DIG-EBC
Installation and Operation Manual
DIG-EBC Installation & Operation
Contents
General��������������������������������������������������������������������������������������������������������������������������������������������������� 4
Main components������������������������������������������������������������������������������������������������������������������������������� 6
Installation ������������������������������������������������������������������������������������������������������������������������������������������� 7
Software setup������������������������������������������������������������������������������������������������������������������������������������� 8
Operation ������������������������������������������������������������������������������������������������������������������������������������������� 10
DIG-EBC Handbook version 20.11
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translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data
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9, 1965, in its current version, and permission for use must always be obtained from Kleindiek Nanotechnik GmbH. Kleindiek Nanotechnik
GmbH does not assume responsibility for errors or omissions in this document. Kleindiek Nanotechnik GmbH does not make any com-
mitment to keep the information contained herein updated.
© 2020 Kleindiek Nanotechnik GmbH
Contact info@[Link] with questions or for further information
4 5
General
Safety
Power supply units should never be disassembled
− they may contain high-tension circuits that can
cause severe electric shock and damage the unit.
For repairs, please speak to your local distributor or
contact us directly. Avoid touching the connector
pins. Only use the power supply provided and check
that the input voltage is correct if it is not a switch-
ing power supply.
Handling
These systems consist of precision instruments.
Please use caution when handling all components.
Do not apply strong pressure or vibration to any
of the components as this can cause damage to
the finely tuned internal parts. Dirty environments
should be avoided − fine turnings, metal dust or
glass fibres can get inside the instruments and
cause operation failure. Avoid bending or damaging
the cables.
Specifications
For detailed technical specifications of the components included with your system, please
refer to the inspection checklist in the system’s documentation.
Consumables
If you wish to order additional consumables for your system, please speak to your local
distributor or contact us directly for pricing and delivery information.
6 7
Main components Installation
Start by installing your MM3A/E & LCMK-EM or Prober Shuttle systems as described in the respective hand-
books and then continue here. The following instructions focus on the digital EBIC system which is con-
trolled via a remote software GUI. Should your system include an electronics rack, most of the connections
described below have already been established. It is recommended that the user familiarize themselves with
the connections nonetheless, in order to better understand the system’s components and usage.
Connect the power supply unit to the power mains
EBIC/RCI signal amplifier - rack version Power supply using the provided multiple socket outlet. In order
rear panel, remote (GUI) controlled amplfier (rack version to avoid ground loops, it must be connected to a
power supply socket on your microscope’s console.
Connect the power supply to the two Power and
Power In ports using both the 5-pin and 15-pin ca-
bles provided.
Connect the Low Current Measurement Kit (LCMK) feed cables to the ports labelled Input
#1, Input #2 or one of the two GND ports. It is also possible to operate the EBIC amplifier
without an LCMK. In this case, the Input port(s) must be connected to the BNC ports on
the air splitter’s front panel. Please refer to your micromanipulator’s installation manual for
details. Also, please note that the measurement limit is approx. 25 pA in the absence of the
LCMK cabling (the measurement limit is less than 1 pA with LCMKs), due to noise.
Video cables RCI grounding cable EBIC/RCI sample
(microscope specific) (MM3A-EM based
systems only)
Next, connect the EBIC amplifier’s Video Out to a video input on your SEM. Please contact
your SEM supplier if you cannot locate a video input port. It may be necessary to configure
the microscope’s software to display the additional input in the list of “detectors”.
Connect the EBIC amplifier to the APT software PC using the supplied USB cable.
If necessary connect a shield cable to the respective
port on the rear panel of the EBIC amplifer. If your
system includes an electronics rack, the shield con-
nection is already installed.
8 9
Software setup
The video output voltage range must be matched
to the microscope’s video input range. The range
Make sure the installed EBIC amplifier’s internal serial number corresponds to the number in
can be set to ±1 V, ±2 V, ±5 V, and ±10 V. Depending
the first line of the [Link] file (highlighted below) which can be found in the installation
on the selected voltage range a resistor is connect-
directory and can only be modified with administrator privileges. This number is displayed
ed in series at the amplifier’s output in order to limit
in the Hardware Setup tab in the EBIC section and can be found on the amplifier’s rear
the current. Please refer to the SEM’s manual or your
panel. If your system includes a PC or Laptop, the software is already configured properly.
local microscope service provider for detail on your
microscope’s video input range..
Video calibration is only possible if the system is in-
stalled on microscopes with an interface to the EBIC
amplifier. At the time of writing, these are Zeiss mi-
croscopes that are running the Remote Client soft-
ware on the microscope PC.
After initiating the video calibration, the video out-
put is characterized and the results can be stored.
The final step is to obtain a list of all installed
Once the hardware is recognized, the EBIC tab is activated which is indicated by the green detectors that can be selected in the APT’s
“LED” lighting up next to the serial number. EBIC tab in order to grab images from within
the APT software.
Before operating the EBIC amplifier for the first time
A list of available SEM detectors can be read out and stored by invoking read detectors.
the video output, the video output range and the
Communication between the APT software and the microscope server is established by
offset must be set or calibrated. This requires a ser-
pressing the activate button.
vice password which is available from Kleindiek. If
All hardware parameters are stored in the user directory: ..\Documents\Kleindiek Data\ in a
your system includes a PC or Laptop the offset is
correspondingly labelled text file.
already calibrated. If the microscope platform was
specified prior to delivery, the video output and offset will already
be configured properly.
The offset calibration is started by clicking on offset cal. while in
service mode. Make sure that the probe tips are connected to the
EBIC amplifier and are not in contact with anything.
The software will measure the offset parameters for each gain and
automatically store the new values.
10 11
Operation
The digital EBIC system is controlled via a software interface that mimics the physical con- Currents as low as 1 pA and up to 100 μA can be measured and visualised. The preampli-
trols of the analogue amplifier to a certain degree. It presents the user with ‘knobs’ to fier 10 x dial changes the preamplifier stage’s gain in eight steps from 10 4 V/A to 10 11 V/A. The
control the amplifier’s gain and offset as well as a number of other options and additional amplifier dial adjusts the second amplifier stage’s gain. The minimum gain is 1, the maxi-
controls that are described below. mum gain is 10. The gain setting affects the image contrast.
The two offset dials (offset coarse and offset fine) are used to adjust the signal level to the
microscope’s respective input range. These dials affect the image brightness.
The video output window shows the output level of the EBIC amplifier with max-min values
derived from the SEM.
The current source is used to compensate large offset currents at the EBIC amplifier’s input.
It consists of a range selector and current source dial as well as an ON button. This is used,
e.g. if the device under test exhibits a large current leakage when a voltage is applied or if
electron hole pairs are generated in the sample by incident infrared light resulting in a con-
stant current flow to the EBIC amplifier. The current source is calibrated and the displayed
value represents the current being generated and applied at the amplifier’s input. The
brightness level changes can be calibrated and used for quantitative EBIC measurements.
The amplifier includes an internal voltage source that is used when input coupling (see
below) is set to AC. A voltage can be applied by choosing a value with the tip voltage dial
and clicking the activate button. The voltage range is limited to ± 4.5 V.
When in service mode (s. APT manual), a video output selector is shown below the tip volt-
age. It is used to adapt the EBIC amplifier’s video output to the SEM’s video input.
The invert selector is used to invert the black and white areas of the image. Without signal
Please note if your system is equipped with the Routing module: The EBIC inversion electrons flowing from the sample to the amplifier yield a positive video output
module uses the routing set in the routing tab, please assign all unused tips voltage and a bright spot in the resulting image.
to GND and only the relevant tip(s) to EBIC or GND EBIC. As other Advanced
Probing Tools modules can alter the routing settings, it is advisable to confirm
correct routing prior to performing EBIC measurements
The gain can be varied over a large range in order to match the requirements for amplifying
the various signal levels associated with the different imaging methods accessible with the
EBIC module: EBIC, EBAC, EBIV, EBIRCH and RCI.
12 13
When using the EBIC system in conjunction with a Zeiss microscope, automated image
acquisition from within the APT interface is possible. This feature allows loading both the
microscope‘s secondary electron image as well as the EBIC image into the EBIC software
at the click of a single button. In order to enable this functionality, an additional piece of
software must be installed on the Zeiss SmartSEM PC and the communication between APT
and Zeiss must be confirmed by clicking on the respective button on the APT’s Setup page.
Please refer to the respective manuals for details.
In single channel mode only the EBIC image is acquired, in dual channel mode (activated
The input coupling selector is used to configure the amplifier’s input for a specific imaging
by clicking on the corresponding radio button) both EBIC and SE image are simultaneously
mode:
pulled from the microscope after clicking on save image. The images are automatically
GND: The input is connected to GND.
DC: The input is directly connected to a probe tip. This is the default mode. transferred to the EBIC Overlay Tool (please refer to the EBIC application manual for details)
AC: The input is capacitatively connected to a probe tip. This allows the measurement for further analysis
of small EBIC signal changes to large DC currents that cannot be compensated using
the offset dials or the current source compensation. In addition, a voltage can be ap-
At the top-left of the EBIC interface, buttons for loading and saving the EBIC settings can
plied to the tip while measuring the EBIC current.
be found. In this manner specific settings, e.g. for quantitative analyses, can be stored and
recalled. When using the EBIC Overlay Tool, the EBIC amplifier settings are automatically
Due to the amplifier’s high bandwidth of up to 1 MHz, high-frequency noise may be present
stored with each exported image.
on the amplifier’s output. A low pass filter can be applied to the signal to improve the im-
age. As an example, for high frame rates (dwell time on pixel 100-1000 ns) a 1 μs filter time
The EBIC IV button is used to record I-V curves. This is implemented for stand-alone EBIC
constant suppresses all high-frequency noise. Accordingly, higher time constants must be
systems without dedicated probing capability.
selected for smaller frame rates.
When switching between gains a slight offset (shift in grey level) can be corrected by ac-
tivating offset corr. The offset corrections are stored in: ...\My Documents\Kleindiek Data\
EBIC\[Link]
For EBIRCH applications, the additional bias allows applying a DC voltage to a different
tip (other than those being used for EBIC). This feature relies on the presence of the Live
Contact Tester (LCT ), thus, the LCT’s current and voltage limits apply. Using the tip voltage
box, the voltage that is to be applied to the selected tip can be chosen. When additional
bias is activated by clicking on the activate radio button, the routing of the selected tip is
adjusted accordingly and the settings in the Routing tab are overruled for this tip.
A voltage applied to an additional tip usually affects the current flowing to the EBIC ampli-
fier. This change in current flow can be compensated by the current source or by using AC
mode.
