described in Section 9.
Typewriter Letters show an example.
In the explanations of OPMODES (page 184 ff.), the first line gives the
state message (received with OPMODE?). The following lines shortly
describe the state. The “Corresponding Errors” are also described in
this way.
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8.2 Remote Software Basics

This section deals with the basics of the remote software:
– how to choose the remote software part of communication interface,
– the required software syntax.
The interface required is described in Section 4.3.2 on page 63. Any
other hardware is not prescribed.

8.2.1 Choosing Remote Software

All communication with the COMPex is transferred via an RS232

interface attached to the Communication Interface. The
communication interface does not differentiate between a handheld
keypad attached to the RS232 or an external PC.
Thus, you do not have to choose between remote or local software. if
the codes originate from an external PC, the communication interface
automatically uses the remote software package.

8.2.2 Software Syntax

All software codes must be transferred in ASCII code, closed with a

carriage return. You may use any ASCII editor.
It does not matter, if you use upper case or lower case characters.

8.3 Operation Commands (OPMODE)

OPMODE is the abbreviation for “operating mode”. OPMODEs are all
the commands executable by the COMPex. They are listed in this
section in alphabetical order.

OPMODE State
The operator may inquire about the state of the COMPex at any given
time. All possible state messages are given in this section with the
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corresponding OPMODE.
Inquiries about the state may always be made using the polling
command OPMODE? (see Section 8.5 on page 205 ff.).
Many of the OPMODEs execute multiple-step programs on the laser
device; thus, they pass more than one state.

184 User Manual COMPex

 Operation Commands (OPMODE)

A state followed by a colon and a number indicates an error or a

warning. These errors and warnings are described under the
corresponding state.
Most OPMODEs have similar commands for the local software and will
also display messages at the handheld keypad to show the state (or
error). The error messages are listed in Section 9.2 on page 211 ff.

OPMODE Syntax
To execute a command, type
OPMODE=<COM>
followed by a carriage return (<COM> means the desired OPMODE).
Example: OPMODE=NEW FILL

8.3.1 OPMODE=CAPACITY RESET

Sets the halogen source capacity indicator to the value given with the
Parameter Command “CAP.SET=”.

Corresponding States

• None

Corresponding Errors

• None

8.3.2 OPMODE=CONT

The flushing procedure (see Section 8.3.5 on page 188) stops twice to
wait for user actions. The user continues the procedure with
OPMODE=CONT.

Corresponding States

• None

Corresponding Errors
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• None

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REMOTE SOFTWARE

8.3.3 OPMODE=ENERGY CAL

Starts the Energy Monitor Calibration procedure (see Figure 64 on

page 187; the steps are listed in the boxes, outside in capital letters
the necessary commands).

Corresponding States

• ENERGY CAL Energy Monitor Calibration procedure running.

• ENERGY CAL CONT Waiting for entering the reading from external
energy meter. The reading is entered using the Parameter
Command “EGY=” or “EGY SET=” (see Section 8.4.6 and Section
8.4.8 and step “Input ext. Energy Meter Reading”, Figure 64 on page
187).

Corresponding Errors

• None

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186 User Manual COMPex

 Operation Commands (OPMODE)

Start Remote Command:

Make a New Fill OPMODE=NEW FILL

Clean beam splitter

Select
MODE=HV
HV Constant Mode

Select
REPRATE=<xy>
max. reprate

Run laser for OPMODE=ON

2 minutes OPMODE=OFF

Install power meter

Select max. HV HV=<xy>

Select reprate 10 Hz REPRATE=10

Insert or remove Start energy

calibration OPMODE=ENERGY CAL
attenuators

Laser adjusts energy

monitor reading EGY?

Stop energy no Reading * Range except F2-Version: 99 - 200

OPMODE=OFF within range*?
calibration Range F2-Version only: 9,9 - 20
OPMODE?
OPMODE=OFF:7 yes OPMODE?
OPMODE=ENERGY CAL CONT
Input reading of
EGY=<xy>
A0303COMP

external energy meter

Check
energy calibration

End

Figure 64: Energy monitor calibration procedure

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REMOTE SOFTWARE

8.3.4 OPMODE=FLUSH <xy> LINE

Evacuates <xy> line for two seconds; <xy> represents the name of the
line; <xy> may be BUFFER, HALOGEN, INERT or RARE.
Example: OPMODE=FLUSH HALOGEN LINE
evacuates the halogen line.

Corresponding States

• FLUSH <xy> LINE

Flushing line <xy> in progress, where <xy> represents the line.

Corresponding Errors

• None

8.3.5 OPMODE=FLUSHING

Starts the Flushing Procedure to clean or replace tube optics (Figure

65 on page 189).

Corresponding States

• FLUSHING CONT
Laser tube filled with inert gas. During this time the tube optics may
be removed/replaced or cleaned. The Flushing Procedure pauses
until sending “OPMODE=CONT” (see Section 7.6 on page 134).

• FLUSHING LEAKTEST
Leak test is performed during the flushing procedure.

• FLUSHING LEAKTEST CONT

During flushing no leaks were detected. The Flushing Procedure
pauses until sending “OPMODE=CONT”.

Corresponding Errors

• FLUSHING:3 NO GAS FLOW was detected in one of the gas lines.

• FLUSHING LEAKTEST:3 NO GAS FLOW was detected during the

leak test.

• FLUSHING LEAKTEST CONT:30 LEAKTEST...ERROR.

Tube or optics are leaky. The flushing procedure pauses, until you
A0303COMP

enter “OPMODE=CONT”.

188 User Manual COMPex

 Operation Commands (OPMODE)

Note: TRANSFER POLLING

If no gas leak is detected,
the message
OPMODE=FLUSHING
"FLUSHING LEAKTEST CONT"
appears. Continue with Evacuate reservoir and refill to OPMODE?
"OPMODE=CONT". If a gas leak 500 mbar with inert gas FLUSHING
is detected, the message or
"FLUSHING LEAKTEST CONT:30" FLUSHING:3 (no gas flow)
appears. Continue with
"OPMODE=CONT" to reduce the
tube pressure to 1200 mbar inert gas. Evacuate reservoir and refill to OPMODE?
After that the reservoir pressure 500 mbar with inert gas FLUSHING
will be compensated automatically or
to atmospherical pressure. FLUSHING:3 (no gas flow)
Continue with "OPMODE=CONT"
to perform the leak test again. OPMODE?
Use the time of the leak test to Evacuate reservoir and refill to
1080 mbar with inert gas FLUSHING
search for the leak with a leak tester. or
FLUSHING:3 (no gas flow)

Compensate to atmosphere
Delay: 20 sec

Replace windows OPMODE?

(Check windows) FLUSHING CONT
OPMODE=CONT
OPMODE?
Reduce to 1080 mbar Fill to 3000 mbar with inert gas FLUSHING LEAKTEST
or
FLUSHING LEAKTEST:3 (no gas flow)

OPMODE?
Delay: 5 min FLUSHING LEAKTEST

OPMODE?
Leaktest: 10 min FLUSHING LEAKTEST

OPMODE=
CONT

Yes OPMODE?
Gas leak?
OPMODE? FLUSHING LEAKTEST CONT
FLUSHING
LEAKTEST CONT:30 No
OPMODE=CONT

OPMODE?
A0303COMP

Evacuate reservoir and refill to FLUSHING

1050 mbar with inert gas or
FLUSHING:3 (no gas flow)

OPMODE?
End OFF
or
OFF:0
Figure 65: Flushing procedure

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REMOTE SOFTWARE

8.3.6 OPMODE=HI

Performs a halogen injection. The partial pressure of halogen injected

depends on the value entered in the Gas Menu. With halogen source,
this command will be executed after 3 minutes.

Corresponding States

• None

Corresponding Errors

• None

8.3.7 OPMODE=LL OFF

Disables the Low Light function. If the Low Light function is activated,
laser operation will be interrupted if more than 30 % of all laser pulses
are missing within a 10 sec. interval.

Corresponding States

• LL OFF
Low Light function disabled

Corresponding Error

• OFF:26
LOW LIGHT criteria was detected

8.3.8 OPMODE=MANUAL FILL INERT

Opens the inert valve for 10 seconds to perform a manual fill of inert
gas into the tube. The command will only be accepted if
“OPMODE=OFF:0” and gas reservoir pressure below 3800 mbar.

Corresponding States

• MANUAL FILL INERT

Inert valve open.
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Corresponding Errors

• None

190 User Manual COMPex

 Operation Commands (OPMODE)

8.3.9 OPMODE=NEW FILL

Starts the new fill procedure.

Corresponding States

• NEW FILL
The new fill procedure has been started.

• NEW FILL,EVAC
Evacuating the tube.

• NEW FILL,WAIT
(only with a fluorine source)
Performing leak test in evacuated tube or during the new fill
procedure while halogen source is heated.

• NEW FILL, FILL

Refilling tube with a new gas fill

Corresponding Errors

• NEW FILL:3
NO GAS FLOW was detected in one of the gas lines.

8.3.10 OPMODE=OFF

Switches laser off.

Corresponding States

• OFF
Laser is off, no messages or warnings.

• OFF:0
Laser is off, no messages or warnings (only available with certain
lasers).

• OFF,WAIT
While starting the laser: The laser is waiting for power supply
standby and gas circulation fan powering up (duration: approx. 5
seconds).
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Corresponding Errors

• OFF:1
Laser off, an INTERLOCK occurred.

• OFF:2
Laser off, PRESET ENERGY TOO HIGH.
Charging HV exceeds HVmax.

• OFF:4
Laser off, a WATCHDOG has been activated.

• OFF:5
Laser off, FATAL ERROR, LWL-DATALINKfailed
(LWL Datalink means the Data Ring).

• OFF:6
Laser off, POLLING; at least one laser module did not respond.

• OFF:7
Laser off, ENERGY CAL. ERROR. Monitor calibration values can
not be adjusted within a range of 99 to 200 (F2-version: 9.9 to 20).

• OFF:8
Laser off, NEW GAS FILL NEEDED. Charging HV exceeds HVmax.

• OFF:9
Laser off, NO VACUUM.Tube may be leaky. A Safety Fill has been
performed successfully. All activities have been interrupted.

• OFF:10
(with a fluorine source only)
Laser off, LOW PRESSURE. Because the sixth fluorine fill did not
succeed, the fluorine source is detected to be empty.

• OFF:11
(with a halogen source only)
Laser off, NO CAPACITY LEFT. The halogen source is detected to
be empty.

• OFF:12
(with a halogen source only)
Laser off, ERROR TEMPERATURE MEASUREMENT. The halogen
source temperature measurement failed.

• OFF:13
(with a fluorine source only)
Laser off, FLUORINE VALVE NOT OPEN. The fluorine source valve
test failed or a malfunction during filling.

• OFF:21
A0303COMP

WARM-UP 8min. This is the warm-up phase of the laser devices,

required by the thyratron.

• OFF:26
Laser off, LOW LIGHT. Energy monitor does not detect light pulses
after trigger pulses. Caused, if at least 30% of all pulses within 10
seconds are missing.

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 Operation Commands (OPMODE)

• OFF:27
Laser off, WRONG PRESSURE. The tube pressure is out of range.
Tube pressure must be within ± 20 % of default tube pressure as
specified by the Gas Menu.

• OFF:29
Laser off, memory check failed, Gas Menu data are lost.

• OFF:31
Laser off, TIMEOUT. There was no data transfer via the RS232
within one second.

• OFF:33
(halogen source only)
Laser off, HALOGEN PRESSURE TOO HIGH. The preset partial
pressure for halogen in the Gas Menu is too high for a halogen
source (> 15mbar).

• OFF:35
(halogen source only)
Laser off, NOT AVAILABLE.A function not possible with a halogen
source was chosen (e.g. the EGY PGR Mode).

• OFF:39
Laser off, INERT VALVE CLOSED. The inert valve was closed after
a manual fill of inert gas (see Section 6.7 on page 116), because:
– the valve has been open for 10 seconds or
– the tube pressure exceeded 3800 mbar.

• OFF:41
Laser off, entered energy value exceeds +5 % of the set value in the
menu data.

8.3.11 OPMODE=ON

Starts the laser (with a starting delay of 4.1 sec, see Section 8.3.1,
OFF,WAIT). The starting procedure is interruptable by sending
“OPMODE=OFF”

Corresponding States

• ON Laser on, no warnings or messages.

• ON:0
Laser on, no warnings or messages (only available with certain
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lasers).

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REMOTE SOFTWARE

Corresponding Warnings

• ON:2
(EGY PGR Mode only)
Laser on, PRESET ENERGY TO HIGH. Charging HV exceeds
Charging Threshold Voltage HVmax.

• ON:03
(some lasers only)
Laser on, Duty Cycle exceeded (more than 12000 pulses in any 20
minutes).

• ON:8
(EGY NGR Mode only)
Laser on, NEW GAS FILL NEEDED. Charging HV exceeds
Threshold Voltage HVrepl.

• ON:9
(fluorine source only)
Laser on, NO VACUUM. During a halogen injection, the evacuation
of the source did not reach 30 mbar after 130 sec.

• ON:10
(fluorine source only)
Laser on, LOW PRESSURE. During a New Fill Procedure, the sixth
attempt to fill did not succeed. Fluorine source empty.

• ON:13
(fluorine source only)
Laser on, FLUORINE VALVE NOT OPEN. The fluorine valve test
failed.

• ON:34
(halogen source only)
Laser on, HI IN PREP. Halogen injection in preparation.

• ON:36
(COD Module only)
Laser on, COD. Charge On Demand is on.

• ON:37
Laser on, WARNING! REPRATE FOR COD > 50 Hz. Charge On
Demand is on, but you input a repetition rate greater than 50 Hz.
Because the maximum possible repetition rate with COD is 50 Hz,
the value has been set to 50 Hz.

• ON:40
Laser on, input energy is too low. The laser is running with minimum
possible HV, but output energy is still higher than setting.
A0303COMP

• ON:41
Laser on, entered energy value exceeds +5 % of the set value in the
menu data.

194 User Manual COMPex

 Operation Commands (OPMODE)

8.3.12 OPMODE=PASSIVATION FILL

Starts a passivation fill.

Corresponding States

• PASSIVATION FILL
Passivation fill is running.

Corresponding Errors

• PASSIVATION FILL:3
NO GAS FLOW; While refilling, during the passivation fill, no gas
flow was detected in halogen line.

8.3.13 OPMODE=PGR

Performs a partial gas replacement.

Corresponding States

• None

Corresponding Errors

• None

8.3.14 OPMODE=PURGE <xy> LINE

Fills <xy> line with the gas connected to the inert gas line, where <xy>
represents the name of the line; <xy> may be BUFFER, HALOGEN,
INERT or RARE.
Example: OPMODE=PURGE HALOGEN LINE
fills the halogen line with inert gas.

Corresponding States

• PURGE <xy> LINE

Filling of <xy> line is in progress, where <xy> represents the name
of the line.
A0303COMP

Corresponding Errors

• None

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REMOTE SOFTWARE

8.3.15 OPMODE=PURGE RESERVOIR

Starts the purge reservoir procedure.

Corresponding States

• PURGE RESERVOIR
Purge reservoir procedure is running.

Corresponding Errors

• PURGE RESERVOIR:3
NO GAS FLOW; While refilling, during purge reservoir procedure, no
gas flow was detected in one of the gas lines.

8.3.16 OPMODE=SAFETY FILL

This OPMODE can only be executed by the communication interface.

It occurs due to an error during laser tube evacuation.

Corresponding States

• SAFETY FILL
Evacuation time exceeded. Did not reach 30 mbar within 11.5 min.
So a safety fill is being performed, i.e. the laser tube is filled with the
gas connected to “Buffer” up to a pressure of 1050 mbar.

Corresponding Errors

• SAFETY FILL:3
NO GAS FLOW; While performing a safety fill, no gas flow was
detected in the inert gas line.

8.3.17 OPMODE=SKIP

Terminates the thyratron warm-up period.

Corresponding States

• None
A0303COMP

Corresponding Errors

• None

196 User Manual COMPex

 Parameter Commands

8.3.18 OPMODE=TRANSPORT FILL

Starts a transport fill.

Corresponding States

• TRANSPORT FILL A transport fill is running.

Corresponding Errors

• TRANSPORT FILL:3 NO GAS FLOW;

While refilling, during the passivation fill, no gas flow was detected at
the buffer line.

8.4 Parameter Commands

To execute a command, send
<COM>=XXX
followed by a carriage return (<COM> means a Parameter Command,
XXX the parameter to be set).
All parameter commands are written without spaces on either side of
the equals sign.
Numerical parameters must be integer values except for HV, for which
one decimal place is accepted.
Examples:
COD=ON
COUNTER=RESET
FILTER=8
HV=25.6

8.4.1 BUFFER=

Sets partial pressure of gas connected to buffer line. After verification

A0303COMP

of conformity with the prescribed parameter range, it will be entered

into the selected Gas Menu.

Available

• in OFF operating modes.

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Parameter Range

• depends on the factory settings of the Gas Menu.

8.4.2 CAP.SET=

Sets the value for the halogen source capacity (in %). To assume the
new capacity value, this command is to be followed by sending the
command “OPMODE=CAPACITY RESET”.

Available

• in OFF operating modes Parameter Range

• 0 to 120

8.4.3 COD=

(with Charge on Demand only)

Switches the Charge on Demand (COD) on (“ON”) or off (“OFF”). See
also Section 11 (Glossary).

NOTE
While running laser with COD on, use repetition rates not higher than
50 Hz. Higher repetition rates will cause missing pulses and thus are
set to 50 Hz.

Available

• in OFF operating modes

Parameter Range

• ON, OFF

8.4.4 COUNTER=

Resets user counter to zero.

Available
A0303COMP

• in OFF operating modes.

Parameter Range

• RESET

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 Parameter Commands

8.4.5 COUNTS=

Sets value for a countdown. The laser now accepts only external
trigger pulses and only as many as specified by the COUNTS value.
Afterwards the laser stops and COUNTS is reset to zero.

Available

• • in OFF operating modes

Parameter Range

• • 0 to 65535

8.4.6 EGY=

Has three functions:

– In energy constant mode it sets the energy value at which the laser
shall be stabilized (“preset energy”). Will be reset during the next
start of the laser device. On some lasers this function is done by the
parameter command “EGY SET”.
– Sending EGY=0 in the energy constant mode resets the energy
value to the to the set value, defined by the parameter
PRESET_EGY in the menu data.
– During energy calibration it is needed to input the external energy
reading.

Available

• in ON and OFF operating modes only.

Parameter Range

• depends on the factory settings of the Gas Menu.

8.4.7 EGY RANGE=

Sets the energy tolerance range in percent, relative to preset beam

energy in EGY PGR- or EGY NGR-mode. Setting this parameter is
A0303COMP

necessary for the indication of “POWER STABILIZATION

ACHIEVED”.

Available

• in OFF operating modes only

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Parameter Range

• 1 to 100

8.4.8 EGY SET=

(only some lasers) Sets the beam energy (“preset energy”) for the
EGY PGR- and EGY NGR-mode, otherwise it is ignored. Will be reset
the next time the laser device is started.

Available

• in ON and OFF operating modes only

Parameter Range

• depends on the factory settings of the Gas Menu

8.4.9 FILTER=

Sets the number of pulses used by the program to calculate an

average beam energy. If the input is out of parameter range, the last
FILTER value is kept. If you input “0”, the program automatically sets a
filter value, dependent on the repetition rate.

Available

• in all operating modes

Parameter Range

• 0, 1, 2, 4, 8, 16

8.4.10 FILTER CONTAMINATION=

Resets the halogen filter capacity in percent (after the halogen filter
have been replaced).

Available
A0303COMP

• in all operating modes

Parameter Range:

• RESET

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 Parameter Commands

8.4.11 GASMODE=

Switches between premix and single gas operation.

Available

• in OFF operating modes only

Parameter Range

• SINGLE GASES, PREMIX

8.4.12 HALOGEN=

Sets partial pressure of gas connected to halogen line.

NOTE
The partial pressure for halogen cylinders must be about 20 times
higher than that for the halogen source because in gas cylinders there
is 5% halogen dissolved in 95% inert gas.

After verification of conformity with the prescribed parameter range, it

will be entered into the selected Gas Menu.

Available

• in OFF operating modes only

Parameter Range

• depends on the factory settings for the Gas Menu

8.4.13 HV=

Sets the charging voltage for the HV constant mode. Ignored in other
modes.

Available

• in all operating modes

A0303COMP

Parameter Range

• depends on the factory settings for the gas menu. This command
accepts values to one decimal place

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8.4.14 INERT=

Sets partial pressure of gas connected to inert line. After verification of

conformity with the prescribed parameter range, it will be entered into
the selected gas menu.
Available
• in OFF operating modes only
Parameter Range
• depends on the factory settings for the gas menu

8.4.15 MENU=

Selects the Gas Menu (by number).

This determines:
– name of the gas,
– wavelength,
– default gas mode (see GASMODE),
– partial pressures of the gases,
– default tube pressure (see OFF 27),
– HVmin,HVmax,
– default beam energy constant value.
MENU also resets the actual Gas Menu to factory settings. To do so,
send:
MENU=RESET

Available

• in OFF operating modes only

Parameter Range

• 1 to 6 (depends on the number of the Gas Menu) and RESET

A0303COMP

8.4.16 MODE=

Selects the running mode (HV, EGY PGR or EGY NGR).

Available

• in OFF operating modes, and in ON operating modes once all gas

handling procedures have been completed.

202 User Manual COMPex

 Parameter Commands

Parameter Range

• HV, EGY PGR, EGY NGR

8.4.17 OPMODE=

See previous section.

8.4.18 RARE=

Sets partial pressure of gas connected to rare gas line. After

verification of conformity with the prescribed parameter range, it will be
entered into the selected Gas Menu.

Available

• in OFF operating modes

Parameter Range

• depends on the factory settings of the Gas Menu

8.4.19 REPRATE=

Sets the internal repetition rate, if TRIGGER=INT has been set. Else
the value is remembered as repetition rate, when switched to
TRIGGER=INT.

Available

• in ON and OFF operating modes only

Parameter Range

• depends on the factory settings of the Gas Menu. High repetition

rate may be declined for high HV values.

8.4.20 ROOMTEMP=
A0303COMP

(with HCl source only)

Informs the HCl source whether the room temperature is above 22 °C
(72 °F) (“HIGH”) or not (“LOW”), because the chemical reaction is
temperature sensitive. Starting up the laser device resets
ROOMTEMP to HIGH (default value).

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REMOTE SOFTWARE

Available

• in all operating modes

Parameter Range

• HIGH, LOW

8.4.21 TEMP CONTROL=

(with temperature control module only)

Switches the temperature control module on (“ON”) or off (“OFF”).

Available

• in all operating modes

Parameter Range

• ON, OFF

8.4.22 TIMEOUT=

Enables or disables the time-out control of the RS232. If TIMEOUT is

on and there is no data transfer to or from RS232, laser is turned off
and the Polling Command OPMODE? displays OFF:31.

Available

• in OFF operating modes only

Parameter Range

• ON, OFF

8.4.23 TRIGGER=

Specifies the triggering source, internal (“INT”) or external (“EXT”).

A0303COMP

Available

• in ON and OFF operating modes only

Parameter Range

• INT, EXT

204 User Manual COMPex

 Polling Commands

8.5 Polling Commands

To execute a Polling Command, type
<COM>
followed by a carriage return (<COM> means a Polling Command).
The actual parameter setting is displayed.
All polling commands are available in all operating modes.
Examples
OPMODE?
CAP.LEFT?
FILTER CONTAMINATION?

8.5.1 ACCU?

(with halogen source only)

Displays the current pressure in the accumulator of the halogen
source. If there is no halogen source the answer is zero. If there is no
accumulator (F2-I-Version) the answer is zero, too.

8.5.2 BUFFER?

Displays the current partial pressure of the buffer gas in mbar.

8.5.3 CAP.LEFT?

(with halogen source only)

Displays the current remaining capacity. The response ranges from 1-
120 (Fluorine source) or 1-100 (Chlorine source). This is equivalent to
0-100 percent. If there is no halogen source the answer is zero.

8.5.4 COD?
A0303COMP

(with Charge on Demand only)

Displays the COD delay in microseconds. This value depends only on
the laser type.

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8.5.5 COUNTER?

Displays the number of pulses accumulated (depending on the

software version, divided by 1000) since the user counter was last
reset.

8.5.6 COUNTS?

Displays the value input for the countdown counter (not the
momentary counter).

8.5.7 EGY?

The feedback differs depending on the actual operating mode:

– OFF operating mode: Displays the preset beam energy value in mJ.
– ON operating mode: Displays the measured beam energy value in
mJ. If polled again before the next trigger pulse, it will display “0”.
– ENERGY CAL operating mode: Displays the momentary monitor
reading (no units).

8.5.8 EGY SET?

Displays the preset beam energy in mJ. Only provided with certain
lasers.

8.5.9 EGY RANGE?

Displays the current setting of the energy tolerance range in percent.

8.5.10 FILTER?

Displays the number of pulses used by the program to calculate a

mean value of the beam energy. If “0” is displayed, the program has
automatically set a value, dependent on the repetition rate.
A0303COMP

8.5.11 FILTER CONTAMINATION?

Displays the capacity of the halogen filter in percent.

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 Polling Commands

8.5.12 GASMODE?

Displays the current gas mode (PREMIX or SINGLE GASES).

8.5.13 HALOGEN?

Displays the current partial pressure of the halogen gas in mbar.

8.5.14 HV?

Displays the value of the charging voltage HV.

8.5.15 INERT?

Displays the current partial pressure of the inert gas in mbar.

8.5.16 INTERLOCK?

Displays a listing of all activated interlocks (separated by commas). If

no interlocks are activated, the response is “NONE”. After polling, the
interlock messages are cleared.

8.5.17 LEAKRATE?

(with fluorine source only)

During new fill procedure; after the new gas has been filled, the laser
stands by to check for gas loss. LEAKRATE? displays the loss of
pressure in mbar per 2 minutes.

8.5.18 MENU?

Displays the current Gas Menu number, wavelength and gas mixture.
A0303COMP

8.5.19 MODE?

Displays the current running mode (“HV”, “EGY PGR” or “EGY NGR”).

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REMOTE SOFTWARE

8.5.20 OPMODE?

Displays the actual OPMODE state (see Section 8.3 on page 184).

8.5.21 POWER STABILIZATION ACHIEVED?

Displays, whether the preset power stabilization EGY RANGE was

achieved (replies “YES”) or not (replies “NO”).

8.5.22 PRESSURE?

Displays the laser tube pressure.

8.5.23 PULSE DIFF?

Requests the difference between trigger pulses and pulses received

by the energy monitor.
If polled or if the laser starts, pulse difference is set to zero.
Negative values mean there were fewer light pulses than trigger
pulses (and vice versa).
While the laser is ON, the value may differ from the actual value by ±1.

8.5.24 RARE?

Displays the current partial pressure of the rare gas in mbar.

8.5.25 RESERVOIR TEMP?

(only with optional temperature control)

Displays the current laser tube temperature in °C.

8.5.26 REPRATE?
A0303COMP

Displays the current repetition rate value.

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 Polling Commands

8.5.27 ROOMTEMP?

(only with HCl source)

Displays the setting for the room temperature value of the source. If no
HCl source is attached, the answer is HIGH.

8.5.28 TEMP?

(only with fluorine source)

Displays temperature of the heater of the integrated fluorine source. If
no fluorine source is attached, the return is ‘0’.
This can be polled in all operating modes; however, the current heater
temperature is only displayed in NEW FILL Mode.

8.5.29 TEMP CONTROL?

(only with temperature control module)

Displays the state of the (tube) temperature control module (“ON”
or “OFF”). If no temperature control module is build-in, the answer is
“N/A”.

8.5.30 TIMEOUT?

Displays, whether the CI is running in time-out control condition (“ON”)

or not (“OFF”).

8.5.31 TOTALCOUNTER?

Displays the number of pulses (divided by 1000) in the laser´s lifetime,

as recorded by the non-resetable total pulse counter.

8.5.32 TRIGGER?

Displays the current trigger setting (“INT” for internal trigger, “EXT” for
external trigger).
A0303COMP

8.5.33 TYPE OF LASER?

Displays the model of your laser.

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REMOTE SOFTWARE

8.5.34 VERSION?

Displays the control software version executed by the communication

interface.

8.6 Priority of ON Code Messages

If the reply to the command OPMODE? is an ON code, it is possible
that two or more ON-codes apply. In this case the COMPex replies
with the ON code having the highest priority.
The priority for each code is listed in the following table. A higher
number corresponds to a higher priority. If two ON codes have the
same priority, the COMPex displays the first ON code to occur.

NOTE
For all other codes there are no priorities. This means that the last
code displayed is the most current and the previous code has been
deleted.

Priority Message Meaning

5 ON:03 Duty Cycle exceeded
4 ON:9 NO VACUUM
ON:10 LOW PRESSURE
ON:13 FLUORINE VALVE NOT OPEN
3 ON:2 PRESET ENERGY TOO HIGH
ON:8 NEW GAS FILL NEEDED
ON:40 PRESET ENERGY TOO LOW
2 ON:34 HI in preparation
1 ON:36 COD on
ON:37 COD on at repetition rate >50 Hz
0 ON Laser on, no warning message
ON:0 Laser on, no warning message
A0303COMP

210 User Manual COMPex

 Overview of this Section

9 TROUBLESHOOTING
This chapter is intended to help you to solve possible problems with
the COMPex. It presupposes that you have read this manual,
especially the safety instructions.
This chapter does not include tasks that can only be performed by
Service as they can endanger the health and life of an untrained
person. Never try to service the COMPex yourself!

9.1 Overview of this Section

This section is structured according to the symptoms of possible
problems with the COMPex. It contains the following sections:

- Warnings and Error Messages page 211

- Interlocks page 226
- Laser Fires a Beam Shot page 229
without a Trigger Pulse (Self-Firing)
- No Trigger Signal page 229
- Corrosion in Gas Lines and Gas Connections page 229
- Gas Leak page 231
- Laser Device Does Not Start page 233
- Beam Energy Too Low page 234
- Low Light page 239
- Fuses page 243

9.2 Warnings and Error Messages

This section describes warning and error messages sent by the
Communication Interface. They are different whether you use a
handheld keypad (Local Software) or an external PC (Remote
Software).
– Within the section the messages are in alphabetical order with
respect to the messages of the handheld keypad. The messages
A0303COMP

appropriate to the Remote Software are given in brackets.

– To allow quick access for users of the Remote Software, all warning
and error codes are given in the following table in alphabetical order

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.
Remote Software Local Software Message Page
Message
FLUSHING LEAKTEST:3 No Gas Flow page 219
FLUSGING LEAKTEST Leak! - Check Windows page 218
CONT: 30
NEW FILL:3 No Gas Flow page 218
OFF:1 Interlock XXX page 218
OFF:2 Preset Energy Too High page 223
OFF:4 Fatal Error, Watchdog page 216
OFF:5 Fatal Error, LWL-Datalink page 214
OFF:6 Polling page 222
OFF:7 Energy Cal. Error page 213
OFF:8 New Gas Fill Needed page 219
OFF:9 No Vacuum page 220
OFF:10 Low Pressure page 218
OFF:11 No Capacity Left page 219
OFF:12 Error Temperature page 213
Measurement
OFF:13 Fluorine Valve Not Opened page 217
OFF:21 Warm-up 8 min page 224
OFF:26 Low Light page 218
OFF:27 Wrong Pressure page 225
OFF:29 RAM Check Error page 223
OFF:31 Timeout page 224
OFF:33 Halogen Pressure Too High page 217
OFF:35 Not Available page 221
OFF:39 Inert Valve Closed page 217
OFF:41 OFF:41 page 221
ON:2 Preset Energy Too High page 223
ON:03 Duty Cycle Exceeded page 213
ON:8 New Gas Fill Needed page 219
ON:9 No Vacuum page 221
ON:10 Low Pressure page 218
ON:13 Fluorine Valve Not Opened page 217
ON:34 HI In Prep page 217
ON:37 Warning! page 224
repetition rate for COD 50 Hz
ON:40 ON:40 page 222
ON:41 ON:41 page 222
PASSIVATION FILL:3 No Gas Flow page 219
PURGE RESERVOIR:3 No Gas Flow page 219
SAFETY FILL:3 No Gas Flow page 219
TRANSPORT FILL:§ No Gas Flow page 219
A0303COMP

With Local Software there is an additional error message that deals

with the handheld keypads communication (“Fatal Error, Com-
Datalink”, page 213). There is of course no corresponding error with
the Remote Software.

212 User Manual COMPex

 Warnings and Error Messages

9.2.1 Duty Cycle Exceeded (ON:03)

Reason:
The laser has exceeded its duty cycle (more than 12000 pulses in any
20 minutes).This warning message is only applicable to some lasers.
Solution:
1. Run the laser with a lower repetition rate for a while.

9.2.2 Energy Cal. Error (OFF:7)

Reason:
During the Energy Calibration Procedure, the energy reading could not
be adjusted within a range of 99-200 (F2-version 9.9-20). The energy
calibration procedure is described comprehensively in Section 8.7.
Solution:
1. Add or remove an attenuator as described in Section 8.7.

9.2.3 Error Temperature Measurement (OFF:12)

This is an error message regarding the fluorine source. See fluorine

source manual.

9.2.4 Fatal Error, COM-Datalink (-)

(only with handheld keypad, thus there is no Remote Software code)

Communication between handheld keypad and Communication
Interface is out of order.

Reason (1):
Handheld Keypad and laser are not connected properly.

Preparation for Solution:

1. Switch off laser device.
A0303COMP

Solution:
2. Re-connect handheld keypad to laser.

Reason (2):
Communication link damaged.

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TROUBLESHOOTING

Solution:
1. Call service.

9.2.5 Fatal Error, LWL-Datalink (OFF:5)

LWL is the german abbreviation for ‘Lichtwellenleiter‘, a Fiber Optics

Light Waveguide (FOL).

Reason (1):
FOL data ring connected improperly.
Preparation for Solution:
1. Switch off laser device.
2. Remove right side panel.
3. Remove Communication Interface access panel.
4. Remove Communication Interface (FOLs remain connected).

Solution:
5. Ensure that all FOLs are connected properly. All FOLs are
equipped with a clip. The clip is marked with an abbreviation
corresponding to the port to which it must be connected.

Reason (2):
FOL data ring interrupted or a module damaged.

Preparation for Solutions:

1. Switch off laser device.
2. Remove right side panel.
3. Remove Communication Interface access panel.
4. Remove Communication Interface (FOLs remain connected).

Solutions:
Switch off laser device and access FOLs.
5. Ensure that all FOLs are properly connected to their ports (Energy
Monitor, Communication Interface, Basic Module).
6. Check that all FOLs have a min. bending radius of 50 mm.
A0303COMP

214 User Manual COMPex

 Warnings and Error Messages

7. Ensure that the Communication Interface is sending a (red) light

pulse.
After switching on the 24 V power supply, the Communication
Interface must send a light pulse for a few seconds.
To do so, you need help of a second person. Act as follows:
–I. (1st person) Disconnect the Data Out FOL on the
Communication Interface.
–II. (2nd person) Switch on the 24 V power supply with the key
switch.
–III. (1st person) Watch for a light signal in the Data Out socket of
the Communication Interface for several seconds. If there is none
the Communication Interface is damaged. Call service.
–IV. Switch off 24 V power supply with the key switch.
–V. Re-connect the Data Out FOL to the Communication Interface.
8. Ensure that the FOL data ring is closed:
To do so, you need help of a second person. Act as follows:
–I. (1st person) Disconnect the Data In FOL on the Communication
Interface.
–II. (2nd person) Switch on the 24 V power supply with the key
switch.
–III. (1st person) Watch for a light signal in the Data In FOL for
several seconds. If none appears, a module is damaged. Call
service
–IV. Switch off 24 V power supply with the key switch.
–V. Re-connect the Data In FOL to the Communication Interface.
A0303COMP

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9. Check for defective FOLs.

To do so, you need help of a second person. Act as follows:
–I. (1st person) Disconnect Data In FOL from Energy Monitor.
–II. (2nd person) Switch on the 24 V power supply with the key
switch.
–III. (1st person) Watch for a light signal in the Data In FOL for
several seconds. If one appears, FOL is in order. If not, remove
the FOL.
–IV. (2nd person) Switch off 24 V power supply with the key switch.
–V. (1st person) Disconnect Data In FOL from Basic Module.
–VI. (2nd person) Switch on the 24 V power supply with the key
switch.
–VII. (1st person) Watch,for a light signal in the Data In FOL for
several seconds. If one appears, FOL is in order. If not, remove
the FOL.
–VIII. (2nd person) Switch off 24 V power supply with the key
switch. If the COMPex has no built-in halogen source, leave out
steps IX to XII.
–IX. (1st person) Disconnect Data In FOL of halogen source.
–X. (2nd person) Switch on the 24 V power supply with the key
switch.
–XI. (1st person) Watch for a light signal in the Data In FOL for
several seconds. If one appears, FOL line is in order. If not,
remove the FOL line.
–XII. (2nd person) Switch off 24 V power supply with the key switch.
10. If all FOLs are working, one of the modules is damaged:
Call service.

Reason (3):
Software is not compatible with a newly-replaced module.

Solution:
1. Call service.
A0303COMP

9.2.6 Fatal Error, Watchdog (OFF:4)

Reason:
Basic Module did not respond.

216 User Manual COMPex

 Warnings and Error Messages

Solution:
1. Switch off laser device, wait a minute and start again. If trouble
remains, call service.

9.2.7 Fluorine Valve Not Opened (OFF:13; ON:13)

This is a warning or error message regarding the fluorine source. See

fluorine source manual.

9.2.8 Halogen Pressure Too High (OFF:33)

This is an error message regarding the halogen source. See halogen

source manual.

9.2.9 HI in Prep (ON:34)

This is a warning message regarding the halogen source.

Reason:
The halogen source is just preparing a halogen injection. This may last
a few minutes.

Solution:
1. Wait a few minutes.

9.2.10 Inert Valve Closed (OFF:39)

Reason:
A manual fill of inert gas has been ended.
This message is both a warning and an error message:
– Warning: the inert valve was open for 10 seconds and is now closed.
– Error message: the tube pressure exceeded 3800 mbar during the
fill. Therefore, the fill has been terminated.
A0303COMP

Solution:
1. Warning: Not necessary.
2. Error message: Reduce tube pressure.

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9.2.11 Interlock XXX (OFF:1)

Reason:
Major malfunction (XXX” represents the name of an interlock).
With a handheld keypad the name of the interlock is displayed.
When the laser is controlled with Remote Software, the interlock can
be identified using the command INTERLOCK?.

Solution:
1. See Section 9.3.

9.2.12 Leak!-Check Windows

(FLUSHING LEAKTEST CONT:30)

Reason:
Leak test in the flushing procedure has failed.

Solution:
1. Check windows for leaks. After solving the problem proceed by
pressing <ENTER> (with Remote Software: send
OPMODE=CONT). The flushing procedure repeats to evacuate
the tube.

9.2.13 Low Light (OFF:26)

The Energy Monitor did not detect a beam pulse after a trigger pulse.

Reason:
At least 30% of all pulses within 10 seconds are missing.

Solution:
1. see Section 9.10.
A0303COMP

9.2.14 Low Pressure (OFF:10; ON:10)

This is an error message regarding a halogen source. See halogen

source manual.

218 User Manual COMPex

 Warnings and Error Messages

9.2.15 New Gas Fill Needed (OFF:8; ON:8)

This message only occurs in Energy Constant Mode. It may be either

a warning or an error message:
– Warning: the charging voltage exceeded the Threshold Voltage
HVrepl.
– Error message: the charging voltage exceeded the maximum
possible voltage HVmax.

Reason (1):
Laser gas quality insufficient.

Solution:
1. Perform a New Fill (see Section 7.4.3).

Reason (2):
EGY Constant value too low, thus HV lower than lasing threshold.

Solution:
1. Raise EGY Constant value (see Section 6.5.2)
If trouble remains, follow the flowchart “Beam Energy too Low” (see
Section 9.9).

9.2.16 No Capacity Left (OFF:11)

This is an error message regarding the halogen source. See halogen

source manual.

9.2.17 No Gas Flow (XX:3)

There was no gas flow detected in one of the gas lines. With Remote
Software XX” represents the name of the OPMODE at which the error
occurred.

Reason (1):
A0303COMP

Cylinder Valve not opened.

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TROUBLESHOOTING

Solution:
1. Open cylinder valve.

Reason (2):
Pressure regulator setting wrong

Solution:
1. Set pressure regulator to 4 bar.

Reason (3):
Gas cylinder pressure low

Solution:
1. Replace gas cylinder (see Section 7.4.4).

9.2.18 No Vacuum (OFF:9)

This error message is displayed after a successful safety fill.

NOTE
With a handheld keypad, do not confuse the warning and the error
message “No Vacuum”. The warning is a function of the optional
halogen source while injecting or filling the laser tube with
halogen.The error only occurs after an unsuccess-ful evacuation of
the laser tube.

1. Symptom:
Vacuum Pump did not run.

Reason:
Vacuum Pump defective.

Preparation for Solution:

1. Switch off laser device.
A0303COMP

Solution:
2. Ensure that the vacuum pump power supply line is properly
connected to the COMPex.
3. Check fuse of vacuum pump. Replace, if necessary.
4. Check power supply line of vacuum pump.

220 User Manual COMPex

 Warnings and Error Messages

2. Symptom:
Vacuum Pump continues to run.

Reason (1):
Laser tube leaky.

Solution:
1. Test laser tube for a leak (see Section 9.7.2). In case of a leak,
tighten if possible. Otherwise call service.
2. Perform a leak test in the gas line to the vacuum pump. If leaky,
replace line.
3. Check halogen filter for leak. For this purpose check the O-rings
inside the halogen filter housing for damage and replace the O-
rings if necessary. Check if the butterfly nuts of the halogen filter
are tightened (see Section 7.9.2). If the problem remains, call
service.

9.2.19 No Vacuum (ON:9)

The COMPex can be operated with an optionally available halogen

source. This warning message is only generated when a predefined
minimum pressure is not reached after evacuating the gas system
inside the halogen source.
To solve the problem follow the instructions described in Section
9.2.18. Additionally refer to the instructions in halogen source manual
concerning this warning message.

9.2.20 Not Available (OFF:35)

The COMPex can be operated with an optionally available halogen

source. This warning message is only generated, when attempting to
call a function which is not available when operating the COMPex with
a halogen source (e. g.: performing a partial gas replacement (PGR)).

9.2.21 OFF:41 (OFF:41)

This error triggers the message OFF:41 in both the Local and Remote
A0303COMP

Software.

Reason:
In Energy Constant Mode, the entered energy value exceeds the set
value in the menu data for more than +5 %. The laser is OFF.

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Solution:
1. If necessary, enter a valid value.

9.2.22 ON:40 (ON:40)

This error triggers the message ON:40 in both the Local and Remote
Software.

Reason:
In Energy Constant Mode, the HV is adjusted to the lowest possible
value but the beam energy cannot be stabilized as low as requested.

Solution:
1. Raise Energy Constant Value (see Section 6.5.2).

9.2.23 ON:41 (ON:41)

This error triggers the message ON:41 in both the Local and Remote
Software.

Reason:
In Energy Constant Mode, the entered energy value exceeds the set
value in the menu data for more than +5 %. The Laser is ON.

Solution:
1. If necessary, enter a valid value.

9.2.24 Polling (OFF:6)

Reason:
At least one module in the laser device did not respond.
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222 User Manual COMPex

 Warnings and Error Messages

Solution:
1. Switch off laser device and start laser again. If problem remains,
call service.

9.2.25 Preset Energy too High (OFF:2; ON:2)

This message can only occur if the Running Mode is an Energy

Constant Mode. It may be either a warning or an error message.
– If a warning: the charging voltage exceeded the Threshold Voltage
HVrepl.
– If an error: the maximum possible voltage HVmax.

Reason (1):
Laser gas quality insufficient.

Solution:
1. Perform a New Fill (see Section 7.4.3).

Reason (2):
EGY Constant value too low, thus HV lower than lasing threshold.

Solution:
1. Raise EGY Constant value (see Section 6.5.2) If problem remains,
follow the flowchart “Beam Energy too Low” (see Section 9.9).

9.2.26 RAM Check Error (OFF:29)

This error message indicates incorrect menu data of the Control

Interface’s Zero Power RAM. The menu data can be downloaded even
in this failure szenario.

Reason:
RAM check failed. Communication Interface or connections damaged.
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Solution:
1. Call service.

9.2.27 Timeout (OFF:31)

This error message appears if no data transfer occurred via the RS232
within one second.

Reason (1):
RS232 plug not properly connected.

Solution:
1. Check RS232 plug for proper connection.

Reason (2):
Control software failure.

Solution:
1. Switch off laser device and start laser device again.

Reason (3):
Communications Interface damaged.

Solution:
1. Call service.

9.2.28 Warm-up 8min (OFF:21)

Reason:
Laser device was just started and is now warming up the thyratron.

Solution:
1. Wait for eight minutes.
A0303COMP

9.2.29 Warning! Repetition Rate for COD 50 Hz (ON:37)

This warning can only occur with an active COD.

224 User Manual COMPex

 Warnings and Error Messages

Reason:
Although COD only supports repetition rates up to 50 Hz, the preset
repetition rate is more than 50 Hz; hence, the COMPex has set the
repetition rate to 50 Hz.

Solution:
1. Set repetition rate to 50 Hz or less.

9.2.30 Wrong Pressure (OFF:27)

Laser tube pressure out of range. The tube pressure must be within a
range of ± 20% of the default tube pressure as specified in the Gas
Menu.

Reason (1):
Pressure settings in the Gas Menu too high or too low.

Solution:
1. Reduce or increase settings in the gas menu, so that the sum of all
partial pressures does not exceed the default pressure by more
than ± 20 %.

Reason (2):
Laser tube leaky.

Solution:
1. Test laser tube for a leak. In case of a leak: tighten, if possible,
otherwise call service.

Reason (3):
Pressure detector at the laser tube defective.
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Solution:
1. Call service.

9.3 Interlocks
Interlock refers to an error message indicating a malfunction or critical
interference. The high voltage is switched off, but the laser system
remains on. The advantages of this method are that the entire system
does not need to be restarted when there is a simple malfunction and
communication with the processor is still possible.
More than one interlock can occur at a time. To receive information
about the current interlocks:
1. Press the function button <F1>.
2. (if an interlock occurred) Press cursor left or right to select interlock.
3. Press <ENTER>.

WARNING
Risk of electric shock!
Storage capacitors are charged with high voltage.
Never open the laser housing while high voltage capacitors are
charged.
Measurements and work on the electrical system and its
eqipment must be carried out only by a skilled electrician.

The following interlocks may occur:

– Overload (see page 226)
– Remote (see page 227)
– Temp.Res. (see page 227)
– Ventilation (see page 228)

9.3.1 Overload

This interlock is an electronic interlock for the HV power supply. This

interlock is activated if the high voltage charging circuit does not reach
A0303COMP

the preset high voltage level.

Reason (1):
Thyratron no longer adjusted.

226 User Manual COMPex

 Interlocks

Solution:
1. Adjust thyratron settings (see Section 7.8.2).

Reason (2):
Malfunction in the HV circuit.

Solution:
1. Switch off the laser device and start again. If the problem remains,
call service.

9.3.2 Remote

A remotely located interlock switch must be connected to the 4-pin

remote socket (see Section 4.3.3). The interlock has to be connected
between pins 2 and 3 of this socket and laser operation is only
possible as long as pin 2 and 3 are jumpered.
This interlock also monitors the panels of the laser device.

Reason (1):
Pins 2 and 3 of the remote socket no longer make contact. This may
be due to an open switch, a detector or other device connected to pins
2 and 3.

Solution:
1. Close contact between pins 2 and 3 of the remote socket.

Reason (2):
One of the laser device panels is open.

Solution:
1. Close all panels.

9.3.3 Temp.Res.
A0303COMP

This interlock is a thermal switch which is located on top of the laser

tube. The switch opens if the laser tube temperature reaches 46 °C.

Reason (1):
(COMPex 110 and 205 only)
There is too little or no cooling water or the cooling water is too warm.

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Solutions:
1. Ensure that water flow matches the specifications (see Section
4.4).
2. Ensure that the water inlet temperature is within range of
specifications (see Section 4.4).
3. Check for a water leak. If trouble remains, call service.

Reason (2):
(all laser devices except COMPex 110 and 205)
There is too little or no cooling air or the cooling air is too warm.

Solutions:
1. Ensure that the housing ventilation entrances are not blocked.
2. Ensure that the fan at the rear housing ventilation exit is functional.
3. Ensure that the ambient temperature matches specifications (see
Section 4.8).
4. Check the duct system for malfunction.
If the problem remains, call service.

9.3.4 Ventilation

The motor which drives the gas circulation fan in the laser tube is
protected by this interlock.

Reason (1):
Malfunction of the motor fan for the laser tube.

Solutions:
1. Ensure that there is power to the fan motor,
2. Ensure that the fan motor is not damaged. If the problem remains,
call service.

Reason (2):
Damaged fan or fan bearings.

Solution:
A0303COMP

1. Call service.

228 User Manual COMPex

 Laser Pulses without Triggering (Self-Firing)

9.4 Laser Pulses without Triggering

(Self-Firing)

Reason (1):
(with COD only) COD not active.

Solution:
1. Switch COD on (see Section 6.5.4)

Reason (2):
Thyratron settings wrong

Solution:
1. Adjust Thyratron (see Section 7.8.2).

Reason (3):
Thyratron, varistors or Trigger Board defective.

Solution:
1. Call service.

9.5 No Trigger Signal

This malfunction causes the error message “LOW LIGHT” (see
Section 9.10 on page 239).

9.6 Corrosion in Gas System

Symptom:
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– insufficient gas lifetime,

– beam specifications not met,
– visible corrosion at gas lines and connections.

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TROUBLESHOOTING

Reason (1):
Halogen line has not been purged before a standstill. Thus, halogen
has come in contact with ambient humidity.

Solution:
1. Replace corroded lines.

Reason (2):
Halogen line has been purged before a standstill, but halogen cylinder
was not sealed properly.

Solutions:
1. Check pressure regulator in halogen line.
2. Check valve on halogen gas cylinder.
3. Replace corroded lines and pressure regulators.

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230 User Manual COMPex

 Gas Leak

9.7 Gas Leak

This procedure is divided into two sub-procedures:

• Leak test gas lines (Section 9.7.1)

• Leak test laser tube (Section 9.7.2)

NOTE
Leak check all lines with inert gas prior to use with halogens or
expensive rare gases.

Tools and Materials

• Liquid leak tester SNOOP® (from service case)

• Helium leak testing device

• Ethanol

• Cleaning paper

9.7.1 Leak Test Gas Lines

NOTE
The following assumes that an inert gas cylinder is attached to the
inert gas line to purge the gas lines. If not, flush and fill the line from a
gas cylinder that does not contain halogen (see Section 7.4.1).

Preconditions

• Laser in OFF mode.

Leak Testing a Gas Line

1. Press <BREAK> to stop laser operation.
2. Close valve on gas cylinder to the line that will be leak-tested.
3. Open valve for appropriate pressure regulator.
4. Open valve of inert gas cylinder.
5. Set pressure regulator for inert gas to 5 bar.
6. Purge the line to be leak-tested (see Section 7.4.2).
7. Close valve to the inert gas cylinder.
8. Spray SNOOP on the fitting in the line.
You can see small bubbles at a leaky fitting after a few seconds.
A0303COMP

9. Tighten leaky fittings.

10. Check for leak again.
11. Call service if it is not possible to seal the fittings.
12. Clean the fittings carefully with cleaning paper.
13. Wash the fittings with ethanol and dry them with cleaning paper.

Finalization
14. Refill the gas lines with fresh gas (see Section 7.4.1).

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9.7.2 Leak Test Laser Tube

Additional tools and Materials

• Thermometer (best scale from 0 to 50 °C)

Preconditions

• Gas lines within the laser device leak tested

• Tube at room temperature

NOTE
Keep the tube temperature constant, because a temperature drop of
just 1 °C results in a pressure drop of 10 mbar. Thus you would detect
leaks that do not exist.

Leak Testing the Laser Tube

CAUTION
Risk of tube damage!
Due to different reasons the leak may persist after troubleshooting.
Call Lambda Physik Service if the leak cannot be sealed.

1. Stop laser.
2. Switch off cooling water.
3. Let laser stand for at least one hour to let the tube cool down.
4. Fix a thermometer at the tube to check that the temperature at the
beginning of the leak test does not differ from that of the end.
5. Perform a leak test while the pressure within the tube is sufficiently
above atmospheric pressure (best 3000 mbar).
6. Fill tube manually to 3000 mbar with helium (see Section 6.7).
7. Wait for 10 minutes to let the gas cool down.
8. Check the pressure drop in the tube. The pressure drop may not
exceed 2 mbar within one hour. Test for at least two hours,
although longer (e.g. overnight) is better.

CAUTION
Risk of soiling tube optics and connections!
Do not use liquid leak tester at the tube. Use a special Helium Leak
Testing Device. If the pressure drop exceeds 2 mbar within an hour, a
leak at the tube is likely.
A0303COMP

9. Search for leaks with a helium leak testing device.

10. Seal the leak(s) if possible, otherwise call service.

Finalization
11. Perform a new fill (see Section 7.4.3). Only when all leaks are
sealed, the laser can be restarted.

232 User Manual COMPex

 Laser Device Does Not Start

9.8 Laser Device Does Not Start

Symptom:
After turning on the laser device with the mains and the key switches,
nothing happens (no lights, no sound).

Reason (1):
Mains supply line not properly connected or defective.

Solution:
1. Check mains supply line.
WARNING
Risk of Electrocution!
The mains supply line must be exchanged by instructed persons
only, under the supervision and guidance of a skilled electrician
and in accordance with electrical engineering rules and
regulations.

Reason (2):
Wrong mains supply.

Solution:
1. Check that the laser device is set to the proper mains supply
voltage and frequency.

Reason (3):
No line voltage.
Solution:
1. Check the main fuse of the connection box of the building.

Reason (4):
Fuse(s) defective.

Solution:

CAUTION
A0303COMP

Risk of damaging power supply.

A blown fuse suggests a malfunction in the power supply. Inform
service.

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TROUBLESHOOTING

1. Check fuses F1 to F6 and replace, if necessary (see Figure 66). For

ratings of the fuses see Section 9.11.

MainS POWER ON
F1 F3 F5

KEY SWITCH CONTROL LINE

SUPPLY F2 F4 F6
24V AC

Figure 66: Fuses on the rear outside of the COMPex

9.9 Beam Energy Too Low

The pulse energy may be low for many different reasons. To clearly
detect the source of the problem, follow the flowcharts shown on the
following pages.

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234 User Manual COMPex

 Beam Energy Too Low

Beam Output Energy Low

Gas cylinders no Continued on

just changed? next page

yes
Check for
gas leak

yes yes
Leak? Tighten leak New Fill Problem solved? Stop

no no

Purge Lines
3 times

Purge laser tube

Flush lines and

fill with fresh gas

New Fill

yes
Problem solved? Stop

no

Check gas lines

for internal corrosion

Corroded yes Replace Re-passivate

gas lines? gas lines New Fill
laser tube

no

Change gas no yes

Problem solved? Stop
cylinders again

Re-passivate
laser tube

New Fill
A0303COMP

yes
Problem solved? Stop

no
Continued on
next page

Figure 67: Beam energy too low - part 1

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TROUBLESHOOTING

Beam Output Energy Low

(Continue 1)

Measure beam energy

with ext. energy meter

Beam energy no Calibrate yes

Problem solved? Stop
really too low? energy monitor

no

yes FOL broken or Check FOL from

Replace or beam splitter box
re-connect FOL not properly
connected? to energy monitor

no
no Energy monitor damaged
Problem solved?
Call Service
yes

Stop

Has laser
no Continued on
been at a standstill
for a long time ? next page

Perform a
leak test

Purge lines
3 times

Flush lines and

fill with fresh gas

New Fill

yes
Problem solved? Stop

no

Continued on
A0303COMP

next page

Figure 68: Beam energy too low - part 2

236 User Manual COMPex

 Beam Energy Too Low

Beam Output Energy Low

(Continue 2)

* F2, ArF about 40 °C

yes Laser tube
temperature XeCl about 30 °C
OK? * all others about 35 °C
no

(if available)
adjust waterflow

Make a few
thousand shots

yes
Problem solved? Stop

no

no Continued on
Optics just changed
next page
or cleaned?
yes

Has laser been yes Re-passivate

open for more New fill
laser tube
than 2 minutes?

no

no yes
Check Optics Problem solved? Stop

Right Optics? no
(labeled at side Replace Optics
of optics)
yes

Correct no Coated optics

mounting properly mounted?

yes

Adjust tube yes

A0303COMP

Problem solved? Stop

optics

no

Continued on
next page

Figure 69: Beam energy too low - part 3

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TROUBLESHOOTING

Beam Output Energy Low

(Continue 3)

Laser tube yes

gases old? New Fill

no

Clean no yes
Problem solved? Stop
tube optics

Clean
beam splitter

Adjust
tube optics

yes
Problem solved? Stop

no

Check for
gas leak

no
Leak?

yes

Tighten leak

yes
Problem solved? Stop

no

Thyratron yes
adjustment OK?

no

Adjust Thyratron
A0303COMP

yes
Stop Problem solved?

no

Call service

Figure 70: Beam energy too low - part 4

238 User Manual COMPex

 Low Light

9.10 Low Light

The LOW LIGHT error may have several reasons. Use the following
flowcharts to trace the reason of the problem.

Low Light

no See flowchart
Are there any
"Low Light-
trigger pulses?
No Trigger Pulses"
yes

Are light yes See flowchart

pulses "Low Light-
missing? Missing Pulses"
no

Measure beam output energy

with external energy meter

yes See flowchart

Is beam output
"Low Light - Problem with
energy accurate?
Energy Monitor"
no

Is there any yes See flowchart

beam output "Low Light - Beam Output
energy? Energy too low"
no

Raise EGY
const. value

no Major malfunction.
Problem solved?
Call service

yes

EGY const. value has been

below lasing threshold.
Run with higher energies.

Figure 71: Low Light

A0303COMP

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TROUBLESHOOTING

Low Light -
No Trigger Pulses

Is the laser set yes Does the laser no

receive any external Check external
to "EXT. TRIGGER"? trigger device
trigger signals?

no yes

Switch to
"INT. TRIGGER"

Measure UH and UR no yes

at thyratron Problem solved? Stop
adjustment panel

Exchange thyratron fuse

Are there no
(M07/F1; at thyratron
any voltages?
adjustment panel)

Measure UBIAS at yes

thyratron adjustment Problem solved? Stop
panel
no

Defective power supply.

Call service

Is UBIAS between no Varistor or HV trigger

-140 and -160 V? damaged. Call service

yes

Raise UH and UR
one or two steps

yes
Problem solved? Stop

no

Major malfunction.
A0303COMP

Call service

Figure 72: Low Light - no trigger pulse

240 User Manual COMPex

 Low Light

Low Light -
Missing Pulses

Is laser in HV yes yes

Is laser gas old? Make a new fill
Constant Mode?

no no

no yes
Problem solved? Stop
no Is laser running
with ArF or F2?

yes

Measure laser
tube temperature

Is temperature yes (If available) yes

Problem solved? Stop
less than 35 °C? Reduce water flow

no no

Raise environ-
mental temperature

Make a few
thousand shots

Raise UH and UR one or no yes

two steps at thyratron Problem solved? Stop
adjustment panel

yes
Problem solved? Stop

no

Major malfunction.
Call service

Figure 73: Low Light - missing pulses

A0303COMP

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TROUBLESHOOTING

Low Light - Problem

with Energy Monitor

Calibrate
energy monitor

yes
Problem solved? Stop

no

Check FOL from

beam splitter box
to energy monitor

FOL broken or yes Replace or

not properly re-connect FOL
connected?
no

Energy monitor damaged no yes

Problem solved? Stop
Call Service

Figure 74: Low Light - problem with energy monitor

A0303COMP

242 User Manual COMPex

 Fuses

Low Light - Beam

Output Energy too Low

Clean
tube optics

Clean
beam splitter

Check optics

no Right optics?
Replace optics (labeled at side
of optics)
yes

Coated
no
optics properly Correct mounting
mounted?
yes

Adjust tube
optics

yes
Problem solved? Stop

no

Major malfunction.
Call service

Figure 75: Low Light - beam energy too low

9.11 Fuses
A0303COMP

9.11.1 Fuses Inside COMPex

The fuses inside COMPex are:

– at the rear side of the laser (seen from beam exit)

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TROUBLESHOOTING

M03/ M03/ M03/ M03/ M03/ M03/

F6 F5 F4 F3 F2 F1

Figure 76: Fuses at the inner rear side of COMPex

– at the thyratron adjustment panel

FUSE

Figure 77: Fuses at the thyratron adjustment panel

Fuse Value 110V Value 230V Protection

M03/F1 0.5 A slow blow 0.5 A slow blow Fan 1 + 2
M03/F2 - - not used
M03/F3 8.0 A slow blow 8.0 A slow blow Vacuum Pump
M03/F4 0.5 A slow blow 0.5 A slow blow Servo Driver
M03/F5 2.5 A slow blow 2.5 A slow blow Gas Circulation
M03/F6 0.063 A slow blow 0.063 A slow blow Power Supply of Gas Purifier
A0303COMP

Thyratron 2.5 A ultra slow blow 2.5 A ultra slow blow Thyratron Supply Module

244 User Manual COMPex

 Fuses

9.11.2 Fuses Outside COMPex

The fuses outside of COMPex are aside of the main switch, located at
the rear outside.

MainS POWER ON
F1 F3 F5

KEY SWITCH CONTROL LINE

SUPPLY F2 F4 F6
24V AC

Figure 78: Fuses at the rear outside of COMPex

Fuse Value 110V Value 230V Protection

F1 12.5 A slow blow 12.5 A slow blow secondary circuit isolating
transformer
F2 4.0 A slow blow 4.0 A slow blow secondary circuit 24 V AC
transformer
F3 1.0 A slow blow 0.5 A slow blow primary circuit 24 V AC
transformer
F4 1.0 A slow blow 0.5 A slow blow primary circuit 24 V AV
transformer
F5 25 A slow blow 16 A slow blow primary circuit main line
F6 25 A slow blow 16 A slow blow primary circuit main line
A0303COMP

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TROUBLESHOOTING

A0303COMP

246 User Manual COMPex

 10 WIRING DIAGRAMS/
DIAGRAM SCHEMATICS
A0303COMP

LAMBDA PHYSIK - 03/2003 247

WIRING DIAGRAMS/ DIAGRAM SCHEMATICS

10.1 Gas Flow Diagrams

PS

LH
PS

B H R I V
PRV

HF

VP

BUFFER HALOGEN RARE INERT

GAS PORTS exhaust

LH - LASERHEAD VALVE PRV - PRESSURE VALVE

B - BUFFER VALVE PS - PRESSURE SENSOR
H - HALOGEN VALVE HF - HALOGEN FILTER
R - RARE VALVE

I - INERT VALVE
A0303COMP

V - VACUUM VALVE

VP - VACUUM PUMP

Figure 79: Laser gas flow diagram without Halogen Source

248 User Manual COMPex

 Gas Flow Diagrams

PS

Laser Tube

LH
PS

H V
5 BAR
PRV

HB
HF

VP

Accu

B R I F2
GAS PORTS
P

Reactor
I
6.5 BAR

HaloSafe™ Fluorine exhaust

LH - LASERHEAD VALVE PRV - PRESSURE VALVE

B - BUFFER VALVE PS - PRESSURE SENSOR
H - HALOGEN VALVE HF - HALOGEN FILTER
R - RARE VALVE
HB - HALOGEN-BUFFER VALVE
I - INERT VALVE
P - PILOT VALVE
V - VACUUM VALVE

VP - VACUUM PUMP

Figure 80: Laser gas flow diagram with Fluorine Source

A0303COMP

LAMBDA PHYSIK - 03/2003 249

 WIRING DIAGRAMS/ DIAGRAM SCHEMATICS

PS

Laser Tube

LH
PS

H V
5 BAR
PRV
B R I

HF

VP

Accu

B R I HR2
GAS PORTS
HB
B

Reactor

HR1

Reservoir

Halo Safe™ HCl

exhaust

LH - LASERHEAD VALVE PRV - PRESSURE VALVE

B - BUFFER VALVE PS - PRESSURE SENSOR
HH - HALOGEN VALVE
A0303COMP

HF - HALOGEN FILTER
R - RARE VALVE
HB - HALOGEN-BUFFER VALVE
I - INERT VALVE
HR1 - HALOGEN-RESERVOIR VALVE
V - VACUUM VALVE
HR2 - HALOGEN-REACTOR VALVE
VP - VACUUM PUMP

Figure 81: Laser gas flow diagram with HCl Source

250 User Manual COMPex

 Layout of the COMPex

10.2 Layout of the COMPex

A0303COMP

Figure 82: Layout of the COMPex 100 Series

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WIRING DIAGRAMS/ DIAGRAM SCHEMATICS

A0303COMP

Figure 83: Layout of the COMPex 200 Series

252 User Manual COMPex

 Maintenance Areas

10.3 Maintenance Areas

A0303COMP

Figure 84: Maintenance Area of COMPex 100 Series

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WIRING DIAGRAMS/ DIAGRAM SCHEMATICS

A0303COMP

Figure 85: Maintenance Area of COMPex 200 Series

254 User Manual COMPex

 Wiring Diagrams

10.4 Wiring Diagrams

A0303COMP

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WIRING DIAGRAMS/ DIAGRAM SCHEMATICS

A0303COMP

256 User Manual COMPex

 11 GLOSSARY
This chapter explains laser vocabulary used throughout this manual.

Basic Module
Central module of the COMPex. The Basic Module controls gas
handling. HV power supply and tube pressure. It is controlled by the
Communication Interface.

Beam Splitter
Laser optics which divide a beam into two separate beams through
reflection and transmittance. On the COMPex, a beam splitter deflects
a part of the beam onto the Energy Monitor. Some beam splitters have
an UV coating. This allows a minimum of beam energy loss with a
maximum of reflection and transmission. Beam splitters may also act
as a filter to allow transmittance of only a small range of wavelengths.

Buffer
Gas that provides optimum discharge abilities for the laser gas. Neon
as a buffer is a patent of Lambda Physik (US Patent # 4,393,505).

Charging Current
Current that charges the storage capacitors in the laser.

COD
Abbreviation for Charge on Demand, an optional function on the
COMPex. With COD the trigger signal enables the power supply to
charge the storage capacitors (and thus the discharge capacitors).
This limits the period of time HV is applied to the thyratron. This
means:
– HV is only used when needed and
– HV is not turned on without a trigger signal.
A0303COMP

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GLOSSARY

COD has been introduced to enhance components lifetime even

further and to prevent self-firing. Figure 86 shows a laser triggering
without COD, Figure 87 with COD.

1/repetition rate

Trigger In (from CI)

HV enabled

HV on capacitors

15µs TCharge Time for possible

fail-triggering
Figure 86: Laser triggering without COD

1/repetition rate

Trigger In (from CI)

HV enabled

HV on capacitor
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15µs TCharge=TDelay 20µs

Figure 87: Laser triggering with COD

Communication Interface
The central control unit of the COMPex. Contains the local and remote
software for the laser. Abbreviation CI.

258 User Manual COMPex

 Data Ring
Module´s information link in the laser. All laser modules are connected
in series and are constantly polled to watch their function. Realized as
an FOL.

Discharge Capacitors
See Peaking Capacitors.

EGY
Abbreviation for Energy.

EGY CONST
Abbreviation for Energy Constant Mode.

Energy Constant Mode (EGY CONST)

Running Mode, that keeps the beam energy constant by continuously
increasing the HV. If a given threshold HV is reached, the laser reacts
with an HI or PGR or a warning, depending on the Energy Constant
Mode chosen (see Figure 88).

Energy
Energy
HV

High Voltage

Time
Figure 88: EGY CONST mode without HI/PGR

Energy Monitor
Tool to measure the energy of the laser beam via a detector. Fed by a
beam splitter, that reflects 10% of the beam energy onto the detector.
The Energy Monitor electronics convert the light intensity into an 8-bit
signal, that is evaluated by the Communication Interface.
The Energy Monitor is triggered with a FOL line from the beam splitter
box to theenergy monitor electronics. If there is laser light within the
beam splitter box, the FOL line leads a light pulse to the energy
monitor electronics causing it to function. Thus it does not detect
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continuously but is triggered by the beam light itself.

Excited State Dimer Gas

A short-lived diatomic molecule, composed of an excited and a non-
excited atom. In an Excimer laser it is created by a high voltage
discharge. When decomposing, the excimer gas emits the laser
radiation.

LAMBDA PHYSIK - 03/2003 259

GLOSSARY

Flushing
Evacuating a gas line.

Flushing Procedure
Procedure to allow optics replacement and optics cleaning.

FOL
Abbreviation for Fiber Optics Light Wave Guide. Information link, that
transmits via light signals. Used in excimer lasers to keep the
information links free of electrical interference.
In some cases at COMPex software the german abbreviation “LWL”
(for Lichtwellenleiter) is used.

FWHM
Abbreviation for Full Width Half Maximum. The width of a graph
measured at 50% of the peak transmission (see Figure 89).

½h

FWHM
Figure 89: Full Width Half Maximum (FWHM)

Gas Lifetime
– Dynamic Gas Lifetime
Lifetime of the gas in the laser tube with respect to operation.
Specified as the number of pulses it takes for the beam energy to
decrease from max. value (after new gas fill) to half output energy
(50%). To test this the laser operates at maximum repetition rate
with no interruption and max. high voltage. Neither Halogen
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Injections nor any other gas actions are performed.

– Static Gas Lifetime
Lifetime of the gas in the laser tube while non-operation. Specified
as the time it takes for the beam energy to decrease from maximum
value (after a new gas fill) to half energy (50%). To test this, the laser
operates at maximum repetition rate with no interruption and

260 User Manual COMPex

 maximum possible high voltage, but only for one minute a day.
Neither Halogen Injections nor any other gas actions are performed.
The decline in output from one day to the next is measured.

Gas Menu
A data file included with the Communication Interface. It contains
information about actual and default partial pressures of the gases,
allowed partial pressure ranges, default repetition rate and HV
threshold settings.

Halogen
In excimer lasers either fluorine (F) or hydrogen chloride (HCl).

Halogen Injection
Injects a single flash of halogen gas into the laser tube. Afterward the
beam energy must stabilize again. Hence, there are increased pulse-
to-pulse energy fluctuations for a while. Supports to increase the gas
lifetime to a great extent (see Figure 90).

max Energy
repl
Energy
HV

HV
min
Time
Gasrefreshment
Figure 90: EGY CONST mode with HI

Halogen source
The HaloSafe® of Lambda Physik. A safe way to provide halogen gas.
Eliminates the need for handling toxic halogen gas outside the laser
device. Halogen only is provided if needed. The halogen source is
available as an option.

Handheld Keypad
A keypad specially designed to make laser operations more
comfortable. It provides control over all necessary laser functions.
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HI
Abbreviation for Halogen Injection.

HV
Abbreviation for High Voltage.

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GLOSSARY

HV Constant Mode (HV CONST)

Running Mode that keeps the charging current constant. Thus, the
beam energy slowly decreases during operation until the next New Fill
(see Figure 91).

High Voltage

Energy
HV
Energy

Time
Figure 91: HV CONST Mode

HVrepl
See Treshold Voltage.

Inert
Gas, that does not react with any other substances. Normally helium.

Interlock
A safety feature that occurs in case of a laser malfunction, switching
the laser into a safe mode (normally off). COMPex laser devices are
equipped with hardware and software interlocks. Hardware interlocks
are mechanically realized by switches. Software interlocks are
activated when a predefined limit value is exceeded.

Laser
Abbreviation for Light Amplification by Stimulated Emission of
Radiation. According to ISO 11 145 “laser” means the lasing unit itself
(see also Laser Device).

Laser Device
According to ISO 11 145 the “laser device” includes the laser and its
supply unit (power supply, cooling supply, etc.); see also Laser.

Local Software
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The software for the COMPex that enables operation with the
handheld keypad.

262 User Manual COMPex

 Mirrors
Mirrors are the part of the laser optics, that build up the resonator. The
rear mirror is a highly reflective mirror, the front mirror is translucent,
thus acting as an output coupler. In most cases it has a dielectric
coating depending on the operating wavelength of the laser.

New Fill
Evacuates the laser tube and refills it with fresh gases according to the
settings in the Gas Menu.

NGR
Abbreviation for No Gas Replacement.

No Gas Replacement (EGY NGR)

No Gas Replacement is a Running Mode of COMPex laser devices,
where the laser control keeps the beam energy constant. If the
threshold voltage HVrepl is exceeded, the software reacts with a
warning. If it exceeds HVmax, the laser is switched off and gives an
error message (see Figure 92).

max Energy
repl
Energy
HV

HV
min
Time
"New gas fill needed"
Figure 92: EGY CONST mode with NGR

OPMODE
Abbreviation for Operating Mode in the Remote Software. All
executable commands are called OPMODE and are executed with this
command.

Passivation
Process that makes the surface of the laser tube chemically inert to a
halogen gas. During this process halogen gas reacts with the surface
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of the tube building up a layer of a halogen-metal complex. The layer

is inert to one specific halogen but not to water, oxygen or other
molecules. Thus it can be destroyed by humidity or other impurities
that enter the tube. In this case the tube must be repassivated.
A full passivation is required when the halogen gas has been changed
(chlorine to fluorine and vice versa). A full passivation can only be
performed by service personnel.

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GLOSSARY

Partial Gas Replacement (EGY PGR)

Partial Gas Replacement is a running mode of the COMPex, where
the laser control keeps the beam energy constant. If the threshold
voltage HVrepl is exceeded and a fixed number of Halogen Injections
were not successful, a part of the gas in the laser tube is removed and
replaced with fresh gas (for a flow diagram see Figure 16 on page 29).
Afterward, the beam energy must stabilize again. Hence, there are
increased pulse-to-pulse energy fluctuations for a while (see Figure
93).

max Energy
repl

Energy
HV

HV
min
Time
HV decrease too low
Figure 93: EGY mode with PGR

Partial Pressure
In a gaseous mixture, the pressure exerted by a single component is
its partial pressure. The sum of all partial pressure of the mixture
equals the pressure of the mixture.

Peaking capacitors
The discharge of an excimer laser is fed from discharge capacitors
(“peaking capacitors”). These discrete ceramic high-voltage capacitors
are coupled directly with the discharge electrodes with minimum
inductance. The peaking capacitors are charged by a current pulse
supplied by the storage capacitors.

PGR
Abbreviation for Partial Gas Replacement.

Premix
Predetermined mixture of the laser gases or its components.

Purging
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Cleaning gas lines or the laser tube with inert gas.

Rare
One of the components of the excimer gas. Depending on the gas
mixture it can be argon, krypton or xenon.

264 User Manual COMPex

 Remote Software
The COMPex software of the Communication Interface that enables
operation with an external (Remote) computer.

Repetition Rate
The number of beam pulses per second. Unit is Hz [1/s].

Reservoir
The hydrogen reservoir of the thyratron. It provides the necessary
hydrogen for thyratron operation.

Resonator
The optical resonator is formed using two mirrors. The mirrors are
arranged on opposite sides of the laser medium (the gas), thus
providing the necessary feedback for the laser oscillator.

RS 232 C
An industry standard for serial communications connections. Adopted
by the Electrical Industries Association, this Recommended Standard
(RS) defines the specific lines and signal characteristics used by serial
communications controllers to standardize the transmission of serial
data between devices. The letter C denotes the current version of the
standard.

Safety Fill
A safety feature of the COMPex. A Safety Fill is performed if the laser
tube could not be evacuated to 30 mbar (due to e.g. a Gas Leak or a
defective vacuum pump). Fills the laser tube with inert gas, thus brin-
ging it to a safe condition. See also Section 10.2.18.

Threshold Voltage
In Energy Constant Mode the charging voltage is steadily increased to
keep the beam energy constant. The Threshold Voltage HVrepl is a
limit value at which the COMPex reacts to this increase. The reaction
may be a warning (in EGY NGR), an HI (in EGY PGR) or a PGR (also
EGY PGR after a number of unsuccessful HIs).

Thyratron
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Fast, high voltage switch to discharge the storage capacitors as a

reaction to a trigger signal. A hydrogen-filled ionization tube. For
details see Section 2.4.

Triggerpulse
A signal that causes the laser to fire a single beam pulse.

LAMBDA PHYSIK - 03/2003 265

GLOSSARY

Tube Optics
Consist of resonator optics (mirrors) and windows. The COMPex only
has resonator optics.

UV
Abbreviation for Ultraviolet Light. The portion of the electromagnetic
spectrum between 200 and 400 nm. A special part of the UV range is
the VUV range (see VUV).

VUV
Abbreviation for Vacuum Ultraviolet Light. The portion of the
electromagnetic spectrum between 100 and 200 nm. At these very
short wavelengths, air becomes opaque; hence, experiments must be
performed in a vacuum (or inert gas).

Watchdog
A switch that alters its logical level when the reset pulses stop. All
watchdogs are reset at least three times a second. If the reset fails, a
breakdown is assumed. The module concerned is switched to a safe,
in-active state. The Basic Module is monitored by a watchdog.

A0303COMP

266 User Manual COMPex

 LIST OF FIGURES

Figure 1: Laser components according to ISO 11145 . . . . . . . . . 3

Figure 2: Front view of the COMPex (from beam exit) . . . . . . . . 14
Figure 3: Rear view of the COMPex . . . . . . . . . . . . . . . . . . . . . . 15
Figure 4: COMPex inside . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Figure 5: Laser principle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Figure 6: Functional design of the COMPex . . . . . . . . . . . . . . . . 18
Figure 7: COMPex control with handheld keypad . . . . . . . . . . . 20
Figure 8: COMPex control with remote computer . . . . . . . . . . . . 21
Figure 9: Communication Interface and Handheld Keypadr . . . . 21
Figure 10: Cutaway drawing of the laser tube . . . . . . . . . . . . . . . 22
Figure 11: Pulse energy as a function of charging voltage . . . . . . 25
Figure 12: Voltage increase in the Energy Constant mode . . . . . 26
Figure 13: Energy decrease in the HV Constant mode . . . . . . . . 26
Figure 14: Charging current with halogen injections . . . . . . . . . . . 27
Figure 15: Charging current with Partial Gas Replacement . . . . . 27
Figure 16: Partial Gas Replacement in Energy Constant Mode . . 29
Figure 17: Charging current with No Gas Replacement (NGR) . . 30
Figure 18: No Gas replacement in Energy Constant Mode . . . . . 30
Figure 19: Labels on the front side of the COMPex . . . . . . . . . . . 50
Figure 20: Labels on the rear side of the COMPex . . . . . . . . . . . 52
Figure 21: Labels inside the COMPex . . . . . . . . . . . . . . . . . . . . . 54
Figure 22: Remote socket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
Figure 23: Permitted tilting gradients . . . . . . . . . . . . . . . . . . . . . . 76
A0303COMP

Figure 24: Rigid transport packaging . . . . . . . . . . . . . . . . . . . . . . 79

Figure 25: Shock absorbing buffers . . . . . . . . . . . . . . . . . . . . . . . 80
Figure 26: Location of clip removal tool . . . . . . . . . . . . . . . . . . . . 81
Figure 27: Removing the clips . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
Figure 28: Fittings for water lines . . . . . . . . . . . . . . . . . . . . . . . . . 85

LAMBDA PHYSIK - 03/2003 FIGURES - 267

LIST OF FIGURES

Figure 29: Connecting the RS232 plug to the laser device . . . . . 88

Figure 30: Connecting the RS232 plug to the keypad . . . . . . . . . 89
Figure 31: Loosen the exhaust fan outlet . . . . . . . . . . . . . . . . . . . 93
Figure 32: Remove the plug from the vacuum pump . . . . . . . . . . 94
Figure 33: Inserting the halogen filter . . . . . . . . . . . . . . . . . . . . . . 95
Figure 34: Adjusting the anti-torsion fork . . . . . . . . . . . . . . . . . . . 95
Figure 35: Overview of the handheld keypad . . . . . . . . . . . . . . . 100
Figure 36: Power switches and lamps on the laser device . . . . . 102
Figure 37: Parameter settings display . . . . . . . . . . . . . . . . . . . . 105
Figure 38: Handheld keypad buttons for maintenance procedures
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
Figure 39: Energy monitor without mirror access panel . . . . . . . 136
Figure 40: View of optics mount, energy monitor removed . . . . 137
Figure 41: Optic mount dismounted, sealing plate . . . . . . . . . . . 137
Figure 42: View of optics mount, energy monitor rmoved . . . . . 138
Figure 43: Disassembled optical mount . . . . . . . . . . . . . . . . . . . 138
Figure 44: Polish the optics . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
Figure 45: Reassembling the optics mount . . . . . . . . . . . . . . . . 140
Figure 46: Horizontal and vertical optics adjustment . . . . . . . . . 142
Figure 47: Front optics with energy monitor . . . . . . . . . . . . . . . . 145
Figure 48: COMPex F2-version: Loosen and fasten front optics mount
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
Figure 49: Optics mount COMPex F2-version . . . . . . . . . . . . . . 147
Figure 50: COMPex F2-version: Fasten and loosen rear optics mount
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
Figure 51: COMPex F2-version: Disassembled optics mount . . 148
Figure 52: Polish the optics . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150
Figure 53: Horizontal and vertical optics adjustment . . . . . . . . . 153
Figure 54: Energy monitor calibration procedure . . . . . . . . . . . . 155
Figure 55: View onto the beam splitter . . . . . . . . . . . . . . . . . . . . 156
A0303COMP

Figure 56: Bending unit of the energy monitor . . . . . . . . . . . . . . 159

Figure 57: Beam splitter removed . . . . . . . . . . . . . . . . . . . . . . . . 160
Figure 58: Energy monitor connection . . . . . . . . . . . . . . . . . . . . 162
Figure 59: Thyratron adjustment . . . . . . . . . . . . . . . . . . . . . . . . . 165
Figure 60: View of the halogen filter . . . . . . . . . . . . . . . . . . . . . . 169

FIGURES - 268 User Manual COMPex

 LIST OF FIGURES

Figure 61: Disassembling the halogen filter housing . . . . . . . . . 170

Figure 62: Setup of the unstable resonator . . . . . . . . . . . . . . . . 176
Figure 63: Marking of the optics . . . . . . . . . . . . . . . . . . . . . . . . . 179
Figure 64: Energy monitor calibration procedure . . . . . . . . . . . . 187
Figure 65: Flushing procedure . . . . . . . . . . . . . . . . . . . . . . . . . . 189
Figure 66: Fuses on the rear outside of the COMPex . . . . . . . . 234
Figure 67: Beam energy too low - part 1 . . . . . . . . . . . . . . . . . . 235
Figure 68: Beam energy too low - part 2 . . . . . . . . . . . . . . . . . . 236
Figure 69: Beam energy too low - part 3 . . . . . . . . . . . . . . . . . . 237
Figure 70: Beam energy too low - part 4 . . . . . . . . . . . . . . . . . . 238
Figure 71: Low Light . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239
Figure 72: Low Light - no trigger pulse . . . . . . . . . . . . . . . . . . . . 240
Figure 73: Low Light - missing pulses . . . . . . . . . . . . . . . . . . . . 241
Figure 74: Low Light - problem with energy monitor . . . . . . . . . . 242
Figure 75: Low Light - beam energy too low . . . . . . . . . . . . . . . . 243
Figure 76: Fuses at the inner rear side of COMPex . . . . . . . . . . 244
Figure 77: Fuses at the thyratron adjustment panel . . . . . . . . . . 244
Figure 78: Fuses at the rear outside of COMPex . . . . . . . . . . . . 245
Figure 79: Laser gas flow diagram without Halogen Source . . . 248
Figure 80: Laser gas flow diagram with Fluorine Source . . . . . . 249
Figure 81: Laser gas flow diagram with HCl Source . . . . . . . . . . 250
Figure 82: Layout of the COMPex 100 Series . . . . . . . . . . . . . . 251
Figure 83: Layout of the COMPex 200 Series . . . . . . . . . . . . . . 252
Figure 84: Maintenance Area of COMPex 100 Series . . . . . . . . 253
Figure 85: Maintenance Area of COMPex 200 Series . . . . . . . . 254
Figure 86: Laser triggering without COD . . . . . . . . . . . . . . . . . . 258
Figure 87: Laser triggering with COD . . . . . . . . . . . . . . . . . . . . . 258
Figure 88: EGY CONST mode without HI/PGR . . . . . . . . . . . . . 259
Figure 89: Full Width Half Maximum (FWHM) . . . . . . . . . . . . . . 260
A0303COMP

Figure 90: EGY CONST mode with HI . . . . . . . . . . . . . . . . . . . . 261

Figure 91: HV CONST Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . 262
Figure 92: EGY CONST mode with NGR . . . . . . . . . . . . . . . . . . 263
Figure 93: EGY mode with PGR . . . . . . . . . . . . . . . . . . . . . . . . . 264

LAMBDA PHYSIK - 03/2003 FIGURES - 269

LIST OF FIGURES

A0303COMP

FIGURES - 270 User Manual COMPex

 INDEX

A
Address
Documentation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Adjustment
Energy constant mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
HV constant mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
Air
Exhaust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Intake . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Asbestos . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41, 49

B
Basic module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46, 257
Beam exit position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Beam shutter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Beam splitter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156
Explanation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 257
Blank pages in this manual
Reason for . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Buffer gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 257

C
Caution
Signal word in this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
CDRH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Class . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Chapters
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Charge on demand (COD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 257
Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
Time delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
Toggeling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
Charging current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 257
CI
SEE Communication interface . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Circulation fan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Class I laser device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Class IV (high power) laser device . . . . . . . . . . . . . . . . . . . . . . . . . 34
Classification
Laser safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Clip removal tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Communication interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20, 258
A0303COMP

COMPex
Fundamental design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Constructive safety features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Conversion table
Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Temperatures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

LAMBDA PHYSIK - 03/2003 INDEX - 271

INDEX

Cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Adjust flow rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

D
Danger
Signal word in this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Data ring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20, 259
Designated use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Diagram schematics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Discharge capacitors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 259
Door interlock switch
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Dynamic gas lifetimes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122, 260

E
Electrical line
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Electrical maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164
Electrical requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Electrical safety features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Electricity symbol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Emergency Fill . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Emergency Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Energy Constant mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26, 259
Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Energy efficiency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Energy monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 259
Energy monitor calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154
Environmental conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Excimer laser . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Excited atoms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Excited state dimer gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 259
Exhaust lines
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92

F
Fiber optics light wave guide (FOL) . . . . . . . . . . . . . . . . . . . . . . . . 260
Filter Cartridge Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
Fire safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
A0303COMP

Fire safety features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

Flammable materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Flammable substances symbol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Flushing procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260
Full width half maximum (FWHM) . . . . . . . . . . . . . . . . . . . . . . . . . 260
Fuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42, 243

INDEX - 272 User Manual COMPex

 INDEX

G
Gas cabinet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Gas handling safety features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Gas lifetime
Dynamic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260
Static . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260
Gas lines
Disconnection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Gas menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261
Gas mixtures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Gas protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Gas requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
Gas reservoir . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Gas safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Gas specifications
Argon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Fluorine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Fluorine (COMPex F2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Hydrogen chloride . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Krypton . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Neon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Nitrogen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Xenon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Gas system
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Gases
Properties of compressed gases . . . . . . . . . . . . . . . . . . . . . . . . 43
General safety features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

H
Halogen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261
Halogen filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38, 73
Check filling ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Reset filling ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
Halogen gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Halogen injection (HI) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261
Halogen source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261
Handheld keypad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261
Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
A0303COMP

Hazardous situation symbol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Heating voltage
Thyratron . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
High voltage / electric energy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
High Voltage Constant mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
High-voltage discharge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
HV constant mode
Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
Hydrofluoric acid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

LAMBDA PHYSIK - 03/2003 INDEX - 273

INDEX

I
Inert . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Electrical line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Exhaust lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Floor loads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Gas lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Handheld keypad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
Laser device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Laser tube exhaust line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Main power supply line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Remote PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
Remote socket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Vacuum pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Water lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Instruction manual
Intended audience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262
Ionizing radiation
Radiation limit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
ISO 11145 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

K
Key switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

L
Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Inside the Laser . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
Outside the Laser . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Laser
Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Laser assembly
Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Laser data sheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Laser device
Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
Power consumption . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Transport and lifting with rigid packaging . . . . . . . . . . . . . . . . . . 80
Transport and lifting without rigid packaging . . . . . . . . . . . . . . . 82
Laser light
A0303COMP

Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Laser Logbook . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
Laser radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35, 40
Laser radiation safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Laser radiation symbol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Laser safety classification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Laser Safety Officer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Laser specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

INDEX - 274 User Manual COMPex

 INDEX

Laser tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Laser tube exhaust line
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Laser unit
Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Laser warning lamp
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
Light amplification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Local software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262

M
Main power supply line
Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
Check thyratron . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164
Cleaning the beam splitter . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156
Cleaning the beam splitter (COMPex F2 - version) . . . . . . . . . 159
Energy monitor calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154
Evacuate gas line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Flush gas line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Halogen filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Halogen filter exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
New gas fill . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
Purge gas line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
Purge laser tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
Refill gas line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124
Re-passivate laser tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
Replacing gas cylinders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
Thyratron adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Tube optics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134
Maintenance schedule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
Manual Fill with Inert Gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Meaning of expression
Start laser . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Start laser device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Measurements
Conversion of . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Mechanical safety features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

N
New fill . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126, 263
Note
A0303COMP

Signal word in this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

NovaTube® . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Functional description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

LAMBDA PHYSIK - 03/2003 INDEX - 275

INDEX

O
Operating modes
Energy Constant mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
High Voltage Constant mode . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Operating temperature
Laser tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Operation
Adjust the cooling water flow rate . . . . . . . . . . . . . . . . . . . . . . . 104
Change the repetition rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Change the trigger mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Check Parameter Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
Check the beam path . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
Environmental conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Laser operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
Pulse counter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
Running modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
Select the gas menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
Select the gas mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
Start laser operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
Stop laser operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
Switch off the laser device . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
Switch on the laser device . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
OPMODE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 184, 263
Optical safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Overview of Chapters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Ozone . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38, 44

P
Parameter command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197
Partial gas replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
Partial pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
Passivation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22, 263
Patents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Peaking capacitors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
Photons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Polling Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
Preionization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Premix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
Premix gas cylinder
Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Pressure regulator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Protective equipment
Gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
A0303COMP

Protective gloves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
Protective goggles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Pulse counter
Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
Pulse energy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

INDEX - 276 User Manual COMPex

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R
Radiation safety features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Recommended cylinder size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Remote PC
Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
Remote socket
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Remote software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 183, 265
Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 184
Operation commands (OPMODEs) . . . . . . . . . . . . . . . . . . . . . 184
Parameter commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197
Polling commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
Priority of ON code messages . . . . . . . . . . . . . . . . . . . . . . . . . 210
Re-passivation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Repetition rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265
Resonator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265
RS232 interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21, 265
Running mode
Energy constant mode with PGR . . . . . . . . . . . . . . . . . . . . . . . 111
Energy constant mode, no PGR . . . . . . . . . . . . . . . . . . . . . . . . 111
HV constant mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112

S
Safety
basic responsibilities of personnel . . . . . . . . . . . . . . . . . . . . . . . 33
Organizational measures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Safety symbols in this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Safety chain
Secure the working area with . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Safety compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Safety information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Safety Officer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Seismic anchorage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Seismic protection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Signal words
Usage in manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Skin safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Software version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 210
Specific safety aspects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Air intake and exhaust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
COMPex 100 Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
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COMPex 200 Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

COMPex F2 Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
Cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Remote socket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
Serial interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
Trigger signal ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Water supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Static gas lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260

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Stimulated emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Storage capacitors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Symbols in this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

T
Temperature Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118
Temperatures
Conversion of . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Threshold voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265
Thyratron . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24, 265
Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Heating voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Toxic substances symbol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Transport and Storage
Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Transport packaging
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Remove rigid packaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Removing the inner covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Trigger . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265
External . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Internal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211
Beam energy too low . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234
Corrosion in gas system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Fuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243
Gas leak . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 231
Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226
Laser device does not start . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233
Low light . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239
No trigger signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Self-firing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Warnings and error messages . . . . . . . . . . . . . . . . . . . . . . . . . 211
Tube optics
Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
Maintenance COMPex F2-Version . . . . . . . . . . . . . . . . . . . . . . 143
Reassembling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
Unmounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136

U
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Ultra-violet light . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Ultra-violet radiation safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Units of measure
Conversion of . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

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Unstable resonator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176

Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180
Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180
Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176
User Counter
Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
User manual
Intended Audience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

V
Vacuum pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Ventilating systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

W
Warning
Signal word in this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Watchdog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266
Water lines
Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Water supply
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Wiring diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
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LAMBDA PHYSIK - 03/2003 INDEX - 279

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INDEX - 280 User Manual COMPex