DaCOS12 Lecture Part 12 Correction of Aberrations 1 112
DaCOS12 Lecture Part 12 Correction of Aberrations 1 112
Systems
Overview
1. Basics 2012-04-18
2. Materials 2012-04-25
3. Components 2012-05-02
4. Paraxial optics 2012-05-09
5. Properties of optical systems 2012-05-16
6. Photometry 2012-05-23
7. Geometrical aberrations 2012-05-30
8. Wave optical aberrations 2012-06-06
9. Fourier optical image formation 2012-06-13
10. Performance criteria 1 2012-06-20
11. Performance criteria 2 2012-06-27
12. Correction of aberrations 1 2012-07-04
13. Correction of aberrations 2 2012-07-11
14. Optical system classification 2012-07-18
3
Contents
Principle of Symmetry
2 3
1
5
Symmetrical Systems
Symmetry Principle
Ref : H. Zügge
7
Lens Bending
Ref : H. Zügge
8
Transverse aberration
5 mm
Correction of spherical aberration:
Splitting of lenses (a)
effect of nonlinearity
- decreasing of contributions at every 5 mm
compensating effect
5 mm
Improvement
(d)
(c) (d) : 1/4
0.005 mm
Improvement
(e)
(d) (e) : 1/75
Ref : H. Zügge
9
Ref : H. Zügge
10
1.0 mm 0.25 mm
Crown (a) (b)
in front
0.25 mm 0.25 mm
Filnt
(c) (d)
in front
Ref : H. Zügge
11
∆s’
Better correction
1.4 1.5 1.6 1.7 1.8 1.9 4.0
for higher index 0 n
Shape of lens / best
bending changes -2
plano-convex
Ref : H. Zügge
12
n = 1.5 n = 1.8
Better correction SI ()
for high index also for meltiple 40
30
lens systems
20
Example: 3-lens setup with one 10
0.5 mm
n = 1.5
0.0005 mm
n = 1.8
Ref : H. Zügge
13
Bravais System
1 1 d f' a
1
f 'a d s f'
b
1 1
f 'b d Bild-
d 1 ebene
s u
u'
s'
s
14
y '
0.2 mm
Effect of lens bending on coma
Sign of coma : inner/outer coma
y '
0.2 mm
y '
0.2 mm
y '
0.2 mm
From : H. Zügge
15
Image height: y’ = 0 mm y’ = 2 mm
Achromat
Bending of an achromate bending
Pupil section:
Transverse
meridional meridional
y' y'
sagittal
y'
Aberration:
- optimal choice: small residual spherical
0.05 mm 0.05 mm 0.05 mm
aberration (a)
Achromat, splitting
(d)
(e)
Wave length:
Ref : H. Zügge
16
Image height: y’ = 19 mm
(a)
(b)
From : H. Zügge
17
Sagittal Sagittal
Plano-convex element coma Spherical aberration corrected coma
exhibits spherical aberration y ' with aspheric surface y '
0.5 mm 0.5 mm
aspheric
aspheric
aspheric
Ref : H. Zügge
18
Ref : H. Zügge
19
ideal
optical system real image
image plane
shell
20
1 hj 1
and positive total refractive power
f j h1 f
for multi-component systems
Solution:
General principle for correction of curvature of image field:
1. Positive lenses with:
- high refractive index
- large marginal ray heights
- gives large contribution to power and low weighting in Petzval sum
2. Negative lenses with:
- low refractive index
- samll marginal ray heights
- gives small negative contribution to power and high weighting in Petzval sum
21
n ' n n 1 d
2
1 1
k k d
R ptz k nk nk 'rk n f n r1r2 r1
2. Concentric meniscus,
r2 r1 d
- Petzval sum negative
- weak negative focal length 1 (n 1) d ( n 1)d
F'
- refractive power for thickness d: R ptz n r1 r1 d nr1 ( r1 d )
n n
Group of meniscus lenses
d
collimated
r1 r2
From : H. Zügge
23
r1 r2
Triplet group with + - +
r3
d/2 collimated
n2
n1
From : H. Zügge
24
Field Curvature
1 F
Correction of Petzval field curvature in lithographic lens j
for flat wafer R j nj
hj
Positive lenses: Green hj large F Fj
j h1
Negative lenses : Blue hj small
(a) (b)
Compensation of axial colour by
appropriate glass choice
rp rp
1 1
486 nm
588 nm
656 nm
z z
-2.5 0 -0.20 0 0.20
Ref : H. Zügge
27
Spherochromatism: Achromate
pupil height :
rp = 1
587 rp = 0.707
rp = 0.4
rp = 0
486 nm
587 nm
656 nm
486
z z
0 0.04 0.08 0.12 -0.04 0 0.04 0.08
28
Broken-contact achromate:
different ray heights allow fof y red
rp
SK11 SF12
486 nm
587 nm
656 nm
z
in [mm]
0 0.2 0.4
29
wavelength
Non-compact system in m
0.656
Generalized achromatic condition Schupman
achromate
2 2
y y
1
F1 F2 0
2
v1 v2
0.571
Use of a long distance and
negative F2 for correction
Only possible for virtual imaging
0.486 s
-50 m 0 50 m
intermediate virtual
image image
30
32
Two-Lens Apochromate
Special glasses and very strong bending allows for apochromatic correction
656nm
588nm
486nm
z 436nm
-2mm 5m 0 z
33
Buried Surface
Nr Glas nd nd d d
1 SK16 1.62031 0.00001 60.28 22.32
F9 1.62030 37.96
2 SK5 1.58905 0.00003 61.23 20.26
LF2 1.58908 40.97
3 SSK2 1.62218 0.00004 53.13 17.06
F13 1.62222 36.07
4 SK7 1.60720 0.00002 59.47 10.23
BaF5 1.60718 49.24
34
Field Lenses
stop
Ref: H.Zügge
38
Ref: H.Zügge
39
Splitted achromate
Aspherical surface
Ref : H. Zügge
40
Merte surface:
- low index step Transverse
spherical aberration
- strong bending
O.25
- mainly higher aberrations
generated
(a)
1
O.25
(b)
1
Merte surface
From : H. Zügge
41
Aspherical Surfaces
compromise :
standard achromate a)
Example: Achromate 0.03 0.8
zonal and axial error
3. Secondary spectrum 0 0
-0.2
-0.01
-0.4
-0.02
spherical
aberration -0.6
-0.03 -0.8
sur 1 sur 2 sur 3 sum sur 1 sur 2 sur 3 sur 4 sum
secondary
b) spot optimized c) spectrum optimized
0.6 3
0.4
2
0.2
1
0
0
-0.2
-1
-0.4
-0.6 -2
-0.8 -3
sur 1 sur 2 sur 3 sur 4 sum sur 1 sur 2 sur 3 sur 4 sum
Ref : H. Zügge
43
rP
SSK2 CaF2 F13
Example: Apochromate
Balance :
1. zonal spherical 400 nm
450 nm
2. Spot 500 nm
z
axis -0.04 0 0.04 0.08 0.12
field
0.71°
field
1.0°
44
Nearly symmetrical system are goord corrected for coma, distortion and lateral color
Important influence on correction: bending of a lens
Correction of spherical aberration: bending, cementing, higher index
Correction of coma: bending, stop position, symmetry
Correction of field curvature: thick mensicus, field lens, low index negative lenses with
low ray height
Achromate: coincidence of two colors, spherical correction, higher order zone remains
Apochromatic correction: three glasses, one with anomalous partial dispersion
Remaining chromatic error: spherochromatism
Field lenses: adaption of pupil imaging
Higher orders of aberrations: occur for large angles
Whole system: balancing of aberrations and best trade-off is desired
45
Outlook