Vision on future role of CAE at ASML
Fred Huizinga
Group Leader Mechanical Analysis
October 2019
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Outline Public
Slide 2
5 November 2019
Introduction
Vision towards role of CAE in development
Some examples
Challenges
Questions/discussion
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Introduction
Current top end generation of machines Public
Slide 3
5 November 2019
Large
vacuum
chamber
• Accuracy: 1 nanometer, less than 5 Si atoms!
• Expensive: > M€ 200 (Boeing 787-9 Dreamliner
M€ 220)
• Needs to be reliable! 1 full day down: Millions of €’s
• Some parts are both very expensive and have a long Source: Building quantum states
with individual silicon atoms,
[Link],
lead time to manufacture
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Introduction
Public
Slide 4
Performance to the extremes 5 November 2019
Sub-nanometer deformation under operational and survive earthquakes
conditions…
Moon
Earth
Factory Floor ASML Scanner
Ground movement
While the earth rotates, the position of the
moon relative to our machine changes
Non-linear transient analysis. Internal loads up to 140 kN!
during the day
→ total peak-to-peak effect on some parts
is 700 pm (0.7 nm)
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
The Vision
Public
Slide 5
5 November 2019
Challenges:
• How to increase the efficiency of development?
“Do more with existing staff and in less time”
• How to increase the quality and reliability of our design?
“right-first-time”
• How to reduce cost?
“less protos, less physical (hardware) testing”
Verification by physical testing is getting more difficult, not feasible
or even not possible.
➔Simulation Driven Design
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
The Vision
Public
Slide 6
Going through the V-cycle 5 November 2019
SPECIFY from SYSTEM to PART QUALIFY from PART to SYSTEM
SYSTEM LEVEL SYSTEM LEVEL
REQUIREMENTS VERIFICATION TO
MANAGEMENT REQUIREMENTS
QUALIFICATION QUALIFICATION
IN NEXT LEVEL IN NEXT LEVEL
SUBSYSTEM VERIFICATION TO
REQUIREMENTS
LEVEL REQUIREMENTS
MANAGEMENT QUALIFICATION QUALIFICATION
IN NEXT LEVEL IN NEXT LEVEL
(SUB) MODULE REQUIREMENTS
LEVEL MANAGEMENT QUALIFICATION QUALIFICATION
IN NEXT LEVEL IN NEXT LEVEL
MONO /
COMPONENT
LEVEL VERIFICATION TO
REQUIREMENTS
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Examples related to reliability
Behavior of a cable slab under high accelerations Public
Slide 7
Objectives: 5 November 2019
• Identify volume conflicts (clashing
➔particle generation)
• Resulting loads on the system
• Potential fatigue problems
Motion profile (10ths of g’s)
0.25
0.2
0.15
Displacement (m)
0.1
0.05
0
-0.05
-0.1
-0.15
-0.2
-0.25
0 0.5 1 1.5
Time (sec)
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Examples related to reliability
Behavior of a cable slab under high accelerations Public
Slide 8
5 November 2019
Initial position Deformed
Experiment
Simulation
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Examples related to reliability
Fatigue analysis of laser welded cooling channels Public
Slide 9
5 November 2019
Objectives:
• Ensure reliability (of laser welds) under
• Pressure loads (pressure pulses)
• Temperature loads
• External loads
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Examples related to reliability
Fatigue analysis of laser welded cooling channels Public
Slide 10
5 November 2019
Material thicknesses in the order of 1/10th of millimeters
Radius weld Through weld
Fins 0,2
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Some challenges
Public
Slide 11
• Achieve a change of mindset toward role of
5 November 2019
simulations
• Early involvement
• More simulations “Front loading CAE”
• Have standard simulation processes
• Verification & Validation (V&V) is important!
• Simulation (Process and) Data Management (SPDM)
• How to organize simulation competences in the best
possible way?
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Some challenges
Public
Slide 12
• Achieve a change of mindset toward role of
5 November 2019
simulations
• Early involvement
• More simulations “Front loading CAE”
• Have standard simulation processes
• Verification & Validation (V&V) is important!
• Simulation (Process and) Data Management (SPDM)
• How to organize simulation competences in the best
possible way?
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
Questions?
Public
Slide 13
5 November 2019
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
INCOSE EMEA WORKSHOP| October 2019 UTRECHT
