305-26217A

Oct. 2017

Scanning Probe Microscope

SPM-9700HT

Instruction Manual
Hardware
Read the
Read the instruction
instruction manual
manual thoroughly
thoroughly before
before you
you use
use the
the product.
Keep this
product. instruction manual for future reference.
Keep this instruction manual for future reference.
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 Introduction

Introduction
Read this Instruction Manual thoroughly before using the product.

Thank you for purchasing this product.

This instruction manual provides explanations for the SPM-9700HT Scanning Probe Microscope and
SPM-9700HT options, which include the magnetic force (MFM) mode, current mode, surface
potential mode (KFM), optical microscope unit, high-magnification optical microscope unit, and fiber
light.
Read this manual thoroughly before using the product and operate the product in accordance with
the instructions in this manual.
Also, keep this manual for future reference.
Note that only partial explanations are provided for the software included with the SPM-9700HT. For
details on software operation, refer to the separate manual "SPM-9700HT Software Instruction
Manual" (P/N 305-26220).

 IMPORTANT
 If the user or usage location changes, ensure that this Instruction Manual is always kept together
with the product.
 If this manual or a product warning label is lost or damaged, immediately contact your Shimadzu
representative to request a replacement.
 To ensure safe operation, read all Safety Instructions before using the product.
 To ensure safe operation, contact your Shimadzu representative if product installation, adjustment,
or re-installation (after the product is moved) is required.

 Notice
 All rights are reserved, including those to reproduce this manual or parts thereof in any form
without permission in writing from Shimadzu Corporation.
 Information in this manual is subject to change without notice and does not represent a
commitment on the part of the vendor.
 Any errors or omissions which may have occurred in this manual despite the utmost care taken in
its production will be corrected as soon as possible, although not necessarily immediately after
detection.
 Shimadzu takes no responsibility for the results obtained through the use of this instrument.
 Unforeseen accidents may cause data loss on the computer's hard disk drives. Always regularly
backup important data to avoid data loss due to unforeseen accidents.
 Microsoft and Windows are registered trademarks of Microsoft Corporation in the United States
and/or other countries. Other company names and product names mentioned in this manual are
trademarks or registered trademarks of their respective companies.
The TM and ® symbols are omitted in this manual.
© 2017 Shimadzu Corporation. All rights reserved.
Original version is approved in English.

SCANNING PROBE MICROSCOPE SPM-9700 SERIES HARDWARE INSTRUCTION MANUAL iii

Introduction

About the Instruction Manual

 Indications Used in This Manual
This instruction manual uses the following notation in explanations.
Notation Meaning
Indicates a potentially hazardous situation which, if not avoided, could result
! WARNING in serious injury or possibly death.

Indicates a potentially hazardous situation which, if not avoided, may result in

! CAUTION minor to moderate injury or equipment damage.

Emphasizes additional information that is provided to ensure the proper use

of this product.

The following symbols are used in this manual:

Notation Meaning

Indicates an action that must not be performed.

Indicates an action that must be performed.

iv SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 Introduction

Safety Instructions
To ensure safe product operation, read these important safety instructions carefully before use and
follow all WARNING and CAUTION instructions given in this section.

 Installation Site
! CAUTION
 Do NOT install this equipment in locations subject to direct sunlight.
Doing so may damage the equipment.

 Installation
To ensure safe operation, contact your Shimadzu representative if product installation, adjustment, or
re-installation (after the product is moved) is required.

! WARNING
 Take steps to prevent the instrument from falling over due to earthquakes or other
causes.
Not doing so may cause an injury.

 Ground the instrument.

Not doing so may result in electric shock due to a breakdown or ground leakage. This is
also important for ensuring stable operation.

 Do NOT insert the adapter's ground wire into, or allow it to come in contact with, the
power outlet.
Doing so may result in fire or electric shock.

 Do NOT place heavy objects on top of power cables. Also, do NOT run power cables
close to heat-generating equipment.
Doing so may result in damage to the cables and cause a fire, electric shock, or
breakdown. If cables are damaged, contact your Shimadzu representative immediately.

 Do NOT modify power cables, or bend or pull power cables with excessive force.
Doing so may damage the cables and cause a fire or electric shock. If cables are
damaged, contact your Shimadzu representative immediately.

SCANNING PROBE MICROSCOPE SPM-9700 SERIES HARDWARE INSTRUCTION MANUAL v

Introduction

 Operation
! WARNING
 NEVER look directly into the laser beam.
The SPM head uses a Class 2 semiconductor laser with a maximum output of 0.6 mW
that is capable of damaging eyesight.
If a sample with a mirror-like surface or a pair of tweezers is held close to the path of the
laser beam inside the SPM head, high-intensity scattered laser light may be emitted from
the aperture due to reflection. In this case, ensure that high-intensity scattered laser light
does not enter your eyes.

 Do NOT raise the SPM head from the SPM main unit while the laser is ON.
Otherwise, you may inadvertently look directly into laser light emitted from the bottom of
the SPM head. Turn power to the instrument OFF before raising the SPM head from the
SPM main unit.

Apert
ure

 Do NOT touch the upper part of scanner, when the voltage is applied to a sample. There
is risk of electric shock.

 Do NOT install an article in the gap of the upper scanner. High voltage is applied to a
scanner. Doing so may result in it and cause electric shock, or breakdown.

Upper part Gap

 Do NOT perform any control or adjustment procedures other than those stipulated in the
instruction manual.
Doing so may result in dangerous laser exposure.
Do NOT use flammable spray (e.g., hairspray or insecticide) close to the instrument. If it
is used, the spray may ignite and cause a fire.

 Use inactivated samples when handling microscopic organisms and bacteria.

vi SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 Introduction

! CAUTION
 Do NOT insert your fingers or foreign objects into the instrument's ventilation slots or in
spaces between the units.
Doing so may cause a breakdown or injury.

 Do NOT remove the covers from the SPM unit or the control unit.
Doing so may cause a breakdown or injury. The unit covers do not need to be removed
for everyday inspections and maintenance. Contact your Shimadzu representative for
repairs that require the removal of unit covers.

 Do NOT use organic solvents, acids, or alkaline solutions near this instrument.
The instrument may be damaged if it comes into contact with any of these liquids.

 Do NOT insert the tweezers to a clearance gap between a guide and a presser bar.
Doing so may cause a contaminating the standard sample.

 Do NOT insert the tweezers to a clearance gap between a guide and a presser bar.
It may damage a piezoelectric device or wire inside the cantilever tune.

 Store the standard samples in their specialized case when not using them.

 Store the standard samples in the environment described below.

Temperature: 23 °C ± 5 °C
Humidity: 30 % max.

SCANNING PROBE MICROSCOPE SPM-9700 SERIES HARDWARE INSTRUCTION MANUAL vii

Introduction

 Inspection and Maintenance

! WARNING
 Disconnect all power plugs from power outlets before performing any inspection or
maintenance work.
Failure to do so may cause accidents due to electric shocks or short circuits.

 Only replace fuses with the specified type.

Using fuses other than the specified type may cause fire to break out.

 If dust has adhered to the pins or pin-side surface of any power plugs, disconnect the
affected plug and wipe it clean with a dry cloth.
Failure to keep power plugs clean may cause fire to break out.

 Only replace parts with those specified in "6.6.1 Maintenance Parts List".
The use of unspecified parts may cause component damage and prevent normal
operation.

 In an Emergency
! WARNING
 If the instrument emits a strange noise or questionable odor, immediately turn OFF the
power switch, disconnect the power plug from the power outlet, and contact your
Shimadzu service representative.

 During a Power Outage

! WARNING
 Turn OFF the power switch if a power failure occurs.
Note that any unsaved data or data in the process of being obtained is lost when a power
failure occurs.
If a power failure occurs while data is being obtained, the cantilever may make contact
with the sample causing the cantilever to break.

 If the instrument does not start up after turning ON the power switch when recovering
from a power failure, contact your Shimadzu service representative.

viii SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 Introduction

Warning Labels
Warning labels are attached at the necessary locations on the instrument to ensure safe usage.
If any warning labels are missing or lost, immediately order replacements from your Shimadzu
representative and attached them at the correct locations. Information for each warning label and part
numbers (P/N) corresponding to each label are shown below.

 Control Unit Side View

Electric Shock Caution

P/N 037-72418-00

P/N 037-72421-01

P/N 037-72601-05

 SPM Unit

Laser Radiation Caution

P/N 037-72604-01

P/N 037-72601-05

P/N 037-72604-03

SCANNING PROBE MICROSCOPE SPM-9700 SERIES HARDWARE INSTRUCTION MANUAL ix

Introduction

Identification and FDA Certification Labels

Identification and FDA Certification labels are attached to the Instrument.
If any Identification or FDA Certification labels are missing or lost, immediately order replacements
from your Shimadzu representative and attached them at the correct locations. Information for each
Identification/Certification label and part numbers (P/N) corresponding to each label are shown
below.

 Control Unit Back View

Identification Label
P/N 228-55336-01

 SPM Unit Back View

FDA Certification Label

P/N 211-34968

This product complies with 21 CFR

Part 1040.10 and 1040.11 except for
deviations pursuant to Laser Notice
No. 50 dated June 24, 2007.

SHIMADZU CORPORATION
1, Nishinokyo-Kuwabaracho,
Nakagyo-ku, Kyoto 604-8511, Japan

x SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 Introduction

Warranty
Shimadzu provides the following warranty for this product.

Please contact your Shimadzu representative for information about the

1. Period: period of this warranty.

If a product/part failure occurs for reasons attributable to Shimadzu

2. Description: during the warranty period, Shimadzu will repair or replace the
product/part free of charge. However, in the case of products which are
usually available on the market only for a short time, such as personal
computers and their peripherals/parts, Shimadzu may not be able to
provide identical replacement products.

1. In no event will Shimadzu be liable for any lost revenue, profit or

3. Limitation of data, or for special, indirect, consequential, incidental or punitive
Liability: damages, however caused regardless of the theory of liability, arising
out of or related to the use of or inability to use the product, even if
Shimadzu has been advised of the possibility of such damage.
2. In no event will Shimadzu's liability to you, whether in contract, tort
(including negligence), or otherwise, exceed the amount you paid for
the product.

Failures caused by the following are excluded from the warranty, even if
4. Exceptions: they occur during the warranty period.
1. Improper product handling
2. Repairs or modifications performed by parties other than Shimadzu
or Shimadzu designated companies
3. Product use in combination with hardware or software other than that
designated by Shimadzu
4. Computer viruses leading to device failures and damage to data and
software, including the product's basic software
5. Power failures, including power outages and sudden voltage drops,
leading to device failures and damage to data and software, including
the product's basic software
6. Turning OFF the product without following the proper shutdown
procedure leading to device failures and damage to data and
software, including the product's basic software
7. Reasons unrelated to the product itself
8. Product use in harsh environments, such as those subject to high
temperatures or humidity levels, corrosive gases, or strong vibrations
9. Fires, earthquakes, or any other act of nature, contamination by
radioactive or hazardous substances, or any other force majeure
event, including wars, riots, and crimes
10. Product movement or transportation after installation
11. Consumable items
Note: Recording media such as CD-ROMs are considered
consumable items.

* If there is a document such as a warranty provided with the product, or

there is a separate contract agreed upon that includes warranty
conditions, the provisions of those documents shall apply.

SCANNING PROBE MICROSCOPE SPM-9700 SERIES HARDWARE INSTRUCTION MANUAL xi

Introduction

After-Sales Service and Availability of Replacement Parts

After-Sales Service For information on periodic inspection and maintenance of this product,
refer to "Chapter 6 Maintenance".
If any problem occurs with this product, perform an inspection and take
appropriate corrective action as described in this manual's
troubleshooting section.
If the problem persists, or the symptoms are not covered in the
troubleshooting section, contact your Shimadzu representative.

Replacement Parts Replacement parts for this product will be available for a period of
seven (7) years after the product is discontinued. Thereafter, such
Availability parts may cease to be available.
Note, however, that the availability of parts not manufactured by
Shimadzu shall be determined by the relevant manufacturers.

Inspection and Maintenance

In order to maintain the instrument's performance and obtain accurate measurement data, daily
inspection and periodic inspection/calibration are necessary.

 For daily maintenance, inspection, and replacement parts, see "5. Maintenance".

 Periodic inspection/calibration should be requested to your Shimadzu representative.

 Replacement cycles described for periodic replacement parts are rough estimate.
Replacement may be required earlier than the described replacement cycles depending on usage
environment and frequency.

Disposal Precautions
This product uses beryllium oxide for one of the electronic parts, and you cannot dispose of the
product as it is.
When disposing the product, be sure to contact your Shimadzu representative.

xii SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 Introduction

Action for Environment (WEEE)

 To all users of Shimadzu equipment in the European Union:
Equipment marked with this symbol indicates that it was sold on or after 13th
August 2005, which means it should not be disposed of with general household
waste. Note that our equipment is for industrial/professional use only.

Contact Shimadzu service representative when the equipment has reached

the end of its life. They will advise you regarding the equipment take-back.
WEEE
Mark
With your co-operation we are aiming to reduce contamination from waste electronic and electrical
equipment and preserve natural resource through re-use and recycling.
Do not hesitate to ask Shimadzu service representative, if you require further information.

SCANNING PROBE MICROSCOPE SPM-9700 SERIES HARDWARE INSTRUCTION MANUAL xiii

Contents

Contents
Introduction ..................................................................................... iii
About the Instruction Manual ................................................................................... iv
Safety Instructions .................................................................................................... v
Warning Labels ........................................................................................................ ix
Identification and FDA Certification Labels ............................................................... x
Warranty .................................................................................................................. xi
After-Sales Service and Availability of Replacement Parts ..................................... xii
Inspection and Maintenance ................................................................................... xii
Disposal Precautions .............................................................................................. xii
Action for Environment (WEEE) ..............................................................................xiii
1. Overview ................................................................................1
2. Observation Mode ..................................................................2
2.1 Contact Mode ................................................................................................... 2
2.2 Dynamic Mode ................................................................................................. 2
2.3 Phase Mode ..................................................................................................... 3
2.4 Lateral Force (LFM) Mode ................................................................................ 4
2.5 Force Modulation Mode .................................................................................... 5
2.6 Magnetic Force (MFM) Mode ........................................................................... 6
2.7 Current Mode ................................................................................................... 7
2.8 Surface Potential (KFM) Mode ......................................................................... 7
3. Configuration ........................................................................ 10
3.1 Appearance .................................................................................................... 10
3.2 System Configuration ..................................................................................... 10
3.2.1 SPM Unit ..................................................................................................................10
3.2.2 Control Unit ..............................................................................................................11
3.2.3 Data Processing System ..........................................................................................11
3.3 Details of Parts ............................................................................................... 11
4. Details of Instrument Units .................................................... 14
4.1 SPM Unit ........................................................................................................ 14
4.2 SPM Head ...................................................................................................... 14
4.3 Control Unit .................................................................................................... 16
4.4 Data Processing System ................................................................................ 17
4.5 Optical Microscope Unit.................................................................................. 17
4.5.1 Preparation ..............................................................................................................18
4.5.2 Optical Microscope Image Display ............................................................................18
4.5.3 Adjusting Focus and Lighting ....................................................................................19
4.5.4 Magnification ............................................................................................................19

xiv SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 Contents

4.5.5 Options ................................................................................................................... 19

4.6 High-Magnification Optical Microscope Unit .................................................. 20
4.6.1 Preparation.............................................................................................................. 21
4.6.2 Optical Microscope Image Display ........................................................................... 21
4.6.3 Adjusting Focus and Lighting ................................................................................... 21
4.6.4 TV Rear Capacitor Lens .......................................................................................... 21
4.6.5 Magnification ........................................................................................................... 22
4.7 Fiber Light ...................................................................................................... 22
4.8 Standard Samples ......................................................................................... 23
5. Starting and Stopping the System......................................... 24
5.1 Starting the System ....................................................................................... 24
5.2 Exiting the Software and Shutting Down the Host Computer ......................... 25
5.3 Stopping the Control Unit ............................................................................... 25
6. Maintenance ......................................................................... 26
6.1 Handling the Scanner .................................................................................... 26
6.1.1 Magnet Type Stub ................................................................................................... 26
6.1.2 Scanner Cap ........................................................................................................... 26
6.2 Replacing the Scanner .................................................................................. 27
6.2.1 Removing the Scanner ............................................................................................ 27
6.2.2 Installing and Assembling the New Scanner ............................................................ 28
6.2.3 Setting the Scanner ................................................................................................. 29
6.3 Moving the System ........................................................................................ 29
6.4 Storage .......................................................................................................... 29
6.4.1 Main Unit ................................................................................................................. 29
6.4.2 Standard Samples ................................................................................................... 29
6.5 Installing the Software ................................................................................... 29
6.5.1 Recovery Installations and Version Upgrades .......................................................... 29
6.6 Maintenance Parts ......................................................................................... 30
6.6.1 Maintenance Parts List ............................................................................................ 30
6.6.2 Using and Replacing Parts ...................................................................................... 30
6.7 Consumable Items ......................................................................................... 31
7. Specifications ....................................................................... 32
7.1 Main Units ...................................................................................................... 32
7.1.1 SPM Unit ................................................................................................................. 32
7.1.2 Control Unit ............................................................................................................. 33
7.1.3 Data Processing System ......................................................................................... 34
7.1.4 Software .................................................................................................................. 34
7.2 Cantilever....................................................................................................... 36
7.3 Standard Samples ......................................................................................... 37
7.3.1 Niobium-Coated Plate ............................................................................................. 37
7.3.2 Precision Grid Plate ................................................................................................. 37

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Contents

7.4 Optical Microscope Unit.................................................................................. 38

7.5 High-Magnification Optical Microscope Unit ................................................... 38
7.6 Fiber Light ...................................................................................................... 38
8. Installation ............................................................................ 39
8.1 Installation Specifications ............................................................................... 39
8.1.1 Tables ......................................................................................................................40
8.1.2 Installation Room......................................................................................................40
8.1.3 Power Supply ...........................................................................................................41
8.2 Connection Procedure .................................................................................... 42
8.2.1 Standard High-Magnification Optical Microscope Unit ...............................................42
8.2.2 Fiber Light ................................................................................................................43

9. Troubleshooting .................................................................... 44
10. Appendix .............................................................................. 47
10.1 Operating Principle of Surface Potential (KFM) Mode .................................... 47

xvi SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 1. Overview

1. Overview
Scanning probe microscope (SPM) is the general term used to describe a microscope that allows the
high-magnification observation of 3D topographic (height) images, force modulation images,
magnetic force images, friction force images, electric-current images, and electric-potential images
by scanning a sample surface with a microscopic probe.
An atomic force microscope (AFM) is a device that allows the observation of a sample's surface
topography by holding an extremely small cantilever close to the sample surface and detecting the
force (atomic force) acting between the cantilever and the sample.

Fig. 1.1.1 Cantilever (for Contact Mode)

The following modes can be selected with the SPM-9700HT:

 Contact mode
 Dynamic mode
 Phase mode
 Lateral force (LFM) mode
 Force modulation mode
 Magnetic force (MFM) mode (option)
 Current mode (option)
 Surface potential (KFM) mode (option)

In addition to height images, switching between observation modes allows the observation of force
modulation images, magnetic force images, friction force images, current images, and potential
images.

The SPM-9700HT is a microscope and not a measuring device. Data values acquired using the
SPM-9700HT should only be used as a guide. Shimadzu does not guarantee the accuracy of such values.

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 1

2. Observation Mode

2. Observation Mode
2.1 Contact Mode
In this mode, the repulsive force that acts between the cantilever and the sample is detected and
feedback* control of the scanner is performed along the Z-axis so that the vertical deflection of the
cantilever remains constant while the surface of the sample is scanned.
Contact mode is used to observe height images, which represent the sample's surface topography,
and deviation images, which indicate the difference from the target feedback value.
4-element photodiode

Mirror Beam splitter

Pre-amplifier
Semiconductor laser
Lens

Cantilever

Signal
processing X/Y scan
controller

Monitor
Tube piezo
scanner

Feedback PC
controller

Fig. 2.1.1 Contact Mode

* The SPM detects the force acting between the cantilever and the sample as a displacement or
variation in amplitude of the cantilever. Feedback in the SPM is defined as using the scanner to
control the distance between the sample and the cantilever so that the detected displacement or
amplitude of the cantilever equals the operating point, which is the target feedback value.

Table 2.1.1 Detectable Signals in Contact Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target feedback value.

2.2 Dynamic Mode

In this mode, the cantilever is vibrated in the vicinity of the resonant frequency. Using the fact that the
amplitude of vibration changes when the cantilever approaches the sample in this state, feedback
control is performed so that the amplitude of the cantilever remains constant while the surface of the
sample is scanned.
Dynamic mode is used to observe height images, which represent the sample's surface topography,
and deflection images, which indicate the difference from the target feedback value. Mobile samples,
soft samples, and adsorbent samples can be observed using this mode due to the low occurrence of
sample scratching during scanning.

Table 2.2.1 Detectable Signals in Dynamic Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target feedback value.

2 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 2. Observation Mode

2.3 Phase Mode

In this mode, which is based on dynamic mode, a lock-in detector is used to extract the cantilever
excitation-frequency component from the cantilever vibration detection signal. AsinD and AcosD
values are obtained from the output signal of the lock-in detector and used in calculation to determine
the delay in phase () with respect to the amplitude (A) and excitation signal of the cantilever.
The phase is displayed as an image that shows topographical information and differences in
properties across the sample surface, such as viscoelasticity. Because the phase combines a variety
of information, this mode provides a useful way to easily observe the differences in properties and
minute topography on the sample surface.

カンチレバーの位置信号
Cantilever position signal
加振信号 signal
Excitation


Asinδ
ロックイン
Lock-in
検出器
detector Reference
参照信号
signal

振幅(A) (A)
Amplitude
位相(δ)
Phase ()
感度
Sensitivity 位相オフセット
Phase offset
x1, x2, x4, 8
1, 2, 4, x8 -100～100度,
-100° to 100°,
ロックイン
Lock-in +180度
+180°
検出器
detector

Acosδ

Fig. 2.3.1 Signal Processing in Phase Mode

Table 2.3.1 Detectable Signals in Phase Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target feedback value.
A signal output from the lock-in detector.
AsinD This signal and the Acos signal are used to calculate the phase () and
amplitude (A).
A signal output from the lock-in detector.
AcosD This signal and the Asin signal are used to calculate the phase () and amplitude
(A).
This signal contains topographical information and differences in properties
Phase
across the sample surface, such as viscoelasticity.
As for deflection, this signal indicates the difference from the target feedback
Amplitude
value.

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 3

2. Observation Mode

2.4 Lateral Force (LFM) Mode

In this mode, which is based on contact mode, the scanning angle is set to 90° and scanning is
performed vertically with respect to the longitudinal direction of the cantilever (Fig. 2.4.1). The lateral
force (frictional force) acting between the cantilever and the sample at this point is detected as
cantilever torsion (deflection (horizontal)) and used to generate an image (Fig. 2.4.2).
This observation method is generally referred to as lateral force microscopy (LFM) or friction force
microscopy (FFM).

走査角度：0deg
Angle: 0 deg 走査角度：90deg
Angle: 90 deg
Clockwise
時計回りに回転rotation

Cantilever
カンチレバー

試料
Sample
トレース
Trace
リトレース
Retrace

Trace
トレース
Retrace
リトレース
Fig. 2.4.1 Cantilever Scan Direction as Displayed on Screen

Angle: 90 deg As viewed from direction A

走査角度：90deg Ａ方向から見た図
Deflection Deflection
(horizontal): 
偏差（よこ）：－ (horizontal): +
偏差（よこ）：＋

検出器
Detector

レーザー
Laser

Cantilever
カンチレバー
トレース
Trace
リトレース
Retrace トレース リトレース
Trace Retrace

（Ａ）
Fig. 2.4.2 How the Deflection (Horizontal) Signal Is Output

Table 2.4.1 Detectable Signals in Lateral Force (LFM) Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target feedback value.
The cantilever torsion signal.
Def.(Hori.) Indicates the lateral force (frictional force) when scanning vertically with respect to
the longitudinal direction of the cantilever.

4 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 2. Observation Mode

2.5 Force Modulation Mode

In this mode, which is based on contact mode, the sample is excited heightwise with constant
amplitude and frequency and a lock-in detector is used to extract the sample excitation-frequency
component from the detection signal of the resulting vibration of the cantilever. AsinD and AcosD
values are obtained from the output signal of the lock-in detector and used in calculation to determine
the delay in phase () with respect to the amplitude (A) and excitation signal of the cantilever.
The amplitude may produce a predominantly elastic image of the sample surface as shown, for
example, in Fig 2.5.1. Images that show the differences in properties, including viscosity and
elasticity, of comparatively soft samples, such as polymer materials and biological samples, can be
generated using this mode. For details, refer to the reference cited at the end of this section.

P
D

Cantilever
Asin Lock-in
A, 
Acos Amplifier
 Sample

Oscillator
Tube scanner

Large
Small

Hard sample Soft sample

Fig. 2.5.1 Force Modulation Mode

カンチレバーの位置信号
Cantilever position signal

加振信号 signal
Excitation

Lock-in 
Asinδ
ロックイン
検出器
detector Reference
参照信号
signal

振幅(A)
Amplitude (A)
位相(δ)()
Phase
感度
Sensitivity 位相オフセット
Phase offset
x1, x2, x4, 8
1, 2, 4, x8 -100～100度,
-100° to 100°,
ロックイン
Lock-in +180度
+180°
検出器
detector 
Acosδ

Fig. 2.5.2 Signal Processing in Force Modulation Mode

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2. Observation Mode

Table 2.5.1 Detectable Signals in Force Modulation Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target feedback value.
A signal output from the lock-in detector.
AsinD
This signal and the Acos signal are used to calculate the phase () and amplitude (A).
A signal output from the lock-in detector.
AcosD
This signal and the Asin signal are used to calculate the phase () and amplitude (A).
May result in a signal that displays predominant viscosity when observing comparatively
Phase
soft samples, such as polymer materials and biological samples.
May result in a signal that displays predominant elasticity when observing comparatively
Amplitude
soft samples, such as polymer materials and biological samples.

Reference:
M. Radmacher, R. W. Tillmann, and H. E. Gaub. 1993. Imaging viscoelasticity by force modulation
with the atomic force microscope. Biophys. J. 64:735-742

Do NOT use the force modulation mode in conjunction with the petri-dish type solution cell (option).

2.6 Magnetic Force (MFM) Mode

In this mode, a magnetized cantilever is vibrated in the vicinity of the resonant frequency and
scanning is only performed at a position separated from the sample by a constant distance. When
this happens, the cantilever is subject to repulsive or attractive forces due to the magnetic flux leaking
from the sample surface and consequently a variation in phase occurs with respect to the amplitude
of the cantilever and excitation signal. Detecting these variations allows images to be generated
based on the magnetic information obtained for the sample surface.
This observation method is generally referred to as magnetic force microscopy (MFM). Magnetic
force (MFM) mode is available as an option.

Cantilever
S S
Scanning direction

N N
Repulsive force Attractive force
Sample N S N S
Fig. 2.6.1 Magnetic Force (MFM) Mode

Table 2.6.1 Detectable Signals in Magnetic Force (MFM) Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target feedback value.
AsinD An intermediate signal used to calculate the phase () and amplitude (A).
AcosD An intermediate signal used to calculate the phase () and amplitude (A).
Indicates the delay in phase with respect to the excitation signal applied to the cantilever.
Phase
This signal also indicates magnetic information.
Amplitude Indicates magnetic information, although with lower sensitivity when compared to the phase.

6 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 2. Observation Mode

2.7 Current Mode

In this mode, which is based on contact mode, a bias voltage is applied between the cantilever and
the sample and images based on the electric current detected to be flowing from the sample to the
cantilever are generated.
Current mode is available as an option.

Height data Current data

I/V amplifier
Laser beam

Photodetector
Bias voltage

Sample
Sample holder

Sample stage

Scanner

Fig. 2.7.1 Current Mode

Table 2.7.1 Detectable Signals in Current Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target feedback value.
Current Indicates the electric current flowing from the sample to the cantilever.

2.8 Surface Potential (KFM) Mode

In this mode, AC electric signals are applied to a conductive cantilever and images based on the
electric potential on the sample surface are generated by detecting the static electricity that occurs
between the sample surface and the cantilever. Because topographic images and potential images of
the sample surface can be observed at the same time, a potential distribution for the sample's surface
profile can be obtained. This observation method is generally referred to as Kelvin probe force
microscopy (KFM).
Surface potential (KFM) mode is available as an option.
With an appropriate AC voltage applied between the cantilever and the sample surface, if the
cantilever is moved towards the sample surface, an electric force acts between the cantilever and the
sample surface (Fig. 2.8.1).
At this time, although the cantilever vibrates at a constant frequency due to the electric force, if the
potential of the sample surface changes, the amplitude of the cantilever vibrations, which are caused
by the electric force, also changes. It is known that the amplitude of the cantilever vibrations, which
are caused by the electric force, will be equal to 0 if a DC voltage of the same value as the potential of
the sample surface is applied to the cantilever. Therefore, performing feedback control of the DC
voltage applied to the cantilever so that the amplitude is equal to 0 makes it possible to obtain the
potential of the sample surface.
Also, control of the distance between the cantilever and the sample surface at this time is performed
using dynamic mode.

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2. Observation Mode

Laser beam
Lock-in amplifier

Photodetector
Cantilever
(conductive)

AC
～ +
Sample
DC
＋＋＋＋ －－－－

Fig. 2.8.1 Surface Potential (KFM) Mode

See "10.1 Operating Principle of Surface Potential (KFM) Mode" for details on the operating principle
of surface potential (KFM) mode.
カンチレバーの位置信号
Cantilever position signal
加振信号 signal
Excitation カンチレバー振動
Cantilever vibration

Potential signal
電位信号(AC+DC)
(AC+ DC) 電位フィードバック(DC)
Potential feedback (DC)

 (Potential deflection)
Asinδ（電位偏差）
電位
Potential
ロックイン
Lock-in Reference
検出器
detector 参照信号
signal
感度
Sensitivity カンチレバー電位(AC)
Cantilever potential (AC)
1, 2, x4,
x1, x2, 4,x8
8 位相オフセット
Phase offset
-100～100度,
-100° to 100°,
+180度
+180°
Fig. 2.8.2 Signal Processing in Surface Potential (KFM) Mode

Table 2.8.1 Detectable Signals in Surface Potential (KFM) Mode

Signal Description
Height Indicates the surface topography.
Deflection Indicates the difference from the target height feedback value.
AsinD Indicates the difference from the target potential feedback value.
Potential Indicates the electric potential on the sample surface.

8 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 2. Observation Mode

! CAUTION
Do NOT allow the cantilever or cantilever hold block to make contact with other metal parts.

The cantilever holders for current mode (option) and surface potential (KFM) mode (option)
communicate electric signals with the cantilever via the hold block. The cantilever is held
down by an insulated presser bar.
Cantilever
Hold block

Presser bar

Fig. 2.8.3 Cantilever and Hold Block

In order to obtain suitable image data, use a cantilever appropriate to the observation mode.
Note that inappropriate parameter settings may cause:
 Noise to appear in image data
 Trace and retrace in the line profile to be out of synchronization or unstable
For details on recommended parameter values when starting observation and the adjustment of parameters,
refer to the "SPM-9700HT Observation Guide" (P/N 305-26223).

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3. Configuration

3. Configuration
3.1 Appearance
Fig. 3.1.1 SPM-9700HT Scanning Probe Microscope shows the SPM-9700HT scanning probe
microscope system.

Fig. 3.1.1 SPM-9700HT Scanning Probe Microscope

The computer and monitor are subject to specification changes.

3.2 System Configuration

As shown in Fig. 3.2.1 System Configuration, the SPM-9700HT system consists of an SPM unit, a
control unit, and a data processing system.

SHIMADZU
SPM Control Unit

SPM unit Control unit Data processing system

Fig. 3.2.1 System Configuration

3.2.1 SPM Unit

The SPM unit consists of an SPM head, a scanner that scans the sample along the X-, Y-, and
Z-axes, a Z-axis drive unit that moves the cantilever in long vertical strokes with respect to the sample,
and a vibration isolation mechanism.
The SPM head consists of a cantilever that detects interaction with the sample surface and an
optical-lever detection unit.

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 3. Configuration

3.2.2 Control Unit

The control unit's scan control function, scanner driver, feedback control function, and control
computer are used to perform scanning and collect data for the sample mounted on the scanner. This
data is transferred to the data processing system via a communications interface.

3.2.3 Data Processing System

The data processing system comprises a host computer and the software installed on the host
computer.
The software consists of manager, online, browser, and offline components.
The manager is used to launch the various functions and configure user environment settings.
The online software is used to set parameters to the control unit, receive data from the control unit,
and display the data in real time on the monitor.
The browser software is used to display the data obtained in the online software in list format as well
as perform maintenance.
The offline software is used to display obtained data and perform processing and analysis.
For details on software operation, refer to the "SPM-9700HT Software Instruction Manual" (P/N
305-26220).

3.3 Details of Parts

 SPM-9700HT Main Units
SPM unit 1
SPM head
SPM head (contained in SPM unit) 1
Cantilever holder
for contact, dynamic, Lateral Force (LFM), phase, force 1
modulation, and Magnetic Force (MFM) modes
(contained in SPM head)
Scanner
HT scanner (10 um scanner) 1
Middle range scanner (30 um scanner) 1 (option)
Wide range scanner (125 um scanner) 1 (option)
Deep-type scanner (55 um scanner) 1 (option)
Narrow range scanner (2.5 um scanner) 1 (option)
Control unit
Main control unit 1
Power cable, 100 VAC 1
Control cables
37 pins, 2.5 m 1
9 pins, 2.5 m 1
Communications cable, 2 m 1
Extension cable with switch 2

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3. Configuration

 SPM-9700HT Accessories
Sample holders 10
Cantilever/probe
for contact mode 1 (includes 34) *1
for dynamic and phase modes 1 (includes 10) *1
Standard samples
Niobium-coated plate 1
Precision grid plate 1
Instruction manuals
Hardware instruction manual 1
Software instruction manual 1
Observation guide 1
Backup media 1
Maintenance accessories (contained in accessory case)
Tweezers, double curve 1
Tweezers, precision 1
Hexagon wrench, 3 mm 1
Grease 1
Flat-bladed screwdriver, 1.6 mm (contained in scanner box) 1
Accessory case 1

 Magnetic Force (MFM) Mode (Option)

Cantilever
for magnetic force (MFM) mode 1 (includes 10) *1
Maintenance accessories
Non-magnetic tweezers 1
Magnet 1
Backup media 1

 Current Mode (Option)

Cantilever holder
for current mode 1
Cantilever
for current mode 1 (includes 10) *1
Cantilever holding fitting
Insulation type 4
Backup media 1

 Surface Potential (KFM) Mode (Option)

Cantilever holder
for surface potential (KFM) mode 1
Cantilever
for surface potential (KFM) mode 1 (includes 10) *1
Cantilever holding fitting
Insulation type 4
Backup media 1

*1 One of the provided cantilevers is used during instrument installation.

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 3. Configuration

 Optical Microscope Unit (Option)

Tool microscope 1
Objective lens, 2x 1
Eyepiece lens, 20x 1
Stand 1

The following items are included only in the model with CCD.
Microscope TV adapter 1
CCD camera 1
AC adapter for CCD camera 1
Coaxial cable with BNC connector, 5 m 1
BNC-RCA conversion connector 1
Image capture cable 1
Installation media for image capture cable 1

 High-Magnification Optical Microscope Unit (Option)

Zoom microscope (0.8x to 5x) 1
TV rear capacitor lens, 3x 1
CCD camera 1
AC adapter for CCD camera 1
Lamp house 1
Lamp house controller 1
Universal stand 1
Bonder mount 1
Coaxial cable with BNC connector, 5 m 1
BNC-RCA conversion connector 1
Image capture cable 1
Installation media for image capture cable 1

 Fiber Light (Option)

Fiber Light set 1

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4. Details of Instrument Units

4. Details of Instrument Units

4.1 SPM Unit

Fig. 4.1.1 SPM Unit

No. Name Description

This unit attaches to the cantilever holder and is fitted with an
1 SPM Head optical-lever detection unit, which includes a laser diode and
photodetector.
This device scans the sample using X- and Y-axis scanning signals and
2 Scanner
Z-axis feedback signals.
This unit moves the cantilever towards the sample (i.e. lowers the SPM
3 Z-axis Drive Unit head) for observation and raises the cantilever away from the sample
when observation is complete.
This display panel monitors the overall intensity of the light that reflects
4 Signal Display Panel
back from the cantilever and enters the photodetector.

4.2 SPM Head

Fig. 4.2.1 SPM Head

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 4. Details of Instrument Units

No. Name Description

1 Clamp Levers Disengaging the clamp levers allows the SPM head to slide backwards.
2
This lever can be moved to position A or B shown in Fig. 4.2.2.
Lever Position A:
This is the normal position for observation and adjustment of the laser
spot position with respect to the cantilever.
Lever Position B:
This is the position for observing samples via the sample observation
window (4).
Switching the lever to this position moves the optical components inside
the SPM head out of the laser beam path and prevents the laser from
irradiating the cantilever and the sample. The sample observation
window's laser-darkening filter is also moved away from the window. This
makes it easier to observe the cantilever and sample from the sample
observation window with an optical microscope.

3 Sample Observation Lever

Fig. 4.2.2 Sample Observation Lever

! CAUTION
If the sample observation lever is set to position B
and then returned to position A, check that the laser
spot position has not been displaced. If it is
displaced, perform readjustment.
The laser spot position with respect to the cantilever
may be displaced when the sample observation lever
is set to position B.

This window is used to observe the cantilever and sample from directly
above with an optical microscope.
Sample Observation
4 Window
When observing the cantilever and sample with the optical microscope
unit (option) or high-magnification microscope unit (option), set the
objective lens on top of the sample observation window.
This knob is used to move the position of the cantilever with respect to
the sample along the X (lateral) direction and can also be used to adjust
5 X Stage-Positioning Knob the position for sample observation.
The cantilever can be moved ±3 mm if the sample size does not exceed
18 mm along the X direction.
This knob is used to move the position of the cantilever with respect to
the sample along the Y (vertical) direction and can also be used to adjust
6 Y Stage-Positioning Knob the position for sample observation.
The cantilever can be moved ±3 mm if the sample size does not exceed
18 mm along the Y direction.
This knob is used to change the angle of the mirror inside the SPM head.
7 Mirror Adjustment Tab The mirror is used to direct laser light reflected from the cantilever to the
detector.

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4. Details of Instrument Units

No. Name Description

Laser Adjustment Knob These knobs are used to adjust the position of the laser spot with respect
8 (Lateral Direction) to the cantilever.
Laser spot

Laser Adjustment Knob

9 (Vertical Direction)
Cantilever
Fig. 4.2.3 Moving the Laser Spot Laterally (Left) and Vertically (Right)
Detector Adjustment Knob These knobs are used to adjust the position of the detector inside the
0 (Vertical Direction) SPM head with respect to the laser light reflected from the cantilever.
Laser spot

Detector Adjustment Knob

b (Lateral Direction)
Detector

Fig. 4.2.4 Moving the Detector Vertically (Left) and Laterally (Right)

4.3 Control Unit

Fig. 4.3.1 Control Unit

No. Name Description

1 Power Switch This switch is used to turn ON the power to the control unit.
After the power turns ON, this lamp lights when communications
2 Ready Lamp between the control unit and the host computer become possible.
It flashes when the SPM head moves up or down.
3 Power Lamp This lamp lights when power to the control unit turns ON.
4 AC to IN This is the input terminal for 100 VAC.
5 FUSE The fuse used for overcurrent protection in the control unit.
6 SPM HEAD This is used to connect the SPM unit's 37-pin control cable.
7 PIEZO This is used to connect the SPM unit's 9-pin control cable.
8 LAN This is used to connect to the host computer via communications cable.
9 AUX IN Not used.
0 AUX OUT Not used.
a Fan The fan used to cool the control unit.

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 4. Details of Instrument Units

4.4 Data Processing System

The data processing system consists of the host computer and the software.
The host computer consists of the computer unit and the monitor. Refer to the instruction manuals
provided with each unit as required.
For details on software, refer to the "SPM-9700HT Software Instruction Manual" (P/N 305-26220).

4.5 Optical Microscope Unit

This optical microscope is used to observe the sample and the cantilever from the SPM head's
observation window.
 Optical Microscope Unit with CCD
Optical microscope images are output from a CCD as video signals, input to the data processing
system from the USB Cable, and displayed on the monitor. Observation with the naked eye is
possible if an eyepiece is attached to the microscope.
 Optical Microscope Unit without CCD
Optical microscope images are observed with the naked eye using the eyepiece lens.

Fig. 4.5.1 Optical Microscope Unit Configuration

No. Name
1 Tool microscope
2 Objective lens, 2x
3 Eyepiece lens, 20x
4 Stand
5 Microscope TV adapter
6 CCD camera
7 AC adapter for CCD camera
8 Coaxial cable with BNC connector, 5 m
9 BNC-RCA conversion connector
0 Image capture cable
a CD-ROM containing Image capture cable software
* If there is no CCD, the configuration consists of items 1, 2, 3, and 4 only.

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4. Details of Instrument Units

4.5.1 Preparation

1. Adjust the stand height and the arm length, and position the tool microscope above the SPM
head's observation window.

2. Position the end of the fiber light's (option) light guide in front of the SPM head so that the
sample can be illuminated.

3. Turn ON the power to the fiber light (option).

Be sure to connect the USB cable to the USB 2.0 port ( ). If the cable is connected to the USB 3.0 port
( ), the microscope cannot operate correctly and thus no image is displayed.

Do NOT enable to put the computer to sleep (Default setting is “Never”). It may cause the CCD camera to fail
to work properly.

4.5.2 Optical Microscope Image Display

Click [OM Image] on the [View] menu (Fig. 4.5.2) in the [SPM Online] window to display the [OM
Image] window (Fig. 4.5.3).

Fig. 4.5.2 [View] Menu

Fig. 4.5.3 [OM Image] Window

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 4. Details of Instrument Units

Click (Live) in the [OM Image] window to display the optical microscope image.
This window is enabled when a CCD-equipped optical microscope is provided with the instrument.

Do NOT insert or extract other USB device while the optical microscope is live. In this case, there is a
possibility that the optical microscope is undetected.

4.5.3 Adjusting Focus and Lighting

The microscope's working distance extends approx. 73 mm from the end of the lens. Adjust the focus
by turning the stand's handle.

4.5.4 Magnification
Images sent to the host computer from the CCD camera via the image capture cable are displayed on
the monitor. The display magnification of the displayed image can be changed using the size and
zoom settings (digital zoom) in the [OM Image] window.
The display magnification for the initial window size without zoom is given below.

Table 4.5.1 Display Magnification

Observation Range Display Range Display Magnification

Approx. 2.3  1.7 mm Approx. 92  69 mm Approx. 40x

The magnification for observation using an eyepiece lens instead of the CCD camera is 40x.

4.5.5 Options
The options given below are available for Optical Microscope Unit.

Table 4.5.2 Optical Microscope Unit Options

Part Number Name Specifications Notes

Magnification: 1x,
046-62928-01 Objective lens, OB-1
Operating distance: 165 mm
Magnification: 2x,
046-62928-02 Objective lens, OB-2 Included in this unit.
Operating distance: 73 mm
046-62925-05 Eyepiece lens, OC-10 Magnification: 10x
046-62925-15 Eyepiece lens, OC-20 Magnification: 20x Included in this unit.

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4. Details of Instrument Units

4.6 High-Magnification Optical Microscope Unit

This optical microscope is used to observe the sample and the cantilever from the SPM head's
observation window. Optical microscope images are output from a CCD as video signals, input to the
data processing system from the USB cable, and displayed on the monitor.

Fig. 4.6.1 High-Magnification Optical Microscope Unit Configuration

No. Name
1 Tool microscope
2 TV rear capacitor lens
3 CCD camera
4 AC adapter for CCD camera
5 Lamp house
6 Lamp house controller
7 Image capture cable
8 Universal stand
9 Bonder mount
0 Coaxial cable with BNC connector
a BNC-RCA conversion connector
b Installation media for image capture cable

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 4. Details of Instrument Units

4.6.1 Preparation

1. Adjust the universal stand's height and the arm length, and position the zoom microscope
above the SPM head's observation window.

2. Position the end of the fiber light's (option) light guide in front of the SPM head so that the
sample can be illuminated.

3. Turn ON the power to the lamp house controller.

4. Turn ON the power to the fiber light (option).

Be sure to connect the USB cable to the USB 2.0 port ( ). If the cable is connected to the USB 3.0 port
( ), the microscope cannot operate correctly and thus no image is displayed.

Do NOT enable to put the computer to sleep (Default setting is “Never”). It may cause the CCD camera to fail
to work properly.

4.6.2 Optical Microscope Image Display

See "4.5.2 Optical Microscope Image Display".

4.6.3 Adjusting Focus and Lighting

The microscope's working distance L extends approx. 75 mm from the end of the lens. Adjust the
focus by turning the bonder mount's handle.
The brightness of the coaxial incident lighting can be adjusted by turning the knob on the lamp house
controller.
If the zoom magnification of the zoom microscope is less than 1.5 (on a scale of 0.8 to 5), the coaxial
incident lighting is cut and the surrounding part becomes darker.
Using a fiber light (option) makes it possible to illuminate the sample from the front of the SPM head.

4.6.4 TV Rear Capacitor Lens

Attaching the TV rear capacitor lens makes it possible to increase the magnification without changing
the distance to the object.
When the TV rear capacitor lens is attached, although the optical magnification is increased by a
factor of 3, the field of observation becomes smaller and the observation images become darker.
Attach or remove the TV rear capacitor lens as appropriate for your application.

TV Rear Capacitor Optical Magnification Field of

Brightness
Lens Factor Observation
Without - Large Bright
With 3x Small Dark

Fig. 4.6.2 Effects of Using TV Rear Capacitor Lens

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4. Details of Instrument Units

4.6.5 Magnification
If the zoom magnification of the zoom microscope is changed (on a scale of 0.8 to 5), the optical
zoom operates and the display magnification changes.
The display magnification of the displayed image can be changed using the size and zoom settings
(digital zoom) in the [OM Image] window.
The optical magnification changes by a factor of 3 depending on whether or not the TV rear capacitor
lens is attached.
The display magnification with and without the TV rear converter lens for the initial window size
without zoom is given below.

 Without the TV Rear Converter Lens

Table 4.6.1 Display Magnification

Display Magnification
Observation Range Display Range Zoom Microscope Scale
0.8 to 5
Approx. 0.9  0.7 mm to
Approx. 92  69 mm Approx. 16x to 100x
approx. 5.7  4.3 mm

 With the TV Rear Converter Lens

Table 4.6.2 Display Magnification

Display Magnification
Observation Range Display Range Zoom Microscope Scale
0.8 to 5
Approx. 0.3  0.2 mm to
Approx. 92  69 mm Approx. 48x to 300x
approx. 1.9  1.4 mm

If the zoom magnification of the zoom microscope is between 0.8 and 1.5 (on a scale of 0.8 to 5),
coaxial incident-light illumination does not reach the area surrounding the viewing field, causing it to
become darker.

4.7 Fiber Light

The fiber light is used to illuminate the cantilever and the sample from in front of the SPM head.
Set the fiber light so that the end of the light guide is pointing towards the SPM head. The brightness
can be adjusted by turning the knob. Turn off the fiber light when using the SPM for observation.

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 4. Details of Instrument Units

4.8 Standard Samples

Standard samples are used to check the condition of the instrument. The surface of standard
samples has been finished to a high level of precision. Handling standard samples carelessly may
result in surface contamination and prevent normal use.

! CAUTION
Always store standard samples according to the following conditions.
 Do NOT touch the surface of standard samples.
 Do NOT wet the surface of standard samples with any type of liquid.
 Store standard samples in their specialized case when not in use.
 Do NOT store standard samples in environments subject to high temperatures and
humidity or significant fluctuations in temperature and humidity.
Temperature: 23 °C ± 5 °C
Humidity: 30 % max.

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5. Starting and Stopping the System

5. Starting and Stopping the System

5.1 Starting the System
1. Turn ON the power to the control unit.

2. Turn ON the power to the host computer.

3. Turn ON the power to the standard optical microscope unit's (option) or the high-magnification
microscope unit's (option) CCD camera.

Be sure to connect the USB cable to the USB 2.0 port ( ). If the cable is connected to the USB 3.0 port
( ), the microscope cannot operate correctly and thus no image is displayed.

4. Turn ON the power to the fiber light.

Wait for the control unit's Ready lamp to light and the host computer's OS to start.

5. Start the manager.

6. Start the online, browser, or offline software according to the operation you wish to perform.

If higher quality image data is required, start the online software and wait several hours after illuminating the
laser before performing observation.

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 5. Starting and Stopping the System

5.2 Exiting the Software and Shutting Down the Host

Computer
1. Exit the offline software.

2. Exit the browser.

3. Exit the online software.

4. Exit the manager.

5. Shut down Windows and turn OFF the power to the host computer.

6. Turn OFF the power to the host monitor.

! CAUTION
Do NOT turn OFF power to the host computer, before the host computer completely stops.
Turning OFF power in operating conditions, especially terminating the host computer, may
cause serious damage to the SPM software, the windows, or the host computer.

5.3 Stopping the Control Unit

1. Turn OFF the power to the fiber light (option).

2. Turn OFF the power to the control unit.

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6. Maintenance

6. Maintenance
6.1 Handling the Scanner
6.1.1 Magnet Type Stub
A magnet type stub is attached in each type of scanner for the SPM-9700HT. (Fig. 6.1.1.)
The magnet type stub is fixed with a stab mounting screw, and can be removed.
The stab mounting screw may become loose during transportation or use. Before attaching the
sample holder, confirm using the dedicated screwdriver attached that the mounting screw is not loose.
If it is loose, slightly tighten it.

Fig. 6.1.1 Scanner Upper Portion

! CAUTION
When turning the stub mounting screw in the scanner, use the attached screwdriver, and do
not apply an excessive force or impact force.

Such action may break the scanner.

6.1.2 Scanner Cap

The scanners are equipped with a protective scanner cap.
If the scanner has been removed because it is not in use or is to be moved, attach the scanner cap
(Fig. 6.1.2).

Scanner cap

Fig. 6.1.2 Scanner Cap

! CAUTION
Do NOT allow the scanner to suffer physical impacts while the scanner cap is removed.

Such action may break the scanner.

26 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 6. Maintenance

6.2 Replacing the Scanner

Wide range, deep-type, and narrow range scanners for SPM-9700HT are available in addition to the
standard type. The procedure for replacing the scanner is described below.

! CAUTION
The scanner is a precision component and must be handled with care.

Otherwise, the scanner may be damaged.

6.2.1 Removing the Scanner

1. Place the new scanner close to the SPM unit.

2. Turn OFF the power to the control unit and the host computer.

3. Remove the J4 connector.

Fig. 6.2.1 J4 Connector

4. Remove the two fixing springs on the left and right.

Fig. 6.2.2 Fixing Springs

5. Lift the SPM head unit slightly and move it to the right.

Fig. 6.2.3 SPM Head

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 27

6. Maintenance

6. Loosen and remove the scanner fixing ring.

Fig. 6.2.4 Scanner Fixing Ring

7. Lift out the scanner.

Fig. 6.2.5 Scanner

6.2.2 Installing and Assembling the New Scanner

Installation and assembly of the new scanner is performed in the opposite order to "6.2.1 Removing
the Scanner".

1. Insert the new scanner so that the expanding slot is located on the near side.
At this time, pull out the cable through the notch on the left side so that it is not pinched.

2. Securely tighten the fixing ring.

3. Return the SPM head and slide it a short distance horizontally until it sets in the home position.
The SPM head will not move horizontally while in the home position.

4. Attach the two fixing springs.

5. Insert the J4 connector.

28 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 6. Maintenance

6.2.3 Setting the Scanner

1. Turn ON the power to the control unit.

2. Turn ON the power to the host computer.

3. If the scanner cannot be selected in the manager, copy the scanner file with the file extension
".PZT" from the media provided with the scanner to the Env folder
(C:\Users\Public\SPM-9700\Env).

4. Start the manager, select the scanner, and then start the online software.

6.3 Moving the System

Contact your Shimadzu representative if you intend to move the SPM-9700HT from the original
installation location.

6.4 Storage
6.4.1 Main Unit
When not using the instrument for a long period, or when storing it, maintain the surrounding
environment at conditions conforming as closely as possible to the installation specifications, cover
the instrument with a vinyl sheet, and store it together with a desiccant. It is recommended that, if
possible, the instrument is stored with the cables connected (except power cables).
Do not store the equipment in the following locations:
 Locations subject to high temperatures and high humidity levels
 Locations subject to direct sunlight, wind, or rain
 Locations close to highly corrosive chemicals
 Unstable locations from which the instrument may fall

6.4.2 Standard Samples

 Store standard samples in their specialized case when not in use.
 Do NOT store standard samples in environments subject to high temperatures and humidity or
significant fluctuations in temperature and humidity.
 Always store standard samples according to the following conditions.
Temperature: 23 C  5 C
Humidity: 30 % max.

6.5 Installing the Software

6.5.1 Recovery Installations and Version Upgrades
Recovery installations of the software and version upgrades are performed by Shimadzu service
personnel. Contact your Shimadzu representative if installation is required.

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 29

6. Maintenance

6.6 Maintenance Parts

6.6.1 Maintenance Parts List
Table 6.6.1 Maintenance Parts List

Part Number Part Name Application Notes

Used for the tips and threads of the
S211-39237-91 Grease screws in the SPM unit's Z-axis drive Approx. 2 cc
unit
Consists of guard, filter,
Used to prevent dust entering the
S042-60935-01 Filter, FL6 and retainer
control unit interior.
2 per unit
1 per unit
S211-39425-91 Fan (upper) Used to cool the control unit. Recommended replacement
period: 2 years
1 per unit
S211-39425-92 Fan (lower) Used to cool the control unit. Recommended replacement
period: 2 years
Fuse, 218_06.3
Used for overcurrent protection in
S072-02004-24 (manufactured 2 per unit
control unit.
by Littelfuse)
Used in contact, dynamic, lateral force,
phase, force modulation, and magnetic
S211-37858 Presser bar 1 per unit
force modes for holding the cantilever in
the cantilever holder.
Used in current, surface potential (KFM
Presser bar
S211-37858-01 ) modes for holding the cantilever in the 1 per unit
(insulation type)
cantilever holder.

6.6.2 Using and Replacing Parts

 Using Grease
Grease is applied to the tips and threads of the three screws used in the Z-axis drive unit in order to
prevent rust and abrasion.
If this grease is wiped off when, for example, dirt that has adhered to the screw tips or threads is
wiped off, reapply grease to the tips and threads.

Screws

Fig. 6.6.1 Z-axis Drive Unit Screws and Grease Applied to Prevent Rust

 Replacing Fan Filters

Fan filters must be replaced when dirt accumulates on them. Contact your Shimadzu representative
to request replacement.

30 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 6. Maintenance

 Replacing Fans
Fans must be replaced if they emit strange noises, do not rotate properly, or exhibit some other
irregularity. The service life of a fan is approx. 2 years. It is recommended that fans are replaced
regularly even if there are no irregularities. Contact your Shimadzu representative to request
replacement.

 Replacing Fuses
Before replacing a fuse, remove the cause of the overcurrent.

1. Turn OFF the power to the control unit and disconnect the power cable.

2. Remove the control unit's fuse cover ((5) in Fig. 4.3.1) with a flat-bladed screwdriver.

3. Replace the fuse and perform the previous steps in reverse.

 Replacing the Cantilever's Presser Bar

If cantilever tuning cannot be performed properly, even though the cantilever is set properly, it is
possible that the cantilever presser bar has deteriorated.
In this case, the cantilever presser bar must be replaced. Contact your Shimadzu representative to
request replacement.

6.7 Consumable Items

Table 6.7.1 Consumable Items List

Part Number Part Name Application Quantity

Used for contact mode.
Also usable in lateral force
SSOT-AK0546 Cantilever, OMCL-TR800PSA-1 34 chips/set
(LFM) mode and force
modulation mode.
Used for dynamic mode and
SSOT-AK0556 Cantilever, NCHR-20 20 chips/set
phase mode.
SSOT-AK0551 Cantilever, CONTPT-10 Used for current mode. 10 chips/set
Used for magnetic force (MFM)
SSOT-AK0554 Cantilever, MFMR-10 10 chips/set
mode.
Used for surface potential
SSOT-AK0552 Cantilever, EFM-10 10 chips/set
(KFM) mode.
S211-37642 Sample holder 10
S211-37642-01 Sample holder 50
Used for contact mode,
Standard sample, niobium-coated
S211-37643-03 dynamic mode, and phase 1
plate
mode.
Standard sample, precision grid
S211-37643-01 Used to calibrate scanner. 1
plate
1
Average
S046-609030-91 Lamp, JCR12V 100W10H Halogen lamp for the fiber light.
service life:
1000 h

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 31

7. Specifications

7. Specifications
7.1 Main Units
7.1.1 SPM Unit
External dimensions Approx. 180 (W)  255 (D)  260 (H) mm
Weight Approx. 5.5 kg
Contact mode
Dynamic mode
Phase mode
Lateral force (LFM) mode
Observation modes
Force modulation mode
Magnetic force (MFM) mode (option)
Current mode (option)
Surface potential (KFM) mode (option)
XY: 0.2 nm
Resolution
Z: 0.01 nm
Displacement detection Light source, optical lever, detector
SPM head Light source Laser diode (650 nm, 0.6 mWmax, ON/OFF possible)
Detector Photodetector
Drive element Tube-type piezo element
10 m  10 m  1 m
30 m  30 m  5 m (option)
Scanner Max. scanning size
125 m  125 m  7 m (option)
(X  Y  Z)
55 m  55 m  13 m (option)
2.5 m  2.5 m  0.3 m (option)
24 (dia.)  8 mm
Maximum sample size
(20 (dia.)  8 mm in current mode)
Stage Sample replacement method Head-slide mechanism
Sample securing method Secured with magnet
SPM Head drive range 6  6 mm (for sample diameter of 18 mm)
Type Fully automated mechanism based on stepping motor
Z-axis drive unit
Maximum stroke 10 mm
Signal display panel Display volume Total light intensity incident to the detector (digital display)
Vibration isolation
Vibration isolator Built into SPM unit
mechanism

32 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 7. Specifications

7.1.2 Control Unit

Approx. 250 (W)  420 (D)  454 (H) mm
External dimensions
(not including protruding parts, such as switches and screws)
Weight Approx. 18.5 kg
100 to 120 VAC, 200 to 240 VAC
Input power voltage
(The upper and lower ranges are switched automatically in the power supply.)
Power consumption 100 W
Input frequency 50 to 60 Hz
Offset: -211 to +211 V / 16 bits
X∙Y-axis control Waveform generation: -211 to +211 V / 16 bits
Waveform gain: 0 to 1 / 16 bits
Offset: -211 to +211 V / 16 bits
Scan controller
Waveform generation: -105.5 to +105.5 V / 16 bits
Z-axis control Waveform gain: 0 to 1 / 16 bits
Feedback: -211 to +211 V / 16 bits
Feedback output gain: 1 to 1/1024
Cantilever excitation Amplitude -5 to 5 V / 16 bits
control Frequency 1 to 500 kHz, 1-Hz units
Cantilever bias voltage Amplitude -10 to 10 V, 16 bits
control (with optional
surface potential (KFM) Frequency 1 to 500 kHz, 1-Hz units
mode)
Sample bias voltage (with
optional current and
Voltage -10 to 10 V / 16 bits
surface potential (KFM)
modes)
Control type Digital control system based on DSP
Resolution 16 bits
Feedback controller
1 simultaneous (standard)
Number of signals
2 simultaneous (option)
Input voltage -10 to 10 V
Resolution 16 bits
Data acquisition Sampling frequency 200 kHz
controller 5 channels (4 channels simultaneous measurement)
(Standard)
Input signals
7 channels (4 channels simultaneous measurement)
(Option)
Frequency 1 to 500 kHz
Lock-in detection
Number of signals 2 simultaneous signals
Communications
Type 1000Base-T, TCP/IP protocol
interface

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 33

7. Specifications

7.1.3 Data Processing System

Main memory 4 GB min.
Built-in hard disk: 160 GB min.
External storage devices
One CD-RW drive
Host computer
Video DirectX 9.0 features are supported
Communications interface 1000Base-T, TCP/IP protocol
OS Windows 10 Professional 64 bit, English version
Monitor Panel Display resolution: 1920  1080 pixels

7.1.4 Software
Interface Language English
Online Observation mode, scanner selection, startup
Offline Function selection, startup
Manager
Specifying and saving of data paths for each user and
User settings
temporary paths
Signal Select from a maximum of 6 signals
Scanning direction Trace, retrace (simultaneous measurement possible)
Scanning angle -90 to 90 deg
Scanning size 0.1 nm to the scanner's max. scanning size, offset settings
Scanning rate 0.015 to 100 Hz
2048  2048*3, 1024  1024*3, 512  512,
256  256, 128  128, 64  64*4, 32  32*4
(*3 Performs displaying as compressed 512  512.
Number of pixels
Performs processing and analysis after conversion to 512 
512 pixels or below)
(*4 Pixels cannot be saved)
Data size 8.03 MB, 2.03 MB, 544 kB, 160 kB, 64 kB
Operating point, P gain, I gain
Feedback settings
Switch between constant force or constant height
Online Scanner operating status display
Scanner operation settings Z range settings
Offset settings (automatic adjustment possible)
Approach (automatic, fast, slow)
Z-axis course adjustment
Release (10 μm, 100 μm, release)
Stop
Switch XY scanning ON/OFF
Scanning Switch Y scanning ON/OFF, restart
Start position of Y scanning can be changed (top, center,
bottom)
Number of screens (single screen display, dual screen
display (upper/lower, left/right)), quad screen display)
View method (gray, solid, mix)
Display range settings (Z display range, offset)
Image data display
Color palette settings (400 types)
Ruler display
Tilt correction settings (none, Y, XY)
Image history display (list display, single image display)

34 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 7. Specifications

Observation mode display

Display of the communication circuit connection status
Display of the scanner's max. scanning size
Status display
Operating status display
Laser ON/OFF display
Incident light intensity display
Display of lateral and vertical variation signals from the
detector
Signal display Feedback target signal display
Switch the laser ON/OFF
Laser intensity display (displayed gain can be changed)
Display of scanning size, scanning angle, offset X and Y
Navigator
Loading and display of image data
Display of AsinD and AcosD signals
Amplitude/phase settings
Frequency, amplitude, and phase offset settings
Display and saving of profile during scanning
Profile display Profile display and analysis of any two points (distance,
difference in elevation)
Configuration using a command file
Online Auto observation (Scanning size, offset X/Y, scanning rate, wait time,
cantilever elevation, comments)
1 to 500 kHz (automatic setting possible)
Lever tune Creation and registration of presets
Saving of lever tune data
Force curve Measurement and saving of force curves
I/V Measurement and saving of I/V data
(option) Sample bias voltage: -10 to 10 V
Independent correction possible for each axis (X-, Y-, and
Calibration
Z-axes)
Optical microscope image
display Live display, zoom display, and saving of CCD images
(option)
Bias voltage settings Sample bias voltage setting (-10 to 10 V)
(option) Cantilever bias voltage setting
Plane tilt correction
Tilt correction using planar approximation
(option)
Guidance Display of operating procedures
Data display method List display with thumbnail images
Browser Changing of group and data names
Maintenance Deletion, copying, moving, and searching of data
Creation and deletion of folders
Gray (top view) display (length measurement possible)
Pseudo 3D display (height, lines, mesh)
3D display (3D-Ex, solid, mix3D , height3D , lines3D,
mesh3D)
3D display zoom in, zoom out and rotation
3D display profile analysis
Setting light source, viewing angle, and luster for 3D
display
Offline Image data display
Contour display (interval setting can be changed)
Creation, editing, and selection of color palette (400 types)
Z display range, changing of offsets
Setting Z-axis units (height, voltage, and user definitions)
Reduced display, enlarged display, and iconization
possible
Information display (scanning parameters, modified history,
comments)

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 35

7. Specifications

Reduced display, enlarged display, iconification possible

Wave data display Wave information display (scanning parameters,
comments)
Overlapping display, side-by-side display, overwrite display
Line color can be changed
Reduced display, enlarged display, and iconization
Line data display
possible
Line information display (scanning parameters, modified
history, comments)
Flattening (11 techniques)
Noise line removal (automatic selection of noise line
possible)
Local filter (6 types, 3 sizes)
Spectrum filter
Image magnification (free and fixed magnification factors)
Image processing
Image inversion
Image rotation (90, 180, 270)
Resolution conversion (512, 256, 128)
Line extraction
Offline
(line width, angle, line number, XY offset)
Macro functions (registration, reading, execution)
Profile analysis (up to 4 cross sections, 3 sections for each)
Analysis of line roughness (conforms to JIS B0601-2001)
Surface roughness analysis (Ra, Rz, Rzjis, Rq, Rp, Rv)
Morphology analysis (histogram, bearing ratio, area,
surface area, volume)
Measurement of average level difference (line
specification, area specification)
Image analysis
Analysis of power spectra
Autocorrelation analysis
Fractal analysis
Line-data length-measurement analysis (up to 6 cross
sections, 3 sections for each)
Analysis of line-data roughness (up to 6 cross sections, Rz,
Ra, Rzjis, Rq)
DIB format (bitmap)
File output TIFF format
ASCII format

7.2 Cantilever
Table 7.2.1 Recommended Cantilevers

Probe Reflective k f L
Part Number Part Name Application Material Lever Shape Quantity
Coating Coating [N/m] [kHz] [µm]

Cantilever,
0.57 73 100
SSOT-AK0546 OMCL-TR800PS Contact mode *5 SiN None Au Triangle 34
0.15 24 200
A-1
Cantilever, Dynamic and 330
SSOT-AK0556 NCHR-20 phase modes
Single-crystal Si None Al Rectangle 20 42
(260-410)
125

Cantilever, 0.2 13
SSOT-AK0551 CONTPT-10
Current mode Single-crystal Si PtIr5 Al Rectangle 10
(0.07-0.4) (10-17)
450

Cantilever, Magnetic force Magnetic 2.8 75

SSOT-AK0554 MFMR-10 (MFM) mode
Single-crystal Si
material
Al Rectangle 10
(1.2-5.5) (60-100)
225

Cantilever, Surface potential 2.8 75

SSOT-AK0552 EFM-10 (KFM) mode
Single-crystal Si PtIr5 PtIr5 Rectangle 10
(1.2-5.5) (60-100)
225

k: Spring constant; f: Resonant frequency; L: Lever length

*5 Also usable in lateral force (LFM) mode and force modulation mode.

36 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 7. Specifications

7.3 Standard Samples

Table 7.3.1 Standard Samples
Part Number Part Name Application
Used in contact and dynamic modes to check
Standard sample,
211-37643-03 parameters, the cantilever, the environment, and the
niobium-coated plate
state of the system.
Standard sample, precision
211-37643-01 Used to calibrate the scanner.
grid plate

7.3.1 Niobium-Coated Plate

 Form of Sample
External dimensions: 10  10 ( 0.5) mm; thickness: 0.5  0.2 mm
Material: Film formed by spattering niobium (Nb) onto plate glass
 Form of Sample Surface
Particles with dimensions of approx. 20 to 30 nm are formed on the surface.

7.3.2 Precision Grid Plate

 Form of Sample
External dimensions: 10  10 ( 1) mm; thickness: 2.0  0.5 mm
Material: Soda glass, gold coating
 Form of Sample Surface
Number of grooves: 1000  0.5 grooves/mm
Groove depth (H): 100  20 nm
Duty ratio (a/d): 0.5  0.2
ｄ

Ｈ/2 Ｈ

Fig. 7.3.1 Precision Grid Plate

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 37

7. Specifications

7.4 Optical Microscope Unit

 Monitor display magnification Approx. 40x *6
 Eyepiece lens observation magnification 40x
 Power supply USB bus power (+5V (+4.4～+5.25V), 320mA)
*6 This indicates the display magnification for the initial window size without zoom.

7.5 High-Magnification Optical Microscope Unit

 Monitor display magnification Approx. 16x to 300x *6
 Power supply USB bus power for CCD (+5V (+4.4～+5.25V), 320mA)
Light controller (100 VAC, 50/60 Hz, 35 W)
*6 This indicates the display magnification for the initial window size without zoom.

7.6 Fiber Light

 Input power supply: 100～120 VAC/200～240 VAC, 50/60 Hz, 150 W
 External dimensions: 76 (W)  235 (D)  120 (H) mm, approx. 1.5 kg
 Light source: 100W
 Maximum average illuminance: 650,000 lux
 Lamp service life: 1000 hours
 Adjustment of light intensity: Stepless variation using dial
 Cooling method: Fan cooling

38 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 8. Installation

8. Installation
In principle, installation of the SPM-9700HT is performed by Shimadzu service personnel. Facilities
that satisfy the installation specifications described below are required for installation and must be
prepared by the customer.
For details on installation specifications, refer to the installation guide.

8.1 Installation Specifications

Fig. 8.1.1 shows an example of a layout configuration for the SPM-9700HT scanning probe
microscope.
Options are indicated with (OP) in the figure.

Switchboard

Max.10m

Stepdown
3m Transformer
3m

Extension cable Extension cable Gas (for the

vibration isolator)
Table (OP)
Vibration isolator (OP)
Host computer

Monitor
800

Control unit

600
250  420  454
Approx. 18.5 kg
Optical microscope Fiber light
unit (OP) (OP)

1200 800

Fig. 8.1.1 Example of Installation

! CAUTION
Always install the control unit on a table. Installation on anything other than a table may cause
the following issues.
 Legs, feet, or chairs may come into contact with the power switch, turning OFF the control
unit during operation and resulting in the loss of important data.
 Legs, feet, or chairs may come into contact with and damage the power switch.
 Personnel may injure themselves due to incorrect posture when operating the power switch
or checking the illumination status of lamps.

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 39

8. Installation

8.1.1 Tables
A large table with dimensions of approx. 1200  800 mm and another large table with dimensions of
approx. 900  800 mm are required for installation.
If higher quality image data is required, instead of using a table with approximate dimensions of
900 mm  800 mm, Shimadzu recommends installing the SPM unit on an air-spring vibration isolator
table of the same size.

8.1.2 Installation Room

 Temperature and Humidity
Room temperature: 23  5 C
Humidity: 60 % max. (no condensation on the instrument)
 Noise and Vibrations
In order to ensure high-quality image observation, install the instrument in an environment that is
not subject to loud noises, floor vibrations, or air turbulence. Ensure that the instrument is not
subject to direct sunlight.

Installing the instrument in an environment that does not satisfy the installation specifications may cause
noise to appear in images.

40 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 8. Installation

8.1.3 Power Supply

The power supplies required in the installation of this system are detailed below. Provide the power
supplies for optional configurations as required.

Table 8.1.1 Power Supply

Capacity/Power
Unit Power Supply Grounding
Consumption
100 to 120 VAC, 50/60 Hz 100 Ω
Control unit 100 W
200 to 240 VAC, 50/60 Hz or less
SPM-9700HT
100 to 120 VAC  10%, 50/60 Hz 100 Ω
Monitor 45 W
200 to 240 VAC  10%, 50 Hz or less
Optical Microscope AC adapter for Not
100 to 120 VAC, 50/60 Hz 100 W
Unit (Option) CCD required
AC adapter for Not
High-Magnification 100 to 120 VAC, 50/60 Hz 100 W
CCD required
Optical Microscope
Not
Unit (Option) Light controller 100 VAC, 50/60 Hz 35 W
required
100 to 120 VAC/200 to 240 VAC, 100 Ω
Fiber Light (Option) 150 W
50/60 Hz or less

Two extension cables (each equipped with a switch) of the following specifications are provided with
this system.
 Number of outlets: 6
 Cable length: 3m
 Ratings: 15 A, 125 V (less than 1.5 kW)
Use the extension cable at the specified ratings.

! CAUTION
Be sure to connect the grounding wire.

The instrument may be damaged if it is used without grounding it.

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 41

8. Installation

8.2 Connection Procedure

8.2.1 Standard High-Magnification Optical Microscope Unit
 Connecting the Optical Microscope Unit
Connect each unit as shown in Fig 8.2.1.

CCD
Optical Host PC
microscope

Image
capture
cable

AC adapter
To switchboard
Extension cable

Fig. 8.2.1 Cable Connection Diagram for Standard Optical Microscope Unit

 Connecting the High-Magnification Optical Microscope Unit

Connect each unit as shown in Fig 8.2.2.

CCD
Host PC
High-magnification
microscope

Light controller

Image
capture
cable

AC adapter
To switchboard
Extension cable

Fig. 8.2.2 Cable Connection Diagram for High-Magnification Optical Microscope Unit

42 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 8. Installation

 Installing the Image Capture Cable

 Switch OFF the power to the host computer.
 Connect the image capture cable to a USB port on the host computer.
 Send the video signal from the CCD camera to the [Video Composite(Yellow)] connector on the
image capture cable. (Fig. 8.2.3)

Video SVideo
Video Composite(Yellow)

Fig. 8.2.3 Connecting Video Signal to Image Capture Cable

 Switch ON the power to the host computer.

 When the computer automatically detects the new hardware, install the driver according to the
instructions displayed on screen.

Be sure to connect the USB cable to the USB 2.0 port ( ). If the cable is connected to the USB 3.0 port
( ), the microscope cannot operate correctly and thus no image is displayed.

8.2.2 Fiber Light

 Connecting the Fiber Light
Connect the fiber light as shown in Fig. 8.2.4. Set the light guide so that the sample stage in the SPM
head is illuminated.

Fiber light

To switchboard
Extension cable

Fig. 8.2.4 Cable Connection Diagram for Fiber Light

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 43

9. Troubleshooting

9. Troubleshooting
Problem Main Cause Corrective Action
Did the control unit start up Check that the control unit's Ready
normally? lamp is lit.
Check that the host computer and
Are the host computer and control
control unit are connected with a LAN
unit connected with a LAN cable?
cross cable.
A connection is not Check that the TCP/IP protocol
established with the control settings for the host computer's LAN
unit when the online software adapter are configured as follows:
is started. IP address: 192.9.200.2
Are the communication settings on Subnet mask: 255.255.255.0
the host computer correct? Display a [Command Prompt] window
from the [Start] menu on the host
computer, enter the command "ping
192.9.200.1", and check that a
response is received.
Select [Windows Firewall] in the
The online software is
[Control Panel] window on the host
interrupted (i.e. scanning Is Windows Firewall enabled?
computer and then disable the
stops).
firewall.
Has the optical axis been adjusted
Readjust the optical axis.
correctly?
Replace the cantilever and readjust
The laser beam is not Is the cantilever bent or deformed?
the optical axis.
detected.
Check the wiring of each component
Are there any broken wires? (especially around the SPM head) for
broken or disconnected wires.
The laser power has Has the optical axis been adjusted
Readjust the optical axis.
dropped. correctly?
Has the optical axis been adjusted
Readjust the optical axis.
correctly?
The approach (coarse Are all the connectors inserted Check that each connector is inserted
adjustment) is not completed correctly? securely.
normally. Check the wiring of each component
Are there any broken wires? (especially around the SPM head) for
broken or disconnected wires.
Is the appropriate cantilever Use a cantilever suitable for the
selected? observation mode.
Is the cantilever correctly attached
Correctly attach the cantilever.
to the cantilever holder?
Is the cantilever holder correctly
Image data cannot be Correctly attach the cantilever holder.
attached to the SPM head?
obtained.
The resolution of the images Is the cantilever bent or deformed? Replace the cantilever and readjust
data is poor (exhibits noise). Is the cantilever worn out? the optical axis.
Trace and retrace in the line
profile is poorly synchronized Is the laser beam spot reflected
or unstable. correctly around the end of the Readjust the optical axis.
cantilever?
Is each parameter in the online Refer to the observation guide and
software set appropriately? adjust each parameter.
Are all the connectors inserted Check that each connector is inserted
correctly? securely.

44 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 9 Troubleshooting

Problem Main Cause Corrective Action

Check the wiring of each component
Are there any broken wires? (especially around the SPM head) for
Image data cannot be broken or disconnected wires.
obtained.
Is the system installed in a location
The resolution of the images
that satisfies the installation
data is poor (exhibits noise).
specifications? Install the system in a location that
Trace and retrace in the line
profile is poorly synchronized Are there any problems in the satisfies the installation
or unstable. surrounding environment including specifications.
electrical or magnetic changes,
noise, or air turbulence?
Is the intended sample being
Check the sample.
observed?
Is the observation position
Check the observation position.
appropriate?
Use double-sided tape or other
Is the sample secured to the
suitable adhesive to secure the
sample holder?
sample to the sample holder.
Secure the sample so that the
Is the observation surface tilted?
observation surface is flat.
Is the appropriate cantilever Use a cantilever suitable for the
selected? observation mode.
Unexpected image data is
obtained. Is the cantilever correctly attached
Correctly attach the cantilever.
to the cantilever holder?
Is the cantilever holder correctly
Correctly attach the cantilever holder.
attached to the SPM head?
Is the cantilever bent or deformed?
Replace the cantilever and readjust
Is the cantilever worn out? the optical axis.

Is each parameter in the online Refer to the observation guide and

software set appropriately? adjust each parameter.
Does the selected scanner match
the actual scanner used in Select the correct scanner.
observation?
Is the observation mode setting Select the appropriate observation
appropriate? mode.
Adjust the relevant parameters to
Is a clear height image obtained?
obtain a clear height image.
Adjust the phase offset.
Are the values of AsinD and
If adjusting the phase offset does not
AcosD outside the measurable
achieve improvement, reduce the
range?
Amplitude/phase images amplitude.
cannot be obtained or their Signals cannot be detected if the
resolution is poor in phase Is the amplitude appropriate? amplitude is too small. Set a larger
and force modulation modes. amplitude.
Is the scanning rate too fast? Slow the scanning rate down.
Select an appropriate cantilever.
Replacing the cantilever with one that
Is an appropriate cantilever being possesses different mechanical
used? characteristics (spring constant,
resonant frequency) may improve
image data.

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 45

9. Troubleshooting

Problem Main Cause Corrective Action

Is the observation mode setting Select the appropriate observation
A phase image cannot be appropriate? mode.
obtained in magnetic force Are the values of AsinD and Adjust the phase offset.
(MFM) mode. AcosD outside the measurable If adjusting the phase offset is not
range? possible, reduce the amplitude.
Is the observation mode selection Select the appropriate observation
appropriate? mode.
Current images cannot be
Is the cantilever holder Use a cantilever holder suitable for
obtained or their resolution is
appropriate? current mode.
poor in current mode.
Is the sample bias setting
Set an appropriate sample bias.
appropriate?
Is the observation mode selection Select the appropriate observation
appropriate? mode.
Is an appropriate cantilever being
Use a special conductive cantilever.
used?
Check the frequency of the cantilever
bias voltage.
Is the cantilever bias voltage
Also, the drive gain of the cantilever
setting appropriate?
bias voltage cannot be detected if it is
too small. Increase the drive gain.

Potential images cannot be The potential image will be flat if the

Does the potential on the sample
obtained or their resolution is entire sample surface has the same
change?
poor in surface potential potential.
(KFM) mode. Is cantilever bias voltage feedback Turn ON cantilever bias voltage
ON? feedback.
Is the scanning rate too fast? Slow the scanning rate down.
Adjusting the phase offset and
Is the lock-in detection setting
sensitivity may allow clear images to
appropriate?
be obtained.
Is the bias voltage feedback gain Adjust the bias voltage feedback
appropriate? gain.
Is the sample bias voltage setting Set an appropriate sample bias
appropriate? voltage.
In this case, loosen a screw fixing the
presser bar and remove the presser
(See picture below).
Screw

Do not be upside down the cantilever

When the cantilever fell down holder. A release pin may fall down.
-
to the clearance gap Remove the cantilever not to touch
the piezoelectric device or wires (See
picture below).
Cantilever

Put the presser bar back in the

original position and fasten the screw.

46 SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL

 10. Appendix

10. Appendix
10.1 Operating Principle of Surface Potential (KFM)
Mode
Surface potential (KFM) mode generates images based on the electric potential of the sample
surface.
Applying an AC voltage to a conductive cantilever and detecting the resulting electric force makes it
possible to observe the surface profile and, at the same time, the surface potential distribution.

Here, we consider a cantilever and sample with uniform surfaces. We assume that they are both
conductors and that their respective surface potentials are Vt and Vs respectively. In this case, the
electrostatic free energy, G, in a system kept at a constant potential can be expressed by formula (1)
below, where d is the distance between the cantilever and the sample surface and C is the
capacitance between the cantilever and the sample.

1
G   C (Vt  Vs ) 2 (1)
2

The electric force, Fze(d), that acts on the cantilever can be expressed by formula (2).

G 1 C
Fze (d )    (Vt  Vs ) 2 (2)
d 2 d

Because the capacitance, C, decreases as d increases, the electric force between the cantilever and
the sample is always attractive, and the size is proportional to the capacitance gradient. The voltage
applied externally to the cantilever can be expressed by formula (3).

Vt  VDC  VAC cos t (3)

The electric force at the cantilever can be expressed by formula (4).

1 C  1 2 1 2 
F (d , t )  Fzm (d )  (VDC  Vs ) 2  VAC  2(VDC  Vs )VAC cos t  VAC cos 2t  (4)
2 d  2 2 

From this, the amplitude of the vibration electric force corresponding to angular frequency  can be
expressed by formula (5).
C
Fe  (VDC  Vs )VAC (5)
d

In SPM profile measurement, the distance between the cantilever and the sample is constant and so
it can be assumed here that the capacitance gradient and VAC are constant. Therefore, if feedback
control is performed for VDC, which is applied to the cantilever, so that Fωe is always equal to zero, VDC
will be equal to Vs and can be obtained as the potential of the sample surface.

Bibliography:
1) M. Nonnenmacher, M. P. O'Boyle and H. K. Wickramasinghe, Appl. Phys. Lett. 58 (1991) 2921
2) S. Morita, Atomic/Molecular Nanomechanics (2003) 33

SCANNING PROBE MICROSCOPE SPM-9700HT HARDWARE INSTRUCTION MANUAL 47